Relevant bibliographies by topics / Systems of microsystems

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Systems of microsystems'

Author: Grafiati
Published: 4 June 2021
Last updated: 13 February 2022

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Journal articles on the topic "Systems of microsystems"

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Peterson, K. A., K. D. Patel, C. K. Ho, et al. "LTCC Microsystems and Microsystem Packaging and Integration Applications." Journal of Microelectronics and Electronic Packaging 3, no. 3 (2006): 109–20. http://dx.doi.org/10.4071/1551-4897-3.3.109.

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Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ‘chip-and-wire’ systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Screeding is an incorporation technique we describe that improves uniformity and eliminates processing steps. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts, including an impeller that has been exercised over thirty million cycles, and a cofired pressure sensor that requires only pressure source and electrical connections. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.
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Esashi, Masayoshi, and Shuji Tanaka. "Integrated Microsystems." Advances in Science and Technology 81 (September 2012): 55–64. http://dx.doi.org/10.4028/www.scientific.net/ast.81.55.

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Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.
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MOKWA, WILFRIED. "ADVANCED SENSORS AND MICROSYSTEMS ON SOI." International Journal of High Speed Electronics and Systems 10, no. 01 (2000): 147–53. http://dx.doi.org/10.1142/s0129156400000180.

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In the recent decade microsystem technologies (MST) have become a very important field. A lot of miniaturized sensors and microsystems based on silicon technologies have been developed and are in production now. Airbag control for example is mostly based on silicon acceleration sensors. Besides the existing products new products are emerging like drug delivery systems, labs on chip for DNA-analysis or electronic noses. Using SOI new sensor and actuator concepts have become possible. Dielectric insulation offers new possibilities concerning mechanical, thermal or electrical behavior. Microsensors for high temperature application including CMOS electronics are under development. This paper concentrates on SOI with silicon dioxide as insulating material. It will give examples of sensing and actuating devices based on SIMOX and on bonded wafer technology. In addition an example of a more complex microsystem, a retina implant system, will be given.
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Ahn, Kihoon, Sung-Hwan Kim, Gi-Hun Lee, SeungJin Lee, Yun Seok Heo, and Joong Yull Park. "Features of Microsystems for Cultivation and Characterization of Stem Cells with the Aim of Regenerative Therapy." Stem Cells International 2016 (2016): 1–13. http://dx.doi.org/10.1155/2016/6023132.

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Stem cells have infinite potential for regenerative therapy thanks to their advantageous ability which is differentiable to requisite cell types for recovery and self-renewal. The microsystem has been proved to be more helpful to stem cell studies compared to the traditional methods, relying on its advantageous feature of mimickingin vivocellular environments as well as other profitable features such as minimum sample consumption for analysis and multiprocedures. A wide variety of microsystems were developed for stem cell studies; however, regenerative therapy-targeted applications of microtechnology should be more emphasized and gain more attractions since the regenerative therapy is one of ultimate goals of biologists and bioengineers. In this review, we introduce stem cell researches harnessing well-known microtechniques (microwell, micropattern, and microfluidic channel) in view point of physical principles and how these systems and principles have been implemented appropriately for characterizing stem cells and finding possible regenerative therapies. Biologists may gain information on the principles of microsystems to apply them to find solutions for their current challenges, and engineers may understand limitations of the conventional microsystems and find new chances for further developing practical microsystems. Through the well combination of engineers and biologists, the regenerative therapy-targeted stem cell researches harnessing microtechnology will find better suitable treatments for human disorders.
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Kobuszewska, Anna, Ewelina Tomecka, Kamil Zukowski, et al. "Heart-on-a-Chip: An Investigation of the Influence of Static and Perfusion Conditions on Cardiac (H9C2) Cell Proliferation, Morphology, and Alignment." SLAS TECHNOLOGY: Translating Life Sciences Innovation 22, no. 5 (2017): 536–46. http://dx.doi.org/10.1177/2472630317705610.

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Lab-on-a-chip systems are increasingly used as tools for cultures and investigation of cardiac cells. In this article, we present how the geometry of microsystems and microenvironmental conditions (static and perfusion) influence the proliferation, morphology, and alignment of cardiac cells (rat cardiomyoblasts—H9C2). Additionally, studies of cell growth after incubation with verapamil hydrochloride were performed. For this purpose, poly(dimethylsiloxane) (PDMS)/glass microfluidic systems with three different geometries of microchambers (a circular chamber, a longitudinal channel, and three parallel microchannels separated by two rows of micropillars) were prepared. It was found that static conditions did not enhance the growth of H9C2 cells in the microsystems. On the contrary, perfusion conditions had an influence on division, morphology, and the arrangement of the cells. The highest number of cells, their parallel orientation, and their elongated morphology were obtained in the longitudinal microchannel. It showed that this kind of microsystem can be used to understand processes in heart tissue in detail and to test newly developed compounds applied in the treatment of cardiac diseases.
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Esashi, Masayoshi. "Introduction to the special issue: microrobots and distributed microactuators in Japan." Robotica 14, no. 5 (1996): 467. http://dx.doi.org/10.1017/s0263574700019925.

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This special issue in Robotica contains papers from Japanese authors on microrobots and distributed microactuators. Advances in technology made possible progress in the realm of small but complicated microsystems that include different elements, such as sensors, circuits and actuators. Microsystems are also called micromachines or microelectromechanical systems (MEMS); microsystems which move like insects are termed microrobots.
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Wallrabe, U., P. Ruther, T. Schaller, and W. K. Schomburg. "Microsystems in Medicine." International Journal of Artificial Organs 21, no. 3 (1998): 137–46. http://dx.doi.org/10.1177/039139889802100304.

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The complexity of modern surgical and analytical methods requires the miniaturisation of many medical devices. The LIGA technique and also mechanical microengineering are well known for the batch fabrication of microsystems. Actuators and sensors are developed based on these techniques. The hydraulic actuation principle is advantageous for medical applications since the energy may be supplied by pressurised balanced salt solution. Some examples are turbines, pumps and valves. In addition, optical sensors and components are useful for analysis and inspection as represented by microspectrometers and spherical lenses. Finally, plastic containers with microporous bottoms allow a 3-dimensional growth of cell culture systems.
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Bermudez, Juliette F., Juan F. Saldarriaga, and Johann F. Osma. "Portable and Low-Cost Respirometric Microsystem for the Static and Dynamic Respirometry Monitoring of Compost." Sensors 19, no. 19 (2019): 4132. http://dx.doi.org/10.3390/s19194132.

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Composting is considered an option for the disposal of organic waste; however, the development of portable and low-cost systems for its monitoring is of high interest. Therefore, in this study, respirometric microsystems were designed and tested including two integrated oxygen sensors for the measurement of compost samples under static and dynamic conditions with high portability and ease of use. The cost of each sensor was calculated as 2 USD, while the cost of the whole respirometric microsystem was calculated as 6 USD. The electronic system for real-time monitoring was also designed and implemented. The designed systems were tested for over 6 weeks for the determination of compost quality using real samples. The respirometric microsystem was compared to a commercial respirometry system and a standard laboratory test using hierarchical analysis which included costs, portability accuracy, analysis time, and integration of new technologies. The analysis showed a global score of 6.87 for the respirometric microsystem compared to 6.70 for the standard laboratory test and 3.26 for the commercial system.
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Jensen, Klavs F., Brandon J. Reizman, and Stephen G. Newman. "Tools for chemical synthesis in microsystems." Lab Chip 14, no. 17 (2014): 3206–12. http://dx.doi.org/10.1039/c4lc00330f.

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Roulet, Jean-Christophe. "Microlens systems for fluorescence detection in chemical microsystems." Optical Engineering 40, no. 5 (2001): 814. http://dx.doi.org/10.1117/1.1359522.

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Dissertations / Theses on the topic "Systems of microsystems"

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Prince, Mark. "Smart microsystems for cell manipulations." Thesis, Aston University, 2006. http://publications.aston.ac.uk/12241/.

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This thesis documents the design, manufacture and testing of a passive and non-invasive micro-scale planar particle-from-fluid filter for segregating cell types from a homogeneous suspension. The microfluidics system can be used to separate spermatogenic cells from testis biopsy samples, providing a mechanism for filtrate retrieval for assisted reproduction therapy. The system can also be used for point-of-service diagnostics applications for hospitals, lab-on-a-chip pre-processing and field applications such as clinical testing in the third world. Various design concepts are developed and manufactured, and are assessed based on etched structure morphology, robustness to variations in the manufacturing process, and design impacts on fluid flow and particle separation characteristics. Segregation was measured using image processing algorithms that demonstrate efficiency is more than 55% for 1 µl volumes at populations exceeding 1 x 107. the technique supports a significant reduction in time over conventional processing, in the separation and identification of particle groups, offering a potential reduction in the associated cost of the targeted procedure. The thesis has developed a model of quasi-steady wetting flow within the micro channel and identifies the forces across the system during post-wetting equalisation. The model and its underlying assumptions are validated empirically in microfabricated test structures through a novel Micro-Particle Image Velocimetry technique. The prototype devices do not require ancillary equipment nor additional filtration media, and therefore offer fewer opportunities for sample contamination over conventional processing methods. The devices are disposable with minimal reagent volumes and process waste. Optimal processing parameters and production methods are identified with any improvements that could be made to enhance their performance in a number of identified potential applications.
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Sunden, Erik Oscar. "Carbon Nanotube Synthesis for Microsystems Applications." Thesis, Georgia Institute of Technology, 2006. http://hdl.handle.net/1853/11528.

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Modern day engineering systems research presently lacks techniques to exploit the unique properties of many nanomaterials; coupled with this challenge exists the need to interface these nanomaterials with microscale and macroscale platforms. A nanomaterial of particular interest is the carbon nanotube (CNT), due to its enhanced physical properties. In addition to varied electrical properties, the CNT has demonstrated high thermal conductivity and tensile strength compared to conventional fiber materials. CNTs are beginning to see commercial applications in areas in which sufficient study has been dedicated. While a large part of the worldwide focus of CNT research has been in synthesis, an equally important area of research lies in CNT integration processes. The unique and useful properties of many nanostructured materials will never be realized in mainstream manufacturing processes and commercial applications without the proper exploration of integration methods such as those detailed in this thesis. The primary motivation for the research detailed in this thesis has been to develop CNT synthesis processing techniques that allow for novel interfacing methods between carbon nanotubes and eventual applications. In this study, an investigation was performed to look at several approaches to integrating CNTs into micro-electromechanical systems (MEMS). Synthesis of CNTs was studied in two different settings. Synthesis was first performed, directly on the microsystem, via a global scale chemical vapor deposition (CVD) process. Secondly, synthesis was performed directly onto a microsystem device via localized resistive heating. Following synthesis, the application of atomically layered, protective coatings was then investigated. Integration methods were then investigated to allow for CNT transfer to microsystem applications incapable of withstanding synthesis temperatures. The developed integration methods were evaluated by creating functional microscale electrical circuits in flexible substrates via hot emboss imprint lithography. Lastly, post synthesis processing methods were used to create micropatterned cell guidance substrates as well as neuronal stimulating substrates.
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Koch, Michael. "Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems." Thesis, University of Southampton, 1997. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.390407.

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Soltanian-Zadeh, Sepeedah. "A Microsystems Approach for Drug Assessment." Thesis, Virginia Tech, 2016. http://hdl.handle.net/10919/82101.

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Cancer metastasis, the departure of cancer cells from the primary tumors and their spread to distant sites, is responsible for 90% of cancer related deaths. Thus, understanding the initial process which leads to cancer metastasis in the later stage and stopping the spread in the initial stage deems necessary. In spite of significant progress in diagnosis and treatment, there is still the need for robust and easy to use drug assessment methods. In this work we present two approaches for this purpose: a microengineered Boyden chamber, and a dielectrophoresis-based platform for cell characterization and drug assessment. Using these methods, we characterize the drug response of breast cancer, which is the second most common type of cancer among US women. The micorengineered Boyden chamber we designed in this work is made of a silicon-based transmigration well with a 30µm-thick membrane and 8µm pores. This platform includes a deep microfluidic channel on the back-side sealed with a glass wafer. Using this platform, the migratory behavior of highly metastatic breast cancer cells, MDA-MB231, is tested under different drug treatment conditions. The second platform, the off-chip passivated electrode insulator-based dielectrophoresis (OπDEP) device, has been used to first distinguish between different breast cancer cell lines namely LCC1/MCF7, LCC9/MCF7, MCF7, and MDA-MB231, and also to probe the effect of different drug treatments on the cells. These versatile platforms will enable the enhanced integration with other technologies and running multiple assays simultaneously. Moreover, the methods presented show potential for next generation drug discovery and patient follow up purposes.<br>Master of Science
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Puik, Erik. "Risk adjusted, concurrent development of microsystems and reconfigurable manufacturing systems." Thesis, University of Warwick, 2017. http://wrap.warwick.ac.uk/104237/.

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Controlling uncertainties is a challenging aspect in design and manufacturing of microsystems. As microsystems are characterised by features in the micro domain, product development and manufacturing processes are applied at the boundaries of their operational areas. In combination with many disciplines (mechanical, electrical, software, chemical etc.) and little standardisation, it causes microsystems development to be more time and cost intensive than products in the macro domain. Development of microsystems benefits from a concurrent approach of product and production design. Uncertainties may be addressed by application of methods for systems engineering (engineering design). Systems engineering applies models for the analysis of projects, usually a linear set of gates that need to be closed successively as the project evolves. Over the last ten years, models with an iterative approach of design and testing, gained in popularity due to their more agile characteristic that performs better in fast changing markets. Microsystems development benefits from the linear approach that performs well for their structured project control, but because of the high market dynamics, agile methods will speed up the process, which results in faster market introduction, advances the product life cycle, and increases return on investments. Currently, there are no known systems engineering models that combine linear and iterative monitoring of projects to gain the best of both methods, especially not in combination with the capability of concurrently monitoring the development of product and production design. This thesis investigates how existing ways of system engineering can be combined to: (RQ1) enable iterative and linear modelling of microsystems development, and (RQ2) merge these qualities into a combined model to monitor the development process concurrently. The first problem is addressed by (RQ1): i. Modelling development progression by execution of iterative cycles that alternately perform functional system decomposition and functional gating. ii. This iterative model is elevated with the method of Axiomatic Design to enable concurrent system decomposition. Implementation of elements from the V-Modell XT enable functional gating to index the concurrent development process iii. The ‘Theory of Complexity’ of Axiomatic Design is applied to realise an intelligent, knowledge based, gating function to be used as a continuous maturity measure; The results show that linear and iterative models can be merged successfully. With some extensions, the Theory of Complexity of Axiomatic Design can indeed be used for continuous monitoring of product and process development. The thus-obtained maturity measure can be applied for the analysis of project decisions. This was successfully done for retrospective analysis of two cases. To merge the qualities of analyses ‘i to iii’ into a combined model to monitor the development process concurrently, three tools for application have been developed (RQ2). iv. The first is a method for visualisation of the intelligent gating function, based on analysis ‘iii’. The method applies a newly developed ‘Maturity Diagram’ that plots the Design Axioms as continuous parameters v. The second is a method for assessment of reconfigurable manufacturing systems based on analysis ‘ii’. The method estimates the investigations needed to (re)configure a product specific manufacturing system vi. The third is a tool for roadmapping and monitoring that combines outcomes of analyses ‘i, ii, and iii’. This model is called ‘Constituent Roadmap’ and it is based on: (a) an iterative approach, (b) concurrent decomposition, (c) the advanced gating function, and (d) knowledge application to the product and process design. The Constituent Roadmap was applied for the development of a ‘smart dust’ sensor system. It was found to structure knowledge development and application. This increases the chances to satisfy the functional requirements of the design. In parallel, it functions as a communications tool between designers and managers. Together, a reasonably complete picture has emerged how the design of microsystems and their production means can be modelled, and how uncertainties may be categorised so they can be addressed in the best order.
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Bejhed, Johan. "Fluidic Microsystems for Micropropulsion Applications in Space." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis, 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-7148.

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Forester, Sean M. "Energy harvesting for self-powered, ultra-low power microsystems with a focus on vibration-based electromechanical conversion." Thesis, Monterey, California : Naval Postgraduate School, 2009. http://edocs.nps.edu/npspubs/scholarly/theses/2009/Sep/09Sep%5FForester.pdf.

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Thesis (M.S. in Computer Science)--Naval Postgraduate School, September 2009.<br>Thesis Advisor(s): Singh, Gurminder ; Gibson, John. "September 2009." Description based on title screen as viewed on November 6, 2009. Author(s) subject terms: Microelectromechanical systems, photovoltaic, piezoelectric, thermocouple, power harvesting, energy scavenging, thermoelectric. Includes bibliographical references (p. 59-65). Also available in print.
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Srinivasaraghavan, Vaishnavi. "Bioimpedance spectroscopy of breast cancer cells: A microsystems approach." Diss., Virginia Tech, 2015. http://hdl.handle.net/10919/63921.

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Bioimpedance presents a versatile, label-free means of monitoring biological cells and their responses to physical, chemical and biological stimuli. Breast cancer is the second most common type of cancer among women in the United States. Although significant progress has been made in diagnosis and treatment of this disease, there is a need for robust, easy-to-use technologies that can be used for the identification and discrimination of critical subtypes of breast cancer in biopsies obtained from patients. This dissertation makes contributions in three major areas towards addressing the goal. First, we developed miniaturized bioimpedance sensors using MEMS and microfluidics technology that have the requisite traits for clinical use including reliability, ease-of-use, low-cost and disposability. Here, we designed and fabricated two types of bioimpedance sensors. One was based on electric cell-substrate impedance sensing (ECIS) to monitor cell adhesion based events and the other was a microfluidic device with integrated microelectrodes to examine the biophysical properties of single cells. Second, we examined a panel of triple negative breast cancer (TNBC) cell lines and a hormone therapy resistant model of breast cancer in order to improve our understanding of the bioimpedance spectra of breast cancer subtypes. Third, we explored strategies to improve the sensitivity of the microelectrodes to bioimpedance measurements from breast cancer cells. We investigated nano-scale coatings on the surface of the electrode and geometrical variations in a branched electrode design to accomplish this. This work demonstrates the promise of bioimpedance technologies in monitoring diseased cells and their responses to pharmaceutical agents, and motivates further research in customization of this technique for use in personalized medicine.<br>Ph. D.
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Sari, Ibrahim. "Design, Fabrication And Implementation Of A Vibration Based Mems Energy Scavenger For Wireless Microsystems." Phd thesis, METU, 2008. http://etd.lib.metu.edu.tr/upload/12610096/index.pdf.

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This thesis study presents the design, simulation, micro fabrication, and testing steps of microelectromechanical systems (MEMS) based electromagnetic micro power generators. These generators are capable of generating power using already available environmental vibrations, by implementing the electromagnetic induction technique. There are mainly two objectives of the study: (i) to increase the bandwidth of the traditional micro generators and (ii) to improve their efficiency at low frequency environmental vibrations of 1-100 Hz where most vibrations exist. Four main types of generators have been proposed within the scope of this thesis study. The first type of generator is mainly composed of 20 parylene cantilevers on which coils are fabricated, where the cantilevers are capable of resonating with external vibrations with respect to a stationary magnet. This generator has dimensions of 9.5&times<br>8&times<br>6 mm3, and it has been shown that 0.67 mV of voltage and 56 pW of power output can be obtained from a single cantilever of this design at a vibration frequency of 3.45 kHz. The second type generator aims to increase the bandwidth of the traditional designs by implementing cantilevers with varying length. This generator is sized 14&times<br>12.5&times<br>8 mm3, and the mechanical design and energy generation concept is similar to the first design. The test results show that by using 40 cantilevers with a length increment of 3 &amp<br>#956<br>m, the overall bandwidth of the generator can be increased to 1000 Hz. It has also been shown that 9 mV of constant voltage and 1.7 nW of constant power output can be obtained from the overall device in a vibration frequency range of 3.5 to 4.5 kHz. The third type is a standard large mass coil type generator that has been widely used in the literature. In this case, the generator is composed of a stationary base with a coil and a magnet-diaphragm assembly capable of resonating with vibrations. The fabricated device has dimensions of 8.5&times<br>7&times<br>2.5 mm3, and it has been considered in this study for benchmarking purposes only. The test results show that 0.3 mV of voltage and 40 pW of power output can be obtained from the fabricated design at a vibration frequency of 113 Hz. The final design aims to mechanically up-convert low frequency environmental vibrations of 1-100 Hz to a much higher frequency range of 2-3 kHz. This type of generator has been implemented for the first time in the literature. The generator is composed of two parts<br>a diaphragm-magnet assembly on the top, and 20 cantilevers that have coils connected in series at the base. The diaphragm oscillates by low frequency environmental vibrations, and catches and releases the cantilevers from the tip points where magnetic nickel (Ni) areas are deposited. The released cantilevers then start decaying out oscillations that is at their damped natural frequency of 2-3 kHz. It has been shown with tests that frequency up-conversion is realized in micro scale. The fabricated device has dimensions of 8.5&times<br>7&times<br>2.5 mm3, and a maximum voltage and power output of 0.57 mV and 0.25 nW can be obtained, respectively, from a single cantilever of the fabricated prototype at a vibration frequency of 113 Hz.
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Kratz, Henrik. "Integrated Communications and Thermal Management Systems for Microsystem-based Spacecraft : A Multifunctional Microsystem Approach." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Universitetsbiblioteket [distributör], 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6316.

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Books on the topic "Systems of microsystems"

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Zhonglin, Wang, Lin Liwei, and SpringerLink (Online service), eds. Microsystems and Nanotechnology. Springer Berlin Heidelberg, 2012.

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Zappe, Hans. Laser Diode Microsystems. Springer Berlin Heidelberg, 2004.

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Niedermayer, Michael. Cost-driven design of smart microsystems. Artech House, 2012.

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Duggirala, Rajesh. Radioisotope thin-film powered microsystems. Springer, 2010.

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Ramos, António. Electrokinetics and electrohydrodynamics in microsystems. Springer, 2011.

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MEMS and microsystems: Design and manufacture. McGraw-Hill, 2002.

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Sun, Tianjia. Wireless Power Transfer for Medical Microsystems. Springer New York, 2013.

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D’Amico, Arnaldo. Sensors and Microsystems: AISEM 2011 Proceedings. Springer US, 2012.

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Hsu, Tai-Ran. Mems and microsystems: Design, manufacture, and packaging. 2nd ed. John Wiley, 2008.

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Fortuna, Luigi. Microelectronics and Microsystems: Emergent Design Techniques. Springer London, 2002.

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Book chapters on the topic "Systems of microsystems"

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Civera, Pierluigi. "Microsystems." In Smart Adaptive Systems on Silicon. Springer US, 2004. http://dx.doi.org/10.1007/978-1-4020-2782-6_3.

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Younis, Mohammad I. "Vibrations of Lumped-Parameter Systems." In Microsystems. Springer US, 2011. http://dx.doi.org/10.1007/978-1-4419-6020-7_2.

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Kjellman, J., N. Hosseini, Jeong Hwan Song, et al. "Integrated Photonic Microsystems." In Sensor Systems Simulations. Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-16577-2_15.

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Solgaard, Olav. "Photonic Crystal Devices and Systems." In Photonic Microsystems. Springer US, 2008. http://dx.doi.org/10.1007/978-0-387-68351-5_15.

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Gosselin, Benoit, and Mohamad Sawan. "Embedded Medical Microsystems." In Design Technology for Heterogeneous Embedded Systems. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-94-007-1125-9_17.

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Poletkin, Kirill. "Inductive Levitation Micro-Systems." In Microsystems and Nanosystems. Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-58908-0_5.

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Poletkin, Kirill. "Hybrid Levitation Micro-Systems." In Microsystems and Nanosystems. Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-58908-0_6.

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Beskok, A. "Mixing in Microfluidic Systems." In Microfluidics Based Microsystems. Springer Netherlands, 2010. http://dx.doi.org/10.1007/978-90-481-9029-4_14.

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Poletkin, Kirill. "Introduction to Levitation Micro-Systems." In Microsystems and Nanosystems. Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-58908-0_1.

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Ko, Wen H. "Applications of Microelectro-Mechanical Systems." In Microsystems and Nanotechnology. Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-18293-8_16.

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Conference papers on the topic "Systems of microsystems"

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Shelepin, N. A. "Silicon sensors and microsystems." In Indo-Russian Workshop on Micromechanical Systems, edited by Vladimir I. Pustovoy and Vinoy K. Jain. SPIE, 1999. http://dx.doi.org/10.1117/12.369454.

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Ryser, Peter. "Microsystems: from technologies to products." In Smart Materials, Structures, and Systems, edited by S. Mohan, B. Dattaguru, and S. Gopalakrishnan. SPIE, 2003. http://dx.doi.org/10.1117/12.514717.

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Huang, Shujuan, Diana-Andra Borca-Tasciuc, and John Tichy. "Liquid Squeeze Film Damping in Microsystems Applications." In ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels collocated with 3rd Joint US-European Fluids Engineering Summer Meeting. ASMEDC, 2010. http://dx.doi.org/10.1115/fedsm-icnmm2010-30580.

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Abstract:
Squeeze film damping (SFD) in microscale systems employing plates parallel to a substrate and operating in a liquid environment is theoretically investigated. Previous analytical or numerical studies of SFD in microsystems are mainly focused on devices working in a compressible fluid, such as air [1–3], where fluid inertia is negligible. However, liquid inertia appears to significantly affect the dynamic response of a microsystem operating in liquid environment. This paper outlines a theoretical framework that takes into account the inertia effects on dynamic response and illustrates this effect presenting the magnification factor for media with high and low density.
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Gengenbach, Ulrich K. "Standards for hybrid microsystems production equipment." In Intelligent Systems and Advanced Manufacturing, edited by Bradley J. Nelson and Jean-Marc Breguet. SPIE, 2001. http://dx.doi.org/10.1117/12.444136.

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Koev, Stephan T., Michael A. Powers, Vlad Badilita, et al. "Chitosan for Biofunctionalization of Microsystems." In 2006 IEEE/NLM Life Science Systems and Applications Workshop. IEEE, 2006. http://dx.doi.org/10.1109/lssa.2006.250400.

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Sinzinger, Stefan. "Optical freeform surfaces in integrated optical microsystems." In Imaging Systems and Applications. OSA, 2012. http://dx.doi.org/10.1364/isa.2012.im3c.3.

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Thiel, David V., and Peter C. Lisner. "Sensor networks and microsystems: get smarter!" In Smart Materials, Nano-, and Micro-Smart Systems, edited by Said F. Al-Sarawi. SPIE, 2005. http://dx.doi.org/10.1117/12.581899.

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Han, Arum. "Microsystems for single cell analysis." In 2010 2nd Circuits and Systems for Medical and Environmental Applications Workshop (CASME). IEEE, 2010. http://dx.doi.org/10.1109/casme.2010.5706686.

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Carmo, J. P., and J. H. Correia. "RF microsystems for wireless sensors networks." In Technology of Integrated Systems in Nanoscal Era (DTIS). IEEE, 2009. http://dx.doi.org/10.1109/dtis.2009.4938023.

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Bercu, Bogdan, Laurent Montes, Panagiota Morfouli, and Nathalie Mathieu. "Simulation and 3D Characterization of Microsystems." In 2007 IEEE International Conference on Microelectronic Systems Education. IEEE, 2007. http://dx.doi.org/10.1109/mse.2007.75.

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Reports on the topic "Systems of microsystems"

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Raj, Rishi. Photo-Stereo Lithography System for Polymer Derived Ceramic Microsystems. Defense Technical Information Center, 2004. http://dx.doi.org/10.21236/ada420403.

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