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Dissertations / Theses on the topic 'Thin film depositions'

Author: Grafiati

Published: 9 March 2023

Last updated: 31 July 2025

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1

Imam, Mewlude. "CVD Chemistry of Organoborons for Boron-Carbon Thin Film Depositions." Doctoral thesis, Linköpings universitet, Tunnfilmsfysik, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-141548.

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Boron-carbon thin films enriched with 10B are potential neutron converting layers for 10B-based solid state neutron detectors given the good neutron absorption cross section of 10B atoms in thin films. The common neutron-transparent base material, Al (melting point 660 °C), limits the deposition temperature and the use of chlorinated precursors forming corrosive by-products such as HCl. Therefore, the organoborons triethylboron B(C2H5)3 (TEB) and trimethylboron B(CH3)3 (TMB) are evaluated as precursors for CVD of BxC films. In order to get a complete understanding of the CVD behaviour of these

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2

Choi, Y. J. "Very high frequency plasma enhanced chemical vapour depositions for thin film transistors." Thesis, University of Cambridge, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597635.

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Hydrogenated amorphous silicon (a-Si:H) is increasingly being used in applications that require large-area, thin-film semiconductor. It can be deposited easily, at low temperature and low cost, on inexpensive substrates of almost any size by chemical vapour deposition methods. One of these applications of a-Si:H is the fabrication of thin-film transistors (TFTs) that are most often used in liquid crystal displays (LCDs). Plasma enhanced chemical vapour deposition (PECVD) is also called glow discharge deposition because of its visible luminosity of the plasma glow region, which is mainly the re

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3

CALDIROLA, STEFANO. "Characterization of a supersonic plasma source for nanostructured thin films deposition." Doctoral thesis, Università degli Studi di Milano-Bicocca, 2015. http://hdl.handle.net/10281/94564.

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The controlled growth of nanostructured thin films represents a challenging field of research which is related to many different applications of great scientific relevance. The properties of many materials can be greatly enhanced by optimizing the nanoscale assembly processes: by modelling the nanoparticles which create and assemble a film it is possible to achieve very promising results, although it requires a bottom-up approach capable of tailoring the properties with a high level of control or a complex set-up. Plasma-based synthesis processes have been widely developed and applied for an i

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4

Kroely, Laurent. "Process and material challenges in the high rate deposition of microcrystalline silicon thin films and solar cells by Matrix Distributed Electron Cyclotron Resonance plasma." Phd thesis, Ecole Polytechnique X, 2010. http://pastel.archives-ouvertes.fr/pastel-00550241.

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High deposition rates on large areas are industrial needs for mass production of microcrystalline silicon (μc-Si:H) solar cells. This doctoral work aims at exploring the usefulness of Matrix Distributed Electron Cyclotron Resonance (MDECR) plasmas to process the intrinsic layer of μc-Si:H p-i-n solar cells at high rates. With the high dissociation of silane achieved in MDECR plasmas, deposition rates as high as 6nm/s and 2.8nm/s have been demonstrated in our lab for amorphous and microcrystalline silicon respectively, without hydrogen dilution. This technique is also promising because it can b

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5

Xiao, Zhigang. "Synthesis of Functional Multilayer Coatings by Plasma Enhanced Chemical Vapor Deposition." Cincinnati, Ohio : University of Cincinnati, 2004. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=ucin1081456822.

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6

Lau, Kenneth Ka Shun 1972. "Chemical vapor deposition of fluorocarbon films for low dielectric constant thin film applications." Thesis, Massachusetts Institute of Technology, 2000. http://hdl.handle.net/1721.1/16748.

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Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2000.<br>Includes bibliographical references.<br>This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.<br>Pulsed plasma enhanced and hot filament chemical vapor deposition have produced fluorocarbon films with the potential use as low dielectric constant interconnect materials in microelectronic circuits. Solid-state nuclear magnetic resonance spectroscopy was demonstrated as a valuable film characterization tool to u

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7

Kim, Gwang-Soo 1975. "Multiscale modeling of thin film deposition processes." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/29277.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2002.<br>Includes bibliographical references.<br>Ionized physical vapor deposition (IPVD) and electrochemical deposition (ECD) are two major thin film deposition processes in the microelectronics industry. The ion fluxes with high kinetic energies in IPVD process involve complex surface interactions that affect overall topology of the microscale features. Copper ECD process involves complex surface reactions and transport phenomena that ranges over different length scales. In this work, predictive simulation

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8

Garza, Ezra. "Pulsed Laser Deposition of Thin Film Heterostructures." ScholarWorks@UNO, 2011. http://scholarworks.uno.edu/td/459.

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Thin films of Strontium Ruthenate have been grown on Strontium Titanate and Lanthanum Aluminate (100) substrates by pulsed laser deposition. X-ray diffraction results show that the films grown on the Strontium Titanate are amorphous and polycrystalline on the Lanthanum Aluminate. Resistances versus temperature measurements show that the films exhibit semiconducting characteristics. In addition to the growth of Strontium Ruthenate thin films, multilayer heterostructures of Terfenol-D thin films on polycrystalline Lead Titanate thin films were grown by pulsed laser deposition. By using a novel e

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9

Rycroft, Ian M. "Electric, magnetic and optical properties of thin films, ultra thin films and multilayers." Thesis, University of Reading, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.318142.

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10

Chen, Yi. "Organic thin film transistors with mono-crystalline rubrene films by horizontal hot wall deposition." Thesis, McGill University, 2009. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=66699.

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As promising candidates for future low-cost and flexible display applications, organic thin film transistors (OTFTs) have attracted considerable research interests for the past two decades. Recent advances in organic semiconductor theory and organic film growth/deposition techniques have resulted in OTFTs based on single crystalline organic films with performance approaching or even exceeding the present day's dominant amorphous silicon TFT technology. In this work, efforts have been made to explore suitable methods for the fabrication of thin film transistors based on high m

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11

Charyshkin, Eugene V. "New methods of diamond and diamondlike films deposition." Thesis, Queensland University of Technology, 1996.

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12

Gledhill, Sophie E. "Spray deposition of thin semiconductor films for use as buffer layers in CuInSâ†2 thin film solar cells." Thesis, University of Oxford, 2002. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.393550.

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13

Lojewski, Brandon. "A Linear Multiplexed Electrospray Thin Film Deposition System." Master's thesis, University of Central Florida, 2013. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/5981.

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Liquid spray is essential to industries requiring processes such as spray coating, spray drying, spray pyrolysis, or spray cooling. This thesis reports the design, fabrication, and characterization of a thin film deposition system which utilizes a linear multiplexed electrospray (LINES) atomizer. First, a thorough review of the advantages and limitations of prior multiplexed electrospray systems leads to discussion of the design rationale for this work. Next, the line of charge model was extended to prescribe the operating conditions for the experiments and to estimate the spray profile. The s

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14

Wu, Genfa. "Energetic Deposition of Niobium Thin Film in Vacuum." Diss., Virginia Tech, 2002. http://hdl.handle.net/10919/28110.

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Niobium thin films are expected to be free of solid inclusions commonly seen in solid niobium. For particle accelerators, niobium thin film has the potential to replace the solid niobium in the making of the accelerating structures. In order to understand and improve the superconducting performance of niobium thin films at cryogenic temperature, an energetic vacuum deposition system has been developed to study deposition energy effects on the properties of niobium thin films on various substrates. The system directly uses microwave power to create a pure niobium plasma, which can be used to ex

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15

Haque, Yasmeen. "Deposition of plasma polymerized thin films /." Thesis, Connect to this title online; UW restricted, 1985. http://hdl.handle.net/1773/9848.

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16

Gustavsson, Lars-Erik. "Hollow Cathode Deposition of Thin Films." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Universitetsbiblioteket [distributör], 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6925.

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17

Al-Busaidy, Mohamed Said Kahalifa. "Energetic deposition of thin metal films." Thesis, Loughborough University, 2001. https://dspace.lboro.ac.uk/2134/36128.

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The primary aim of this thesis was to study the physical effect of energetic deposition on metal thin films. The secondary aim is to enhance the quality of the films produced to a desired quality. Grazing incidence X-ray reflectivity (GIXR) measurements from a high-energy synchrotron radiation source were carried out to study and characterise the samples. Optical Profilers Interferometry, Atomic Force Microscope (AFM), Auger electron spectroscopy (AES), Medium energy ion spectroscopy (MEIS), and the Electron microscope studies were the other main structural characterisation tools used.

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18

Rayan, Mihir K. "Spray deposition of biomolecular thin films." [Tampa, Fla] : University of South Florida, 2008. http://purl.fcla.edu/usf/dc/et/SFE0002681.

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19

Rieth, Loren Wellington. "Sputter deposition of ZnO thin films." [Gainesville, Fla.] : University of Florida, 2001. http://purl.fcla.edu/fcla/etd/UFE0000349.

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Thesis (Ph. D.)--University of Florida, 2001.<br>Title from title page of source document. Document formatted into pages; contains xv, 262 p.; also contains graphics. Includes vita. Includes bibliographical references.

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20

Kaufmann, Christian A. "Chemical bath deposition of thin semiconductor films for use as buffer layers in CuInSâ†2 thin film solar cells." Thesis, University of Oxford, 2002. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.393556.

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21

Okazaki, Nobuharu. "Molecular rectification with identical metal electrodes at low temperatures." Thesis, University of Exeter, 2003. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.251190.

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22

Ramezani-Namin, Mehrdad. "Optimization of glow discharge magnetron sputtering for deposition of high Tc superconducting thin films." Thesis, University of Southampton, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.243149.

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23

Omar, Ozma. "Optical effects in Langmuir-Blodgett films of novel organic materials." Thesis, Sheffield Hallam University, 1998. http://shura.shu.ac.uk/20143/.

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The high level of molecular control makes the Langmuir-Blodgett (LB) technique an appealing method of film deposition. The uniform nature of the films produced allows convenient investigation of intermolecular interactions and provides information pertaining to the orientation of molecules within films. LB films of two amphiphilic materials with contrasting molecular structures have been deposited. AmPc5 (a metal-free phthalocyanine (pc)) is a two-dimensional, cyclic molecule, whereas AmAzl (a resorcinol calixarene) possesses a three-dimensional basket-type structure. The amphiphilic nature of

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24

Klosterman, Luke J. "Deposition, Oxidation, and Adhesion Mechanisms of Conformal Polydopamine Films." Research Showcase @ CMU, 2016. http://repository.cmu.edu/dissertations/702.

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The oxidation of dopamine in aqueous solutions deposits thin conformal films on a wide variety of material surfaces. These films consist of a material known as polydopamine (PDA), and they exhibit chemical and structural similarities to melanin pigments and adhesive proteins secreted by mussels. The facile synthesis and versatile adhesion of PDA enable the functional modification of numerous material surfaces for applications in biomedical devices, energy storage, and water purification. This thesis details fundamental investigations into the deposition, oxidation, and adhesive mechanisms of P

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25

Hu, Xiaobing. "Deposition and characterisation of bismuth layer-structured ferroelectric films." Thesis, University of Cambridge, 2006. https://www.repository.cam.ac.uk/handle/1810/194739.

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Bismuth layer-structured ferroelectrics have been recognised as promising film materials for ferroelectric random access memory application due to their excellent fatigue resistance and other electrical properties. This work deals with the deposition and characterisation of epitaxial and polycrystalline W-doped SrBi2Ta2O9 (SBT) and lanthanide-doped bismuth titanate (BiT) films. SBT and W-doped SBT films were fabricated by pulsed laser deposition (PLD) on platinised silicon substrates. The effects of fabrication temperature and W-doping level on film properties were studied. The crystallinity o

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26

Gregory, Robert p. "Digital control of a MBE deposition system." Thesis, University of Manchester, 1988. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.237668.

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27

Ravindran, Ramasamy. "Deposition and characterization of high permittivity thin-film dielectrics." Diss., Columbia, Mo. : University of Missouri-Columbia, 2006. http://hdl.handle.net/10355/4530.

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Thesis (M.S.)--University of Missouri-Columbia, 2006.<br>The entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on April 17, 2009) Includes bibliographical references.

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28

Kaye, Simon Peter. "Ion-assisted deposition of molybdenum disulphide films." Thesis, University of Salford, 1993. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.238835.

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29

Halindintwali, Sylvain. "A study of hydrogenated nanocrystalline silicon thin films deposited by hot-wire chemical vapour deposition (HWCVD)." Thesis, University of the Western Cape, 2005. http://etd.uwc.ac.za/index.php?module=etd&amp.

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In this thesis, intrinsic hydrogenated nanocrystalline silicon thin films for solar cells application have been deposited by means of the hot &ndash<br>wire chemical vapour deposition (HWCVD) technique and have been characterised for their performance. It is noticed that&nbsp<br>hydrogenated nanocrystalline silicon is similar in some aspects (mainly optical) to its counterpart amorphous silicon actually used as the intrinsic layer in the photovoltaic industry. Substantial differences between the two materials have been found however in their respective structural and electronic properties.<br

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30

Zou, Shubing. "Deposition and characterization of HfO₂ thin films." Thesis, This resource online, 1994. http://scholar.lib.vt.edu/theses/available/etd-07112009-040501/.

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31

Piskin, Fatih. "Deposition And Testing Of Thin Film Hydrogen Separation Membranes." Master's thesis, METU, 2013. http://etd.lib.metu.edu.tr/upload/12615550/index.pdf.

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Industrial production of hydrogen from the syngas, generated from steam reformation of natural gas or coal gasification, sets conditions for hydrogen separation membranes in terms of operating conditions. An alternative source for hydrogen is a syngas generated by gasification of municipal solid wastes which are likely to set more stringent conditions for the separation membranes. There is therefore, a growing demand for separation membranes with improved permeability and particularly of low cost. Among various alternatives, metallic membranes are particularly attractive due to their high sele

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32

Horley, Graeme Anthony. "Novel gallium and indium precursors for thin film deposition." Thesis, Imperial College London, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.322883.

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33

Huq, Syed Ejazul. "Thin film deposition by the ionized cluster beam method." Thesis, University of Cambridge, 1988. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.304288.

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34

Schreiber, Simon Johannes. "Plasma deposition of microcrystalline silicon for thin film transistors." Thesis, University of Cambridge, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.621413.

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35

Plassmeyer, Paul. "Metal-Oxide Thin Films Deposited from Aqueous Solutions: The Role of Cation/Water Interactions." Thesis, University of Oregon, 2017. http://hdl.handle.net/1794/22295.

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Metal-oxide thin films are used in a wide variety of electronic devices. Although many techniques have been developed to deposit thin films of metal oxides, there is still a need for alternative cost- and energy-effective deposition methods. Deposition of metal oxide thin films from aqueous solutions of all-inorganic metal salts is a viable method that meets these needs. Although many aqueous-deposited metal-oxide thin films have been successfully incorporated into functioning devices, many of the mechanisms that occur as precursors transition to metal oxides are not well understood. The wo

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36

Akyildiz, Hasan. "Hydrogen Storage In Magnesium Based Thin Film." Phd thesis, METU, 2010. http://etd.lib.metu.edu.tr/upload/12612652/index.pdf.

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ABSTRACT HYDROGEN STORAGE IN MAGNESIUM BASED THIN FILMS Akyildiz, Hasan Ph.D., Department of Metallurgical and Materials Engineering Supervisor : Prof. Dr. Tayfur &Ouml<br>zt&uuml<br>rk Co-Supervisor : Prof. Dr. Macit &Ouml<br>zenbas October 2010, 146 pages A study was carried out for the production of Mg-based thin films which can absorb and desorb hydrogen near ambient conditions, with fast kinetics. For this purpose, two deposition units were constructed<br>one high vacuum (HV) and the other ultra high vacuum (UHV) deposition system. The HV system was based on a pyrex bell jar

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37

Lindahl, Erik. "Thin Film Synthesis of Nickel Containing Compounds." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-111484.

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38

Johnson, Shevon. "Pulsed Laser Deposition of Hydroxyapatite Thin Films." Thesis, Georgia Institute of Technology, 2005. http://hdl.handle.net/1853/6839.

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Pulsed laser deposition (PLD) was used to deposit hydroxyapatite (HA) thin films on various substrates, including silicon (100) and titanium (Ti-6Al-4V) alloy. Thin films of amorphous HA were deposited at room temperature and then annealed over a range of temperatures. The microstructure and composition of the films were determined using scanning electron microscopy (SEM), energy dispersive x-ray spectroscopy (EDS), and X-ray diffraction (XRD). The HA films were found to achieve total crystallinity at 350㮠The mechanical properties of the films were studied by means of nanoindentation and scrat

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39

Liljeholm, Lina. "Reactive Sputter Deposition of Functional Thin Films." Doctoral thesis, Uppsala universitet, Fasta tillståndets elektronik, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-175666.

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Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. Characteristic for reactive sputtering processes is the hysteresis due to the target poisoning. One particular finding in this work is the elimination of the hysteresis by means of a mixed nitrogen/oxygen processing environment for dual sputtering of

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40

Huang, Ying-Hao, and 黃英豪. "A study of various depositions of absorption layers in CIGS thin film solar cells." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/22298356181624336824.

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碩士<br>聖約翰科技大學<br>機械與電腦輔助工程系碩士班<br>103<br>CIGS thin films have become one of the most important absorption layer in solar cells because of its high efficiency. This work characterizes flexible CIGS solar cells synthesized with various deposition methods. The Mo conducting films is sputtered on stainless steel shells, and utilizes sandwich deposition method (In/CuGa/In) to sputter CIG precursor films on the Mo/stainless steel substrates. Then, the CIGS absorption layers are synthesized with three stage high temperature selenization. The surface roughness, micro structure, composition, crystalliz

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41

"Ferroelectric Lithium Niobate Surfaces for Depositions of Metallic Nanostructure and ZnO Semiconducting Thin Film." Doctoral diss., 2011. http://hdl.handle.net/2286/R.I.9290.

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abstract: A distinct characteristic of ferroelectric materials is the existence of a reversible spontaneous polarization with the application of an electric field. The relevant properties ferroelectric lithium niobate surfaces include a low density of defects and external screening of the bound polarization charge. These properties result in unique surface electric field distribution with a strong electric field in the vicinity of domain boundaries, while away from the boundaries, the field decreases rapidly. In this work, ferroelectric lithium niobate (LN) is used as a template to direct the

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42

Luo, Yu-Siang, and 羅渝翔. "Investigation of the Electrochromic Properties of WO3 Thin Film Prepared by Containing Hydrogens by DC and Pulsed DC Sputtering Depositions." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/46834604955187338967.

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碩士<br>國立雲林科技大學<br>電子與光電工程研究所碩士班<br>101<br>The rapid development of electrochromic materials has draw much attention to the evaluation of the performance of its devices. To understand the dynamic performance is necessary for the sake of making a reliable electrochromic device in commercial purpose, which in term mostly is all-solid-state electrochromic devices. The key to the success of these products reflects strongly on various electrochromic performance of such a device. These include response time, memory effect, transmittance, optical density change and color-bleach cyclic lifetime. In thi

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43

Lu, Yi-Cheng, and 盧奕誠. "Pulsed Laser Deposition of MnZnO Thin Film on ZnO Films." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/6x3639.

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碩士<br>國立臺北科技大學<br>光電工程系研究所<br>98<br>MnxZn1-xO has become an attractive material because of it’s ferromagnetic and optoelectronic properties. Here we demonstrate that MnZnO thin film can be synthesized via pulsed laser deposition (PLD) method and investigate it’s structural and optoelectronic properties. The thesis consists of two parts. In the first part, the MnxZn1-xO (0.02≦x≦0.2) thin film was grown on c-plane sapphire substrate by PLD method directly. Measurements include scanning electron microscope (SEM), X-ray diffraction (XRD), optical transmission spectra, and atomic force microsco

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li, hao jung, and 李浩榮. "Deposition of Pt/C thin film." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/34828350392790798412.

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45

Goswami, Jaydeb. "Chemical Vapor Deposition Of Thin Films Of Copper And YBa2Cu3O7-x." Thesis, 1995. https://etd.iisc.ac.in/handle/2005/2092.

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Goswami, Jaydeb. "Chemical Vapor Deposition Of Thin Films Of Copper And YBa2Cu3O7-x." Thesis, 1995. http://etd.iisc.ernet.in/handle/2005/2092.

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47

Coetsee, Dirk. "Experiments in thin film deposition : plasma-based fabrication of carbon nanotubes and magnesium diboride thin films." Thesis, 2004. http://hdl.handle.net/10413/4307.

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A simple, low-cost plasma reactor was developed for the purpose of carrying out thin film deposition experiments. The reactor is based largely on the Atmospheric Pressure Nonequilibrium Plasma (APNEP) design with a simple modification. It was used in an attempt to fabricate magnesium diboride thin films via a novel, but unsuccessful CVD process where plasma etching provides a precursor boron flux. Carbon nanotubes were successfully synthesised with the apparatus using a plasma-based variation of the floating catalyst or vapour phase growth method. The affect of various parameters and chemicals

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48

Permanasari, Rina. "Electrochemical deposition of thin film CuGaSe�� for photovoltaics." Thesis, 2004. http://hdl.handle.net/1957/33321.

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CuGaSe��/CuInSe�� tandem junction solar cell is currently being pursued to be a low cost and high efficiency renewable energy source. A reported theoretical efficiency of 33.9% solar cells has been the motivation to fabricate CuGaSe�� films in a simple and low cost method. Electrodeposition is a potentially suitable method to obtain the CuGaSe�� films. A better understanding of the electrodeposition process is required to optimize the process. Focusing on the manufacture of CuGaSe�� film, the reaction accompanying the electrodeposition of CuGaSe�� using rotating disk electrode from cupri

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Narayanachari, K. V. L. V. "Stress and Microstructural Evolution During the Growth of Transition Metal Oxide Thin Films by PVD." Thesis, 2015. http://etd.iisc.ac.in/handle/2005/3590.

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System on Chip (SoC) and System in Package (SiP) are two electronic technologies that involve integrating multiple functionalities onto a single platform. When the platform is a single wafer, as in SOC, it requires the ability to deposit various materials that enable the different functions on to an underlying substrate that can host the electronic circuitry. Transition metal oxides which have a wide range of properties are ideal candidates for the functional material. Si wafer on which micro-electronics technology is widely commercialized is the ideal host platform. Integrating oxides with

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Narayanachari, K. V. L. V. "Stress and Microstructural Evolution During the Growth of Transition Metal Oxide Thin Films by PVD." Thesis, 2015. http://etd.iisc.ernet.in/2005/3590.

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System on Chip (SoC) and System in Package (SiP) are two electronic technologies that involve integrating multiple functionalities onto a single platform. When the platform is a single wafer, as in SOC, it requires the ability to deposit various materials that enable the different functions on to an underlying substrate that can host the electronic circuitry. Transition metal oxides which have a wide range of properties are ideal candidates for the functional material. Si wafer on which micro-electronics technology is widely commercialized is the ideal host platform. Integrating oxides with

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