Dissertations / Theses on the topic 'Ti(N'
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Schramm, Benítez Isabella Citlalli. "Defect-engineered (Ti,Al)N thin films." Doctoral thesis, Linköpings universitet, Nanostrukturerade material, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-142116.
Full textDiese Arbeit untersucht den Effekt von Punktdefekten (Stickstoffleerstellen und Zwischengitteratome) und Multilagen ((Ti,Al)N/TiN) auf die Phasenumwandlung in lichtbogenverdampften kubischen (Ti,Al)N-Dünnschichten bei erhöhten Temperaturen. Besonderes Augenmerk liegt auf der Entwicklung der vorteilhaften spinodalen Entmischung in c-TiN und c-AlN und der nachteiligen Bildung von Wurtzit-AlN, sowie der möglichen Anwendung als Hartstoffbeschichtung von Schneidwerkzeugen. c-(Ti1-xAlx)Ny mit unterschiedlichem Al-Anteil und N-Gehalten von y = 0,93 bis 0,75 zeigt mit zunehmenden Stickstoffleerstellen eine Verzögerung der spinodalen Entmischung. Dadurch verschiebt sich die Ausscheidungshärtung um 300 °C zu höheren Temperaturen und die w-AlN-Bildung wird verzögert, während der Einbau von Eigenzwischengitteratomen die Entmischung beschleunigt. Die Hochtemperaturwechselwirkung zwischen Hartmetallsubstrat und Dünnschicht durch Diffusion von Substratelementen in die Schicht nimmt mit steigendem Stickstoffdefizit zu. Stickstoffarme Schichten (y = 0,58 bis 0,40) zeigen während der Wärmebehandlung zusätzliche Phasen wie Ti4AlN3, Ti2AlN, Al5Ti2 und Al3Ti und eine Umwandlung von Ti2AlN in Ti4AlN3 durch Interkalation. Die Multischichtstruktur von TiN/TiAlN führt zu einer oberflächengerichteten spinodalen Entmischung, die das Entmischungsverhalten beeinflusst. Ein gezielter Einsatz dieser Effekte erscheint als ein vielsprechender Weg, um die Leistungsfähigkeit von Schneidwerkzeugen zu verbessern.
I denna avhandling behandlas inverkan av punktdefekter (kvävevakanser och interstitialer) och multilagring ((Ti,Al)N/TiN) på högtemperaturfasomvandlingar i tunna arcförångade skikt av kubiska (Ti,Al)N. Störst vikt har lagts på utvecklingen av det fördelaktiga spinodala sönderfallet till c-TiN och c-AlN, den ofördelaktiga omvandlingen till w-AlN och potentialen som hårda skikt i verktygstillämpningar. Tunna c-(Ti1-xAlx)Ny skikt med olika Al-andel och en N-halt mellan (y = 0.93 och 0.75) uppvisar ökad undertryckning av det spinodala sönderfallet med ökat kvävevakanshalt. Detta resulterar i bildandet av w-AlN skiftas upp i temperatur vilket gör att åldershärdningen höjs med 300 °C. Däremot medför närvaron av självinterstitialer ett snabbare sönderfall. Växelverkan mellan hårdmetallsubstraten och de tunna skikten vid hög temperatur ökar med minskad kvävehalt i skiten genom diffusion av atomer från substratet in i filmen. Filmer med låg kvävehalt (y = 0.58 till 0.40) bildar även andra faser så som Ti4AlN3, Ti2AlN, Al5Ti2 och Al3Ti under värmebehandling och fasomvandlingen från Ti2AlN till Ti4AlN3 sker via en mekanism kallad intercalation. Multilagring av TiN/TiAlN resulterar i ett ytriktad spinodalt sönderfall vilket påverkar det totala sönderfallsförloppet. Nyttjande av dessa resultat syns som lovande vägar till förbättrade verktygsegenskaper.
Qangule, Lusanda Lungelwa. "Investigation of the ⁵¹V(n,d)⁵⁰Ti reaction." Master's thesis, University of Cape Town, 1992. http://hdl.handle.net/11427/18346.
Full textThe ⁵¹V(n,d) ⁵⁰Ti reaction has been studied with neutrons of energy of 21.6 MeV. The measurement of the angular distribution of the differential cross section was made with the aid of a spectrometer designed by Dr. McMurray and Prof K. Bharuth - Ram. The spectrometer consists of three multiwire proportional counters followed by a curved plastic scintillator. The proportional counters act as ΔE detectors and the scintillator acts as an energy detector. The ΔE - E method based on the Bethe - Bloch formula was used for particle identification. The spectrometer allows accumulation of data over an angle range of ≥ 70°, has angular resolution (FWHM) ≈ 5° and energy resolution (FWHM) ≈ 0.8 MeV. A review of the optical model and the reaction mechanism is presented. Theoretical DWBA cross sections are performed by using the Distorted Waves code DWUCK4. Spectroscopic factors for transitions to the 0⁺, 2⁺ and (4⁺ , 6⁺ ) states in ⁵⁰Ti have been determined from the comparison of experimental differential cross sections to theoretical DWBA differential cross sections. These have a mean value of 0.42, 0.30 and 0.38 respectively. The spectroscopic factors are compared with the results from (e,e' p) and (d,³He) measurements and shell model calculations.
Basilio, Bartolo Juan Carlos, and Prada Renzo Jos? Mendoza. "Gesti?n de requerimientos del ?rea de TI." Bachelor's thesis, Universidad Peruana de Ciencias Aplicadas (UPC), 2012. http://hdl.handle.net/10757/300089.
Full textTesis
Krüger, Kathrin [Verfasser], and Dr S. [Akademischer Betreuer] Ulrich. "Funktionelle PVD-Viellagenschichten aus den Systemen Fe-Co-Hf-N, Ti-N und Ti-Al-N für die Hochfrequenz-Sensorik / Kathrin Krüger. Betreuer: Dr. S. Ulrich." Karlsruhe : KIT-Bibliothek, 2015. http://d-nb.info/1070635707/34.
Full textSalamat, N. "High pressure solid state chemistry of C-N-H and Ti-N systems." Thesis, University College London (University of London), 2010. http://discovery.ucl.ac.uk/20191/.
Full textFlink, Axel. "Growth and Characterization of Ti-Si-N Hard Coatings." Licentiate thesis, Linköping : Department of Physics, Chemistry and Biology, Linköping University, 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-7741.
Full textFlink, Axel. "Growth and Characterization of Ti-Si-N Thin Films." Doctoral thesis, Linköpings universitet, Tunnfilmsfysik, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11929.
Full textTi-Si-N and Ti-Al-Si-N thin solid films have been studied by analytical electron microscopy, X-ray diffraction, scanning tunneling microscopy, X-ray photoelectron spectroscopy, elastic recoil detection analysis, nanoindentation, and ab initio calculations. I find that arc evaporated (Ti1-xSix)Ny films can be grown as cubic solid solutions up to x = 0.09 with a dense columnar microstructure. Films with higher Si content up to x = 0.20 assumes an extremely defect-rich, feather-like structure consisting of cubic TiN:Si nanocrystallite bundles with low-angle grain boundaries caused by thermodynamically driven Si segregation. Correspondingly, the N content in the films increases close to linear with the Si content from y = 1.00 (x = 0) to y = 1.13 (x = 0.20). Annealing of the films at 1000 °C yields a metastable crystalline SiNz (1.0 ≤ z ≤ 1.33) tissue phase in 0.04 ≤ x ≤ 0.20 films which is (semi)-coherent to TiN. These films are compositionally stable and exhibit retained hardness between 31-42 GPa up to 1000 °C. At 1100-1200 °C, the tissue phase amorphizes and all SiNz diffuse out of the films, followed by recrystallization of the cubic phase. Hard turning testing was performed on (Ti0.83Si0.17)N1.09. Analysis of the tool-chip interface prepared by focused ion beam revealed shear deformation in the film and an adhering layer consisting of the work-piece material and Si and N from the film. For (Ti0.33Al0.67)1-xSix)N (0 ≤ x ≤ 0.29) films the NaCl structure cubic (Ti,Al)N solid solution phase is predominant at low Si contents, which gradually changes to a dominating hexagonal wurtzite (Al,Ti,Si)N solid solution for 0.04 ≤ x ≤ 0.17. Additional Si results in amorphization. Annealing experiments at 600-1000 °C yields spinodal decomposition of c-(Al,Ti)N into c-AlN and c-TiN, with corresponding age hardening. The h-(Al,Ti,Si)N films exhibit precipitation of c- TiN with smaller volume than the host lattice, which results in tensile cracks formations and age hardening. Films with c-(Ti,Al)N perform best in turning applications, while films with h- (Al,Ti,Si)N form cracks and fail. Finally, I have characterized the nature of metastable crystalline SiNz phases and the interface between TiN(001) and SiNz. Magnetron sputtering was used to deposit TiN/SiNz(001) nanolaminate films with varying SiNz and TiN layer thicknesses. Maximum hardness is obtained when SiNz forms coherent interfaces with TiN. In addition, in situ surface analyses in combination with ab-initio calculations reveal that SiNz sub-monolayers grow epitaxially and form crystalline reconstructions on TiN(001) and TiN(111) surfaces. Phonon calculations predict that stoichiometric c-SiN is dynamically instable when the atoms are arranged in the NaCl and ZnS forms. However, c-Si3N4 can be stabilized with D022 or L12 ordered ZnS-like structures. These results have impact for the design of superhard nanocomposites and multilayer thin films.
Rahil, Issam. "Elaboration et caractérisation de revêtements à base de nitrure de chrome, carbonitrure et carbure de titane élaborés par pulvérisation magnétron." Phd thesis, Ecole nationale supérieure d'arts et métiers - ENSAM, 2013. http://pastel.archives-ouvertes.fr/pastel-00967251.
Full textDümmler, Wolfram. "Étude par spectrométrie de masse d'ions secondaires des interfaces Ti/Si₃N₄, Ag/Si₃N₄ et Cu/Si₃N₄." Vandoeuvre-les-Nancy, INPL, 1998. http://www.theses.fr/1998INPL046N.
Full textHöglund, Carina. "Growth and Phase Stability Studies of Epitaxial Sc-Al-N and Ti-Al-N Thin Films." Doctoral thesis, Linköpings universitet, Tunnfilmsfysik, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-56274.
Full textMcArthur, Warren F. "Ti-Si-N as a Cu diffusion barrier in microelectronic metallization /." Diss., Connect to a 24 p. preview or request complete full text in PDF format. Access restricted to UC campuses, 1999. http://wwwlib.umi.com/cr/ucsd/fullcit?p9938292.
Full textChacon, Maria Lu?za Assun??o. "A personagem ensimesmada em Tu n?o te moves de ti." PROGRAMA DE P?S-GRADUA??O EM ESTUDOS DA LINGUAGEM, 2015. https://repositorio.ufrn.br/jspui/handle/123456789/22368.
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Coordena??o de Aperfei?oamento de Pessoal de N?vel Superior (CAPES)
Esta pesquisa pretende analisar a obra Tu n?o te moves de ti (1980), de Hilda Hilst (1930-2004). Em nossa investiga??o, observaremos primordialmente a complexidade do comportamento das personagens. ? importante destacar, no entanto, que o fato de a personagem ser a categoria principal de nossa an?lise n?o implica na exclus?o de outros elementos da narrativa. Detectamos que a personagem, elemento mais atuante da fic??o, encontra-se radicalmente ensimesmada no texto hilstiano, e ? sobre esse aspecto que pretendemos nos deter. Sendo assim, investigaremos a rela??o estabelecida entre a subjetividade exacerbada das personagens e a linguagem utilizada pela autora. Para tanto, observaremos o recurso discursivo que ? bastante recorrente em seus textos: o fluxo da consci?ncia. Refletir acerca desse recurso ? de fundamental import?ncia para a nossa pesquisa, pois a problematiza??o do indiv?duo, na escrita de Hilst, passa tamb?m pelo desordenamento da linguagem. ? v?lido ressaltar, ainda, que consideraremos o contexto social no qual a obra se insere, promovendo di?logos entre ambos a fim de evidenciar de que forma a sociedade se configura no romance. Em fun??o disso, n?o entenderemos o isolamento das personagens somente em sua dimens?o ontol?gica, mas tamb?m em sua dimens?o hist?rica e social.
Esta pesquisa pretende analizar la obra Tu n?o te moves de ti (1980), de Hilda Hilst (1930-2004). En nuestra investigaci?n, observaremos primordialmente la complejidad del comportamiento de los personajes. Es importante destacar, sin embargo, que la elecci?n del personaje como categor?a principal de nuestro an?lisis no implica la exclusi?n de otros elementos de la narrativa. Detectamos que el personaje, elemento m?s actuante de la ficci?n, se encuentra radicalmente ensimismado en el texto hilstiano, y es acerca de este aspecto que pretendemos detenernos. Por lo tanto, investigaremos la relaci?n establecida entre la subjetividad exacerbada de los personajes y el lenguaje utilizado por la autora. Para eso, observaremos el recurso discursivo que es bastante recurrente en sus textos: el flujo de conciencia. Reflexionar acerca de este recurso es de fundamental importancia para nuestra investigaci?n, ya que la problematizaci?n del individuo, en la escrita de Hilst, pasa tambi?n por el desordenamiento del lenguaje. Es v?lido resaltar, todav?a, que consideraremos el contexto social en el cual la obra se inserta, promoviendo di?logos entre ambos con fin de evidenciar de qu? forma la sociedad se configura en la novela. En funci?n de esto, no entenderemos el aislamiento de los personajes solamente en su dimensi?n ontol?gica, pero tambi?n en su dimensi?n hist?rica y social.
Liu, Xuejie. "Basic structure and formation mechanism of Ti-Si-N superhard nanocomposite coatings." Heimsheim : Jost-Jetter, 2009. http://d-nb.info/994974574/34.
Full textLiu, Xuejie. "Basic structure and formation mechanism of Ti-Si-N superhard nanocomposite coatings." Heimsheim Jost-Jetter, 2008. http://d-nb.info/99307751X/04.
Full textAlmeida, Joel Alexandre Santiago. "Desenvolvimento de um cerâmico Al2O3/TI(C,N) para uso em maquinação." Master's thesis, Universidade de Aveiro, 2015. http://hdl.handle.net/10773/15707.
Full textO principal objetivo deste trabalho é preparar um cermeto do tipo Al2O3/Ti(C,N) com propriedades mecânicas adequadas à sua utilização na maquinação de materiais do tipo DIN ISO 513:K01-K10 e ISO H01-H10. De forma a incrementar a sinterabilidade do cermeto investigou-se o efeito da adição de dopantes metálicos, nomeadamente alumínio metálico (Al) e hidreto de titânio (TiH2) e o efeito da substituição da moagem convencional por moagem de alta energia. As variáveis das etapas principais de processamento, i.e., da moagem, prensagem e sinterização, foram selecionadas com trabalho realizado quer na Universidade de Aveiro quer na empresa Palbit. Foram preparadas três composições do cermeto Al2O3/Ti(C,N) com adições de 5%TiH2, 1%Al e 5%TiH21%Al através da moagem de alta energia. Os parâmetros de moagem, i.e. a velocidade de rotação, o rácio bolas/pó e o tempo de moagem foram otimizados para os seguintes valores: 350 rpm, 10:1 e 5 h, respetivamente. A utilização da moagem de alta energia permitiu uma redução do tamanho de partícula dos pós até aproximadamente 100 nm e a obtenção de uma boa uniformidade da distribuição das fases (Al2O3+Ti(C,N)). A etapa de conformação foi efetuada por prensagem uniaxial seguida de prensagem isostática. A avaliação da reatividade dos cermetos através de dilatometria em atmosfera de vácuo revelou que a densificação é maioritariamente realizada em estado sólido. A adição de apenas 1%Al é a menos efetiva para a densificação. Os cermetos foram sinterizados através de sinterização convencional em forno de vazio a 1650ºC e prensagem a quente (1650ºC com uma pressão uniaxial de 25 MPa). Os valores de densificação obtidos, aproximadamente 80% e 100%, respetivamente, indicam que a aplicação de pressão durante a sinterização é efetiva para atingir densificações elevadas nos compactos, compatíveis com as suas aplicações tecnológicas. As propriedades mecânicas de dureza e de tenacidade avaliadas nos três cermetos apresentaram valores aproximados de 1800-1900 HV50 para a dureza e entre 5.4 e 7.7 MPa.m1/2 para a tenacidade à fratura.
The main goal of this work is to prepare a cermet type Al2O3/Ti(C, N) with mechanical properties adequate for use in machining type materials DIN ISO 513: K01-K10 and ISO H01-H10. In order to increase the sinterability of the cermet investigated the effect of addition of metal dopants, including metallic aluminum (Al) and titanium hydride (TiH2) and the effect of substitution of the conventional milling by high energy milling. The variables of the main processing steps, ie, milling, pressing and sintering were selected with work done both at the University of Aveiro either in Palbit company. It was prepared three cermet compositions Al2O3/Ti(C,N) with additions of 5%TiH2, 1%Al and 5%TiH21%Al by high energy milling. The grinding parameters, eg the rotational speed, the ratio balls / powder and the grinding time were optimized for the following values: 350 rpm, 10: 1 and 5 h, respectively. The use of high energy milling of the powders allowed a reduction of particle size to about 100 nm and to obtain a good uniformity of distribution of the phases (Al2O3+Ti (C,N)). The forming step was carried out by uniaxial pressing, followed by isostatic pressing. The evaluation of the reactivity of cermetos by dilatometry in a vacuum atmosphere revealed that the densification is performed mainly in a solid state. The addition of only 1% Al is less effective for densification. The cermets were sintered using conventional sintering in vacuum oven at 1650ºC and hot pressing (1650ºC with a uniaxial pressure of 25 MPa). The densification values, approximately 80% and 100%, respectively, indicate that the application of pressure during sintering is effective to achieve high densification in the compact, consistent with their technological applications. The mechanical properties of hardness and toughness evaluated in the three cermetos showed similar values of 1800-1900 HV50 for the hardness and between 5.4 and 7.7 MPa.m1/2 to the fracture toughness.
Yoon, Su-Jong. "Synthesis and characterization of ceramics in the Ti-B-N-C system." Thesis, Brunel University, 1994. http://bura.brunel.ac.uk/handle/2438/5352.
Full textHöglund, Carina. "Reactive Magnetron Sputter Deposition and Characterization of Thin Films from the Ti-Al-N and Sc-Al-N Systems." Licentiate thesis, Linköping University, Linköping University, Thin Film Physics, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-17683.
Full textThis Thesis treats the growth and characterization of ternary transition metal nitride thin films. The aim is to probe deeper into the Ti-Al-N system and to explore the novel Sc-Al-N system. Thin films were epitaxially grown by reactive magnetron sputtering from elemental targets onto single-crystal substrates covered with a seed layer. Elastic recoil detection analysis and Rutherford backscattering spectroscopy were used for compositional analysis and depth profiling. Different x-ray diffraction techniques were employed, ex situ using Cu radiation and in situ during deposition using synchrotron radiation, to identify phases, to obtain information about texture, and to determine the thickness and roughness evolution of layers during and after growth. Transmission electron microscopy was used for overview and lattice imaging, and to obtain lattice structure information by electron diffraction. Film properties were determined using van der Pauw measurements of the electrical resistivity, and nanoindentation for the materials hardness and elastic modulus. The epitaxial Mn+1AXn phase Ti2AlN was synthesized by solid-state reaction during interdiffusion between sequentially deposited layers of (0001)-oriented AlN and Ti thin films. When annealing the sample, N and Al diffused into the Ti, forming Ti3AlN at 400 ºC and Ti2AlN at 500 ºC. The Ti2AlN formation temperature is 175 ºC lower than earlier reported results. Ti4AlN3 thin films were, however, not possible to synthesize when depositing films with a Ti:Al:N ratios of 4:1:3. Substrate temperatures at 600 ºC yielded an irregularly stacked Tin+1AlNn layered structure because of the low mobility of Al adatoms. An increased temperature led, however, to an Al deficiency due to an out diffusion of Al atoms, and formation of Ti2AlN phase and Ti1-xAlxN cubic solid solution. In the Sc-Al-N system the first ternary phase was discovered, namely the perovskite Sc3AlN, with a unit cell of 4.40 Å. Its existence was supported by ab initio calculations of the enthalpy showing that Sc3AlN is thermodynamically stable with respect to the binaries. Sc3AlN thin films were experimentally found to have a hardness of 14.2 GPa, an elastic modulus of 21 GPa, and a room temperature resistivity of 41.2 μΩcm.
Eriksson, Anders. "Cathodic Arc Synthesis of Ti-Si-C-N Thin Films from Ternary Cathodes." Licentiate thesis, Linköpings universitet, Tunnfilmsfysik, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-61994.
Full textHaag, Steffen. "Ionenstrahlgestützte Abscheidung dünner Funktionsschichtsysteme im System Ti-B-C-N und deren Charakterisierung." [S.l. : s.n.], 2003. http://deposit.ddb.de/cgi-bin/dokserv?idn=968811477.
Full textPiallat, Fabien. "Plasma assisted chemical deposition (CVD/ALD) and integration of Ti(Al)N and Ta(Al)N for sub-20 nm metal gate." Thesis, Grenoble, 2014. http://www.theses.fr/2014GRENT015/document.
Full textFor the sub-20 nm technological nodes metal conformity requirements are beyond the possibilities of the currently used PVD deposition technique. CVD techniques, more specifically MOCVD and ALD, are identified as the best techniques for metal deposition. For metal-gate application, titanium and tantalum carbo-nitrides alloys are considered as the most promising. In this work, a detailed review of MOCVD and ALD deposition mechanisms and plasma influence on the deposited material is carried out. First, process windows for successful tuning of the metal properties are examined. Plasma impact on the metal and the inherent reaction mechanisms are also highlighted with the help of plasma characterisation. Then great importance is given to the integration of these metals, by careful study of the interactions taking place at the interfaces. Correlations between physico-chemical properties and electrical behavior of the metal/high-k dielectric stack are introduced thanks to XPS characterisation. Finally, aluminium doping of MOCVD TiN and TaN is considered for n-mos and p-mos gate characteristics achievement. By comparison of the properties and behaviours of Al doped metals deposited by PVD and MOCVD, diffusion mechanisms are proposed to explain the role of Al in the observed changes
Sanchette, Fredéric. "Synthèse et caractérisation de dépôts Al-Cr-(N) et Al-Ti-(N) obtenus par pulvérisation cathodique magnétron en condition réactive." Vandoeuvre-les-Nancy, INPL, 1996. http://www.theses.fr/1996INPL057N.
Full textGuevarra, Jonathan S. "Crystal structures of perovskite-related Can(Nb,Ti)nO3n+2 (n=5 and 6)." [S.l.] : [s.n.], 2006. http://deposit.ddb.de/cgi-bin/dokserv?idn=979215722.
Full textSchramm, Benítez Isabella Citlalli Verfasser], and Frank [Akademischer Betreuer] [Mücklich. "Defect-engineered (Ti,Al)N thin films / Isabella Citlalli Schramm Benítez ; Betreuer: Frank Mücklich." Saarbrücken : Saarländische Universitäts- und Landesbibliothek, 2017. http://d-nb.info/115209470X/34.
Full textFenard, Emmanuelle. "Céramiques composites du système Ti/B/N : Propriétés mécaniques et résistance à la corrosion." Limoges, 2001. http://www.theses.fr/2001LIMO0029.
Full textGilles, Sandra. "Elaboration de couches minces de (Ti,Al)N par OMCVD : étude thermodynamique et expérimentale." Grenoble INPG, 1997. http://www.theses.fr/1997INPG0155.
Full textForsén, Rikard. "Mechanical properties and thermal stability of reactive arc evaporated Ti-Cr-Al-N coatings." Licentiate thesis, Linköpings universitet, Nanostrukturerade material, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-79579.
Full textEriksson, Anders. "Cathodic Arc Synthesis of Ti-Si-C-N Thin Films : Plasma Analysis and Microstructure Formation." Doctoral thesis, Linköpings universitet, Tunnfilmsfysik, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-86259.
Full textAnderbouhr, Stéphanie. "Dépôt chimique en phase vapeur de couches minces de (Ti,Al)N à composition variable." Grenoble INPG, 1999. http://www.theses.fr/1999INPG0061.
Full textAntunes, Vinícius Gabriel 1984. "Deposição e caracterização físico-química de filmes finos nanoestruturados (nanocompósitos) contendo Ti, C, N e O, Obtidos a partir de um precursor líquido (Ti(OC2H5)4)." [s.n.], 2014. http://repositorio.unicamp.br/jspui/handle/REPOSIP/276978.
Full textDissertação (mestrado) - Universidade Estadual de Campinas, Instituto de Física Gleb Wataghin
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Resumo: Os tratamentos de superfície a plasma são amplamente usados em diversas áreas de tecnologia, tais como: indústria metalmecânica, microeletrônica, plástico e medicina, para o crescimento de filmes finos, camadas protetoras em instrumentos e ferramentas de corte, funcionalização de superfícies plásticas, tecidos sintéticos, esterilização de instrumentos cirúrgicos e plasma reativo em semicondutores. Há alguns anos, uma nova família de filmes duros e protetores com baixo atrito compostos por nanoestrururas, tem sido intensamente pesquisada por apresentar propriedades particularmente interessantes, do ponto de vista da físico-química básica, como possíveis aplicações tecnológicas em que a demanda por desgaste, altas temperatura, e resistência mecânica são necessárias. A deposição de filmes finos, constituídos por nanocompósitos, e a compreensão de propriedades (mecânicas, elétricas, ópticas) desses novos materiais, gera um leque de possíveis aplicações tecnológicas. A partir de tais premissas, focalizamos o objetivo do trabalho em estudar a obtenção e caracterização das propriedades físico-químicas de filmes finos nanoestruturados (nanocompósitos), que contêm compostos de Ti, C, N, e O, utilizando a técnica de Deposição Química pela Decomposição do precursor líquido tetraetóxido de titânio (Ti(OC2H5)4) (PECVD, na sigla em inglês). Ressalta-se que o interesse em obter esses materiais, a partir do reagente em questão, reside no fato de que ele poderia substituir o uso de outros precursores de difícil manuseio, tais como o tetracloreto de titânio (TiCl4), o qual é normalmente utilizado em numerosas aplicações de deposições de filmes compósitos, mediante a técnica de PECVD, e cujo subproduto da reação gera reagentes altamente corrosivos. Em resumo, este trabalho contempla a caracterização da composição química, micro e nano estrutura de compósitos que contêm os compostos mencionados, em função das variáveis mais importantes de deposição. O presente estudo foi bem sucedido em obter nanocompósito e correlacionar a dependência das ligações químicas do material com os parâmetros mais importantes de deposição
Abstract: Plasma surface treatments are widely used in several technological areas (e.g., metallurgic industry, microelectronic, plastic industry, medicine) in order to obtain hard coatings on cutting tools and instruments, funtionalization of plastics and synthetic materials used in the textile industry, sterilization of chirurgic instruments, etching by reactive plasma in the semiconductor industry, etc. Recently, a new family of coatings deposited by plasma assisted techniques owing interesting physical chemical properties such as super-hardness, low friction and wear resistant, temperature and corrosion resistant, known as nano-composites, have been intensely studied.The objectives of this work is developing a nano composite containing Ti, C, N e O and understand as far as possible its physical and chemical properties. The material is obtained by plasma assisted enhanced chemical deposition (PECVD) using Titanium(IV) ethoxide ( (Ti(OC2H5)4) and N as precursors of the reaction. The importance of the attempt to use the cited precursor resides in the fact that it is a friendly liquid without corrosive o major toxic effects, as the normal precursors used in the actual industrial process (e.g., titanium tetrachloride, TiCl4). Summarizing, this work is focusing the research in the deposition and study of the physical and chemical properties of thin films nano composites obtained from Titanium(IV) ethoxide precursor. The study shows that the deposition procedure allows obtaining a material containing nanoscopics size crystallites of the compounds cited above. Finally, the relation of the material properties with the more important deposition parameters is discussed and presented
Mestrado
Física
Mestre em Física
Liu, Xuejie [Verfasser]. "Basic structure and formation mechanism of Ti-Si-N superhard nanocomposite coatings / vorgelegt von Xuejie Liu." Heimsheim : Jost-Jetter, 2009. http://d-nb.info/994974574/34.
Full textKussmaul, Armin. "Thermodynamische Berechnungen zum Einfluss reduzierender und oxidierender Atmosphären auf Werkstoffe im System Ti-Al-O-N /." Online version, 1998. http://bibpurl.oclc.org/web/37074.
Full textGodinho, Vanda. "Synthesis and characterization of magnetron sputtered thin films of the Ti-Al-Si-N(O) system." Doctoral thesis, Universite Libre de Bruxelles, 2011. http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/209969.
Full textIn each chapter the individual conclusions from that particular chapter are presented, a summary of the most relevant conclusions and achievements is listed below.
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Doctorat en Sciences de l'ingénieur
info:eu-repo/semantics/nonPublished
Eberling-Fux, Nicolas. "Matériaux composites à matrice nanostructurée dans les systèmes Si-B-C-Ti et Si-B-C-N." Bordeaux 1, 2006. http://www.theses.fr/2006BOR13235.
Full textPinot, Yoann. "Micro- et nanostructure des revêtements (Ti, Al)N et comportement tribologique au voisinage de la transition structurale." Thesis, Mulhouse, 2015. http://www.theses.fr/2015MULH0719/document.
Full textTi1-xAlxN (0 ≤ x ≤ 1) is considered as a model system, where TiN (fcc) and AlN (hcp) do not mix over the whole composition range due to their low miscibility. However, the physical vapour deposition (PVD) allows achieving metastable phases of Ti1-xAlxN, where Al atoms are partially substituting for Ti in fcc lattice. Ti1-xAlxN coatings exhibit high hardness and oxidation resistance for the maximum Al substituted to Ti in fcc lattice (about x=0.6). The proportion of grain boundaries and the limit solubility play a major role on the mechanical properties and resistance to wear of the coatings. Several techniques are employed to investigate two sets of Ti1-xAlxN thin films deposited by magnetron reactive sputtering from two types of metallic targets onto Si (100). Lattice symmetry of crystallised domains and columnar growth structure of the films are characterized by X-ray diffraction (XRD) and electron microscopy (TEM, HRTEM). Several local probes such as X-ray absorption fine structure (XAFS), diffraction anomalous fine structure (DAFS) and Electron Energy Loss Spectroscopies (EELS) which are very sensitive to the symmetry of the atomic sites either octahedral for fcc lattice or tetrahedral for hcp one are carried out. For Ti-rich films (x < 0.5), the competitive growth of cubic domains between [200]c and [111]c is observed. For Al-rich films (x > 0.7) have a domain growth well crystallized in the direction [002]h the hexagonal lattice. In addition, the cubic / hexagonal transition in Al contents higher is observed for films from sintered target. These films show better wear resistance than those deposited from target compartmentalized
Munardi, Adriantono. "Polymérisation de l'acétylène par un nouveau système d'amorçage n-BuLi/Ti (OnBu)4, étude cinétique, structurale et morphologique." Grenoble : ANRT, 1985. http://catalogue.bnf.fr/ark:/12148/cb37594996c.
Full textTASAYCO, CARLOS MANUEL SANCHEZ. "STRUCTURAL, MECHANICAL AND TRIBOLOGICAL PROPERTIES OF TIB2 AND TI-B-N FILMS DEPOSITED BY REACTIVE DC MAGNETRON SPUTTERING." PONTIFÍCIA UNIVERSIDADE CATÓLICA DO RIO DE JANEIRO, 2007. http://www.maxwell.vrac.puc-rio.br/Busca_etds.php?strSecao=resultado&nrSeq=10020@1.
Full textCONSELHO NACIONAL DE DESENVOLVIMENTO CIENTÍFICO E TECNOLÓGICO
O presente trabalho teve como objetivo central o estudo das modificações nas propriedades estruturais, mecânicas e tribológicas causadas pela incorporação de nitrogênio em filmes de diborato de titânio (TiB2) crescidos pela técnica de erosão catódica assistida por um campo magnético. Os revestimentos de Ti-B-N com diferentes conteúdos de nitrogênio foram depositados em substratos de silício cristalino (100) a partir da erosão de um alvo de diborato de titânio mediante o uso da técnica de erosão catódica em uma atmosfera de argônio e nitrogênio e com tensões de polarização variando entre +100V e - 100V. Os efeitos do conteúdo de nitrogênio e a influência da tensão de polarização na estrutura e no comportamento tribológico foram investigados com o uso da técnica nuclear de retroespalhamento Rutherford (RBS), espectroscopia de fotoelétrons induzida por raios-x (XPS), difração por raios-x (XRD), perfilometria (medidas de tensão interna), microscopia de força atômica (AFM) e de ângulo de contato. Os resultados do presente trabalho mostraram que a incorporação de nitrogênio produz filmes com tensões internas cada vez mais compressivas. No entanto a mudança da tensão de autopolarização a valores positivos provocou uma relaxação na tensão interna. Nesses casos, foi observada uma melhor adesão dos filmes aos substratos de silício. Os resultados de XPS mostraram que as fases, TiB2, BN e TiN, estão presentes nos filmes de Ti-B-N e a caracterização por XRD determinou a estrutura nanocristalina desses revestimentos. Medidas de AFM indicaram valores de rugosidade superficial entre 1 e 2nm.
The main purpose of the present work was the study of the effects on the structural, mechanical and tribological properties of the incorporation of nitrogen in titanium diboride films (TiB2) grown by reactive dc magnetron sputtering. Ti-BN coatings with different N contents were deposited on Si (100) substrates from a TiB2 target. The sputtering was carried out in an Ar-N2 gas mixture with a substrate bias voltage in the range between +100V e -100V. The effects of the nitrogen content and the influence of substrate bias voltage on the coatings properties were studied by Rutherford Backscattering Spectrometry (RBS), XRay photoelectron spectroscopy (XPS), X-Ray diffraction (XRD), profilometry (internal stress measurements), atomic force microscopy (AFM) and contact angle measurements. The results of the present work show that nitrogen incorporation produces films with higher compressive internal stress. However, a positive substrate bias reduces the compressive stress, thus resulting in a better adhesion to the substrate. The XPS results showed that the TiB2, TiN and BN phases are present in the Ti-B-N films. Characterization by XRD determined the nanocrystalline structure of Ti-B-N coatings. Measurements by AFM revealed low surface roughness values.
Dutron, Anne-Marie. "Dépots LPCVD de siliciures ternaires Me-Si-N (Me= Re, W, Ti, Ta) pour des applications en microélectronique." Grenoble INPG, 1996. http://www.theses.fr/1996INPG0092.
Full textLe, Brizoual Laurent. "Analyse expérimentale et modélisation du dépôt de films de Ti-Si-N par pulvérisation réactive r. F. Magnétron." Nantes, 2000. http://www.theses.fr/2000NANT2125.
Full textNgendahimana, Aimable. "Investigation of Novel Routes in the Synthesis of TiNF and Compounds in the Ti-N-O-F System." Youngstown State University / OhioLINK, 2010. http://rave.ohiolink.edu/etdc/view?acc_num=ysu1278100734.
Full textHong, Kai Cheng, and 洪愷誠. "Study of Ti-Si-N film." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/60285077502466019287.
Full textChen, Jun-Hao, and 陳君濠. "Deposition and characterization of Ti-Si-N, Ti-Si-C-N films by cathodic arc plasma evaporation." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/zrzu7r.
Full text國立虎尾科技大學
材料科學與綠色能源工程研究所
97
There are two phases in this study. In phase one, nanocomposite Ti-Si-N films were deposited by a filtered cathodic arc plasma deposition system. The influences of bias voltages on the microstructure, mechanical and corrosion properties of the films were investigated. In phase two, Ti-Si-N and Ti-Si-C-N films were deposited by a dual cathodic arc plasma deposition system. The influences of C2H2/N2 flow rate ratio on the microstructure, mechanical properties, corrosion resistance and oxidation behavior of the films were investigated. Field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), transmission electron microscopy (TEM), X-ray diffraction techniques (XRD), X-ray photoelectron spectroscope (XPS), Raman spectroscopy, nano-indenter, wear and corrosion testes were also employed to investigate the microstructures and properties of films. The results of the experiment show that Ti-Si-N films which were deposited using filter system revealed characteristics which are smooth surface, dense structure, good wear and corrosion resistance. The incorporation of C in Ti-Si-N film improves the wear behavior of the films while that were unbeneficial for corrosion and oxidation resistance. The friction coefficients of the TiSiCN films were between 0.2 and 0.3. The hardness of the film decreased when the C2H2/N2 flow rate ratio increased, the value of the hardness were between 4GPa~34GPa. After oxidation at high temperature, the oxide layer consists of TiO2 and SiO2 which presented as a solid solution. As the C content increased, the dominant TiO2 phase in oxide layer changed from rutile to anatase.
Dashdorj, Dugersuren. "Spin distribution in preequilibrium reactions for ⁴⁸Ti + n." 2005. http://www.lib.ncsu.edu/theses/available/etd-03252005-191446/unrestricted/etd.pdf.
Full textBangani, Vuyokazi Lusanda. "Computation of some properties of Ti-Si-C and Ti-Al-N MAX phase materials." Thesis, 2010. http://hdl.handle.net/10539/8346.
Full textBuchholz, Stephen. "RECIPROCATING WEAR RESPONSE OF Ti(C,N)-Ni3Al CERMETS." 2011. http://hdl.handle.net/10222/14409.
Full textHolmes, Melanie. "Electrochemical Behaviour of Ti(C,N) and TiC Cermets." 2012. http://hdl.handle.net/10222/15345.
Full textNaidoo, Melisha. "Preparation of (Ti,Ta)(C,N) by mechanical alloying." Thesis, 2013. http://hdl.handle.net/10539/12352.
Full textLee, Chien-Chih, and 李建志. "Study on Characteristics of (Ti,TiAl)N/(Ti,TiAl)CN Mixed Coatings by Filtered CAD Process." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/44217153013193875027.
Full text大同大學
材料工程學系(所)
94
The work investigated to improve the defect of the bigger particle by Cathodic Arc Deposition (CAD) system with filtered. Because the TiN、TiAlN and TiCN coatings are popularly investigated before. Thereby, in this case, use a Ti target and TiAl target moreover N2 and C2H2 gases are through into with the process parameters to deposited (Ti,TiAl)N and (Ti,TiAl)CN two mixed films. They expect to obtain excellent properties besides to compare with filtered effect. Via knew with the experiment, the filter improves the defect of bigger particle, there are best improvement in roughness (Ra)、adhesion and porosity, moreover the structure cannot change. Also because the porosity decrease to improved with the corrosion resistance. But the particle decrease resulted in the decrease of depositing rate.
Wang, Jyh-Liang, and 王志良. "Characterization of Sputtered TiB2 and Ti-B-N Diffusion Barriers." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/20441733527437218707.
Full text國立成功大學
材料科學及工程學系
87
TiB2 and Ti-B-N films deposited by co-sputtering from a TiB2 and a boron target are evaluated as diffusion barriers for Cu/
Figueiredo, José Miguel Fernandes. "Analysis of the tribological behaviour of W-Ti-N coatings." Master's thesis, 2013. http://hdl.handle.net/10316/23872.
Full textLin, Nai-Yuan, and 林乃元. "Mechanical Properties and Oxidation Resistance of Ti–Si–N Coatings." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/5h49f3.
Full text國立臺灣海洋大學
材料工程研究所
106
Ti–Si–N coatings were fabricated using reactive direct current magnetron cosputtering. Fixed titanium target power and changes silicon power. The Ti–Si–N coatings with Si contents of 3–16 at. % exhibited crystalline, whereas the Ti–Si–N coatings with Si contents of 20 and 23 at. % were near-amorphous. The Ti31Si16N53 coatings exhibited maximum mechanical property levels, including a nanoindentation hardness of 19.2 GPa and a Young’s modulus of 247 GPa. The oxidation resistance of the Ti–Si–N coatings was evaluated through annealing at 600 ℃ in a 1%O2–99%Ar atmosphere. The Ti–Si–N coatings showed good oxidation resistance. High silicon content coatings. Rutile TiO2 formed in the early stage of oxidation, however, the reflection intensity of X-ray diffraction decreased in further annealing. To explore the stability in glass molding procrsses, thermal cycles annealing, involving annealing at 270 ℃ to 600 ℃ and maintaining at 600 ℃ ± 10 ℃ hold for 1 min. The coatings withstands continuous temperature changes over 500 cycles. In this study, transmission electron microscopy and X-ray photoelectron spectroscopy were applied to investigate the evolution of nanostructure and bonding characteristics of the annealed Ti–Si–N coatings. Keywords: Annealing, Mechanical properties, Oxidation, Transmission electron microscopy; X-ray photoelectron spectroscopy