Dissertations / Theses on the topic 'Transistors bipolaires à hétérojonction Si'
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Bazzi, Jad. "Caractérisation des transistors bipolaires à hétérojonction SiGe à très hautes fréquences." Thesis, Bordeaux 1, 2011. http://www.theses.fr/2011BOR14296/document.
Full textSiGe HBTs have proven their capability to support large bandwidth and high data ratesfor high-speed communication systems. Systems operating at 820GHz with these componentshave already been implemented. To design circuits operating at high frequencies, adetailed analysis of the intrinsic behavior should be performed. The main objective of thisthesis is the characterization of the intrinsic part of these components. Good accuracy inthe millimeter wave frequency range represents a real challenge, since the intrinsic deviceparameters are much lower than the raw data measurement that is associated with theextrinsic part of the component. However, existing on-wafer de-embedding techniquesare known to be inadequate to remove completely the parasitic effects and to get thereal intrinsic characteristics. In addition, an on-wafer calibration technique has beendeveloped. This overcomes the effects of coupling between the surface of the standard calibrationand RF probe tips. The set has been validated by an electromagnetic simulation
Mnif, Hassène. "Contribution à la modélisation des transistors bipolaires à hétérojonction Si/SiGe en température." Bordeaux 1, 2004. http://www.theses.fr/2004BOR12786.
Full textThe consideration of the temperature and in particular of he self-heating effect in Si/SiGe heterojunction bipolar transistors is a fundamental aspect to predict in a precise way these electric characteristics. The use of these components in microwaves applications exposes to various tempertaures and strong densities of current, accentuates enormously these effects. Consequently, a precie modelling of these phenomena is necessary. A dynamic model describing the self-heatinng, characterized by a rise in the junction temperature, is developed. An electric equivalence close to the analytical model, compatible with SPICE electric models type, is established. A specific test bench is used in order to evaluate the new model and to extracts its parameters. In a second part, the temperature dependence of the various compact model parameters is studied, in particular in the HICUM model
Danaie, Stéphane. "Étude de l’appariement des transistors bipolaires à hétérojonction Si/SiGe issus de technologies bicmos." Grenoble INPG, 2007. http://www.theses.fr/2007INPG0160.
Full textThe present work deals with matching of Si/Si Ge heterojunction bipolar transistors (HBT) in BiCMOS technologies. This study should lead to the identification of electrical parameter random fluctuations. First, thanks to the comparison of experimental matching results, obtained on several HBTs architectures, we have highlighted typical base and collector CUITent matching properties. Then, in the ideal CUITent region, physical models based on dopant fluctuations have been established. Ln the low CUITent region, base CUITent matching degradation has been full y interpreted and a new physical model has been proposed. This analysis has also been confirmed by a matching characterization after hot carrier injection stress. Finally, at high cUITents, base and collector CUITent mismatch degradation origins have been clearly demonstrated experimentally
Ardouin, Bertrand. "Contribution à la modélisation et à la caractérisation en hautes fréquences des transistors bipolaires à hétérojonction Si/SiGe." Bordeaux 1, 2001. http://www.theses.fr/2001BOR12465.
Full textPolleux, Jean-Luc. "Contribution à l'étude et à la modélisation de phototransistors bipolaires à hétérojonction SiGe/Si pour les applications opto-microondes." Paris, CNAM, 2001. http://www.theses.fr/2001CNAM0392.
Full textPotentialities of SiGe/Si heterojunction bipolar phototransistors are explored through physical simulations. A drift-diffusion hydrodynamic model coupled to an optical absorption model is used. The full set of the models of the SiGe/Si parameters is set up. The band gap energy variations models are reviewed. Simple and accurate effective densities of states equations are developed and the optical absorption coefficient model is extracted from 90K measurement's data. A MacFarlane average phonon model is used and an original extraction procedure is described that gives optical wavelength, temperature and Ge composition dependent variation's laws. Novel fundamental and general tools are then defined to properly describe the opto-microwave behaviour of phototransistors : The optical carried microwave signal is treated through the optical power which is modelled through an equivalent current source. Worth of this representation is described and argued. Responsivities and optical gain are generalised in order to take into account the three-port behaviour of the device. An opto-microwave power gain is defined, as well as opto-microwave S parameters. A maximum working frequency definition is proposed. Optimisation of terminal loads of different InP/InGaAs HPTs is presented. Some SiGe/Si HPT prototypes are produced and then analysed through the use of so-built study tools. Along this way, the understanding of the internal mechanisms is improved and potential opto-microwave performance are described. A lγm optical measurement bench is then proposed
Brossard, Florence. "Epitaxies Si/SiGe(C) pour transistors bipolaires avancés." Phd thesis, Université Joseph Fourier (Grenoble), 2007. http://tel.archives-ouvertes.fr/tel-00200095.
Full textCette chimie à base de silane permet d'augmenter significativement la vitesse de croissance par rapport au système SiCl2H2/GeH4/HCl/H2 utilisé classiquement, aussi bien pour un dépôt silicium sélectif que pour un film SiGe sélectif. Par exemple, pour un film Si0,75Ge0,25 la vitesse de croissance est multipliée par un facteur 8.
L'incorporation des atomes de carbone dans les sites substitutionnels est facilitée par cette hausse du taux de croissance. En effet, la teneur en carbone substitutionnel est plus élevée en utilisant le silane comme précurseur de silicium (jusqu'à un facteur 4). L'effet bloquant du carbone sur la diffusion du bore est alors meilleur et le dopant est mieux contenu dans la base Si/SiGeC:B. Cette meilleure incorporation du carbone se reflète dans les résultats électriques. Le courant IB n'augmente pas aux fortes concentrations de carbone, ce qui signifie qu'il n'y a pas de centres recombinants dans la base. Le courant IC et la fréquence fT augmentent aussi, ce qui suggère que la largeur de la base neutre est plus fine et donc que la diffusion du bore est ralentie.
Nous avons également mis en évidence l'existence d'une corrélation entre le courant IB et l'intensité du signal de photoluminescence à température ambiante. En effet, considérant que leurs mécanismes de recombinaison sont similaires, nous avons noté que la hausse de IB correspond à la chute de la photoluminescence.
Barbalat, Benoit. "Technologie et Physique de Transistors Bipolaires à Hétérojonction Si/SiGeC Auto-alignés très Hautes Fréquences." Phd thesis, Université Paris Sud - Paris XI, 2006. http://tel.archives-ouvertes.fr/tel-00139028.
Full textRaya, Christian. "Modélisation et optimisation de transistors bipolaires à hétérojonction Si/SiGeC ultra rapides pour applications millimétriques." Bordeaux 1, 2008. http://www.theses.fr/2008BOR13602.
Full textWith the recent improvement in silicon technologies, SiGeC bipolar transistors are now able to compete with III-V technologies for millimeter-wave applications (frequency-range 60GHz/80GHz). However to break into the millimeter-wave market, the circuit frequency will be close to the devices cut-off frequency. Therefore, the transistors work in extremely non-linear conditions and the high injection needs to be accurately modelled. First, a description of the bipolar transistors architecture allows introducing the device parasitic components. Extraction methods based on specific test structures are presented to identify the key parameters limiting the high frequency performances, and for process optimization. Secondly the hyper-frequency characterization method is discussed in the millimeter range. Finally, the last part of this thesis is a contribution to the extraction of the compact bipolar model HICUM high-injection parameters
Michaillat, Marc. "Paramètres matériau pour la simulation de transistors bipolaires à hétérojonctions Si/SiGe et Si/SiGeC." Phd thesis, Université Paris Sud - Paris XI, 2010. http://tel.archives-ouvertes.fr/tel-00461914.
Full textBarbalat, Benoît. "Technologie et physique de transistors bipolaires à hétérojonction Si/SiGeC auto-alignés à très hautes performances." Paris 11, 2006. http://www.theses.fr/2006PA112334.
Full textThis thesis has for main purpose the study and optimization in industrial environment of Si/SiGe heterojunction bipolar transistors having very high performances for telecommunication and radar detection applications. The first chapter is a reminder of the theory of the bipolar transistor, both in its static and dynamic operations. We present in the second chapter a history of the fabrication technologies of SiGeC HBTs, explaining the reasons leading to a fully self aligned structure with selective epitaxial growth of the base. Performances obtained in this thesis are compared with the state of the art. The third chapter deals with the classical optimization of the bipolar transistor, and we demonstrate how, by several optimizations made on the vertical profile and the lateral extension of the device, we could push up the performances from 200GHz up to 300GHz reached at the end of this work. Chapter IV deals with the optimization of the BVceo voltage by technological processes breaking out from the standard optimization scheme. Significant improvements of the breakdown voltage are demonstrated, which enables to get state of the art fTxBVceo products. Finally, the last chapter has for objective the study of the HBT behavior with temperature: We describe first the self-heating of the transistor, and its impact on dynamic performances. We finish by the study of the bipolar transistor at cryogenic temperatures. Dynamic performances are strongly improved at low temperature, we can deduct from the extraction of the several delays on the device interesting perspectives for further optimization of the transit times, to reach ultimate performances
Jouan, Sébastien. "Développement et caractérisation de transistors bipolaires à hétérojonctions Si/SiGe pour les circuits radiofréquences." Université Joseph Fourier (Grenoble), 2001. http://www.theses.fr/2001GRE10011.
Full textDuvernay, Julien. "Développement et étude de transistors bipolaires à hétérojonctions Si/SiGeC de type pnp sur substrats SOI minces." Toulouse, INSA, 2008. http://eprint.insa-toulouse.fr/archive/00000204/.
Full textRecently, Si pnp bipolar transistors have known an increasingly interest with the development of complementary BiCMOS technologies. Furthermore, by using a thin-SOI substrate instead of a bulk substrate, MOS transistor and passive devices performances are improved. The work performed during this thesis aims at developing and studying pnp Si/SiGeC heterojunction bipolar transistors on thin-SOI to integrate them into a thin-SOI complementary SiGe BiCMOS technology
Penarier, Annick. "Etude du bruit de fond BF et HF dans les transistors bipolaires double polysilicium et dans les transistors bipolaires à hétérojonction Si/SiGe et InP/GaInAs." Montpellier 2, 2001. http://www.theses.fr/2001MON20117.
Full textBenoit, Patrice. "Influence de paramètres technologiques sur le bruit basse fréquence des transistors bipolaires à hétérojonction Si[slash]SiGe[deux points]C." Montpellier 2, 2005. http://www.theses.fr/2005MON20211.
Full textChay, Cyril. "Etude du bruit basse fréquence dans les transistors bipolaires à hétérojonction issus de technologies avancées sur filières Si/SiGe et Si/SiGeC." Montpellier 2, 2004. http://www.theses.fr/2004MON20199.
Full textMilitaru, Liviu-Laurentiu. "Etude des défauts induits lors de l'intégration des transistors bipolaires a hétérojonction Si/SiGe dans une technologie BiCMOS avancée." Lyon, INSA, 2000. http://www.theses.fr/2000ISAL0081.
Full textProgress in growth techniques for the deposition of pseudomorphic SiGe epitaxial layers has allowed the incorporation of these thin films into silicon technology. Using a strained SiGe layer as the base of bipolar transistors strongly improves device performance and allows the development of high frequency circuits for telecommunications. The development of SiGe epitaxial base transistors has now reached a point where attention must be paid to any source of defects which could alter process quality and thus transistor performance. It is therefore important to evaluate the influence of process steps (such as etching, annealing or implantation) on device performance and point out which ones are liable to degrade transistor performance. Our purpose has been to electrically characterize Si/SiGe heterojunction bipolar transistors in order to identify parasitic effects that can influence the static and dynamic transistors' performances. Our study includes two major parts. Current-voltage static characteristics allow us to identify the conductions mechanisms at the emitter-base end base-collector junctions. We have observed a degradation of these characteristics at low temperature induced by the deep levels within the bandgap. Afterwards, we have done capacitance transient spectroscopy and random telegraph signal measurements to characterize these deep levels in order to localize them and to determine their physical properties (such as activation energy, effective caption section). This study allows us to analyze the effect of deep levels on the static characteristics or on the low frequency noise properties of SI/SIGE HBTS. We have also indicated the technological steps, which introduce these defects
Frégonèse, Sébastien. "Contribution à la modélisation électrique sous l'aspect du dimensionnement des transistors bipolaires à hétérojonctions Si/SiGe." Bordeaux 1, 2005. http://www.theses.fr/2005BOR12999.
Full textGeynet, Boris. "Développement et étude de transistors bipolaires à hétérojonctions Si/Si/Ge : C pour les technologies BiCMOS millimétriques." Thesis, Lille 1, 2008. http://www.theses.fr/2008LIL10150/document.
Full textSi/SiGe:C heterojunction bipolar transistors integrated in BiCMOS technologies now reach cut-off frequencies fT and fmax larger than 200GHz. This allows them to address millimeter-wave applications up to 100GHz such as anti-collision automobile radars and optical and wireless communications. The purpose of this thesis is the development and the study of Si/SiGe:C HBTs for millimeter-wave BiCMOS technologies. After a reminder of the bipolar transistor theory, we show the methods of fabrication, characterization and modeling of high-speed devices. The architectures chosen by the main manufacturers of the semiconductor market are detailed and the obtained performances are compared. Then, we present the investigations driven for the development of the BiCMOS9MW technology from STMicroelectronics. A low-cost version of the high-speed HBT and a high-voltage device fully compatible with the technology are presented and the state-of-the-art results are shown. We also study the impact of the variations of the technological parameters and the design mIes on the main characteristics of devices. The last part of this work is dedicated to the development of new technological solutions in order to further improve the transition frequency fT of Si/SiGe:C HBTs. An optimization of the vertical profile has been realized thanks to the development of a new collector module using a selective epitaxy and to the reduction of the thermal budget during the devices fabrication. This last study leads to an improvement of the transition frequency fT above 400GHz at room temperature, this is the best performance obtained to date for a transistor in silicon technology
Seif, Marcelino. "Caractérisation et modélisation des sources de bruit BF dans les transistors bipolaires développés en technologie BiCMOS (sub 0,13µm) pour applications RF et THz." Thesis, Montpellier, 2015. http://www.theses.fr/2015MONTS127/document.
Full textThe presented thesis work, in this manuscript, focuses on the characterization and modeling of the low frequency noise sources in heterojunction bipolar transistors Si/SiGe :C derived from 130 to 55 nm BiCMOS technology used in the production of integrated circuits dedicated for THz domain applications. From measurements versus bias, geometrical parameters (emitter area and perimeter) and temperature, the 1/f noise component, associated to the base current fluctuations, has been fully characterized and the associated sources have been localized. The SPICE compact model parameters have been extracted and compared with those of the literature. For the BiCMOS 130 nm technology, the obtained figure of merit value of 6,8 10-11 µm2 represents the best published result so far in all bipolar transistors. The dispersion study of the 1/f noise component, performed over a complete wafer, allowed us to extend the SPICE type compact modeling. Measured over a large temperature range, the 1/f noise did not show any variations. For the first time, a complete characterization of the 1/f component at the output of the transistors is presented as well as the extraction of SPICE parameters. Regarding the characterization of generation-recombination components (unsystematic presence), a statistical study has showed that transistors with small emitter areas (Ae < 1 µm2) are affected more than the transistors with large emitter areas by the presence of g-r components. Comparison between different technologies shows that these components are much more present in the less mature technologies. When these components have been associated to RTS, time and frequency domain method is implemented. Finally, in some cases, a study at low temperatures was used to extract the activation energy of the traps responsible for the generation-recombination components
Alaeddine, Ali. "Le Transistor Bipolaire à Hétérojonction Si/SiGe sous contraintes électromagnétiques : des dégradations électriques à l'analyse structurale." Rouen, 2011. http://www.theses.fr/2011ROUES001.
Full textThis work proposes a new methodology for studying the reliability of the Heterojunction Bipolar Transistors (HBTs) in SiGe technology. The originality of this study comes from the use of a targeted electromagnetic field stress by using the near field bench. This type of stress has to degrade the performance of this component causing failure mechanisms. The DC characterizations showed the presence of leakage currents at Si/SiO2 interface, not only between the base and the emitter, but also between the base and the collector. This is attributed to a trapping phenomenon induced by hot carriers which have been generated during stress. This phenomenon has been addressed by the physical modeling, by studying the influence of interface traps on the drift of the HBT characteristics. To identify the failures that can be detected by microscopy, characterization of the structure before and after ageing was performed by Transmission Electron Microscopy (TEM) and energy dispersive spectroscopy (EDS). These analyses revealed the degradation of the titanium layers around the emitter, the base and the collector. The degradations are attributed to the gold (Au) migration into the titanium (Ti) due to the high current density induced by stress. Some of these Au–Ti reactions are known to increase the resistivity of the conducting layers which directly affects the HBTs‟ dynamic performances
Avenier, Grégory. "Développement et étude de transistors bipolaires à hétérojonctions Si/SiGe verticaux sur substrats SOI minces." Bordeaux 1, 2006. http://www.theses.fr/2006BOR13228.
Full textChaudier, Frédérique. "Etude physique des transistors bipolaires à hétérojonctions Si/SiGe intégrés dans une technologie BiCMOS 0,35 µm." Lyon, INSA, 2001. http://www.theses.fr/2001ISAL0056.
Full textThis work reports on a physical study of SiGe heterojunction bipolar transistors. We study how device performance is affected by the position of the emitter-base (EB) and base-collector (BC) junctions. From numerical simulations, we demonstrated that the performance degradation due to boron outdiffusion at the BC junction could depend on the position of EB junction in the SiGe gradual base. An experimental study of EB and BC junction positions in real bipolar transistors was carried out. From the experimental results, we established that selective ion implantation of collector (SIC) is responsible for transient enhanced diffusion effect. These effects induce junction displacements and performance variations. Our experimental study was also very useful to analyse small geometry effects. One of our conclusions was that small transistor collector current can be improved under certain conditions
Ruat, Marie. "Etude des mécanismes de viellissement [i. E. Vieillissement] sous contrainte électrique des transistors bipolaires à hétérojonction Si/SiGeC issus de technologies BiCMOS avancées." Grenoble INPG, 2006. http://www.theses.fr/2006INPG0157.
Full textRapid evolution in bipolar transistors architectures and materials in the past ten years led to new reliability concerns. Degradation of electrical characteristics and especially of base current was investigated under the three main known degradation modes for bipolar transistors: reverse mode, forward mode and mixed-mode. Main relevant results led to a unique behaviour after any of these three reliability stresses: the apparition of a generation recombination non-ideal excess base current, characteristic of interface traps created by hot carriers at Si/Si02 spacer and/or STI interfaces. Acceleration factors of the base current degradation with stress time and any other stress parameters were extracted in details, and led to the proposal of empirical models that should be taken into account next bipolar transistors generations qualification work. TCAD simulations and LF noise measurements before and after stress were also implemented for further understanding of bipolar transistor aging studies. Finally, the unified behaviour of degradation under any reliability stress is discussed
Mans, Pierre-Marie. "Optimisation de transistors bipolaires à hétérojonctions Si/SiGe∶C en technologie BiCMOS 0.25 μm pour les applications d’amplification de puissance". Thesis, Bordeaux 1, 2008. http://www.theses.fr/2008BOR13661/document.
Full textThe present work deals with Si/SiGe:C heterojonction bipolar transistor optimization for power amplifier applications dedicated to wireless communications. We first present the investigated structure, a Si/SiGe:C heterojonction bipolar transistor integrated in a 0.25µm BiCMOS technology on 200 mm wafers. We discuss the cell dedicated to power amplification. We have paid attention to thermal phenomenon linked to this kind of cell and to possible dedicated solutions. Various optimizations realized on HBT architecture are detailed. These optimizations concern technological process modifications and transistor design. The main objective of this work is to improve both large and small signal characteristics. This is obtained by transistor design rule variations, collector and base intrinsic parameters optimization. Finally, two kind of developed HBT architectures are presented. One, simple polysilicium quasi self aligned, integrated in a technology dedicated to power amplification, the other one fully self aligned with double polysilicium structure
Gauthier, Alexis. "Etude et développement d’une nouvelle architecture de transistor bipolaire à hétérojonction Si / SiGe compatible avec la technologie CMOS FD-SOI." Thesis, Lille 1, 2019. http://www.theses.fr/2019LIL1I081.
Full textThe studies presented in this thesis deal with the development and the optimization of bipolar transistors for next BiCMOS technologies generations. The BiCMOS055 technology is used as the reference with 320 GHz fT and 370 GHz fMAX performances. Firstly, it is showed that the vertical profile optimization, including thermal budget, base and collector profiles allows to reach 400 GHz fT HBT while keeping CMOS compatibility. In a second time, a fully implanted collector is presented. Phosphorous-carbon co-implantation leads to defect-free substrate, precise dopants profile control and promising electrical performances. A new 450 GHz fT record is set thanks to optimized design rules. A low-depth STI module (SSTI) is developed to limit the base / collector capacitance increase linked to this type of technology. In a third time, the silicon integration of a new bipolar transistor architecture is detailed with the aim of overcoming DPSA-SEG architecture limitations used in BiCMOS055 and first electrical results are discussed. This part shows the challenges of the integration of new-generation bipolar transistors in a CMOS platform. The functionality of the emitter / base architecture is demonstrated through dc measurements. Eventually, the feasibility of 28-nm integration is evaluated with specific experiments, especially about implantations through the SOI, and an overview of potential 3D-integrations is presented
Assous, Myriam. "Caractérisation de transistors bipolaires à hétérojonctions Si/SiGe intégrés : corrélation à la technologie et éléments de modélisation." Lyon, INSA, 1999. http://www.theses.fr/1999ISAL0018.
Full textMy thesis is concerned with is Si/ SiGe hetero-junction bipolar transistors (SiGe HBT) behavior, related to the SiGe base epitaxy. These specific phenomena leading to non standard operation compared to Si BJTs are underscored. We focused on the study of base-collector junction leakage current and of neutral base recombination. Correlation of electrical results to the fabrication process contributed to the improvement of pre-epitaxial surface preparation and of strained SiGe layer quality. From the electrical characterization of neutral base recombination, we deduced a method for extracting the apparent electron lifetime in the base. The basic equations needed to include neutral base recombination in compact models of the SiGe HBT (suitable for circuit simulation) were established. •finally, based on our measurements it was demonstrated that improved performance could be obtained at circuit level although the HBTs used in this study had their performance limited by integration constraints
Berranger-Marinet, Elisabeth de. "Etude et fabrication de transistors bipolaires à hétérojonctions Si/SiGe (TBH) intégrés dans une filière BiCMOS industrielle 0. 5µ." Lyon, INSA, 1998. http://www.theses.fr/1998ISAL0026.
Full textThis work deals with Si/SiGe Hetero junction Bipolar Transistors (SiGe HBTs). We present our method for integrating HBTs into a Bi CM OS process from the CNET -SGS Thomson Joint Center. Firstly, the main parameters (Ge profile, Boron position with respect to SiGe layer) acting on HBT operation were identified in order to adapt device architecture to the technological context and take benefit from the SiGe base (this especially implied the set up of a simulation environment adapted to hetero structures). Technological constraints and their consequences were taken into account. The first results highlighted a few technological problems which were solved in the following batches. Electrical characterisation showed a clear improvement of the performance and pointed out the decisive advantages of SiGe in a BiCMOS technology. We also verified that MOS transistors were not perturbed. This work proves the feasibility of HBT integration into a BiCMOS process and presents future prospects for the evolution of the structure
Vu, Van Tuan. "Recherche et évaluation d'une nouvelle architecture de transistor bipolaire à hétérojonction Si/SiGe pour la prochaine génération de technologie BiCMOS." Thesis, Bordeaux, 2016. http://www.theses.fr/2016BORD0304/document.
Full textThe ultimate objective of this thesis is to propose and evaluate a novel SiGe HBT architec-ture overcoming the limitation of the conventional Double-Polysilicon Self-Aligned (DPSA) archi-tecture using Selective Epitaxial Growth (SEG). This architecture is designed to be compatible with the 28-nm Fully Depleted (FD) Silicon On Insulator (SOI) CMOS with a purpose to reach the objec-tive of 400 GHz fT and 600 GHz fMAX performance in this node. In order to achieve this ambitious objective, several studies, including the exploration and comparison of different SiGe HBT architec-tures, 55-nm Si/SiGe BiCMOS TCAD calibration, Si/SiGe BiCMOS thermal budget study, investi-gating a novel architecture and its optimization, have been carried out. Both, the fabrication process and physical device models (incl. band gap narrowing, saturation velocity, high-field mobility, SRH recombination, impact ionization, distributed emitter resistance, self-heating and trap-assisted tunnel-ing, as well as band-to-band tunneling), have been calibrated in the 55-nm Si/SiGe BiCMOS tech-nology. Furthermore, investigations done on process thermal budget reduction show that a 370 GHz fT SiGe HBT can be achieved in 55nm assuming the modification of few process steps and the tuning of the bipolar vertical profile. Finally, the Fully Self-Aligned (FSA) SiGe HBT architecture using Selective Epitaxial Growth (SEG) and featuring an Epitaxial eXtrinsic Base Isolated from the Collector (EXBIC) is chosen as the most promising candidate for the 28-nm FD-SOI BiCMOS genera-tion. The optimization of this architecture results in interesting electrical performances such as 470 GHz fT and 870 GHz fMAX in this technology node
Canderle, Élodie. "Études et développement de transistors bipolaires Si/SiGe : C rapides dans un nœud BiCMOS 55 nm." Thesis, Lille 1, 2014. http://www.theses.fr/2014LIL10193/document.
Full textThis work was carried out during BiCMOS055 technology development in 300 mm platform, the first one worldwide in node 55 nm, with frequencies as high as fT = 320 GHz and fMAX = 370 GHz. First we present the study of different solutions to reduce the extrinsic base resistance in DPSA-SEG architecture to improve the maximum oscillation frequency fMAX. We show then that changing material properties does not provide any improvement, but the insertion of dedicated anneals after the intrinsic base formation significantly increases the transistor performance while being compatible with MOS devices. In a second part, we demonstrate the potentialities of a low-cost transistor with a fully implanted collector, removing the buried layer and deep trench isolations. It has been shown it is possible to reach 96% fT and 91% fMAX with adequate structures layout, compared to the reference technology parameters. In the last part we analyze the impact of back-end-of-line connections on the bipolar device right below: the main effect is created by residual stress in the metal lines transferred into the device itself; the thermal study showed little influence of the back-end-of-line stack
Quiroga, Andrés. "Investigation and development of advanced Si/SiGe and Si/SiGeC Heterojunction Bipolar Transistors by means of Technology Modeling." Thesis, Paris 11, 2013. http://www.theses.fr/2013PA112273/document.
Full textThe present work investigates the technology development of state-of-the-art SiGe and SiGeC Heterojunction Bipolar Transistors (HBT) by means of technology computer aided design (TCAD). The objective of this work is to obtain an advanced HBT very close to the real device not only in its process fabrication steps, but also in its physical behavior, geometric architecture, and electrical results. This investigation may lead to achieve the best electrical performances for the devices studied, in particular a maximum operating frequency of 500 GHz. The results of this work should help to obtain more physical and realistic simulations, a better understanding of charge transport, and to facilitate the development and optimization of SiGe and SiGeC HBT devices.The TCAD simulation kits for SiGe/SiGeC HBTs developed during our work have been carried out in the framework of the STMicroelectronics bipolar technology evolution. In order to achieve accurate simulations we have used, developed, calibrated and implemented adequate process models, physical models and extraction methodologies. To our knowledge, this work is the first approach developed for SiGe/SiGeC HBTs which takes into account the impact of the strain, and of the germanium and carbon content in the base, for both: process and electrical simulations.In this work we will work with the successive evolutions of B3T, B4T and B5T technologies. For each new device fMAX improves of 100 GHz, thus the technology B3T matches to 300 GHz, B4T and B5T to 400 and 500 GHz, respectively.Chapter one introduces the SiGe SiGeC heterojunction bipolar technologies and their operating principles. This chapter deals also with the high frequency AC transistor operation, the extraction methods for fMAX and the carrier transport in extremely scaled HBTs.Chapter two analyzes the physical models adapted to SiGeC strained alloys used in this work and the electrical simulation of HBT devices. This is also an important work of synthesis leading to the selection, implementation and development of dedicated models for SiGeC HBT simulation.Chapter three describes the B3T TCAD simulation platform developed to obtain an advanced HBT very close to the real device. In this chapter the process fabrication of the B3T technology is described together with the methodology developed to simulate advanced HBT SiGeC devices by means of realistic TCAD simulations.Chapter four describes the HBT architectures developed during this work. We will propose low-cost structures with less demanding performance requirements and highly performing structures but with a higher cost of production. The B4T architecture which has been manufactured in clean-room is deeply studied in this chapter. The impact of the main fabrication steps is analyzed in order to find the keys process parameters to increase fMAX without degrading other important electrical characteristics. At the end of this chapter the results obtained is used to elaborate a TCAD simulation platform taking into account the best trade-off of the different key process parameters to obtain a SiGeC HBT working at 500 GHz of fMAX
Thiam, Ndèye Arame. "Etude et développement de transistors bipolaires à hétérojonctions InP/GaAsSb reportés sur Si en vue de l’amélioration de la dissipation thermique." Thesis, Lille 1, 2012. http://www.theses.fr/2012LIL10168/document.
Full textThe InP heterojonctions bipolar transistors (HBT) offer today cut-off frequencies larger than 400GHz for the InP / GaAsSb system. Thanks to these performances, these transistors are used for the realization of successful circuits in millimeter-wave applications such as the optical communications. So, to reach these remarkable performances, the HBT are subject to a notorious self-heating phenomenon due to high current density of collector. This thesis thus has for object the study and the development of InP / GaAsSb HBT transferred on a host substrate of silicon with the aim of the improvement of the thermal behavior. We report first of all the principles of the bipolar transistor as well as the state of the art of the various materials used for fast transistors. A transfer technique of epitaxial layers was then presented. We study bounding problems resulting from the chosen technique and transfer parameters for valid thermo-compression at low temperature were optimized. The development of InP / GaAsSb transferred technology on silicon was then made. In particular, the collector contact realization has needed particular attention. Active layers thickness reduction as well as device fabrication process technology allowed reaching transition frequency Ft higher than 400GHz. The study of HBT thermal behavior was finally presented with thermal resistance extraction. Very low values were obtained on the transferred technology, from 800 to1300 W/K.m according to transistors size; these values are very close to those obtained by TCAD simulation for such a technology. It is the first measurement on InP / GaAsSb transferred-HBT on high thermal conductivity silicon substrate. This transfer technology has so allowed thermal resistance improvement of 70 % compared with that of standard HBT technology. This work leads to the influence of transferred-substrate for the severe reduction of self-heating in bipolar transistors technology
Lacave, Thomas. "Transistor bipolaire Si/SiGe C en nœud CMOS avancé pour applications (sub)-millimétriques." Thesis, Lille 1, 2011. http://www.theses.fr/2011LIL10150/document.
Full textSiGe heterojonction bipolar transistors (HBT) available in production qualified BiCMOS technologies today reach maximum oscillation frequencies fMAX close to 300 GHz. These technologies address millimeter-wave applicationsuntil 100 GHz, as collision avoidance radar for automotive (77 GHz), 60 GHz high date rate wireless communications and 100 Gb/s optical communications.. Objective of the work presented in this manuscript was to increase the transit frequenciess, and more especially fMAX, of SiGe HBTs in order to prepare the next BiCMOS generation. First, the theory of the bipolar transistor and the architecture of the device used for our studies are presented. Then, the different parameters defining the vertical doping profile are investigated and their influences on frequency performances, in particular on the trade-off between the current gain transit frequency fT and fMAX are detailed. The reduction of the lateral dimensions of the transistor, performed to reduce parasitic resistances and capacitances, exhibited the benefits but also the limitations of the scaling toincrease fMAX. Those studies enabled to demonstrate the feasability to integrate a 300-GHz fT and 400-GHz fMAX HBT in a 55-nm CMOS node. Finally, the different generations of devices fabricated during this work, exhibiting fT values between 250 GHz and 320 GHz and fMAX values between 330 GHz et 420 GHz, are compared between them and with BiCMOS9MW, a production qualified technology featuring 220 GHz fT and 280 GHz fMAX. This comparison deals with both the noise and the power (large signal) performances at millimeter-wave frequencies. The benefit of the work carried out in this PhD thesis is also demonstrated through the results of circuits designed by partners from different universities. One of those circuits in particular had been used to demonstrate a prototype of an active imaging system at 160 GHz
Ouhachi, Rezki. "Mise en oeuvre d'un banc de caractérisation non linéaire dans le domaine fréquentiel pour l'analyse de transistors HBT Si/SiGe : C." Thesis, Lille 1, 2012. http://www.theses.fr/2012LIL10165/document.
Full textThe emergence of satellite communications and radar technologies always require more compact microwave power devices for integration of analog/digital operations on a single chip, reducing the manufacturing cost. As an exemple, since many years heterojunction bipolar transistor (HBT) permits to improve the silicon power transistor performances for microwave applications associated with CMOS technology. In this context, this work focuses on the characterization and modeling of these active devices. For this goal, a non linear bench and a large signal model are developed up to 50 GHz. On the first step, the non-linear measurement is carried out using the NVNA for load-pull measurements on the frequency domain and results are compared with those obtained from the LSNA on the time domain. This instrumental configuration associated with the dynamic operating capabilities of NVNA highlights its advantages and disadvantages. Subsequently, a SiGe HBT device extraction parameters procedure has been validated to establish a large signal model. The originality of this last one is its predictive extraction procedure and fast implementation based on the semiconductors analytical equations. Extraction steps are proven very effective in confrontations with the experimental data of the device under test with the same biases and for different load impedances. At last, thermal currents impacts on microwave power performance are discussed in time and frequency domains
Martin, Jean-Christophe. "Étude des mécanismes de dégradation des transistors bipolaires à hétérojonction sur substrat InP destinés aux communications optiques." Bordeaux 1, 2004. http://www.theses.fr/2004BOR12853.
Full textGranier, Hugues. "Optimisation technologique des transistors bipolaires hyperfréquence de puissance à hétérojonction GaAs/GaAlAs." Phd thesis, Université Paul Sabatier - Toulouse III, 1995. http://tel.archives-ouvertes.fr/tel-00146678.
Full textKhelifi, Tarik. "Etude, conception et applications de structures différentielles à transistors bipolaires à hétérojonction." Grenoble INPG, 1996. http://www.theses.fr/1996INPG0075.
Full textDiop, Malick. "Fiabilité et bruit basse fréquence de transistors bipolaires à hétérojonction SiGe :C 250 GHz dédiés aux applications ondes millimétriques." Grenoble INPG, 2009. http://www.theses.fr/2009INPG0126.
Full textThis work concerned the study of reliability and low frequency noise of SiGe: C heterojunction bipolar transistors of BiCMOS9MW dedicated to millimeter-wave applications. A better understanding of the degradation physics of HBTs was presented in this report. So, the reverse, forward and mixed-mode polarization were characterized well and the associated degradation studied in detail by using an original approach of noise and reliability and powerful tools such as the TCAD simulations and the HICUM modelling. Then, acceleration factors of the base current degradation with stress time were extracted according and allowed us to propose new empirical models of life time for all these failure modes. Finally the introduction of design in reliability allowed to simulate for the first time the degradation of HBT on power amplifier at 77GHz
Raoult, Jérémy. "Etude et modélisation de transistors bipolaires à hétérojonction SiGe : application à la conception d'oscillateurs radiofréquences intégrés." Lyon, INSA, 2003. http://theses.insa-lyon.fr/publication/2003ISAL0092/these.pdf.
Full textThe expanding telecommunication market including specifically the field of wireless communication ranging from 900 MHz to 6 GHz leads to constant evolution in integrated circuits supply. The present trend is to increase the integration level and to decrease the consumed power in order to firstly obtain a cheap terminal, and secondly reach a greater autonomy. The BOCMOS technology gives a perfect answer to these needs as it offers a very interesting compromise between cost and performance. In this context, our work contributes to improve the design of local silicon oscillators for radio frequency applications. In a first part, it focuses the charcterization and modelling of SiGe heterojunction bipolar transistors (HBT) from ST Microelectronics 0. 35 micrometer BICMOS 6G technology. In a second part, it aims at optimizing a 5 GHz voltage controlled oscillators. Our study focuses on HBTs low frequency noise and on their consequences for integrated microwave oscillators design
Lijadi, Melania. "Transistors bipolaires à hétérojonction : développement d'une filière InP/GaAsSb pour applications ultra-rapides." Phd thesis, Université Pierre et Marie Curie - Paris VI, 2005. http://tel.archives-ouvertes.fr/tel-00010627.
Full texthétérojonctions de type II par électroluminescence, associée aux mesures électriques a permis de clarifier les conditions du transport électronique dans le système InP/GaAsSb et d'initier l'utilisation d'un émetteur en InGaAlAs. Deux briques technologiques spécifiques ont été développées : la gravure chimique sélective de InGaAlAs par rapport à GaAsSb et la réalisation de contacts ohmiques très faiblement résistifs sur p-GaAsSb. Ceci a permis l'assemblage d'un procédé de fabrication de TBH ultra-rapides dans cette filière. La faisabilité de ce procédé a été démontrée par la réalisation de TBH submicroniques ayant des fréquences ( fT ; fmax) de (155 ; 162) GHz. Son optimisation, protégée par deux brevets, montre des perspectives pour atteindre des fréquences ( fT ; fmax) de (380 ; 420) GHz.
Si, Mahfoud Rachid. "Modélisation des transistors bipolaires à hétérojonction pour la réalisation de circuits monolithiques hyperfréquence." Mémoire, École de technologie supérieure, 2001. http://espace.etsmtl.ca/845/1/SI_MAHFOUD_Rachid.pdf.
Full textJacob-Maneux, Cristell. "Etude des mécanismes de dégradation des transistors bipolaires à hétérojonction sur substrat GaAs." Bordeaux 1, 1998. http://www.theses.fr/1998BOR10509.
Full textTegegne, Zerihun. "SiGe/Si Microwave Photonic devices and Interconnects towards Silicon-based full Optical Links." Thesis, Paris Est, 2016. http://www.theses.fr/2016PESC1070/document.
Full textWith the recent explosive growth of connected objects, for example in Home Area Networks, the wireless and optical communication technologies see more opportunity to merge with low cost MicroWave Photonic (MWP) technologies. Millimeter frequency band from 57GHz to 67GHz is used to accommodate the very high speed wireless data communication requirements. However, the coverage distance of these wireless systems is limited to few meters (10m). The propagation is then limiting to a single room mostly, due to both the high propagation attenuation of signals in this frequency range and to the wall absorption and reflections. Therefore, an infrastructure is needed to lead the signal to the distributed antennas configuration through MWP technology. Moreover, MWP technology has recently extended to address a considerable number of novel applications including 5G mobile communication, biomedical analysis, Datacom, optical signal processing and for interconnection in vehicles and airplanes. Many of these application areas also demand high speed, bandwidth and dynamic range at the same time they require devices that are small, light and low power consuming. Furthermore, implementation cost is a key consideration for the deployment of such MWP systems in home environment and various integrated MWP application.This PhD deals with very cheap, Bipolar or BiCMOS integrated SiGe/Si MWP devices such as SiGe HPTs, Si LEDs and SiGe LEDs, and focused on the combined integration of mm wave and optoelectronic devices for various applications involving short wavelength links (750nm to 950nm).This research focused on the study of the following points:The better understanding of vertical and lateral illuminated SiGe phototransistors designed in a 80 GHz Telefunken GmbH SiGe HBT technology. We draw conclusions on the optimal performances of the phototransistor. The light sensitive Si substrate and two-dimensional carrier flow effects on SiGe phototransistor performance are investigated. This study helps to derive design rules to improve frequency behavior of the HPT for the targeted applications.For future intra /inter chip hybrid interconnections, we design polymer based low loss microwave transmission lines and optical waveguides on low resistive silicon substrate. It is a step to envisage further Silicon based platforms where SiGe HPT could be integrated at ultra-low cost and high performances with other structures such high-speed VCSEL to build up a complete optical transceiver on a Silicon optical interposer. The polymer is used as dielectric interface between the line and the substrate for electrical interconnections and to design the core and cladding of the optical waveguide.The design, fabrication and characterization of the first on-chip microwave photonic links at mid infrared wavelength (0.65-0.85μm) based on 80 GHz Telefunken GmbH SiGe HBT technological processes. The full optical link combines Silicon Avalanche based Light Emitting Devices (Si Av LEDs), silicon nitride based waveguides and SiGe HPT. Such device could permit hosting microfluidic systems, on chip data communication and bio-chemical analysis applications
Roux, Jean-Philippe. "Etude du bruit de fond dans les transistors bipolaires hyperfréquences à hétérojonction GaInP/GaAs." Toulouse 3, 1996. http://www.theses.fr/1996TOU30123.
Full textSaleh, Alaa. "Caractérisation en impulsions étroites et modélisation de transistors bipolaires à hétérojonction en technologie InP." Limoges, 2009. https://aurore.unilim.fr/theses/nxfile/default/d53675da-a4bd-4ac4-b56e-385b631394a2/blobholder:0/2009LIMO4044.pdf.
Full textThe first chapter gives a general description of fast semiconductor devices. Hereon a detailed description of the HBT InP/InGaAs of Alcatel Thales 3-5 Lab used in this work, is given. The second chapter focuses on the description of a test bench developed at Xlim during the thesis. It allows a small signal characterization up to 65 GHz, as well as large signal characterization. The originality of this work is the narrow pulses (40 ns) characterization method, which is very useful for electrothermal modelling. This chapter describes also the model extraction procedure and some steps of validation of the electrothermal model through a pulsed measurement of a current mirror and by time domain waveforms measurements at the transistor ports. In order to show possible use of the electro model the third chapter propose a simulation of a track and hold circuit. Narrow pulses characterization and modelling of hetero junction bipolar transistors in InP technology
Blayac, Sylvain. "Transistor bipolaire à double hétérojonction InP/GalnAs pour circuits de communications optiques à très haut débit." Montpellier 2, 2001. http://www.theses.fr/2001MON20039.
Full textGirardot, Arnaud. "Conception de transistors bipolaires à double hétérojonction GaInP/GaAs en topologie collecteur en haut pour l'amplification très forte puissance." Lille 1, 2001. https://pepite-depot.univ-lille.fr/RESTREINT/Th_Num/2001/50376-2001-315.pdf.
Full textBaratte, Hervé. "Technologie bipolaire hétérojonction AlGaAs/GaAs pour circuits intégrés." Paris 11, 1985. http://www.theses.fr/1985PA112012.
Full textThe good injection properties of the heterojunction bipolar transistor allow predicting very high frequency performance of the device. An ion-implanted double hétérostructure with graded junctions is well adapted for integrated circuits application. An analytic model, close to reality, helps calibrate an optimized structure. It is also a convenient tool to correlate observed performance to the device internal structure. The epitaxial growth sequence is rather complicated because of the presence of two different heterojunctions (AlGaAs/GaAs and GaAs/AlGaAs) and of two types of dopants (Silicium for n-type and Beryllium for p-type). Thanks to a GaAs none intentionally doped interfacial layer, recombination effects in the junctions are greatly reduced. Then, a rapid thermal annealing treatment of the implanted devices proves to be a suitable method to achieve good activation efficiency while limiting dopants diffusion inside the structure. Further integration of such a device is then analyzed. Very high speed and high density of integration are predicted for future I²L or ELC bipolar heterostructures. The HBT (Heterojunction Bipolar Transistor) is also well adapted for linear application
Dhondt, François. "Modélisation électrothermique des Transistors Bipolaires à Hétérojonction (TBH) pour les applications de puissance à haut rendement en bande X." Lille 1, 1997. http://www.theses.fr/1997LIL10100.
Full textPeyretaillade, Thierry. "Modélisation électrothermique des transistors bipolaires à hétérojonction : Application à la conception non linéaire d'amplificateurs de puissance à haut rendement." Limoges, 1997. http://www.theses.fr/1997LIMO0026.
Full textPérez, Marie Anne. "Modèle électrothermique distribué de transistor bipolaire à hétérojonction : application à la conception non linéaire d'amplificateurs de puissance optimisés en température." Limoges, 1998. http://www.theses.fr/1998LIMO0029.
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