Academic literature on the topic 'Transparente leitfähige Oxidschicht'

Solid state lighting is a new environmentally friendly light source. So far, light emitting diodes (LEDs) and organic LEDs (OLEDs) have been presented as candidates with potentially high efficiency. Recent advances of OLEDs in device architecture, light-out coupling, and materials have ensured high efficiency, exceeding that of incandescent light bulbs. In contrast to conventional point source LEDs, OLEDs distribute light throughout the surface area and are not restricted by their size. Additionally, OLEDs are expected to reach sufficient stability in the near future. The remaining challenge for OLEDs is their cost. New OLED technologies provide cost effective manufacturing methods which could be presented for transparent electrode materials because indium tin oxide (ITO), a widely used material as a transparent electrode for OLEDs, is less than optimal due to its high element price. In this work, alternative transparent electrodes for OLEDs as a replacement of ITO were studied. First, Al doped ZnO (ZnO:Al) which is composed of abundant materials was investigated with DC magnetron sputtering under a wide range of experimental conditions. The optimised ZnO:Al received comparable performance with conventional ITO films, low sheet resistance of 22.8 Ω/sq as well as a high transparency of 93.1 % (average value in the visible range). Various type of p-i-n OLEDs were employed on the structured ZnO:Al using photolithography. Green OLEDs with double emission layers have been archived stable efficiencies even at higher luminance. Also, OLEDs using two fluorescent colour system on ZnO:Al anode showed a purely white emission. It has been found that the OLEDs on ZnO:Al anode has comparable or better device efficiencies and operational lifetime compared to OLEDs on conventional ITO anode. As another alternative electrode, the conductive polymer Baytron®PH510 (PEDOT:PSS) was investigated. Due to a relatively high sheet resistance of PEDOT:PSS, metal grid was designed for large size OLEDs. White OLEDs on PEDOT anode with a size of 5 × 5 cm2 have achieved more than 10 lm/W of power efficiency using a scattering foil. Furthermore, up-scaled devices on 10 × 10 cm2 were also demonstrated. These results showed ZnO:Al and PEDOT are suitable for OLEDs as anode and have high potential as alternative transparent electrode materials.

Solid state lighting is a new environmentally friendly light source. So far, light emitting diodes (LEDs) and organic LEDs (OLEDs) have been presented as candidates with potentially high efficiency. Recent advances of OLEDs in device architecture, light-out coupling, and materials have ensured high efficiency, exceeding that of incandescent light bulbs. In contrast to conventional point source LEDs, OLEDs distribute light throughout the surface area and are not restricted by their size. Additionally, OLEDs are expected to reach sufficient stability in the near future. The remaining challenge for OLEDs is their cost. New OLED technologies provide cost effective manufacturing methods which could be presented for transparent electrode materials because indium tin oxide (ITO), a widely used material as a transparent electrode for OLEDs, is less than optimal due to its high element price. In this work, alternative transparent electrodes for OLEDs as a replacement of ITO were studied. First, Al doped ZnO (ZnO:Al) which is composed of abundant materials was investigated with DC magnetron sputtering under a wide range of experimental conditions. The optimised ZnO:Al received comparable performance with conventional ITO films, low sheet resistance of 22.8 Ω/sq as well as a high transparency of 93.1 % (average value in the visible range). Various type of p-i-n OLEDs were employed on the structured ZnO:Al using photolithography. Green OLEDs with double emission layers have been archived stable efficiencies even at higher luminance. Also, OLEDs using two fluorescent colour system on ZnO:Al anode showed a purely white emission. It has been found that the OLEDs on ZnO:Al anode has comparable or better device efficiencies and operational lifetime compared to OLEDs on conventional ITO anode. As another alternative electrode, the conductive polymer Baytron®PH510 (PEDOT:PSS) was investigated. Due to a relatively high sheet resistance of PEDOT:PSS, metal grid was designed for large size OLEDs. White OLEDs on PEDOT anode with a size of 5 × 5 cm2 have achieved more than 10 lm/W of power efficiency using a scattering foil. Furthermore, up-scaled devices on 10 × 10 cm2 were also demonstrated. These results showed ZnO:Al and PEDOT are suitable for OLEDs as anode and have high potential as alternative transparent electrode materials.

Die Temperung mittels Xenon-Blitzlampen (Flash Lamp Annealing - FLA) ist ein Kurzzeittemperverfahren mit Pulszeiten im Bereich von Millisekunden, bei dem nur die Oberfläche eines Substrats erhitzt wird. Durch die Blitzlampentemperung kann der Schichtwiderstand von tansparenten leitfähigen Oxidschichten reduziert und die Transmission im sichtbaren Licht erhöht werden. In dieser Arbeit wurde dies am Beispiel von Indium-Zinn-Oxid (ITO), Indium-Zink-Oxid (IZO) und aluminiumdotiertem Zinkoxid (AZO) gezeigt. Es wurde untersucht, welchen Einfluss verschiedene Prozessparameter wie Energiedichte und Pulszeit des Xenonlichtblitzes, die Absorption der zu behandelnden Schicht, die Gasatmosphäre während der Temperung, die Reflexion im Prozessraum und das Substratmaterial auf die optischen und elektrischen Eigenschaften der Schichten haben. Für ITO-Schichten mit einer Schichtdicke von 150 nm kann der Widerstand von 45 auf <14 Ohm verbessert werden, was vergleichbar mit einer konventionellen Temperung im Umluftofen ist.

Die Temperung mittels Xenon-Blitzlampen (Flash Lamp Annealing - FLA) ist ein Kurzzeittemperverfahren mit Pulszeiten im Bereich von Millisekunden, bei dem nur die Oberfläche eines Substrats erhitzt wird. Durch die Blitzlampentemperung kann der Schichtwiderstand von tansparenten leitfähigen Oxidschichten reduziert und die Transmission im sichtbaren Licht erhöht werden. In dieser Arbeit wurde dies am Beispiel von Indium-Zinn-Oxid (ITO), Indium-Zink-Oxid (IZO) und aluminiumdotiertem Zinkoxid (AZO) gezeigt. Es wurde untersucht, welchen Einfluss verschiedene Prozessparameter wie Energiedichte und Pulszeit des Xenonlichtblitzes, die Absorption der zu behandelnden Schicht, die Gasatmosphäre während der Temperung, die Reflexion im Prozessraum und das Substratmaterial auf die optischen und elektrischen Eigenschaften der Schichten haben. Für ITO-Schichten mit einer Schichtdicke von 150 nm kann der Widerstand von 45 auf <14 Ohm verbessert werden, was vergleichbar mit einer konventionellen Temperung im Umluftofen ist.