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1

A, Hopwood Jeffrey, ed. Ionized physical vapor deposition. Academic Press, 2000.

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2

Jaworek, Anatol. Electrospray technology for thin-film devices deposition. Nova Science, 2010.

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3

Konuma, Mitsuharu. Film Deposition by Plasma Techniques. Springer Berlin Heidelberg, 1992.

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4

Awan, Tahir Iqbal, Sumera Afsheen, and Sabah Kausar. Thin Film Deposition Techniques. Springer Nature Singapore, 2025. https://doi.org/10.1007/978-981-96-1364-9.

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5

Konuma, Mitsuharu. Plasma techniques for film deposition. Alpha Science International, 2005.

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6

Moroșanu, C. E. Thin films by chemical vapour deposition. Elsevier, 1990.

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7

Krishna, Seshan, ed. Handbook of thin-film deposition processes and techniques: Principles, methods, equipment, and applications. Noyes Publications, 2000.

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8

B, Chrisey Douglas, and Hubler G. K, eds. Pulsed laser deposition of thin films. J. Wiley, 1994.

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9

Sankapal, Babasaheb R., Ahmed Ennaoui, Ram B. Gupta, and Chandrakant D. Lokhande, eds. Simple Chemical Methods for Thin Film Deposition. Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-99-0961-2.

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10

Moran, Robert. Thin layer deposition: Highlighting PVD. Business Communications Co., 2000.

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11

J, Mazumder, North Atlantic Treaty Organization. Scientific Affairs Division., and NATO Advanced Study Institute on "Laser Processing: Surface Treatment and Film Deposition" (1994 : Sezimbra, Portugal), eds. Laser processing: Surface treatment and film deposition. Kluwer Academic Publishers, 1996.

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12

Eason, Robert. Pulsed Laser Deposition of Thin Films. John Wiley & Sons, Ltd., 2006.

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13

National Renewable Energy Laboratory (U.S.) and IEEE Photovoltaic Specialists Conference (2011 : Austin, Taxas), eds. Optical properties of Zn(O,S) thin films deposited by RF sputtering atomic layer deposition, and chemcial bath deposition: Preprint. National Renewable Energy Laboratory, 2012.

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14

Eason, Robert, ed. Pulsed Laser Deposition of Thin Films. John Wiley & Sons, Inc., 2006. http://dx.doi.org/10.1002/0470052120.

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15

Hawkeye, Matthew M., Michael T. Taschuk, and Michael J. Brett. Glancing Angle Deposition of Thin Films. John Wiley & Sons, Ltd, 2014. http://dx.doi.org/10.1002/9781118847510.

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16

W, Rubloff G., and American Institute of Physics, eds. Deposition and growth: Limits for microelectronics, Anaheim, CA, 1987. American Institute of Physics, 1988.

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17

L, Smith Donald. Thin-film deposition and applications: Principles and practice. McGraw-Hill, 1994.

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18

Kromann, Rasmus. Deposition, characterization, and electronic applications of YBa2Cu3O7 thin films. Risø National Laboratory, 1992.

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19

Schuegraf, Klaus K. Handbook of Thin Film Deposition Processes and Techniques: Principles, Methods, Equipment and Applications. Elsevier, 2001.

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20

Moutinho, Helio R. Mechanisms of growth of nanocrystalline silicon deposited by hot-wire chemical vapor deposition. National Renewable Energy Laboratory, 2005.

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21

United States. National Aeronautics and Space Administration., ed. Analysis of hard thin film coating: Final report for NASA-UAH contract NAS8-38609, D.O. 59 : funding level, $19,000 (total). National Aeronautics and Space Administration, 1998.

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22

universitet, Uppsala, ed. Nucleation and growth of CVD diamond films. Acta Universitatis Upsaliensis, 1995.

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23

universitet, Uppsala, ed. Growth, structure and morphology of CVD carbon films. Acta Universitatis Upsaliensis, 1993.

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24

Moran, Robert. Thin layer deposition: Highlighting CVD. Business Communications Co., 2000.

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25

Robert, Moran. Thin layer deposition: Highlighting CVD. Business Communications Co., 1996.

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26

Robert, Moran. Thin layer deposition: Highlighting PVD. Business Communications Co., 1996.

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27

Seshan, Krishna, and Dominic Schepis. Handbook of Thin Film Deposition. Elsevier, 2024.

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28

Handbook of Thin Film Deposition. Elsevier, 2024.

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29

Seshan, Krishna, and Dominic Schepis. Handbook of Thin Film Deposition. Elsevier Science & Technology Books, 2018.

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30

Seshan, Krishna, and Dominic Schepis. Handbook of Thin Film Deposition. Elsevier Science & Technology Books, 2018.

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31

Seshan, Krishna. Handbook of Thin Film Deposition. Elsevier Science & Technology Books, 2012.

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32

Handbook of Thin Film Deposition. Elsevier Science & Technology Books, 2012.

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33

Powell, Ronald, and Abraham Ulman. Ionized Physical Vapor Deposition. Elsevier Science & Technology Books, 1999.

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34

Lin, Yuan. Advanced Nano Deposition Methods. Wiley & Sons, Incorporated, John, 2016.

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35

Lin, Yuan. Advanced Nano Deposition Methods. Wiley & Sons, Incorporated, John, 2016.

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36

Lin, Yuan. Advanced Nano Deposition Methods. Wiley & Sons, Limited, John, 2016.

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37

Lin, Yuan. Advanced Nano Deposition Methods. Wiley-VCH Verlag GmbH, 2016.

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38

Lin, Yuan. Advanced Nano Deposition Methods. Wiley & Sons, Incorporated, John, 2016.

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39

Jacobson, Michael Roy. Optical Thin Film Deposition. Mcgraw-Hill (Tx), 1992.

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40

Seshan, Krishna. Handbook of Thin Film Deposition Techniques. 2nd ed. Noyes Publications, 2001.

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41

Takagi, Toshinori. Ionized-Cluster Beam Deposition and Epitaxy. Elsevier Science & Technology Books, 1989.

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42

Ionized-cluster beam deposition and epitaxy. Noyes Publications, 1988.

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43

Depla, Diederik, and Stijn Mahieu. Reactive Sputter Deposition. Springer, 2010.

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44

Plasma Techniques for Film Deposition. Alpha Science International, Ltd, 2006.

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45

Handbook of Thin Film Deposition. Elsevier, 2012. http://dx.doi.org/10.1016/c2009-0-64359-2.

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46

Handbook of Thin Film Deposition. Elsevier, 2018. http://dx.doi.org/10.1016/c2016-0-03243-6.

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47

Gould, Phillip. Deposition and Characterization of Thin Films. Springer London, Limited, 1999.

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48

Shah, S., D. Glocker, and L. Vescan. Handbook of Thin Film Process Technology 99/1 Substrate Preparation for Thin Film Deposition. Taylor & Francis Group, 2000.

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49

Siddall, G., and C. E. Morosanu. Thin Films by Chemical Vapour Deposition. Elsevier Science & Technology Books, 2016.

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50

Ohring, Milton, and Shefford P. Baker. Materials Science of Thin Films: Deposition and Structure. Elsevier Science & Technology Books, 2016.

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