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Dissertations / Theses on the topic 'Thin film interference'
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1
Faichnie, David Malcolm. "Thin Film Optical Metrology Using Principles of Wavefront Sensing and Interference." Thesis, Heriot-Watt University, 2007. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.486271.
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The work contained within this thesis considers the applicability of wavefront sensing to the problem of laminate and thin film metrology and considers whether such technology can be applied to the problem of in-situ thickness measurement. Some initial investigations were carried out to develop new applications based on current technology. The main body of the work investigated the development of a thickness monitor based on measuring the separation of surface reflections and the further development required to incorporate a wavefront sensor into the system to allow the reflected wavefronts to be analysed. The initial system was developed theoretically using a mathematical model and tested experimentally giving a high dynamic range (lOJlm - 8mm) and good accuracy (50nm) for this application. Analysis of higher order aberration modes introduced by the film structure have been carried out in simulation and a robust algorithm fonnulated to measure film thickness and surface tilt simultaneously using a single measurement. The most prominent aberrations introduced by laminate layers were identified as tilt, defocus, astigmatism and coma and monitoring of these modes allowed thickness variation to be measured. Experiments and simulations were shown to agree and further development of a sensor based on analysis of the interference between wavefronts allowed much thinner laminates to be measured. This work will allow further development of an industrial thickness monitor capable of measuring film thickness and surface fonn in multiple laminates simultaneously and suitable for in-line in-situ real time measurements.
2
Chi, Robert Chih-Jen. "Optical Memory Device Structure Using Vertical Interference From Digital Thin Films." University of Cincinnati / OhioLINK, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin988039043.
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Hutson, D. "The design, construction and operation of practical thin film superconducting quantum interference devices (SQUIDs)." Thesis, University of Strathclyde, 1987. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.382345.
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Francis, Laurent A. "Thin film acoustic waveguides and resonators for gravimetric sensing applications in liquid." Université catholique de Louvain, 2006. http://edoc.bib.ucl.ac.be:81/ETD-db/collection/available/BelnUcetd-01272006-113333/.
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The fields of health care and environment control have an increasing demand for sensors able to detect low concentrations of specific molecules in gaseous or liquid samples. The recent introduction of microfabricated devices in these fields gave rise to sensors with attractive properties. A cutting edge technology is based on guided acoustic waves, which are perturbed by events occurring at the nanometer scale. A first part of the thesis investigates the Love mode waveguide, a versatile structure in which a thin film is guiding the acoustic wave generated in a piezoelectric substrate. A systematic analysis of its sensitivity was obtained using a transmission line model generalized to discriminate the rigid or viscous nature of the probed layers. We developed a novel integrated combination of the Love mode device with a Surface Plasmon Resonance optical sensor to quantify the thickness and the composition of soft layers. The electromagnetic interferences in the recorded signal were modeled to determine the phase velocity in the sensing area and to provide new mechanisms for an enhanced sensitivity. The experimental aspects of this work deal with the fabrication, the important issue of the packaging and the sensitivity calibration of the Love mode biosensor. A second part of the thesis investigates nanocrystalline diamond under the form of a thin film membrane suspended to a rigid silicon frame. The high mechanical and chemical resistance of nanocrystalline diamond, close to single-crystal diamond, open ways to membrane based acoustic sensors such as Flexural Plate Wave and thin Film Bulk Acoustic Resonators (FBAR). A novel dynamic characterization of the thin film is reported and the properties of composite FBAR devices including a diamond thin film membrane and a piezoelectric aluminum nitride layer are assessed using the perturbation theory. This study is applied to evaluate the high sensing potential of the first prototype of an actual diamond-based composite FBAR.
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Holmqvist, Johan. "Development of Free-Standing Interference Films for Paper and Packaging Applications." Thesis, Linköping University, The Department of Physics, Chemistry and Biology, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11398.
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The newfound capability of creating moisture sensitive interference multilayered thin films (MLTFs) comprising microfibrillated cellulose and polymers has not previously been possible to implement on surfaces other than silicon wafer strips. Being able to incorporate interference MLTFs on fibre-based materials would introduce the possibility for new applications within authentication, sensing and customer attraction for the paper and packaging industry. By using trichloro (1H, 1H, 2H, 2H-perfluorooctyl) silane we were able to hydrophobically modify silicon substrates, enabling interference MLTF lift-off and thus the creation of free-standing MLTFs of approximately 400 nm thickness. Contact dried MLTFs approximately 250 nm thick, were successfully transferred to copy- and filter paper as well as to cellulose-based dialysis membranes. We can also report on the successful synthesis of interference MLTFs directly on a fibre composite material and on aluminium. Initial tests of a method to quantify the pull-off conditions of the MLTFs from the fluorinated surfaces using the Micro Adhesion Measurement Apparatus showed promising results.
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Aydogdu, Selcuk. "Near Infrared Interference Filter Design And The Production Withion-assisted Deposition Techniques." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614092/index.pdf.
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Near infrared region (NIR) of the electromagnetic spectrum (EM) is defined as 700nm to
1400nm wavelength interval by International Commission on Illumination(CIE). This wavelength
interval is extensively used for target acquisition, night vision, wireless communication
etc. Therefore, filtering the desired portion of EM spectra becomes a need for that kind
of applications. Interference filters are multilayer optical devices which can be designed and
produced for the desired wavelength intervals. The production of near infrared interference
filters is a process of depositing thin material layers on the suitable substrates. In this thesis, a
multilayer NIR filter will be designed for a selected wavelength interval by the use of dierent
materials. Then, transmission quality, thermal stability, dependence of the transmission
values on the incoming beam angle, performance and durability of the filter will be studied.
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Johansson, Jim. "An Investigation of Short Circuits in All-solution Processed and All-organic Solar Cells." Thesis, KTH, Skolan för kemivetenskap (CHE), 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-207027.
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Organic solar cells have shown great promise of becoming a cheaper alternative to inorganic solar cells. Additionally, they can also be made semitransparent. To avoid using expensive indium tin oxide electrodes in organic solar cells the electrodes can be made from conductive polymer, poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS). However, these so-called PEDOT-PEDOT solar cells are prone to short-circuiting. The work behind this thesis thus aimed to find the cause of these short circuits. The initial working hypothesis assumed the hygroscopic PSS in the bottom electrode could attract water across the active layer when the top electrode layer was applied. This would then swell the bottom electrode and cause the active layer to crack leading to short circuits. Accordingly, swelling was investigated as it was suspected to be the main cause of the shorts. This was achieved by coating reflective substrates with different layers from the solar cell, dropping water on top of the stack and then filming the thin film interference effects. SEM, AFM and IR were also used for further analysis. Although the bottom electrode swells, it was found that water does not cause permanent cracking. Instead, the research unveiled that water causes a formation of blisters, which are suspected to be made of PSS. The exact mechanism for the formation of the shorts remains unclear however.
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Barutcu, Burcu. "The Design And Production Of Interference Edge Filters With Plasma Ion Assisted Deposition Technique For A Space Camera." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614574/index.pdf.
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Interference filters are multilayer thin film devices. They use interference effects between
the incident and reflected radiation waves at each layer interface to select wavelengths. The
production of interference filters depend on the precise deposition of thin material layers on
substrates which have suitable optical properties. In this thesis, the main target is to design
and produce two optical filters (short-pass filter and long-pass filter) for the CCDs that will
be used in the electronics of a space camera. By means of these filters, it is possible to take
image in different bands (RGB and NIR) by identical two CCDs. The filters will be fabricated
by plasma ion-assisted deposition technique.
9
Dyck, Tobias Verfasser], Uwe [Akademischer Betreuer] [Rau, and Andres Fabian [Akademischer Betreuer] Lasagni. "Light trapping by light treatment : direct laser interference patterning for the texturing of front contacts in thin-film silicon solar cells / Tobias Dyck ; Uwe Rau, Andres Fabian Lasagni." Aachen : Universitätsbibliothek der RWTH Aachen, 2017. http://d-nb.info/1162845805/34.
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Dyck, Tobias [Verfasser], Uwe [Akademischer Betreuer] Rau, and Andres Fabian [Akademischer Betreuer] Lasagni. "Light trapping by light treatment : direct laser interference patterning for the texturing of front contacts in thin-film silicon solar cells / Tobias Dyck ; Uwe Rau, Andres Fabian Lasagni." Aachen : Universitätsbibliothek der RWTH Aachen, 2017. http://nbn-resolving.de/urn:nbn:de:101:1-2018071608004058241947.
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Walsh, Michael E. (Michael Edward) 1975. "Nanostructuring magnetic thin films using interference lithography." Thesis, Massachusetts Institute of Technology, 2000. http://hdl.handle.net/1721.1/8812.
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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.Includes bibliographical references.
Proliferation of data caused by rapid increases in computer power and the rise of the internet have caused an acute need for advanced data storage technology. Patterned magnetic media and magneto-resistive random-access memory (MRAM) can potentially fulfill this need. The technique of interference lithography is examined in the context of patterning ~100 nm size features. An interferometer is designed and built which will allow exposure of gratings and grids with a minimum spatial period of ~ 170 nm. Etching methods, especially ion-beam etching, or ion milling, is investigated as the optimal choice for patterning sub-100 nm features in thin magnetic films and multi-layer thin film stacks. The advantages and disadvantages of a variety of resist stacks and etch masks are presented. An optimal process for linewidth control and preservation of magnetic properties is found to include a thin phase-shifting resist stack and a tungsten hardmask.
by Michael E. Walsh.
S.M.
12
Eckhardt, Sebastian. "Hocheffiziente metallische Dünnschichtelektroden durch Direkte Laserinterferenzstrukturierung." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2017. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-220616.
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Moderne optoelektronische Dünnfilmapplikationen erfordern den Einsatz effizienter großflächiger Elektrodensysteme, die einerseits über sehr gute Leitfähigkeitseigenschaften verfügen und andererseits eine hohe Transparenz in einem breiten Wellenlängenspektrum aufweisen. Momentan wird für derartige Anwendungen zum Großteil der Werkstoff Indiumzinnoxid (ITO) eingesetzt, dessen Hauptbestandteil Indium nur in geringen Mengen auf der Erde vorkommt. Für die Erhaltung der Marktfähigkeit und zur Weiterentwicklung der Dünnschichtelektronik ist es nötig, dieses Ressourcenproblem zu lösen. Eine Möglichkeit zur Substitution von ITO ist die Verwendung dünner metallischer Filme als transparente Elektroden. Die vorliegende Dissertationsschrift untersucht in diesem Zusammenhang die Anwendung der Direkten Laserinterferenzstrukturierung (DLIP). Um hinreichend große optische Transparenz bei entsprechender elektrischer Leitfähigkeit zu erhalten, werden Dünnschichtensysteme aus Kupfer, Aluminium, Chrom und Silber mit verschiedenen periodischen Lochmustern zwischen 1,5-2,7 µm perforiert. Im Anschluss werden die bearbeiteten Probenkörper hinsichtlich ihrer optischen, elektrischen und topografischen Eigenschaften vermessen. Die umfangreichen gewonnenen Daten werden in einer Auswertung zusammengefasst und mit Resultaten aus numerischen Modellrechnungen verglichen. Neben den Ergebnissen zur Effizienzsteigerung der Dünnfilme untersucht die vorliegende Arbeit die laserinduzierte Ablationsdynamik metallischer Filme auf Glassubstrat zwischen 5-40 nm Schichtdicke.
13
Perzlmaier, Korbinian. "Propagation and interference of spin waves in ferromagnetic thin films /." Berlin : Logos-Verl, 2008. http://d-nb.info/988446545/04.
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Graf, zu Eulenburg Alexander. "High temperature superconducting thin films and quantum interference devices (SQUIDs) for gradiometers." Thesis, University of Strathclyde, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.366689.
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Grotewohl, Herbert. "Tunable Geometric Fano Resonances in a Metal/Insulator Stack." Thesis, University of Oregon, 2016. http://hdl.handle.net/1794/20689.
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We present a theoretical analysis of surface-plasmon-mediated mode-coupling in a planar thin film metal/insulator stack. The spatial overlap of a surface plasmon polariton (SPP) and a waveguide mode results in a Fano interference analog. Tuning of the material parameters effects the modes and output fields of the system. Lastly, the intensity and phase sensitivity of the system are compared to a standard surface plasmon resonance (SPR).
We begin with background information on Fano interference, an interference effect between two indistinguishable pathways. Originally described for autoionization, we discuss the analogs in other systems. We discuss the features of Fano interference in the mode diagrams, and the Fano resonance observed in the output field. The idea of a geometric Fano resonance (GFR) occurring in the angular domain is presented.
Background information on surface plasmon polaritons is covered next. The dielectric properties of metals and how they relate to surface plasmons is first reviewed. The theoretical background of SPPs on an infinite planar surface is covered.
The modes of a two planar interface metal/insulator stack are reviewed and the leaky properties of the waveguide are shown in the reflectance. We solve for modes of a three interface metal/insulator stack and shows an avoided crossing in the modes indicative of Fano interference. We observe the asymmetric Fano resonance in the angular domain in the reflectance.
The tunability of the material parameters tunes the GFR of the system. The GFR tuning is explored and different Fano lineshapes are observed. We also observe a reversal of the asymmetry Fano lineshape, attributed to the relate phase interactions of the non-interacting modes. The phase of the GFR is calculated and discussed for the variations of the parameters.
The reflected field is explored as the insulator permittivities are varied. As the waveguide permittivity is varied, we show there is little response from the system. As the exterior permittivity is varied, the reflectance exhibits the geometric Fano resonance and the tunability of the lineshape is explored. Finally, we calculate the sensitivities of our metal/insulator stack to changes in the permittivity and compare them to the sensitivities of SPRs.
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Xie, Yuantao. "Quantum-coherent transport in low-dimensional mesoscopic structures and thin films." Diss., Virginia Tech, 2018. http://hdl.handle.net/10919/81701.
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This thesis experimentally studies quantum interference phenomena and quantum coherence in mesoscopic systems, and quantum transport as well as magnetotransport in various materials system. One overarching aim is exploring the different mechanisms that give rise to quantum phase decoherence in lithographically patterned mesoscopic structures, of importance in the field of quantum technologies and spintronics. Various mesoscopic structures, namely quantum stadia, quantum wires, and side-gated rings, were fabricated to function as quantum interference devices and platforms to study quantum coherence on two-dimensional electron systems in InGaAs/InAlAs heterostructures. The mesoscopic structures were fabricated by photolithography and electron-beam lithography. The dependence of quantum coherence on geometry or temperature is investigated for each of the quantum interference devices.
In the case of quantum stadia, phase coherence lengths were extracted by universal conductance fluctuations, and the extracted phase coherence lengths show a dependence on both temperature and geometry. Phase coherence lengths decreased with increasing temperature, as expected. Moreover, phase coherence lengths also varied with the width-to-length ratio and length of the side wires connected to the stadia, where competition between Nyquist decoherence and environmental coupling decoherence mechanisms coexists. For the quantum wires studied, the phase coherence lengths were extracted from antilocalization signals. Antilocalization measurements provide a sensitive mean of probing the quantum mechanical correction to electronic transport. The phase coherence lengths increased as the wire length increased, due to reduction of the environmental coupling that induces decoherence at the ends of a wire; longer wires tend to have longer phase coherence lengths. In related work, the thesis shows that the spin coherence length, as limited by spin-orbit interaction, increases as the wire width decreases. Decoherence in side-gated rings was measured from the amplitudes of the quantum-mechanical Aharonov-Bohm oscillations. The side gates allow for an in-plane controllable electric field. Asymmetrically biased side-gate voltages allow for the breaking of the two-dimensional parity symmetry of the ring device, effectively resulting in reduced amplitude of the Aharonov-Bohm oscillations. The mechanism that contributes to decoherence in these rings appears to be related to the breaking of the spatial symmetry.
Measurements of antilocalization and weak-localization as well as magnetotransport were used to probe interesting or unique quantum mechanical phenomena in the following two, quite different, materials system: bismuth iridate thin films, and Ge/AlAs heterostructures on GaAs or Si substrates. Both materials are of interest for future quantum technologies and devices. Measurements in bismuth iridate thin films reveal interesting transport characteristics such as logarithmic temperature dependence of the resistivity, multiple charge carriers, and antilocalization due to spin-orbit interaction in the system. Weak localization measurements in the Ge/AlAs heterostructure on GaAs or Si substrates show that single carrier transport is essentially located in the Ge layer only. Further, the weak localization results indicate the near-absence of spin-orbit interaction for carriers in the electronically active Ge layer, suggesting the potential use of this materials system as a promising candidate for future electronic device applications. In short, quantum transport and interference measurements probe the quantum-mechanical behavior of materials system for future quantum, spin and electronic technologies. Mesoscopic patterned geometries in InGaAs/InAlAs heterostructures offer a wide range of interesting and unique platforms to study quantum-mechanical phenomena, specifically quantum decoherence, in the solid state. The decoherence phenomena observed and the investigations to the underlying mechanisms studied and modeled in this thesis may be transferred to similar materials system, enriching the knowledge in the field of quantum technologies.
Magnetotransport and quantum transport were also applied to Ge/AlAs heterostructures and bismuth iridate thin films, to study the properties of their carrier systems.Ph. D.
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Wang, Liping. "Role of magnetic resonance and wave interference in tailoring the radiative properties of micro/nanostructures." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/42863.
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The spectral and directional control of radiative properties by utilizing engineered micro/nanostructures has enormous applications in photonics, microelectronics, and energy conversion systems. The present dissertation aims at: (1) design and analysis of micro/nanostructures based on wave interference and magnetic resonance effects to achieve tunable coherent thermal emission or enhanced optical transmission; (2) microfabrication of the designed structures; and (3) development of a high-temperature emissometer to experimental demonstrate coherent thermal emission from fabricated samples at temperatures from 300 K to 800 K.
Asymmetric Fabry-Perot resonant cavities were studied as a potential coherent emission source. The reflectance was measured at room temperature using a Fourier-transform infrared spectrometer, and the emittance can be indirectly obtained from Kirchhoff's law. A high-temperature emissometer was built to measure the thermal emission of fabricated samples, and the temperature effect on the emission peaks was discussed. The direct and indirect approaches were unified and a generalized Kirchhoff's law was deduced to calculate thermal emission from layered structures with nonuniform temperatures.
Magnetic polaritons were identified as a mechanism for achieving extraordinary optical transmission/absorption, through the comparison between equivalent capacitor-inductor models and the rigorous coupled-wave analysis. With carefully tuned geometric parameters, the resonance frequencies can be tailored for specific applications. A coherent emission source was designed with grating structures by excitation of magnetic polaritons, and is well suitable for thermophotovoltaic applications, thanks to the spectral selectivity and directional insensitivity of magnetic polaritons. Test samples were fabricated, and coherent thermal emission was experimentally observed at room temperatures up to 800 K.
The results obtained in this dissertation will facilitate the design and application of micro/nanostructures in energy-harvesting systems.
18
Catrin, Rodolphe [Verfasser]. "Effects of microstructure modification induced by laser interference patterning of thin films / Rodolphe Catrin." Aachen : Shaker, 2012. http://d-nb.info/1069044512/34.
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Cabrera, Eusebio Duarte. "APPLICATIONS OF THIN CARBON COATINGS AND FILMS IN INJECTION MOLDING." The Ohio State University, 2014. http://rave.ohiolink.edu/etdc/view?acc_num=osu1408447610.
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Cooper, Kristie Lenahan. "Electrostatic Self-Assembly of Linear and Nonlinear Optical Thin Films." Diss., Virginia Tech, 1999. http://hdl.handle.net/10919/27141.
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This dissertation demonstrates the feasibility of using novel electrostatic self-assembly (ESA) methods to fabricate linear and nonlinear optical thin films and components. The ESA process involves the layer-by-layer alternate adsorption of anionic and cationic complexes from aqueous solutions. Selection of the molecules in each layer, their orientation at the molecular level, and the order in which the layers are assembled determine the film's bulk optical, electronic, magnetic, thermal, mechanical and other properties. In this work, the capability of nanoscale control over film optical properties allowed the fabrication of complicated refractive index profiles required for linear optical interference filters. The inherent ordered nature of ESA films yielded extremely stable noncentrosymmetric thin films for second-order nonlinear optical applications. The ESA technique offers numerous advantages over conventional thin film fabrication methods and offers great potential in commercial applications such as reflectance and AR filters, EO waveguides and modulators and other optoelectronic devices.
The structure of each monolayer in ESA films is dependent on the processing parameters, producing subsequent variations in bulk film properties both intentionally and incidentally. As this method is still in its infancy, variations in ESA processing methods, including process automation, are considered first in this document. These results allowed carefully controlled refractive index experiments and the synthesis of both step and graded index structures, several microns thick. Dielectric stack, Rugate, and antireflection optical interference filters were designed, synthesized and demonstrated. c(2) films of both commercially available polymer dyes and novel polymers designed specifically for the ESA process were demonstrated using second harmonic generation. UV/vis spectroscopy, ellipsometry and atomic force microscopy analysis are presented.Ph. D.
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Catrin, Rodolphe Verfasser], and Frank [Akademischer Betreuer] [Mücklich. "Effects of microstructure modification induced by laser interference patterning of thin films / Rodolphe Catrin. Betreuer: Frank Mücklich." Saarbrücken : Saarländische Universitäts- und Landesbibliothek, 2012. http://d-nb.info/1052339565/34.
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Catrin, Rodolphe [Verfasser], and Frank [Akademischer Betreuer] Mücklich. "Effects of microstructure modification induced by laser interference patterning of thin films / Rodolphe Catrin. Betreuer: Frank Mücklich." Saarbrücken : Saarländische Universitäts- und Landesbibliothek, 2012. http://nbn-resolving.de/urn:nbn:de:bsz:291-scidok-47993.
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Sayão, André Cozza. "Estudo e desenvolvimento dos parâmetros de projeto de um radiômetro solar multiespectral baseado em filtro de interferência variável aplicável ao sensoriamento ambiental e de aerossóis." Universidade de São Paulo, 2015. http://www.teses.usp.br/teses/disponiveis/3/3140/tde-04012016-164754/.
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Neste trabalho são apresentados os resultados do estudo e desenvolvimento dos parâmetros de projeto de um radiômetro solar multiespectral (RSME), baseado em Filtros de Interferência Variável (FIV) de banda-passante que incorpora uma camada ressoante de Fabry-Perot, inclinada em forma de cunha, sintonizável dentro da área opticamente ativa do FIV, aplicável ao sensoriamento ambiental e de aerossóis. Foi apresentada a teoria proposta para a simulação, projeto e deposição pelo método interativo (simulações associada às avaliações de deposições). O FIV foi parametrizado para o RSME, mas pode atender outras aplicações em sensores multicanais e multiespectrais. A construção dos FIV exigiu estudos e adaptações das técnicas clássicas de deposição de filmes finos e de microeletrônica, foi utilizada a PVD/E-Beam. É apresentado um estudo e o emprego de simulações matemáticas e softwares, aplicáveis a FI convencionais correlatas aos FIVs. Estes softwares foram aplicados e avaliados em relação ao projeto dos FIV. Avaliamos a técnica empregada que produz a inclinação na espessura dos FIVs em uma monocamada de 600 nm com um Perfilômetro do LME. Os FIVs caracterizados opticamente com espectrofotômetros, apresentam uma área opticamente ativa de varredura de 120,5 nm no espectro eletromagnético, entre os canais 475,5 nm a 596 nm, pertencentes a 17,3 mm de extensão do FIV. O FIV é um dispositivo óptico projetado com espessura em cunha provocando a resposta espectral linear para a transmitância, com uma taxa de 6,97 nm/mm na sua extensão. Foi proposto que os FIVs caracterizados em conjunto com PD de um PDA, difusor e lente, formem um conjunto detector conectado a um módulo de pré-processamento e coleta de dados (módulo eletrônico) formando assim o RSME parametrizado. O RSME proposto foi avaliado utilizando o FIV02 que opera numa faixa opticamente ativa entre (600 nm a 715 nm), um PDA modelo TSL1401 com 128 PD e um microcontrolador Arduino UNO para o gerenciamento da detecção. Os resultados apontam que o instrumento faz medições equivalentes a outro espectrofotômetro de referência quando medindo um feixe monocromático em 655,4 nm, mas com resolução mais estreita de 0,13 nm por canal. Foi apontada também a necessidade de instrumentação dedicada para outras caracterizações ópticas dos FIV, do conjunto detector do RSME e para a sua calibração.This paper presents the results of the study and development of the design parameters of a Multi-Spectral Solar Radiometer (MSSR), based on Variable Interference Filter (VIF) pass-bad which incorporates a resonant layer Fabry-Perot inclined in form wedge, tunable within the optically active area of VIF, applicable to enviro nmental sensing and aerosols. The theory proposed was presented for the simulation, design and deposition by interactive method (associated with reviews of depositions simulations). The VIF was parameterized for the MSSR, but can serve other applications in multi-channel and multispectral sensors. The construction of VIF required studies and adaptations of the classic techniques of thin film deposition and microelectronic, was used the PVD / E-Beam. A study and the use of mathematical and simulation software, related to VIFs applicable to conventional IF appears. This software were applied and assessed in relation to the design of VIF. We evaluate the technique that produces the slope in the thickness of VIFs in a monolayer of 600 nm with a LMEs Surface Profiler. The VIFs characterized optically with spectrophotometers, can present an optically active area scanning 120,5 nm of the electromagnetic spectrum between channels 475,5 nm to 596 nm, belonging to 17,3 mm extension of VIF. FIV is an optical device designed with wedge-shaped thickness resulting in the linear transmittance for the spectral response with a 6,97 nm/mm in extension rate. It was proposed that VIFs characterized together with PD of a PDA, diffuser and lens form a detector module connected to a set of pre-processing and data collection (electronic module) thus forming the parameterized MSSR. The proposed MSSR was assessed using the VIF02 which operates a range of optically active (600 nm to 715 nm), a PDA model TSL1401 with PD 128 and Arduino UNO microcontroller to manage the detection. The results indicate that the instrument is equivalent to other reference spectrophotometer measurements, when measuring a monochromatic beam at 655,4 nm, but with narrower 0,13 nm resolution by channel. It was also pointed out the necessity of dedicated instrumentation for optical characterizations of other VIF MSSR detector assembly and the calibration.
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Espinosa, Jorge D. "Roughening of cobalt thin films on sapphire (110) upon annealing and superparamagnetic behavior of cobalt nanodots on sapphire (001)." Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3801.
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Thesis (M.S.)--West Virginia University, 2004Title from document title page. Document formatted into pages; contains vi, 30 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 29-30).
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Silva, Celso Manoel da. "Filtro de interferência variável e descrição de uma aplicação: dispositivo multicanal espectral para análise ambiental." Universidade de São Paulo, 2010. http://www.teses.usp.br/teses/disponiveis/3/3140/tde-05122012-170614/.
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O presente trabalho apresenta o desenvolvimento de um método de obtenção e a caracterização de filtros ópticos de interferência de banda passante variável que, constituídos por refletores dielétricos multicamadas de filmes finos intercalados por cavidades de Fabry- Perot não planares com espessuras linearmente variáveis, apresentam a propriedade do deslocamento linear da transmitância máxima espectral em função da posição, isto é, um Filtro de Interferência Variável (FIV). Este método apresenta novas e abrangentes possibilidades de confecção de filtros ópticos de interferência variável: lineares ou em outras formas desejadas, de comprimento de onda de corte variável (passa baixa ou alta) e filtros de densidade neutra variável, através da deposição de metais. A primeira etapa do trabalho foi o projeto e a construção de um filtro óptico convencional, de um comprimento de onda central, com camadas homogêneas. A etapa seguinte foi, com base na teoria espectrométrica, promover a variação das espessuras das camadas em um perfil inclinado e linear. Para tanto, de acordo com os requisitos de projeto, foram feitas adaptações em uma evaporadora por e-Beam (elétron-Beam), acrescentando um obliturador mecânico especialmente projetado, ajustando parâmetros de técnicas de deposição e caracterizando o perfil inclinado de um filme depositado para ajustar o obliturador. E, ao final destas etapas, foi projetado e construído o FIV especificado. Também é descrita uma possível aplicação do FIV: um dispositivo multicanal espectral para análise ambiental, e, dentre muitas, outras podem ser mencionadas: sistemas Lab-on-Chip, biosensores, detectores chip-sized, espectrometria de fluorescência on-chip, detectores de deslocamento de comprimento de onda, sistemas de interrogação e etc.This work presents the development of a method to obtain and characterize a variable interference optical bandpass filter, made up of a number of thin films forming dielectrical reflectors intercalated by non flat Fabry-Perot cavities whose thickness variates linearly. These filters present the propriety of a linear variation in the maximum spectral transmittance as a function of the position in the filter, for this reason this is called Variable Interference Filter (VIF). This method allows of manufacturing linear interference filters or any other function disered, with variable cut wavelength (low or high pass) and variable neutral density filters by means of metallic depositions. The first step in this work was to design and built a conventional filter, with homogeneous layers and a fixed central wavelength. The following step was, using spectrometric theory basis, introduce the variation in the thickness of the layers in a linear inclined outline. Accordingly with the design requirements, it was made some adaptations in an e-beam evaporator (electron-beam), adding a mechanical obliterator adjusted with series of depositions and characterizations of a single layers in order to find a linearly inclined outline. In the end of this step it was designed and built the specified VIF. It is also described a possible application of this VIF: a multichannel spectral device for environmental analysis. Between many applications, others can be cited, such as: Lab-on-Chip systems, biosensors chip-sized detectors, on-chip fluorescence spectrometry, shift wavelength detectors, interrogation systems, etc.
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Hegerová, Lucie. "Studium tloušťky tenkých vrstev organických materiálů." Master's thesis, Vysoké učení technické v Brně. Fakulta chemická, 2008. http://www.nusl.cz/ntk/nusl-216429.
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The diploma thesis deals with the determination of thickness and refractive index of thin organic films using image analysis. In the theoretical part there are described principles of the methods, which are used to prepare the films (spin coating, inkjet printing, vapour deposition), the characteristics of thin films, ways of finding out the thickness and refractive index of substances (weight methods, electric methods, method based on measurement of absorption coefficient of light, interference microscopy, ellipsometry) and also image analysis (harmonic and wavelet analysis). Interference microscope Epival - Interpako (Carl Zeiss Jena), digital camera Nikon Coolpix 5400 and computer were used for the determination of thickness and refractive index. The thicknesses of layers were set on the basis of interference images of edges and grooves – both from the side of the metal contact and the side of underlying glass. The refractive indices of thin layers were then set using the recorded figures. In the final part of the thesis there are discussed the results of interference images photographed along the full length of the aluminium contact which are used for measuring electrical characteristics of DPP structures. The produces are thicknesses and refractive indices of individual layers.
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Carossi, Lory Cantelli. "Propriedades ópticas da alumina anódica porosa e o efeito do guia de onda." Universidade Federal de São Carlos, 2015. https://repositorio.ufscar.br/handle/ufscar/9003.
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Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
Nanoporous anodic alumina films (NAA) may present different behavior to reflectance and photoluminescence techniques, with Fabry-Pérot interferences and waveguide properties. This phenomenon makes possible the use of NAA as transducer signal in optical sensors. In this work, we investigated how the pre-treatment, the number of steps of anodizing, the anodizing electrolyte mode and temperature affect electrochemical characteristics, morphological and optical mainly NAA. As a result, it was noticeable that the realization of electropolishing is necessary for both the NAA with good regularity as to make it possible to obtain a spectrum with the Fabry-Pérot interference. If the fabrication of NAA is done in two steps, it is possible to obtain reflectance spectra and luminescence fringed with better amplitudes, areas and heights. Regarding the anodizing mode, both the NAA anodized in galvanostatic how potentiostatic showed similar morphologies and spectra with fringes, but the interferences were better defined when the galvanostatic mode was performed. Regarding the temperature, it was noticeable that the change of this parameter leads influences the porous oxide thickness. The spectrum of the luminescence and reflectance increasing the electrolyte temperature caused an increase in interference. However, the range and resolution of interference decreased with increasing temperature. The oxide thicknesses were estimated by energy variation (?E), graph slope between order and 1/? and fast Fourier transform (FFT) techniques. The ratio of film thickness and pore diameter (L/dp) was performed to validate the NAA films with better waveguides property. Moreover, the surface composition analysis of NAA films anodized in phosphoric acid, oxalic acid and mixtures thereof by backscattering spectroscopy Rutherford (RBS) was performed. From simulations it was possible to note that the amount of carbon in the porous oxide structure is practically zero, which may indicate that the origin of the luminescence is related to the presence of more centers F.
Filmes de alumina anódica porosa (AAP) podem apresentar, espectros de reflectância e luminescência com interferências de Fabry-Pérot e propriedades de guias de onda. Esse fenômeno possibilita que a AAP possa ser utilizada como plataforma em sensores ópticos. Neste trabalho, foi investigado como o pré-tratamento, o número de etapas de anodização, o modo de anodização e a temperatura do eletrólito afetam características eletroquímicas, morfológicas e principalmente ópticas da AAP. Como resultado, foi possível notar que a realização do eletropolimento é necessário para obter tanto a AAP com boa regularidade como para que seja possível obter um espectro com as interferências Fabry-Pérot. Se a fabricação da AAP for feita em duas etapas, é possível obter espectros de reflectância e luminescência com franjas com melhores amplitudes, áreas e alturas. Com relação ao modo de anodização, tanto as AAPs anodizadas em modo galvanostático como potenciostático apresentaram morfologias semelhantes e espectros com franjas, mas as interferências foram melhor definidas quando o modo galvanostático foi realizado. Com relação à temperatura, foi possível notar que a mudança desse parâmetro ocasiona influencia na espessura do óxido poroso. Quanto aos espectros de luminescência e reflectância, o aumento da temperatura do eletrólito ocasionou um aumento no número de interferências. Entretanto, a amplitude e a resolução das interferências diminuíram com o aumento da temperatura. A espessura do filme poroso foi estimada pelas técnicas de variação de energia (?E), coeficiente angular do gráfico entre ordem da interferência e 1/? e através da transformada rápida de Fourier (FFT). E foi utilizada a razão entre a espessura do filme e diâmetro do poro (Esp/Dp) para averiguar os filmes de AAP com guias de onda que pudessem ser utilizadas como substratos para sensores ópticos. Além disso, foi realizada a análise de composição superficial dos filmes de AAP anodizados em ácido fosfórico, oxálico e mistura destes ácidos pela técnica de espectroscopia de retroespalhamento de Rutherford (RBS). A partir das simulações realizadas foi possível notar que a quantidade que carbono na estrutura do oxido poroso é praticamente nula, o que pode indicar que a origem da luminescência está relacionada à presença dos centros F.
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CHIANG, WEI-FAN, and 江偉凡. "Effect of Thin-Film Interference on Resonance Spectra of Distorted Metamaterials." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/69129744602258466857.
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Yu, Hsuanyu, and 余軒宇. "Fabrication Of Periodical Nanostructures On CIGS Thin Film By Laser Interference Lithography." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/71574561689561192781.
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碩士國立中正大學
機電光工程研究所
100
In this study, the laser interference lithography and wet etching process on CIGS thin film has been discussed. We used laser interference lithography technique and wet etching to transfer the square and the hexagnal periodical pattern nanostructures on Copper Indium Gallium Selenide(CIGS) thin films, the period of grating was about 500nm, and the depth was about 100nm~200nm. In order to fabricate a superior quality mask of photoresist(SU-8 2000.5) for wet etching transfer that on the CIGS thin film by laser interference lithography. We used the wet etching to polish the CIGS surface and solve the problem of CIGS surface roughness. Therefore we has been fabricated the 1D and 2D pattern mask of photoresist for etching transfer that on CIGS thin film. In addition, we also measured the reflectance of different nanostructures surface on CIGS thin films. The reflectance of polished, textured, squared nanostructures, and hexagnal nanostructures CIGS thin films surface was 26.34%, 24.21%, 22.41%, and 16.84%, respectively. Comapred to polished CIGS thin films surface, the total reflectance of square and hexagnal nanostructures CIGS thin film surface was decrease to 14.91% and 36.05%, respectively. The fabrication of nanostructures on CIGS thin film has been discussed, and we find out the optimal parameters in etching time, then we produced the large area and small period nanostructures on CIGS thin film.
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WU, JYUN HUEI, and 吳俊輝. "The measurement for 3D mircostructure of thin film by using Michelson Interference method." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/31379950343554319444.
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碩士國立高雄大學
電機工程學系--先進電子構裝技術產業研發碩士專班
99
As electro-optical devices become dominated, the optical thin-films are important elements in the fabrication of electro-optical industry. Except for the needs of high quality's optical thin-films, surface's examination of thin film structure is also very important. Because that the mechanical surface profiling of a thin-film requires the expense of measuring time, it is important to develop non-intrusion techniques for thin-film profiling. An optical surface profiling method of applying Michelson interfering image contain information of surface structure which can be easily interrogated by using a numerical calculating program. In this thesis we demonstrates the development of a microscopic Michelson interferes surface profiling system which is able to achieve a high resolution depth profiling of a two dimensional thin film. The characterization of the performance of this surface profiling system effected by imaging approach has presented.
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MAO, TZU-CHI, and 毛子奇. "Thin Film Interference Filter and Absorption Filter Used for Enhancing Night Vision Acuity." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/eba34b.
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碩士逢甲大學
視光科技碩士在職學位學程
106
The purpose of this research is to study people’s vision under night-time conditions, using thin-film filter and absorption filter to improve night vision ability. The proposed method is to use thin-film coating technology to increase optical visibility, through thin film interference filters to make visual images clearly on the target imaging of the retina and to increase the visual sensitivity. The absorption filter is the most widely utilized type of filter, and operated by attenuation of light through absorption of specific wavelengths, so that other wavelengths of light pass through the filter to reduce glare and to enhance contrast sensitivity of seeing a target, thus it can improve the visual acuity. Characteristics of combining two types of filters can enhance the visual acuity at night time. This research carries out the experimental analysis for two kinds of filters, and the combination of the two filters can help to promote higher night vision sensitivity. Using the advantages of both filters could reduce the degree of eye fatigue and provide a good protection for the personal security.
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林政忠. "A study of thin film thickness distribution by sputtering coating:for dense wavelength division multiplexer interference filter." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/37334526104362430795.
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碩士輔仁大學
物理學系
89
At present, we are studying a tiny but important part of the DWDM (Dense Wave-length Division Multiplexer), which is the filter. It will influence the quality and stability of communication. I am working on how to use the sputtering-coating skill to make a good filter. In the experiment, some self-remold equipment is used, including four sputter guns, magnetic fluid feedthrough, and transmitted optical thickness monitors. I use the equipment to start the first stage of coating DWDM filter. In the state, the following topics are discussed: the remold of equipment, the study of the thickness of the coating, and how it can be improved in the future.
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Chen, Yan-Ting, and 陳彥廷. "Using the Optical Interference Method Measure Mechanical Behaviors of Copper Thin Film on the Paddle Cantilever Beam." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/14473719583199623931.
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碩士國立彰化師範大學
機電工程學系
97
A test structure with micro-nano scale copper film, which is deposited on the novel paddle-like cantilever beam, was successfully fabricated using standard C-MOS processes. Compared to the traditional cantilevered beam, the 40 μm and 120μm thickness paddle-like structure provides the uniform stress distribution along the whole beam to ecrease the measurement variation. The deflections of Cu film led by the electrostatic force were measured using four step phase-shifting method. The measurement results present that the test structure and the optical (FSPS) method work properly. And the performance of system responding to the magnitude of the film residual stresses was calculated. Finally, research mentions some methods and suggestions for this system.
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Chen, Kuen-Lin, and 陳坤麟. "The YBa2Cu3O7-δ Thin Film and Superconducting Quantum Interference Device Fabricated by Off-Axis Pulse Laser Deposition." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/75207440382714761481.
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碩士國立臺灣大學
物理學研究所
89
Abstract The thin films for electronic applications are generally required to have smooth surfaces. However, the film surface roughness is greatly dependent on deposition parameters. This thesis mainly discusses how to use off-axis Pulse Laser Deposition to fabricate the YBa2Cu3O7-δ thin film with smoother surface. We change the deposition parameters, such as laser repetition rate, oxygen pressure…et al., to get different surface roughness and use AFM to determine them. Moreover, different deposition parameters will cause different superconducting electric properties. The film has the smooth surface, which does not mean that it also has good superconducting electric properties. However, we use the two-step deposition method to get the YBa2Cu3O7-δ thin film which both has the smooth surface and good superconducting electric properties. Then, we use the bi-layer thin film to fabricate the High-Tc SQUID and the High-Tc SQUID magnetometer and measure the electric properties and noise of them. The critical currents Ic of the High-Tc SQUID and the High-Tc SQUID magnetometer that we fabricated are both too small which cause serious thermal fluctuation. The thermal fluctuation causes the higher noise. If we can improve the question of critical current, we should reduce the noise of SQUIDs.
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Chen, Szu-Fen, and 陳司芬. "Design issues in using thin film optical interference filters as color filters for liquid crystal display application." Thesis, 1994. http://ndltd.ncl.edu.tw/handle/46000044669204010379.
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Eckhardt, Sebastian. "Hocheffiziente metallische Dünnschichtelektroden durch Direkte Laserinterferenzstrukturierung: Efficiency enhancement of metal thin film electrodes by direct laser interference patterning." Doctoral thesis, 2015. https://tud.qucosa.de/id/qucosa%3A30207.
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Moderne optoelektronische Dünnfilmapplikationen erfordern den Einsatz effizienter großflächiger Elektrodensysteme, die einerseits über sehr gute Leitfähigkeitseigenschaften verfügen und andererseits eine hohe Transparenz in einem breiten Wellenlängenspektrum aufweisen. Momentan wird für derartige Anwendungen zum Großteil der Werkstoff Indiumzinnoxid (ITO) eingesetzt, dessen Hauptbestandteil Indium nur in geringen Mengen auf der Erde vorkommt. Für die Erhaltung der Marktfähigkeit und zur Weiterentwicklung der Dünnschichtelektronik ist es nötig, dieses Ressourcenproblem zu lösen. Eine Möglichkeit zur Substitution von ITO ist die Verwendung dünner metallischer Filme als transparente Elektroden. Die vorliegende Dissertationsschrift untersucht in diesem Zusammenhang die Anwendung der Direkten Laserinterferenzstrukturierung (DLIP). Um hinreichend große optische Transparenz bei entsprechender elektrischer Leitfähigkeit zu erhalten, werden Dünnschichtensysteme aus Kupfer, Aluminium, Chrom und Silber mit verschiedenen periodischen Lochmustern zwischen 1,5-2,7 µm perforiert. Im Anschluss werden die bearbeiteten Probenkörper hinsichtlich ihrer optischen, elektrischen und topografischen Eigenschaften vermessen. Die umfangreichen gewonnenen Daten werden in einer Auswertung zusammengefasst und mit Resultaten aus numerischen Modellrechnungen verglichen. Neben den Ergebnissen zur Effizienzsteigerung der Dünnfilme untersucht die vorliegende Arbeit die laserinduzierte Ablationsdynamik metallischer Filme auf Glassubstrat zwischen 5-40 nm Schichtdicke.:1 Einleitung 1
2 Theoretische Grundlagen 4
2.1 Verfahren zur Herstellung von Dünnschicht-Elektroden 4
2.1.1 Verdampfungsverfahren 4
2.1.2 Sputterverfahren 5
2.1.3 Metallorganische Gasphasenepitaxie – MOCVD 6
2.2 Schichtwachstum von Metallfilmen in PVD-Verfahren 7
2.3 Elektrische Eigenschaften von Dünnschicht-Elektroden 9
2.3.1 Mechanismen der elektrischen Leitung in Festkörpern 9
2.3.2 Elektrische Charakteristika von Indiumzinnoxid-Schichten 10
2.3.3 Elektrische Charakteristika dünner Metallschichten 10
2.4 Optische Eigenschaften dünner Schichten 13
2.4.1 Wechselwirkung von Licht mit Materie 13
2.4.2 Lichtmanipulation durch periodische Strukturen 14
2.4.3 Optische Eigenschaften transparenter ITO-Schichten 17
2.4.4 Optische Eigenschaften metallischer Dünnschichten 18
2.5 Grundlagen lasergestützter Bearbeitungsmethoden 19
2.5.1 Materialablation durch gepulste Laserstrahlung 19
2.5.2 Theoretische Grundlagen zur Bestimmung der Ablationsschwelle 21
2.6 Verfahren zur Mikrostrukturierung von Oberflächen 22
2.6.1 Elektronenstrahl-Lithographie 23
2.6.2 Sequentielles Laserstrukturieren 24
2.6.3 Strukturieren mit Laserinterferenz 25
2.7 Aktueller Forschungsstand zur DLIP dünner Metallschichten 29
2.7.1 DLIP metallischer Filme mit Nanosekunden-Pulsen 29
2.7.2 DLIP metallischer Filme mit Pikosekunden-Pulsen 35
3 Experimentelle Arbeit 37
3.1 Entwicklung numerischer Rechenmodelle 37
3.1.1 Modellierung des Interferenzvolumens 37
3.2 Thermische Simulationen 38
3.3 Experimente und Versuchsanordnungen 42
3.3.1 Verwendete Lasersysteme 42
3.3.2 Vorgehensweise zur Bestimmung der Ablationsschwellwerte 42
3.3.3 Laser-Annealing metallischer Dünnschichten 43
3.3.4 Direkte Laserinterferenzstrukturierung 44
3.3.5 Übersicht der verwendeten Dünnfilmsubstrate 47
3.3.6 Mess- und Analysemethoden 49
4 Auswertung und Diskussion 55
4.1 Ermittlung der Ablationsschwellwerte 55
4.1.1 Ablationsschwellwerte bei Nanosekunden-Pulsen 55
4.1.2 Ablationsschwellwerte bei Pikosekunden-Pulsen 58
4.2 Charakterisierung unbehandelter Dünnschichten 58
4.2.1 Topographische Eigenschaften unbehandelter Metalldünnschichten 58
4.2.2 Optische und Elektrische Eigenschaften unbehandelter metallischer Filme 59
4.3 Charakterisierung lasergeglühter Metalldünnschichten 60
4.3.1 Optische Eigenschaften lasergeglühter Metallfilme 60
4.3.2 Elektrische Eigenschaften lasergeglühter Metallschichten 61
4.3.3 Schlussfolgerungen aus den Annealing-Experimenten 63
4.4 Ergebnisse der Modellrechnungen 63
4.4.1 Mathematische Simulation der Interferenzeigenschaften 63
4.5 Charakterisierung DLIP-strukturierter Metalldünnschichten 67
4.5.1 DLIP-Strukturierung von Silberdünnschichten ns-Pulsen 67
4.5.2 DLIP-Strukturierung von Silberdünnschichten mit ps-Pulsen 71
4.5.3 DLIP-Strukturierung von Kupferdünnschichten mit ns-Pulsen 77
4.5.4 DLIP-Strukturierung von Kupferdünnschichten mit ps-Pulsen 89
4.5.5 DLIP-Strukturierung von Aluminiumdünnschichten mit ns-Pulsen 93
4.5.6 DLIP-Strukturierung von Aluminiumdünnschichten mit ps-Pulsen 106
4.5.7 DLIP-Strukturierung von Chromdünnschichten mit ns-Pulsen 111
4.5.8 Charakterisierung DLIP-strukturierter Vielschicht-Substrate 116
4.6 Optische Charakterisierung 118
4.6.1 Optische Eigenschaften mittels ns-Pulsen strukturierter Filme 119
4.6.2 Optische Eigenschaften mittels ps-Pulsen strukturierter Filme 127
4.6.3 Optische Charakterisierung DLIP-strukturierter Vielschicht-Substrate 129
4.7 Elektrische Eigenschaften 131
4.7.1 Schichtwiderstand DLIP-strukturierter Metallelektroden 131
4.7.2 Schichtwiderstand DLIP-strukturierter Vielschicht-Elektroden 140
5 Zusammenfassung 144
6 Ausblick 149
7 Literaturverzeichnis 150
8 Anhang 161
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Wang, Chang-Jan, and 王昶然. "Quantum interference effect in cobalt disilicide thin films." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/28104337178684446010.
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碩士國立交通大學
物理研究所
103
Cobalt disilicide (CoSi_2) is a kind of common silicides in semiconductor industry. The crystal structure of CoSi_2 is very similar to silicon, so it's ready to grow good epitaxial layers on silicon substrates and the resulting CoSi_2 possesses low resistivity and long elastic mean free path (l_e). It also one of the very few silicides which have superconductivity. In this study, we investigate the electronic transport properties in the CoSi_2 layers. One of the most interested issues for us is the quantum interference effects (e.g. weak anti-localization effect), the related phase coherent length and superconducting (SC) fluctuation effect at low temperatures. The CoSi_2 layers are made by the method of solid phase epitaxy. Briefly speaking, we deposit patterned cobalt films on pure silicon substrates, and then perform a high-temperature annaeling to drive cobalt diffusion and form CoSi_2 layers. To understand the effect of disorderness on the electrical transport in CoSi_2, we have made samples of different thicknesses (53 and 25 nm) on the substrates of different crystal orientations (Si<100> and Si<111>) and measured them with a low-noise AC resistance bridge at variable temperatures and magnetic fields. The resistivities at 4 Kelvin are between 2.2 and 5 μΩ⋅cm. The magneto-resistances (MRs) within +/- 1 Tesla are positive and show parabolic shape in the high-field region (0.2 - 1 Tesla). From these data, we can extract the carrier mobilities and l_e's which range from 50 to 130 nm. Besides, the thinner the CoSi2 layers, the lower the superconducting transition temperatures (Tc). Their Tc's locate between 1.2 and 1.5 K. As the temperature is between 4 K and 20 K, the low-field (+/- 0.2 Tesla) MRs reveal clear sharp dips at zero field. The dips are just the signature of weak anti-localization (WAL) and indicate strong spin-orbit coupling (SOC) in this material. We utilize the well established theory of two-dimentional (2D) WAL effect and SC fluctuation to analyze the data and hence extract phase coherent lengths L_φ and the strength parameter β of SC fluctuation at different temperatures. After the analysis, we found that the L_φ can be longer than one micron which is much longer than those in normal conductors. The β is smaller than the theoretical value. This result can be attributed to the strong SOC which induces spin mismatch on the virtual Cooper pairs more quickly. After the L_φ is transformed into dephasing rate (1/τ_φ), we found a rough trend that the samples of shorter le's show higher dephasing rates. Furthermore, 1/τ_φ has two distinct temperature dependences in low-T and high-T regimes, that is, 1/τ_φ~T^1 and 1/τ_φ~T^3, respectively. In the low-T regime, the origin of 1/τ_φ~T^1 is mainly due to electron-electron (e-e) scattering (1/τ_ee) in 2D systems. With the theoretical estimation of e-e scattering strength Aee in the dirty limit, we found that the theoretical Aee is close to the experimental one extracted from 1/τ_φ and both lie in the order of magnitude of 1×〖10〗^9 Hz/T. The temperature dependence of 1/τ_φ~T^3 at higher temperatures fits the theoretical description of electron-phonon scattering (e-ph) rate in the clean limit. The theoretical and experimental e-ph scattering strength A_ep's are both in the order of magnitude of 1×〖10〗^7Hz/T^3. This result is reasonable for our samples because the le is much longer than the phonon wavelength such that the e-ph scattering in CoSi_2 actually corresponds to the model of clean limit. Comparing to analysis method in the literature, we have found that the curve-fitting of our MRs can not be well done if we do not include the SC fluctuation effect. Another unclear point is the strong SOC in this material. From our result, the SOC strength seems no dependence on the disorderness (i.e. l_e). We hope our study can help to develop more future applications with CoSi_2.
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Lin, Chiu-Hsu, and 林秋旭. "Thermal Radiative Properties in Thin Films with Interference effects." Thesis, 1994. http://ndltd.ncl.edu.tw/handle/50554536749124901397.
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Kanakaraju, S. "Interference Enhanced Raman Spectroscopy Of Ultra Thin Crystalline Ge & Si Films And Their Interfaces." Thesis, 1997. http://etd.iisc.ernet.in/handle/2005/1763.
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LIU, DIAN-HAO, and 劉殿昊. "Effectiveness of electromagnetic interference shielding of sputtered nitrogen-doped carbon thin films." Thesis, 2019. http://ndltd.ncl.edu.tw/handle/nw3rhg.
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碩士國立聯合大學
材料科學工程學系碩士班
107
With the urgent demand to improve the processing frequency and data transfer rate, the development of electronic devices working at high frequency range have drawn extensive attention. Electromagnetic interference has become a serious issue due to the generated electromagnetic pollution. In this work, carbon-based materials are investigated because of their outstanding properties for electromagnetic shielding in the X-band frequency. The sputtering technique is employed because it allows large area deposition and is eminently suitable for mass production. Ti adhesion layer with a thickness of 30 nm was deposited on aluminum foils or Si substrates. Nominally 200-nm-thick nitrogen-doped carbon (C:N) films were then deposited on the Ti layer. Different N2 flow rates were introduced as n-type dopant during the deposition of C:N films. N2 flow rates for reactive sputtering of the C:N layer were 0 sccm, 1 sccm, 3 sccm, 5 sccm and 7 sccm, respectively. The thicknesses of film stacks were measured by scanning electron microscopy and transmission electron microscopy. The crystal structures were analyzed by grazing incidence angle X-ray diffraction (GIAXRD). The compositions and C-N bonding configurations of the C:N films were examined by X-ray photoelectron spectroscopy (XPS). Raman scattering spectra were used to analyze the bonding structures of C:N films. Electrical properties, in terms of carrier density, mobility, and resistivity, were probed by Hall measurement system. The electromagnetic shielding efficiency is extracted from network analyzer in the frequency range of 8.2-12.4 GHz. The results show that the C:N film is composed of pyridinic, pyrrolic and graphitic structures, wherein only graphitic structure gives effective doping. The graphitic structure increases with increasing nitrogen flow rate, and show maximum for C:N film deposited at 3 sccm N2 flow rate, then decreases as the flow rate further increases. Excess nitrogen atoms would form pyridinic and pyrrolic structures, leading to a decline of graphitic structure and its doping effect. The electromagnetic shielding efficiency consists of reflection loss (SE_R) and absorption loss (SE_A). The absorption loss amplified with enhanced conductivity, and also shows maximum for C:N film deposited at 3 sccm N2 flow rate. It is evidenced that the absorption loss originates from the internal free carriers interacting with the electromagnetic field.
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Chen, Hsiang Hung, and 陳相宏. "Preparing Graphene/Silver nanowires/ Polyvinyl alcohol complex thin films for Electromagnetic Interference Shielding Application." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/35608660030997527555.
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碩士國立清華大學
化學工程學系
103
As electronic devices become popular in the application of military, industrial, communications, biomedical, and in space, some noise pollution, radio frequency interference (RFI), radio radiation, electromagnetic interference (EMI) problems are more serious. These problems will not only interfere with equipment but damage to human health. Therefore, in order to prevent these disturbances become more serious, developed with technology or electromagnetic shielding material is very important. This study wishing graphene as an electrically conductive filler, blended with water soluble polyvinyl alcohol. We make use of the good film-forming properties of polyvinyl alcohol, to prepared a composite film with electromagnetic shielding properties. This process does not use organic solvent, in line with concept of environmental protection. Furthermore, in order to achieve good graphene dispersion in polyvinyl alcohol substrate, we using dispersant to disperse graphene to achieve a better degree of conductivity, and have better electromagnetic shielding effects. On the other hand, silver nanowires have well conductivity and good stability. Therefore, in order to build a better electrically conductive network, this study added silver nanowires as second filler material. We also used glutaraldehyde to crosslink PVA to enhance the water resistance of composite. Finally, at ASTM-D4935-99 test specification, using vector network analyzer to detect the electromagnetic shielding effect of composite film to give a electromagnetic shielding effect, excellent workability, and nontoxic PVA / graphene / silver nanowires composite film.