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Dissertations / Theses on the topic 'Thin film'

Author: Grafiati

Published: 4 June 2021

Last updated: 25 July 2025

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1

Abusabee, K. M. "Thin film engineering for transparent thin film transistors." Thesis, Nottingham Trent University, 2014. http://irep.ntu.ac.uk/id/eprint/127/.

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Zinc oxide (ZnO) and Indium Gallium Zinc Oxide (IGZO) thin films are of interest as oxide semiconductors in thin film transistor (TFT) applications, due to visible light transparency, and low deposition temperature. There is particular interest in ZnO and IGZO based transparent TFT devices fabricated at low temperature on low cost flexible substrates. However, thermal annealing processes are typically required to ensure a good performance, suitable long term stability, and to control the point defects which affect the electrical characteristics. Hence there is interest in post deposition proce

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2

Mackay, Ian. "Thin film electroluminescence /." Online version of thesis, 1989. http://hdl.handle.net/1850/10551.

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3

Han, Sanggil. "Cu2O thin films for p-type metal oxide thin film transistors." Thesis, University of Cambridge, 2018. https://www.repository.cam.ac.uk/handle/1810/285099.

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The rapid progress of n-type metal oxide thin film transistors (TFTs) has motivated research on p-type metal oxide TFTs in order to realise metal oxide-based CMOS circuits which enable low power consumption large-area electronics. Cuprous oxide (Cu2O) has previously been proposed as a suitable active layer for p-type metal oxide TFTs. The two most significant challenges for achieving good quality Cu2O TFTs are to overcome the low field-effect mobility and an unacceptably high off-state current that are a feature of devices that have been reported to date. This dissertation focuses on improving

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4

Hein, Moritz. "Organic Thin-Film Transistors." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2017. http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-167894.

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Organic thin ﬁlm transistors (OTFT) are a key active devices of future organic electronic circuits. The biggest advantages of organic electronics are the potential for cheep production and the enabling of new applications for light, bendable or transparent devices. These beneﬁts are offered by a wide spectrum of various molecules and polymers that are optimized for different purpose. In this work, several interesting organic semiconductors are compared as well as transistor geometries and processing steps. In a cooperation with an industrial partner, test series of transistors are produced th

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5

Hu, Jingping. "Electronic Thin Film Materials." Thesis, University of Oxford, 2007. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.491618.

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This thesis is concerned with investigations of the features of two types of electronic thin film materials: chemical vapour deposition (CVD) diamond and copper oxide based materials. CVD Diamond possesses excellent electrochemical properties. This thesis was concerned with investigating the fabrication and electrochemical properties of certain such diamond electrodes. The fabrication of diamond Ultramicroelectrodes (UMEs) was explored by coating tungsten needles with CVD diamond film under optimised. conditions, followed by selective insulation with different media. It was found that small gr

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6

Zhu, Wen Wei. "Organic thin film transistors." Thesis, McGill University, 2003. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=19597.

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Organic thin film transistors (OTFTs) have been fabricated using four different semiconducting polymers: poly[2-methoxy-5-(2'-ethyl-hexyloxy)-1,4-phenylene vinylene] (MEH-PPV), polyhedral oligomeric silsesquioxanes (POSS) poly (2-methoxy-5-(2'-ethyl-hexyloxy)-l,4-phenylene vinylene) (MEH-PPV-POSS), poly[N-(3-methylphenyl)-N,N-diphenylamine-4,4'-diyl] (poly-TPD), and polyhedral oligomeric silsesquioxanes (POSS) poly (N,N'-bis(4-butylphenyl)-N,N'-bis(phenyl)benzidine (poly-TPD-POSS). These OTFTs were fabricated on heavily doped «-type silicon wafers with thermally grown silicon dioxide layer was

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7

McCaughan, Adam Nykoruk. "Superconducting thin film nanoelectronics." Thesis, Massachusetts Institute of Technology, 2015. http://hdl.handle.net/1721.1/101576.

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Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2015.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (pages 163-171).<br>Superconducting devices have found application in a diverse set of fields due to their unique properties which cannot be reproduced in normal materials. Although many of these devices rely on the properties of bulk superconductors, superconducting devices based on thin films are finding increasing application, especially in the realms of sensing and amplification. With recent a

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8

Morasch, Kevin R. "Nanoindentation induced thin film fracture." Online access for everyone, 2005. http://www.dissertations.wsu.edu/Thesis/Spring2005/k%5Fmorasch%5F042605.pdf.

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9

Geddis, Demetris Lemarcus. "Single fiber bi-directional OE links using 3D stacked thin film emitters and detectors." Diss., Available online, Georgia Institute of Technology, 2004:, 2003. http://etd.gatech.edu/theses/available/etd-04082004-180141/unrestricted/geddis%5Fdemetris%5Fl%5F200312%5Fphd.pdf.

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10

Roos, Andreas. "Growth and characterization of advanced layered thin film structures : Amorphous SmCo thin film alloys." Thesis, Uppsala universitet, Institutionen för fysik och astronomi, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-177674.

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This report describes the growth and characterization of thin amorphous samarium-cobalt alloy films. The samarium-cobalt alloy was grown by DC magnetron sputtering in the presence of an external magnetic field parallel to the thin film. The external magnetic field induces a uniaxial in-plane magnetic anisotropy in the samarium-cobalt alloy. The thin films were characterized with x-ray scattering, and the magnetic anisotropy was characterized with the magneto optic Kerr effect. The measurements showed a uniaxial in-plane magnetic anisotropy in the samarium-cobalt alloy films. It is not clear ho

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11

Marinkovic, Marko [Verfasser]. "Contact resistance effects in thin film solar cells and thin film transistors / Marko Marinkovic." Bremen : IRC-Library, Information Resource Center der Jacobs University Bremen, 2013. http://d-nb.info/1037014243/34.

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12

Maka, Thorsten. "Thin film opal photonic crystals." [S.l.] : [s.n.], 2004. http://deposit.ddb.de/cgi-bin/dokserv?idn=974086991.

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13

Bjurström, Johan. "Advanced Thin Film Electroacoustic Devices." Doctoral thesis, Uppsala universitet, Fasta tillståndets elektronik, 2007. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-7672.

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The explosive development of the telecom industry and in particular wireless and mobile communications in recent years has lead to a rapid development of new component and fabrication technologies to continually satisfy the mutually exclusive requirements for better performance and miniaturization on the one hand and low cost on the other. A fundamental element in radio communications is time and frequency control, which in turn is achieved by high performance electro-acoustic components made on piezoelectric single crystalline substrates. The latter, however, reach their practical limits in t

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14

Panda, Durga Prasanna. "Nanocrystalline silicon thin film transistors." [Ames, Iowa : Iowa State University], 2006.

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15

Qian, Feng. "Thin film transistors in polysilicon /." Full text open access at:, 1988. http://content.ohsu.edu/u?/etd,162.

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16

Bjurström, Johan. "Advanced thin film electroacoustic devices /." Uppsala : Acta Universitatis Upsaliensis, 2007. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-7672.

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17

Fuentes, Iriarte Gonzalo. "AlN Thin Film Electroacoustic Devices." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör], 2003. http://publications.uu.se/theses/91-554-5557-3/.

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18

Murphy, Craig E. "Pyroelectric thin film composite materials." Thesis, University of Oxford, 1994. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.260162.

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19

Grief, Andrew. "Modelling of thin-film superconductors." Thesis, University of Oxford, 2003. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.432285.

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20

Guldeste, Ayhan. "Bismuth based thin film superconductors." Thesis, University of Oxford, 1994. http://ora.ox.ac.uk/objects/uuid:681efdc0-8cba-4b3d-83eb-e0021eea5135.

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This thesis describes investigations performed into the growth and characterisation of Bi-based (Bi<sub>2</sub>Sr<sub>2</sub>Ca<sub>n-1</sub>Cu<sub>n</sub>O<sub>2n + 4 + x</sub>, n=2, 3) ceramic superconducting material in the form of thin films, about 0.5μm thick, grown on single crystal MgO, LaAIO<sub>3</sub> and SrTiO<sub>3</sub> substrates by r.f. magnetron sputtering. The effect of oxygen content on the Pb doped Bi-2223 (n=3) phase was also studied by changing the cooling process and by annealing in different partial pressures of oxygen at ambient pressure. The films produced have been as

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21

Shard, Alexander Gordon. "Plasma assisted thin film formation." Thesis, Durham University, 1992. http://etheses.dur.ac.uk/5736/.

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Thin films of fluorocarbon-based polymers can be deposited by plasma assisted polymerisation of various perfluorocarbons. The chemical natures of plasma polymers of hexafluoropropene and perfluorohexane were examined as a function of power, flow rate and position in reactor. Polymerised hexafluoropropene displayed increased fluorine contents at high powers; this is at odds with perfluorohexane which demonstrated lower fluorine contents. Differing reaction mechanisms between saturated and unsaturated perfluorocarbons were proposed to explain this. Both perfluorocarbons were found to give increa

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22

Castaldi, Lorenzo. "Thin film rare earth magnets." Thesis, University of Sheffield, 2003. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.289666.

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23

Gillanders, Ross Neil. "Optically addressed thin film sensors." Thesis, University of Strathclyde, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.415379.

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24

Leslie, George Adam. "Thin-film flows on cylinders." Thesis, University of Strathclyde, 2012. http://oleg.lib.strath.ac.uk:80/R/?func=dbin-jump-full&object_id=18218.

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Three different problems concerning thin-film flows on horizontal cylinders are studied. Firstly, steady two-dimensional gravity-driven flow with prescribed volume flux of a thin film of Newtonian fluid with temperature-dependent viscosity (i.e. thermoviscous flow) over a uniformly heated or cooled stationary horizontal cylinder is studied. Numerical results along with asymptotic solutions in appropriate limits are presented giving an insight into the effects of thermoviscosity and heat transfer at the free surface. Next, we consider steady two-dimensional flow of a prescribed load (mass) of N

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25

Bauza, M. "Nanocrystalline silicon thin film transistors." Thesis, University College London (University of London), 2013. http://discovery.ucl.ac.uk/1385744/.

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This thesis presents my work on the fabrication of nanocrystalline silicon (nc-Si) thin film transistors and characterization of their stability under different conditions. Nc-Si transistors are promising alternative to the current amorphous silicon (a-Si:H) devices, especially in areas where a-Si:H TFTs are reaching the performance ceiling, e.g. new large area applications such as active matrix organic light emitting diode displays (AMOLED). This is mostly due to the superior nc-Si properties – high carrier mobility and good electrical stability stemming from the crystalline Si grains embedde

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26

McKinley, Iain Stewart. "Studies in thin film flows." Thesis, University of Strathclyde, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.366911.

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27

Andreescu, Radu. "Exchange coupled thin film magnets /." Search for this dissertation online, 2004. http://wwwlib.umi.com/cr/ksu/main.

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28

Tam, Dickson Tai Shun. "An investigation on effect of Mn-doping on dielectric property of barium strontium stannate titanate." access abstract and table of contents access full-text, 2005. http://libweb.cityu.edu.hk/cgi-bin/ezdb/dissert.pl?msc-ap-b21175135a.pdf.

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Thesis (M.Sc.)--City University of Hong Kong, 2005.<br>At head of title: City University of Hong Kong, Department of Physics and Materials Science, Master of Science in materials engineering & nanotechnology dissertation. Title from title screen (viewed on Sept. 4, 2006) Includes bibliographical references.

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Yeung, Kwok Fai. "An investigation on effect of Mn-doping on dielectric property of barium strontium stannate titanate." access abstract and table of contents access full-text, 2005. http://libweb.cityu.edu.hk/cgi-bin/ezdb/dissert.pl?msc-ap-b21175317a.pdf.

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Thesis (M.Sc.)--City University of Hong Kong, 2005.<br>At head of title: City University of Hong Kong, Department of Physics and Materials Science, Master of Science in materials engineering & nanotechnology dissertation. Title from title screen (viewed on Sept. 4, 2006) Includes bibliographical references.

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30

Suttle, Helene. "Thin film vapour barrier systems on vacuum-planarized polyester films." Thesis, University of Oxford, 2010. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.555308.

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The work contained in this thesis examines how the properties of gas barrier materials may be affected by the choice of deposition technique, substrate material, and surface treatment. The performance of barriers with respect to the requirements for the optoelectronics industry was studied, along with an appraisal of the metrics used to assess barrier levels. Polyester films were coated with aluminium oxide by reactive sputter deposition in an industrial-scale research web coater. The transparency and stoichiometry of coatings was achieved by control of the reactive gas supply levels, and the

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31

Beringer, Douglas. "Thin Film Approaches to The Srf Cavity Problem: Fabrication and Characterization of Superconducting Thin Films." W&M ScholarWorks, 2016. https://scholarworks.wm.edu/etd/1499449840.

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Superconducting Radio Frequency (SRF) cavities are responsible for the acceleration of charged particles to relativistic velocities in most modern linear accelerators, such as those employed at high-energy research facilities like Thomas Jefferson National Laboratory’s CEBAF and the LHC at CERN. Recognizing SRF as primarily a surface phenomenon enables the possibility of applying thin films to the interior surface of SRF cavities, opening a formidable tool chest of opportunities by combining and designing materials that offer greater benefit. Thus, while improvements in radio frequency cavity

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32

Rauschmayer, Joseph T. "A complementary thin film process for digital applications." Ohio : Ohio University, 1985. http://www.ohiolink.edu/etd/view.cgi?ohiou1184074634.

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33

Xiong, Zhibin. "Novel scaled-down poly-Si thin-film transistor devices and technologies /." View abstract or full-text, 2005. http://library.ust.hk/cgi/db/thesis.pl?ELEC%202005%20XIONG.

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34

Chow, Thomas. "A conduction model for intrinsic polycrystalline silicon thin film transistor based on discrete grains /." View abstract or full-text, 2009. http://library.ust.hk/cgi/db/thesis.pl?ECED%202009%20CHOW.

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35

Wang, Yongjian. "Dewetting instability of polymer thin film /." View abstract or full-text, 2006. http://library.ust.hk/cgi/db/thesis.pl?PHYS%202006%20WANG.

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36

Fogelström, Linda. "Polymer Nanocomposites in Thin Film Applications." Doctoral thesis, KTH, Ytbehandlingsteknik, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-12400.

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The introduction of a nanoscopic reinforcing phase to a polymer matrix offers great possibilities of obtaining improved properties, enabling applications outside the boundaries of traditional composites. The majority of the work in this thesis has been devoted to polymer/clay nanocomposites in coating applications, using the hydroxyl-functional hyperbranched polyester Boltorn® as matrix and montmorillonite clay as nanofiller. Nanocomposites with a high degree of exfoliation were readily prepared using the straightforward solution-intercalation method with water as solvent. Hard and scratch-res

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37

Inkoom, Godfred. "Ferromagnetic Resonance of LSMO Thin Film." Thesis, Norges teknisk-naturvitenskapelige universitet, Institutt for fysikk, 2011. http://urn.kb.se/resolve?urn=urn:nbn:no:ntnu:diva-12933.

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The magnetic properties of a 15uc thick LSMO thin film on SrTiO3 (STO) substrate atT=150K was investigated using the technique of ferromagnetic resonance (FMR). The FMRmeasurement of the 15uc thick LSMO thin film at a frequency f = 9.75GHz and powerP = 0.6325mW as a function of the angle between the static magnetic field H, and theeasy direction of magnetization within the sample plane in the "in-plane" (IP) configuration displayed an FMR spectrum. This resonance spectrum shows unequal resonance field peaks. The unequal peaks in the resonance field may be attributed to the uniaxial anisotropy

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38

Ma, Wen-Yuan, and 馬文元. "Transparent thin film transistors fabricated by amorphous InGaZnO4 thin films." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/33645187712147492214.

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碩士<br>國立交通大學<br>電子物理系所<br>94<br>In this thesis, we study the transparent thin film transistors fabricated by amorphous InGaZnO4 (a-IGZO) thin films. The Hall measurements indicate that the carrier concentration of a-IGZO film is between 1019~1021 cm-3, resistivity ρ is around 10-3 (Ω-cm), and electron mobility is between 20~25 cm2V-1s-1 repectively. Films were deposited with O2 pressure between 20~200 mtorr. The contact between film and metal as well as indium-tin oxide (ITO) all showed the Schottky contact behavior. The devices, fabricated by a bottom gate structure combined with lift-off pro

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39

Lee, Chih-Hung, and 李至弘. "The Study of HfZnO Thin Film and Thin Film Transistor." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/03339234857014398090.

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博士<br>國立臺灣大學<br>應用力學研究所<br>103<br>This thesis reports the properties of the HfxZn1-xO thin films deposited by rf-sputtering and sol-gel method. The sputter-deposited HfxZn1-xO thin films were then used as the active layers of thin film transistors (TFTs) on the glass substrates. The sputtering HfxZn1-xO thin ﬁlms with various Hf contents are sputter-deposited on glass substrates from HfxZn1-xO (x = 0, 2.5, 5, 7.5 and 10 at%) targets at room temperature. The incorporation of Hf in the ZnO film leads to the amorphization of the materials. As the annealing temperature increases, the built-in st

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40

Qin, Zhipei. "Thin film microextraction." Thesis, 2010. http://hdl.handle.net/10012/5170.

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This thesis developed thin film extraction technique, which is a solid phase microextraction (SPME) technique with enhanced sensitivity, without sacrificing analysis time due to the large surface area-to-volume ratio of thin film. Thin film extraction was applied for both spot sampling and time weighted average (TWA) sampling in laboratory and on site. First, an electric drill coupled with a SPME polydimethylsiloxane (PDMS) fiber or a PDMS thin film was used for active spot sampling of polycyclic aromatic hydrocarbons (PAHs) in aqueous samples. Laboratory experiments demonstrated that the samp

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41

Cooper, Ryan Christopher. "Thin Film Mechanics." Thesis, 2014. https://doi.org/10.7916/D8PR7T1V.

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This doctoral thesis details the methods of determining mechanical properties of two classes of novel thin films suspended two-dimensional crystals and electron beam irradiated microfilms of polydimethylsiloxane (PDMS). Thin films are used in a variety of surface coatings to alter the opto-electronic properties or increase the wear or corrosion resistance and are ideal for micro- and nanoelectromechanical system fabrication. One of the challenges in fabricating thin films is the introduction of strains which can arise due to application techniques, geometrical conformation, or other spurious c

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42

Chang, Ya-Yun, and 鄭雅云. "Growth of TiN and ZrO2 Thin Films Using Thin Film Templates." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/61382518230180369445.

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碩士<br>國立清華大學<br>工程與系統科學系<br>97<br>This study developed a two-step method to control the growth of TiN and ZrO2 thin films using thin film templates and explored the effects of template on the structure and properties of the derivative thin films. The experiment was divided into two parts. The first part was to deposit TiN on TiN(111), TiN(200) and Ti(0002) templates. In the second part, ZrO2 thin films were grown by oxidizing ZrN thin films with different preferred orientations in Ar (99.99% purity) atmosphere, where ZrN (111) thin films were prepared by three deposition systems for examining

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Cho, Sungmee. "Nanostructured Thin Film Electrolyte for Thin Film Solid Oxide Fuel Cells." Thesis, 2011. http://hdl.handle.net/1969.1/ETD-TAMU-2011-08-10145.

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Solid oxide fuel cells (SOFCs) are very attractive as energy generation devices because they are clean, reliable, and almost entirely pollution-free. SOFCs have flexible fuel selections compared with other fuel cell technologies. The main disadvantage of SOFCs is their high operating temperature (~1000ºC for conventional SOFCs) which leads to cell cracking and formation of non-conducting compounds at electrolyte/electrode interfaces. Therefore, intermediate temperature SOFCs (ITSOFCs) in the range of 500-700 ºC has attracted extensive research interests. To achieve high cell performance at re

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吳承哲. "Growth characterization of electrodeposited ZnO thin film on copper thin film." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/68932165056020424540.

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碩士<br>建國科技大學<br>機械工程系暨製造科技研究所<br>98<br>The study uses magnetron sputtering to produce a copper thin film deposited on silicon substrates to provide a copper thin film substrate. Then electrochemical methods are adopted to investigate the properties of ZnO thin films. Aiming to understand the ZnO thin film deposited on copper thin film substrate, the study conducts experiments on various electrochemical parameters of ZnO. ZnO thin films are obtained via electrochemical deposition with controlled parameters such as concentration of electrochemical solution, voltage and temperature. X-ray Diffrac

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CHIU, YI-HSUN, and 邱奕勳. "Application of High Dielectric Hybrid Thin Films in Organic Thin Film Transistors." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/76348811197882023705.

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碩士<br>明志科技大學<br>材料工程系碩士班<br>105<br>Organic thin film transistors (OTFTs) based on pentacene and hydroxyl-containing polyimide(PI)-SiO2-TiO2 hybrid films were fabricated on silicon substrate as the semiconductor and the gate dielectrics, respectively.The precursor was used to synthesize nano-sized SiO2-TiO2 colloid through the hydrolysis and condensation reaction in a sol-gel process. Then, PI-SiO2-TiO2 hybrid solution was synthesized from a condensation reaction between hydroxyl-containing SiO2-TiO2 and polyimide, followed by a spin coating to form the PI- SiO2-TiO2 dielectric composites. Cycl

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Hsu, Chin-Tsar, and 許清茶. "The Study of Green Thin Film Electroluminescent Devices and ZnSe Thin Films." Thesis, 1993. http://ndltd.ncl.edu.tw/handle/73390181103205789568.

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博士<br>國立成功大學<br>電機工程研究所<br>82<br>In this thesis, the high luminous efficiency thin film electroluminescent devices and the characteristics of ZnSe thin films were investigated. The Ta2O5 and Al2O3 insulating have high resistivity that to act as current limiter. The HfO2 and BaTiO3 insulating have low resistivity that to act carrier injector. Crystallinity of the ZnS:Tb,F films deposited by RF- magnetron sputtering were studied by X-ray diffraction. The intensive diffraction line, which aris

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47

Tsai, Li-Shiuan, and 蔡立軒. "Nitrogen incorporated Hafnium Dioxide dielectric thin film For Organic Thin Film Transistors." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/05427454364168925544.

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碩士<br>國立清華大學<br>材料科學工程學系<br>97<br>Hafnium oxide is a high-k dielectric material which have dielectric constant of 25,high-k dielectric material use to be a gate oxide can decrease the threshold voltage and device scale for low voltage and microelectronics. Organic thin film transistors has been used to fabricate soft electronics devices. The active layers for OTFTs is numerous, pentacene for our research is one of most used OTFTs active layers. In this thesis, we fabricate the HfO2 and HfON thin film by RF Reactive Magnetron Sputter System. The target is Hf metal for 99.99%, and we use Mass

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48

TSAI, HUEI-JEN, and 蔡惠甄. "Characteristic Study of ITO Thin Film Etching and Cr Thin Film Evaporation." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/15506805664270546929.

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碩士<br>南台科技大學<br>機械工程系<br>94<br>Abstract This study consists of two parts. The first part is to investigate four kinds of commonly used etching liquids to etch the thin film of indium tin oxide (ITO), and then compares the differences among them. When the ITO film is etched, the photo resistant layer usually serves as an etching mask to etch the required pattern. Therefore, it is necessary to find out the fastest way to etch the ITO film but almost not to etch the photo resistant layer. This study not only compares the etching rate of ITO film by four kinds of etching liquids at different temp

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Rao, K. Yellareswara. "Sputter Deposited Thin Film Cathodes from Powder Target for Micro Battery Applications." Thesis, 2015. http://etd.iisc.ac.in/handle/2005/3825.

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Abstract:

All solid state Li-ion batteries (thin film micro batteries) have become inevitable for miniaturized devices and sensors as power sources. Fabrication of electrode materials for batteries in thin film form has been carried out with the existing technologies used in semiconductor industry. In the present thesis, radio frequency (RF) sputtering has been chosen for deposition of cathode material (ceramic oxides) thin films because of several advantages such as precise thickness control and deposition of compound thin films with equivalent composition. Conventional sputtering involves fabrication

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Rao, K. Yellareswara. "Sputter Deposited Thin Film Cathodes from Powder Target for Micro Battery Applications." Thesis, 2015. http://etd.iisc.ernet.in/2005/3825.

Full text

Abstract:

All solid state Li-ion batteries (thin film micro batteries) have become inevitable for miniaturized devices and sensors as power sources. Fabrication of electrode materials for batteries in thin film form has been carried out with the existing technologies used in semiconductor industry. In the present thesis, radio frequency (RF) sputtering has been chosen for deposition of cathode material (ceramic oxides) thin films because of several advantages such as precise thickness control and deposition of compound thin films with equivalent composition. Conventional sputtering involves fabrication

APA, Harvard, Vancouver, ISO, and other styles

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