Academic literature on the topic 'Ultra-precision machines'
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Journal articles on the topic "Ultra-precision machines"
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Wan, Shao Song, Jian Cao, and Cong Yan. "Interpolation Algorithm Application to New Ultra-Precision Polishing Instrument." Applied Mechanics and Materials 602-605 (August 2014): 3400–3403. http://dx.doi.org/10.4028/www.scientific.net/amm.602-605.3400.
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This paper presented the key techniques development of motor/generator (M/G) for the FES system in recent years, and summarized the latest developments of three machines such as: induction machine (IM), reluctance machine (RM) and permanent magnet machine (PMM) including traditional structure PMM and Halbach structure PMM, which now widely used in the FES system. Ultra smooth surface polishing techniques are the important part in the ultra precision machining system. The new ultra-precision polishing instrument which fit for the precision polishing in the elbow’s internal surface has been researched in this paper. The polishing instrument is a sphere which performs rotating-jet polishing and flexibly dragged by the string. The simulation result has proved that the polishing instrument can polish the internal surface of the elbow and achieve the purpose of the improving roughness of the internal surface.
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Zhan, Lan, Fei Hu Zhang, Chen Hui An, and Zhi Peng Li. "Influencing Factors of Surface Generation in Ultra-Precision Fly Cutting." Advanced Materials Research 1136 (January 2016): 221–26. http://dx.doi.org/10.4028/www.scientific.net/amr.1136.221.
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Ultra-precision fly cutting machines have long been the hardest one to compliant and induce great focus of researchers. In this paper, a surface topography model is proposed to predict the surface generation in an ultra-precision fly cutting machine. The building of surface topography model is based on the trace of the tool tip. With the 3D surface profile simulations of workpieces, several influencing factors of surface topography, especially the factors related to micro waviness error, are studied.
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Gao, Bin, Jing Hua Zhu, and Wen Chang Lang. "Structural Analysis for an Ultra-Precision Machine Slide by FEM Based on Applied Mechanics." Advanced Materials Research 496 (March 2012): 321–24. http://dx.doi.org/10.4028/www.scientific.net/amr.496.321.
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Micro/nano machining becomes more and more important and popular. Ultra-precision machines are the fundamentals. Aiming at design and developing an ultra-precision machine tool for micro/nano machining, the slide, one of the most important part of the machine has been analyzed by FEM. The software Abaqus has been used for the analysis. Based on the full load created by the coils and permanent magnet of the linear motors, the kinetics characteristics have been analyzed. According to the analytical results, the slide structure has been optimized to fulfill the requirements of the developed micro/nano machine tool.
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Vahdati, Mehrdad, and Ali Shokuhfar. "Design of Moving Components of an Ultra Precision Machine Tool for Nanometric Machining." Materials Science Forum 553 (August 2007): 232–38. http://dx.doi.org/10.4028/www.scientific.net/msf.553.232.
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Ultra precision machines are used for very precise machining as well as small parts. Due to their application, the accuracy of products has been upgraded in recent years. Thus, dimensional accuracies could be compared with surface texture dimensions like roughness and etc. In order to attain dimensions with surface texture accuracy, usually micro/nano meter, it is necessary to adopt ordinary machining technologies with micro/nano techniques. This measuring by adoption leads to nano-machining. Nano-machining researches deal with all three basic components of, machine tools, work piece, and cutting tool, which have fundamental importance for development of this technique. Despite of wide range of possible researches, only part of design points of ultra precision machines have been considered in this report. Air operated systems, like air slide table, and air spindle are examples of ultra precision machine tool components. These two components have been analyzed for some of their characteristics. Experiments have been planed to extract the relationship between stiffness, employing some of the effective parameters such as air pressure and air gap. The results describe the performance condition of air table and air spindle under different loadings.
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Vahdati, Mehrdad, and Seyed Alireza Rasouli. "Vibration Simulation of Air Slide Table in Ultra Precision Machines." Applied Mechanics and Materials 66-68 (July 2011): 2158–63. http://dx.doi.org/10.4028/www.scientific.net/amm.66-68.2158.
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The compressed air vibration in air slide table of ultra precision machines is an obstacle for gaining Nano-metric level of accuracies in the products created by these machines. In this article, the vibration behavior of air slide table due to compressed air layer is analyzed. The air slide table fluid and dynamic analytical model has been derived. In order to have air exit velocity from clearance gap, the finite element software FLUENT was applied. Finally, in order to calculate the displacements of table due to vibration and drawing its curves via time at the presence of varieties of air pressure, the second order differential equation was solved by MATLAB. In solving differential equation the Rang-Kutta method was used.
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Vahdati, Mehrdad, E. Azimi, and Ali Shokuhfar. "Air Characteristics in Air Turbine Spindle of Ultra Precision Machines." Defect and Diffusion Forum 297-301 (April 2010): 396–401. http://dx.doi.org/10.4028/www.scientific.net/ddf.297-301.396.
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Air Spindles have been used in ultra precision machines for several years due to their advantages such as high speed rotation, low friction, and low vibration, [1]. Air spindles are widely used in these machines for producing precise work pieces. Although, spindles function on a very complicated theoretical basis, [2, 3], their structure is very simple and consists of mainly a rotor and a stator. The rotor/stator could be made of different shapes. A cylindrical shape is the one commonly in use. The spindle designed in this work has a spherical configuration. It has been designed so that it could be moved without application of electric motor and only by a wind turbine system, [4]. The spindle studied in this research uses compressed air for rotor suspension, and has an air turbine for rotating its shaft. A thin air film acts as bearing layer between rotor and stator. In design procedure, operation parameters such as air inlet pressure for turbine, air inlet pressure for bearing, diameter of turbine nuzzles, diameter of bearing nuzzles, clearance between rotor and stator and etc. have been considered, [5]. A prototype spindle has been manufactured using design criteria. The influence of above mentioned parameters have been recognized through experiments.
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Buhmann, Marco, Erich Carelli, Christian Egger, Raoul Roth, and Thomas Liebrich. "Investigation on probe positioning errors affecting on-machine measurements on ultra-precision turning machines." Procedia CIRP 101 (2021): 242–45. http://dx.doi.org/10.1016/j.procir.2020.10.004.
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Brecher, Christian, Dominik Lindemann, and Christian Wenzel. "Influences of Closed Loop Control Componentson the Performance of Ultra-Precision Machines." Key Engineering Materials 625 (August 2014): 207–12. http://dx.doi.org/10.4028/www.scientific.net/kem.625.207.
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At Fraunhofer IPT a test bench has been setup to analyze closed loop control components and their interfaces with focus on their application in ultra-precision machining applications. This paper will present the results of the analysis of feedback and servo drive systems and will give a close inside on the influences of linear scales and analog and digital servo drives for applications in ultra-precision machining. The performed measurements include the analysis of the position accuracy and repeatability (step response test) as well as the determination of the dynamic frequency characteristics (stiffness / compliance) of an air bearing axis. With respect to the aforementioned measurements the tests have been performed under the variation of linear scales (vendor, pitch, signal, sampling frequency, etc.) and servo drives (vendor, switching or linear amplifiers, PWM frequency, control architecture, DC bus voltage, etc.). The paper will give a summary on the results of the analyzed topics, carefully chosen regarding their relevance to ultra-precision machining. Finally, a short outlook to future research work concerning the analysis of CNC controls will be given.
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Li, Xiao Peng, Hao Tian Yang, Ya Min Liang, Guang Hui Zhao, and Xing Ju. "Improvement Technology and Research Contents of Machining Accuracy for CNC Machine Tools." Applied Mechanics and Materials 394 (September 2013): 195–200. http://dx.doi.org/10.4028/www.scientific.net/amm.394.195.
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To bring a new technological revolution, CNC technology and machines give the birth of a new era of control and production. The rapid development of CNC has considerably advanced the precision and ultra-precision machining technology to improve a new level and great attention. From error prevention and compensation, researches of the CNC machines precision at home and abroad were introduced. Key reasons for error compensation hardly use in the domestic widely were pointed out. Finally, the necessity and main contents of error compensation technology were presented according to the actual situation of enterprises.
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Aggogeri, Francesco, Alberto Borboni, Rodolfo Faglia, Angelo Merlo, and Sara de Cristofaro. "Precision Positioning Systems: An Overview of the State of Art." Applied Mechanics and Materials 336-338 (July 2013): 1170–73. http://dx.doi.org/10.4028/www.scientific.net/amm.336-338.1170.
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In the industrial world the interest in Precision Positioning Systems is exponentially increasing in relation to the rapid growth of Ultra High Precision (UHP) machining. A greater attention is given to traditional techniques and developing of innovative solutions. This paper intends to present a review of the actual state of art in precision positioning system based on flexure hinge related to industrial machines, showing a comparison between different techniques.
Dissertations / Theses on the topic "Ultra-precision machines"
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Chen, Dongju. "Analysis and identification technology of system errors of large vertical ultra-precision machine tool." Compiègne, 2010. http://www.theses.fr/2010COMP1890.
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Dans plusieurs pays, les technologies d'usinage d'ultra-précision apportent une contribution importante au développement des sciences et des hautes technologies, principalement dans les domaines de l'optique, des microsystèmes et des ordinateurs avec des applications dans l'industrie des semi-conducteurs, du stockage de données, de l'aéronautique et de l'espace. L'usinage d'ultra-précision est entré dans le domaine de la nano-échelle et devient une dé nécessaire au développement des hautes technologies tant civiles que militaires. L'objectif de la recherche était de développer des méthodes de modélisation des axes mobiles d'une machine-outil d'ultra-précision, afin de prédire et identifier les erreurs de la machine et sa précision d'usinage. L'analyse des erreurs a été effectuée par la théorie multi-corps, la méthode des matrices de transfert et la méthode des éléments finis. La broche verticale sur paliers hydrostatiques a été modélisée. La raideur des paliers a été déduite des calculs de la portance par éléments finis et par une approximation analytique, en très bon accord. Le modèle mathématique de l'équilibre statique de la broche a permis d'évaluer la raideur sur tous les degrés de liberté, conduisant à la relation entre l'angle d'erreur de battement et le chargement. Les vibrations forcées de la broche générées par un défaut d'équilibrage pendant l'usinage ont été calculés par un modèle dynamique, dont on peut déduire la raideur dynamique et la réponse en fréquence. Un modèle thermomécanique de la broche intégrée à la machine a été établi, avec estimation des sources et des transferts de chaleur : l’influence des mécanismes de transfert sur l'erreur thermique a été analysée et l'impact sur la précision de la machine a été déduit. Un modèle d'erreur couplée des axes la machine sur guidages à paliers aérostatiques a été établi par la théorie multi-corps. La distribution de pression du film de gaz alimenté par une double rangée d'orifices a été obtenue par la théorie de la lubrification pour la structure complexe composée de guidages verticaux associés à des chariots d'équilibrage. Le modèle dynamique couplé du système de glissière a été établi et la réponse dynamique des guidages en fonction de la hauteur du film d'air a été déduite. Finalement, une méthode d’identification de l'erreur de mouvement de la machine à partir de la mesure d'une pièce usinée a été développée. Les mesures de la surface de la pièce usinée ont été traitées par transformation en ondelettes. L'erreur de rotation de la broche a été modélisée par une fonction de Weierstrass du temps. La corrélation entre les mesures géométriques des guidages, du système de broche et de la pièce permet d'en déduire l'influence de chaque source d'erreur sur la précision d'usinage. En combinant les analyses par ondelettes et densité spectrale, on peut également identifier les différentes erreurs dynamiques de la machine dans le domaine fréquentiel et la relation entre les ondulations de petite amplitude présentes dans la morphologie de la surface sur la précision de la machine<br>Ultra-precision machining technology is an important supporting technology of modern high-technology warfare, which is the development foundation for hightech industries and science and technology, and is the development direction of modern manufacturing science. The semiconductor device supported by ultraprecision machining technology, laid the foundation for the development of electronics and information industry. The development of modern science and technology based on the test, almost all of the test equipment needs the support of ultra-precision machining technology. Now ultra-precision machining has entered the nano-scale, and become an indispensable key means of developing high-tech. Whether the military industry, or civilian industry, all need such advanced machining technology. The research on machining precision of a two-axis large ultra-precision machine tool, analyzing the errors of main components of machine tool by multibody theory, the transfer matrix method, and finite element method. In order to show the comprehensive characterization of workpiece, wavelet method, correlation analysis and power spectral density method are used to analyze the surface topography of workpiece, different from the traditional Fourier transfer method, wavelet method express the comprehensive characterization of the signal in time and frequency domain. Correlation analysis method can estimate the signal in two different processes. Power spectral density method can fully reflect the impact of small-scale waviness of surface morphology on the machined accuracy. For the hydrostatic bearings, the parameters equation of bearings was deduced by the knowledge of fluid mechanics, and the calculated results were compared with other calculations. The mathematical model of spindle system in equilibrium was established according to Newton’s law, based on the the model, the relationship between derivation angle and stiffness of bearing was deduced, and the stiffness in all directions are given. The forced vibration of spindle caused by unbalance during machining process was researched through dynamic model of spindle. Dynamic stiffness and frequency response were deduced according to the axial static stiffness of spindle. Thermal-mechanical model of spindle system was established, the calculation basis of the heat transfer in the spindle system was deuced, and thermal error was analyzed with heat transfer mechanism, the variation of bearing performance at the different conditions under the influence of thermal errors, and the impact on the machining accuracy was analyzed. The coupling error model of guidewaies of machine tool was established with multi-body system theory. For the complex structure of guideway and unloading slide, the pressure distribution of gas film of guideway with double row orifices by gas lubrication theory, and corresponding load capacity and gas stiffness was obtained. The movement frequency with gas film thickness of entire slide system during machining process was showed. The coupling dynamic model of motion and unloading slides was established through corresponding frequency, the dynamic response of slide with the variation of gas film thickness was deduced. Finally, the variation of moving frequency in the whole gas film thickness was obtained. Finally, the measured result of workpiece was processed by wavelet transfer. The rotation error model of spindle was proposed by Weierstrass function, and the correctness and feasibility of this model was verified by comparing with actual test results. The correlation between guideway, spindle system and measured result of workpiece was analyzed, thus the degree of influence of every error on the machining accuracy was deduced. Combained with wavelet method and power spectral density method, the errors of guideway and spindle systems was analyzed in frequency domain, the characteristics of vibration signal of machine tool in frequency domain was extracted, and various error that affect the machining accuracy were identified according to the spectral characteristics
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Ximenes, Robert Dias. "Estudo e aplicação da metodologia TRIZ: desenvolvimento de um projeto conceitual para escolha de mancais para cabeçote de uma máquina de ultraprecisão." Universidade de São Paulo, 2011. http://www.teses.usp.br/teses/disponiveis/18/18146/tde-05032013-091533/.
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Este trabalho aborda o estudo e aplicação das ferramentas da metodologia TRIZ (Teoria da Resolução de Problemas Inventivos) aplicada na fase do projeto conceitual, no qual é desenvolvido um estudo de caso para escolha dos mancais, para cabeçotes de máquinas de corte do tipo \"Dicing Saw\". A metodologia TRIZ é direcionada para busca de idéias, através de uma abordagem sistemática da criatividade para a solução de problemas inventivos, consiste no reconhecimento da similaridade de um problema de projeto específico com um problema análogo, o qual tem uma solução conhecida no universo das patentes. É demonstrada a importância da capacidade de inovação como vantagem competitiva dentro do cenário atual, e como a TRIZ se apresenta como ferramenta sistêmica de suporte à criatividade inserida na fase de projeto conceitual, dentro do processo de desenvolvimento de produto. É desenvolvido um estudo de caso, no qual a TRIZ conduz à escolha sistemática de tipos de mancais apropriados, para eixos-árvore de alta velocidade para uma máquina denominada \"Dicing Saw\". O resultado da aplicação da TRIZ, dada as restrições operacionais foi a escolha de mancais aerostáticos porosos não-metálicos, os quais em conjunto com trabalhos na área de dinâmica de rotores foram manufaturados. A decisão pelo cabeçote com mancais aerostáticos porosos cerâmicos pode minimizar a influência de elevadas amplitudes de vibração durante usinagens sob alta rotação. Dessa forma, é possível concluir que, a metodologia TRIZ é uma ferramenta que permite a identificação de forma rápida e sistêmica os conceitos utilizados para solucionar problemas semelhantes direcionam a busca de soluções criativas para os problemas inventivos, intensifica a capacidade produtiva do engenheiro projetista, ampliando as alternativas, para encontrar melhores soluções, que podem resultar em um menor tempo, para lançamento de novos produtos, bem como melhorar desempenhos funcionais.<br>This work treats of study and application of the tools of methodology TRIZ (Theory of Inventive Problem Solving) applied to conceptual design where it is developed a case study to choice of pair of bearings more adequate for Dicing Saw machines. The TRIZ methodology leads the idea searches through systematic approach of creativity to solution of inventive problems where is recognized the common behavior of a specific problem with similar problem using patents database. It is demonstrated the importance of the innovation capacity as competitive advantage considering the current scenario and as the TRIZ technique acts as systematic tool to support for creativity and decision making during the conceptual design into product development process. So, it is developed a case study where the TRIZ lead the systematic selection of bearings for spindles of Dicing Saw machines or ultraprecision machines. The results of this study considering the operational constraints it was choice of aerostatic no-metallic porous bearings which were manufacturing to posterior study of dynamic behavior. The decision on spindle using ceramic aerostatic porous bearings can minimize the influence of high amplitudes of vibrations during the manufacturing on different operational ranges. Therefore it is possible to conclude that TRIZ is a technique or procedure that allows the fast and efficient identification of the physical and technical concepts to solution of the similar problems that directed creative alternatives when it is necessary new conceptual approaches, moreover to stimulate the productive capacity of the design engineer lead the search of the better solutions relating better functional solutions, less costs and small time to market.
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Pinheiro, José Antonio. "Desenvolvimento de um controlador PID para aplicação em uma mesa angular rotativa." Universidade de São Paulo, 2009. http://www.teses.usp.br/teses/disponiveis/18/18146/tde-19012011-105359/.
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Trata do desenvolvimento de um controlador Proporcional-Integral-Derivativo (PID) para uma Mesa Angular Rotativa (MAR) destinada à usinagem de ultraprecisão. O sistema de controle tem como objetivo efetuar posicionamento angular de alta resolução e repetibilidade antes e durante a usinagem de ultraprecisão, propiciando fabricar peças complexas através de torneamento. A MAR faz uso de elementos como mancais de flexão, atuadores piezelétricos, juntamente com o sistema de controle PID. A estratégia de controle é baseada na aquisição de dados na plataforma de desenvolvimento LabVIEW®, para gerar curvas tensão de saída do tesatronic versus deslocamento da MAR e no processamento dos sinais adquiridos ao longo do microposicionamento da MAR em tempo real para realimentação de posição. Constatou-se que o sistema suporta deslocamentos da MAR correspondendo a expansão do atuador piezelétrico de até 24 µm com freqüência de acionamento de até 3 Hz. O uso de filtro Chebyshev provocou atraso na resposta e forte instabilidade no sistema. Conclui-se que para a melhora do desempenho do sistema em termos de freqüência pode ser conseguida através do uso de filtro do tipo FIR (Finite Impulse Response).<br>A Micro Tilt Stage (MTS) was developed in the Precision Engineering Laboratory (University of São Paulo) to be used in commercial diamond turning machines. The MTS has the aim of positioning workpieces angularly with high resolution and repeatability before and during ultraprecision machining. The use of flexural bearings and piezoelectric actuators together with a PID control system provided improved dynamic performance. The control strategy is based on data acquisition using LabView to create standard curves and perform the correction of positioning errors. Experimental tests are performed with displacement of the (MTS), up to 24 µm, with frequency, up to 3 Hz. The use of a Chebyshev filter caused a delay and a strong instability in the system. In conclusion, in order to improve the performance of the system in terms of frequency, the use of a FIR filter (Finite Impulse Response) may be indicated.
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Onwuka, Goodness Raluchukwu. "Ultra-high precision grinding of BK7 glass." Thesis, Nelson Mandela Metropolitan University, 2016. http://hdl.handle.net/10948/5203.
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With the increase in the application of ultra-precision manufactured parts and the absence of much participation of researchers in ultra-high precision grinding of optical glasses which has a high rate of demand in the industries, it becomes imperative to garner a full understanding of the production of these precision optics using the above-listed technology. Single point inclined axes grinding configuration and Box-Behnken experimental design was developed and applied to the ultra-high precision grinding of BK7 glass. A high sampling acoustic emission monitoring system was implemented to monitor the process. The research tends to monitor the ultra-high precision grinding of BK7 glass using acoustic emission which has proven to be an effective sensing technique to monitor grinding processes. Response surface methodology was adopted to analyze the effect of the interaction between the machining parameters: feed, speed, depth of cut and the generated surface roughness. Furthermore, back propagation Artificial Neural Network was also implemented through careful feature extraction and selection process. The proposed models are aimed at creating a database guide to the ultra-high precision grinding of precision optics.
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Shore, Paul. "Machining of optical surfaces in brittle materials using an ultra-precision machine tool." Thesis, Cranfield University, 1995. http://dspace.lib.cranfield.ac.uk/handle/1826/3610.
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Investigations of machining optical surfaces into brittle materials using an ultra precision machine tool are presented. The newly developed ultra precision NION machine is evaluated to gain a good appreciation of its operating performance. The machining accuracy capability of this machine is established by careful measurement of its motion accuracy, thermal and dimensional stability and loop stiffness. Corroboration of these measurements are provided by assessment of surfaces which were produced in soft 'easily machined' metal materials. It was found that surfaces smooth to -1 nm Ra could be produced on the NION machine and with a form error of less than 100 nm P-V. The main source of figure error, approximately 80 nm, was found to be caused by the synchronous axial error motion of the workhead spindle. Other elements of the machine, including thermal effects, incurred less than 25 nm of additional figure error. Assessment of the diamond turning process for the producing optical surfaces made in a number of important optical materials, which are ostensibly brittle, were undertaken. Turning tests were carried out to establish the relative difficulty for machining optical surfaces in these materials and to define the most important parameters which affect the attained surface quality. Assessment of the produced surfaces was based on their roughness quality, surface morphology and residual stress condition. It was found that diamond tool edge quality degraded with total cut distance. Tool cut distance was found to be a major influence on achievable material removal rate before micro-fractures became present at the surface. Surface quality and residual stress condition were also greatly influenced by the overall tool cut distance. Diamond grinding trials were also carried out using the NION machine tool. These grinding trials were carried out using a mode of grinding which permits complex shape optical surfaces to be produced. Various grinding technologies were employed to establish the optimum methods. Selected grinding trials were carried out to establish the dominate parameters affecting the optical quality. Assessment of the machined surfaces was in regard of their surface roughness, residual stress and severity of sub-surface micro cracking. It was found that grinding wheel specification was a major influence on surface quality and sub-surface damage. The level of residual stress associated with 'ductile' mode grinding was not found to prohibit its application toward the direct manufacture of optical elements. Selection of grinding parameters which ensured the grain depth of cut, GDOC, parameter did not exceed the materials critical depth, dc, allowed glass surfaces to be ground to 1-2 nm Ra. These ground glass surfaces appeared free of any surface fractures. Sub-surface assessments did however reveal small levels of micro-fractures hidden below the surface. Discussion of both machining processes is provided. Available material removal rates for each process is given when cutting a number of important optical materials. Conclusions regarding the production of both Infrared and visible wavelength optics using the NION machine tool are provided. Recommendations for future work to improve both the understanding of the processes and the effectiveness of applying the processes are suggested.
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Arai, S. "Surface integrity control of piezoelectric materials in ultra precision grinding on the basis of machine design assessment." Thesis, Cranfield University, 2004. http://dspace.lib.cranfield.ac.uk/handle/1826/10441.
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The
target of this research work was to establish a surface integrity
control methodology in ultra precision grinding for piezoelectric materials, taking
into account the interaction between the material removal manner and the
machine
design contributions.
Whilst there are
many respective research works concerning the
microscopic material removal behavior on brittle materials and the design
characterization of individual machine components, it was necessary to identify
the
design characteristics in order to ensure a consistent and fine surface
integrity ( i.e. surface roughness, surface atness, textural damage ) in contact
machining.
For
example, in a thermal analysis of a machine structure, the
considerable inuences of internal and external heat sources were observed,
which resulted in heat ows in aerostatic and hydrostatic components. After
identifying several thermal error modes, a substantial improvement of thermal
stability was applied successfully onto the machine structure. However, the
major contributions arising from this research work are considered to be the
following.
( i ) Suggestion of a method to achieve optimized grinding conditions for
piezoelectric materials
( ii ) Identification of a link between material removal behavior and the
machine
design contribution (iii)Development of a novel tooling component
Following a static and dynamic assessment of three grinding machine
structures, it was conciuded that an enhanced damping performance at the loop
distance, between the grinding wheel and work tooling, is beneficial to obtain a
fine surface finish
together with a at surface, whereas past researchers have
claimed that static stiffness and
high resonant frequencies should be the prime
aim.
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Damazo, Bradley N. "A compliance model of the roller contact interface for a friction drive used on ultra precision machine tools." Thesis, Cranfield University, 1995. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.283256.
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Yin, Zidong. "Modeling and design of a miniature high precision linear stage on ball bearings." Compiègne, 2010. http://www.theses.fr/2010COMP1914.
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Aujourd'hui, la miniaturisation est une tendance forte dans le développement technologique des produits industriels, avec les exigences en composants microtechniques. Le micro / usinage conventionnel à l'outil est de plus en plus important, car il peut créer des pièces en 3-D avec des matériaux divers et il présente de nombreux avantages en efficacité, productivité, flexibilité et rentabilité, etc. Us guidages linéaires miniatures sont des composants clés des méso machines-outils. Cette thèse porte sur la conception d'une table linéaire miniature sur roulements à billes avec une raideur élévée, apte à satisfaire les exigences des méso machines-outils de haute précision. Deux critères de conception de base sont considérés: le premier est que les paliers à billes doivent être en mesure de supporter la charge maximale d'utilisation tout en conservant un comportement élastique et maximisant la rigidité ; l'autre est que l'influence des tolérances sur le diamètre des billes et la planéité de la paroi sur les mouvements parasites doit rester en dessous de l'erreur maximale autorisée sur la surface usinée. Un palier ouvert avec des erreurs géométriques est étudié en premier lieu par la théorie de He. Ensuite, une structure de palier fermé précontraint est proposée pour sa capacité à soutenir une charge relativement élevée, avec une grande rigidité, dans un encombrement limité. Sur la base des éléments de palier fermé proposés, une méthode de modélisation et de minimisation d'un guidage a été développée pour répondre aux exigences d'une taille limite de 70x 140 mrra, une capacité de charge > 250N et une rigidité > 500N/gm. Une évaluation théorique des erreurs de rectitude et de tangage d'un mini guidage avec des paliers sur roulements précontraints a été développée et analysé pour différentes préchuges, erreurs géométriques et charges externes. L'erreur de rectitude du mouvement peut ainsi être réduite à environ 1/10' de l'erreur de fabrication, ou moins selon la longueur d'onde de l'erreur de planéité des parois. Une optimisation des profils d'entrée sous le chariot est étudiée pour réduire les mouvements parasites et les excitations vibratoires induits par l'effet de bord du contact de roulement. Enfin, un prototype de mini-rail de guidage pour méso machines-outils a été conçu et fabriqué. La course est de 80 mm. S parois du roulement sont en acier GCr15 et les billes sont en céramique Si3N4, pour son niveau élevé de résistance à la compression et sa dureté. Les dimensions de la structure de la table miniature ont été déterminées avec des évaluations par éléments finis ; l'épaisseur des parois doit être >Ilmm. Les erreurs de tangage et de rectitude du mouvement du prototype ont été étudiées. Pour une erreur maximale du diamètre des billes d'environ 0,13gm et des erreurs de profil des parois d'environ 1,0 à 3,0gm, l'erreur de rectitude du guidage est d'environ 0,25gm sur une course de avec une précontrainte géométrique de 6gm. Ces résultats sont en bon accord avec les prédictions théoriques<br>In actual technological developments, the trend to miniaturization of industrial products requtes micro components. Tool based micro/meso-scale machining is becoming increasingly important, since it cm create 3-D parts in various engineering materials and has many advantages in productivity, efficiency, flexibility and cost effectiveness, etc. Mini-guideways are key components of meso-machine tools. This thesis fuses on the design of an ultra precision miniature linear guideways on bail bearings, able to fulfilling the requirements of ultra predision meso-machine tools with a high stiffness. Two basic design criteria are consider: one is that the bail bearing elements must be able to bear the maximum working load while keeping an elastic behaviour and maximizing the stiffness; the other is that the influence of halls diameter and wall flatness tolerances on peasidc movements must be kept below the maximum error allowed to surface machining. Firstly, based on Hertzian contact theory, an open bearing with geometrical errors is studied. Then a structure of preloaded closed bearing element is proposed for its potential ability to supporting a heavy load with a high stiffness in a limited size. Based on the proposed closed bearing elements, a method of modeling and minimisation of a guideway is developed, targeting at fulfilling the conditions of a limited size of 70x140 mm, load capacity >250N and stiffness >500N/gm. A Theoretical evaluation of straightness error and pitch error of the motion of the mini-guideway with closed bearing elements is developed and is analyzed with various specified preloads, geometrical errors and external loads. Straightness error of motion of the mini-guideway may be reduced to about 1610 times the given fabrication error or even less, for specified appropriate wavelength of surface error of the walls. To lower the puasitic motion and excitation generated by bUls entering or exiting from under the cage, opdMzation of the cage's profiles is discussed to minimize the edge effect on rolling contact. At last, a prototype of mini-guideway for meso machine tools has been design and manufactured. The travel is80 mm. The beuings walls have been made of steel GCr15 and the bans are in ceramics Si4, rince they have a high level of compressive strength and hardness. The dimension of the ni-guideway structure have been dened via evaluations with the Finite Element Method (FEM); thickness of the walls of the ni-guideway should be >11 mm. Fitch errors and straighness error of motion of the prototype have been invesfigated. For a diameter error of balls of about 0. 13gm and straightness profile errors of the walls aof about I. 0-3. 0gm, the straightness motion error of the mini-guideway is about 0. 251tm over a travel of 5m with a geometrical preload of 6jrm. These results agree well with the theoretical prédictions
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Lin, Yu-Cheng, and 林佑整. "Development of a large measurement range ultra precision with topography machine." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/44836967883117797787.
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碩士<br>南台科技大學<br>機械工程系<br>95<br>The purpose of this study is to develop a large measurement range ultra precision with topography with advantages of low cost and high precision. The measurement system is consisted of Piezo Ceramic Linear Moter (PCLM), X/Y axis microstep motor, and contact probe with sensor, and a PC with Borland C++ Builder is used to write control measurement software for system integration. The contact probe is designed with a cross-form frame bar, which has slender rod on all four ends. Commercial stylus is used and affixed at the end of lead cylinder, which is positioned at the center of the cross-form frame bar. The two sides of the lead cylinder are designed with a fixed structure and Vee grove structure. A roller and two univesal balls support the lead cylinder at interval of 120° by surrounding the center of the lead cylinder. The probe is limited to move toward Z-axis.
The sensor of the contact probe is made with an optical displacement sensor modified from a pick-up head inside DVD player available on the market. The measurement principle of this study is that when the stylus tip of the contact probe is touches the object surface, the contact force would be passed to the suspension structure via the lead cylinder, and the cross-form frame bar inside the suspension structure generates vertical displacement. Then the optical displacement sensor would generate a focus error signal, and move the contact probe driven by program judgment, so that the contact probe always moves along the surface profile. At the same time, the coordinates of PCLM are recorded by a linear scale, and are used to obtain the profile data of objects.
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Arthur, Song, and 宋俍宏. "Preliminary Research and Development of New Ultra-Precision Ball Grinding Machine." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/53514785278455995071.
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碩士<br>國立中山大學<br>機械工程研究所<br>86<br>The purpose of this study is to develop a new ultra-percision ballgrinding machine. First, the kinematic characteristics of ball and removal mechanism for various ball grinding machines are theoretically investigated. This new float-ring ball grinding machine combines thee design advantages of those ball grinding machines previously developed. The effects of gritsize, abrasive material, the angle of float-ring, spindle speed and load on the grinding characteristics of machine are investigated experimentally. Experimental results show that when spindle speed increases to 1200rpm under low load, the removal rate increases because of the sliding between driving shaft and ball. When the speed increases to 1800 rpm, the remmoval rate achieves a saturated value. When load increases to 1.5 N/ball under the speed of 1200 rpm, the highest removal rate can be obtained. To obtainthe better sphericity and removal rate it is suggested to decrease the angle of float-ring and to increase the spindle speed. When the abrasive gritsize # increases, the better sphericity and surface roughness can be achieved,but with lower removal rate. It is also found that the diamond can obtain the better removal rate, but the rougher surface. However, it is not suitablefor the carborundum to grind ceramic balls due to the severe wear. In this preliminary test, the present ball grinding machine can achieves the sphericityof 6.32 um.
Books on the topic "Ultra-precision machines"
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The Theory and Practice of Worm Gear Drives (Ultra Precision Technology) (Ultra Precision Technology Series). Butterworth-Heinemann, 2000.
Find full textBook chapters on the topic "Ultra-precision machines"
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McKeown, Pat, and John Corbett. "Ultra Precision Machine Tools." In Autonome Produktion. Springer Berlin Heidelberg, 2004. http://dx.doi.org/10.1007/978-3-642-18523-6_23.
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Hill, Achim, and Wolfgang Tischer. "Dynamical Behaviour of an Ultra-precision Turning Machine." In Progress in Precision Engineering. Springer Berlin Heidelberg, 1991. http://dx.doi.org/10.1007/978-3-642-84494-2_70.
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Suzuki, Shinya, Nobuhito Yoshihara, and Tsunemoto Kuriyagawa. "Improvement of Machined Surface Flatness in Ultra-Precision Plane Honing." In Advances in Abrasive Technology VIII. Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/0-87849-974-1.359.
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Suet To, Sandy, Victor Hao Wang, and Wing Bun Lee. "Factors Influencing Machined Surface Quality." In Materials Characterisation and Mechanism of Micro-Cutting in Ultra-Precision Diamond Turning. Springer Berlin Heidelberg, 2017. http://dx.doi.org/10.1007/978-3-662-54823-3_2.
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Jiang, Xiangqian, Zhen Tong, and Duo Li. "On-Machine Measurement System and Its Application in Ultra-Precision Manufacturing." In Precision Manufacturing. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-10-5192-0_16-1.
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Jiang, Xiangqian, Zhen Tong, and Duo Li. "On-Machine Measurement System and Its Application in Ultra-Precision Manufacturing." In Precision Manufacturing. Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-13-0381-4_16.
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Sun, X. W., Fei Hu Zhang, Shen Dong, and L. J. Zhang. "Research on Low Speed Servo Control Technology of Ultra-Precision Machine Tool." In Progress of Precision Engineering and Nano Technology. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-430-8.163.
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Wang, Bo, Ying Chun Liang, and Shen Dong. "Study on the Compound Fuzzy Motion Control for the Ultra Precision Machine Tools." In Advances in Machining & Manufacturing Technology VIII. Trans Tech Publications Ltd., 2006. http://dx.doi.org/10.4028/0-87849-999-7.813.
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Vahdati, M., and Ali Shokuhfar. "Design of Moving Components of an Ultra Precision Machine Tool for Nanometric Machining." In Materials Science Forum. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-438-3.232.
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Zhang, Fei Hu, X. W. Sun, Shen Dong, and L. J. Zhang. "Research on Ultra-Low Feed Servo Control Technology of Ultra-Precision Machine Based on Semi-Closed Loop Control." In Advances in Machining & Manufacturing Technology VIII. Trans Tech Publications Ltd., 2006. http://dx.doi.org/10.4028/0-87849-999-7.486.
Full textConference papers on the topic "Ultra-precision machines"
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Langenbeck, P., and W. Ohligs. "Optical Acceptance Testing For Ultra Precision Air Bearing Machines." In Hague International Symposium, edited by Peter Langenbeck. SPIE, 1987. http://dx.doi.org/10.1117/12.967098.
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Okwudire, Chinedum E., and Jihyun Lee. "Optimal Motor Location for the Reduction of Residual Vibrations in Mode-Coupled Ultra-Precision Manufacturing Machines." In ASME 2013 International Manufacturing Science and Engineering Conference collocated with the 41st North American Manufacturing Research Conference. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/msec2013-1228.
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Ultra-precision manufacturing (UPM) machines are used to fabricate and measure complex parts having micrometer-level features and nanometer-level tolerances/surface finishes. Therefore, low-frequency residual vibrations that occur during the motion of the machines’ axes must be minimized. Recent research by the authors has revealed that coupling the vibration modes of passively-isolated machines by properly selecting the location of the vibration isolators could lead to a drastic reduction in residual vibrations. However, the effect of motor location on the residual vibrations of mode-coupled UPM machines has not been rigorously analyzed. In this paper, an objective function which minimizes residual vibration energy with respect to motor location is defined and analyzed. It is shown to have a guaranteed global minimum irrespective of the parameters of the UPM machine. Conditions that ensure that the global minimum is located in a practically feasible design space are explored. Finally, the merits of optimal motor placement on residual vibration reduction are demonstrated using simulations conducted on a 5-axis ultra-precision machine tool.
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Liew, W. Y. H., and X. Ding. "Wear of Coated Carbide Tools in the Ultra-Precision Machining of Stainless Steel." In World Tribology Congress III. ASMEDC, 2005. http://dx.doi.org/10.1115/wtc2005-63952.
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Ultra-precision machines are widely used to turn aspherical profiles on mould inserts for the injection moulding of optical lenses. During turning of a profile on a stainless steel mould insert, the cutting speed reduces significantly to 0 as the cutting tool is fed towards the center of the machined profile. This paper reports on experiments carried out to study the wear of uncoated, PVD-coated and CVD-coated carbide tools in the ultra-precision machining of STAVAX (modified AISI 420 stainless steel) at low speeds.
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Lee, Jihyun, and Chinedum Okwudire. "Effects of Non-Proportional Damping on the Residual Vibrations of Mode-Coupled Ultra-Precision Manufacturing Machines." In ASME 2014 Dynamic Systems and Control Conference. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/dscc2014-6120.
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Ultra-precision manufacturing (UPM) machines are used to fabricate and measure complex parts having micrometer-level features and nanometer-level tolerances/surface finishes. Therefore, low-frequency residual vibrations that occur during the motion of the machines’ axes must be minimized. Recent work by the authors has revealed that coupling vibration modes of passively-isolated UPM machines can provide conditions for drastic reduction of residual vibrations vis-a-vis the recommended practice of modal decoupling. This paper presents an investigation into the effects of non-proportional (NP) damping on the conclusions reached in the authors’ prior work. With NP damping added, the conditions under which mode coupling is beneficial relative to decoupling are seen to remain largely the same. However, NP damping is shown to significantly influence the conditions under which the system’s response is most sensitive to mode coupling. Design guidelines for maximally exploiting the benefits of mode coupling are presented and demonstrated experimentally on a UPM machine.
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Otsubo, Tatsuki, Takanori Yazawa, Jinhui Wang, and Tomonori Kato. "Diamond Fly Cutting Applied to Improve Curved Surface Machining by In-Process Measurement and Control on an Ordinary Milling Machine." In JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/lemp2020-8590.
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Abstract To improve the accuracy of the machined surface produced by an ordinary milling machine, a system called workpiece-referred form accuracy control (WORFAC) was developed and confirmed in diamond turning. However, non-rotational symmetric surface structures, such as V-grooves, pyramid structures, F-theta lenses, and other free form surface cannot be machined by diamond turning. We proposed to improve the form accuracy of a machined surface produced by an ordinary milling machine by diamond fly cutting using controlled cutting with reference surface (CCRS), an in-process measurement and control method. Fly cutting is usually used to manufacture ultra-precision microstructures with nanometric surface roughness and submicrometric form accuracy, without the need for subsequent polishing. Nevertheless, a high level of accuracy has only recently been achieved on ultra-precision milling machines. In this study, we verified the effectiveness of fly cutting with CCRS on an ordinary milling machine. CCRS improves machined surface accuracy by controlling the relative displacement between the tool and workpiece. Diamond fly cutting using CCRS was demonstrated to reduce the table motion error on an ordinary milling machine. The experiments of curved surface machining by uncontrolled machining and control machining were conducted, and the effectiveness of improving the circular are machining accuracy of the general-purpose milling machine was confirmed.
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Bukhari, Mohammad, and Oumar Barry. "On the Nonlinear Vibration Analysis of Ultra Precision Manufacturing Machines With Mode Coupling." In ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/detc2017-68331.
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Nonlinear free undamped vibrations are investigated for ultra-precision manufacturing (UPM) machines with quadratic stiffness. The modes of the system are linearly coupled. The non-resonant case and the bounded internal resonance case are considered. The results of the non-resonant case indicate that the behavior of the system is the same as the linear behavior. However, for the internal resonance case, the results show that the amplitudes are coupled. The results also indicate that the nonlinear frequencies and amplitudes depend not only on the initial conditions, but also on the location of the isolators with respect to the center of gravity of the UPM.
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Gupta, Sunit K., Mohammad A. Bukhari, Oumar R. Barry, and Chinedum E. Okwudire. "On the Nonlinear Mode-Coupling in Ultra Precision Manufacturing Machines: Experimental and Analytical Analyses." In ASME 2020 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/detc2020-22398.
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Abstract Recent studies in passively-isolated systems have shown that mode coupling is desirable for best vibration suppression, thus refuting the long-standing rule of mode decoupling. However, these studies have ignored the non-linearities in the isolators. In this work, we consider stiffness nonlinearity from pneumatic isolators and study the nonlinear free undamped vibrations of a passively-isolated ultra-precision manufacturing (UPM) machine. Experimental analysis is conducted to guide the mathematical formulation. The system comprises linearly and nonlinearly coupled in-plane horizontal and rotational motion of the UPM machine with quadratic nonlinear stiffness from the isolators. We present closed-form expressions using the method of multiple scales for two cases viz. the non-resonant case and the bounded internal resonance case. We validate our theoretical findings through direct numerical simulations. For the non-resonant case, we show that the system behaves similar to a linear system. However, for the nearly internal resonance case, we demonstrate strong energy exchange between the modes stemming from nonlinear mode coupling. We further study the effect of nonlinear mode coupling on the vibration isolation performance and demonstrate that mode coupling is not always desirable.
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Nakao, Yohichi, Shota Nakatsugawa, Masataka Komori, and Kenji Suzuki. "Design of Short-Pipe Restrictor of Hydrostatic Thrust Bearings." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87306.
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High stiffness hydrostatic bearings are needed in order to achieve precise motions of the machine components of ultra-precision machine tools or other precision machines. Design procedure of restrictors of hydrostatic thrust bearings, making bearing stiffness maximize under given conditions, is considered in the paper. In particular, the paper focuses on design of short pipe restrictors that are used in the hydrostatic thrust bearings in many industrial applications. Derived mathematical model predicting load capacity and stiffness of the hydrostatic bearings with short pipe restrictors are verified by compared with experimental results. Based on the derived mathematical model, an optimum condition of a ratio between the diameter and length of the short pipe restrictor is then derived. Designed short pipe restrictors are used in a water hydrostatic thrust bearing. Then the experimental results show that the bearing stiffness significantly increased. It is noted that the optimum condition of the restrictors is represented by defined non-dimensional parameters.
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Davanlou, Ashkan. "Integration of Fiber Optic Sensors in Measuring Machines." In ASME 2013 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/imece2013-65057.
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The production metrology of today is still dominated by tactile probing systems. However some special metrological tasks cannot be fulfilled by this technique, one example is in the high precision manufacturing of surfaces and structures, which become ultra-miniaturized, complex and fragile. The inspection of small boreholes and cavities is also an example with very tight tolerances which demands non-contact miniaturized sensors. Particularly the measurement of the shape of spray holes in modern fuel injection nozzles for diesel engines fits this statement, as its shape represents the key factor for maximal motor efficiency, as well as minimal pollutant emissions. Any deviation from its design shape significantly affects spray breakup and can lead to unequal distribution of flow and pressure changes. These holes can have diameter of 150 microns, with a tendency to even smaller diameters in future systems. Within this work the integration of a fiber optic sensor for distance measurements in measuring machines, specifically for borehole inspection, is described. The used device is a form-tester (Mahr GmbH, MMQ-400) with 3 degrees of freedom. The motion of the machine axis will be controlled with help of image processing operation which are based on pictures taken from the specimen’s top surface. For this mean a micro camera will be mounted on the form-tester. By applying in-house developed MATLAB codes, the exact position of the boreholes and that of the fiber optic probe is obtained, so that an automated positioning and measurement (e.g. round-out and roundness tests) could be performed. This process enhances both the precision due to an optimized sensor positioning and speed of the measurement rather than manual execution. Different positioning scenarios will be discussed and compared in this paper, to prove the capability of the proposed system as well as its adaptivity.
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Duan, Hao, Shinya Morita, Takuya Hosobata, Masahiro Takeda, and Yutaka Yamagata. "On-Machine Metrology System Using Confocal Chromatic Probe and Motion Error Correction for Ultra-Precision Machine Tool." In JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/lemp2020-8564.
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Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations. This waviness lowers the quality of the optical surface. To address this problem, we use the waviness of the axial displacement of the ultra-precision machine tool. The waviness is obtained by a non-contact on-machine metrology (OMM) system that measures an optical flat as a correction reference curve, which is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation of the workpiece with 1 nm resolution. The axis position capture system uses a signal branch circuit of linear scale on each axis from the ultra-precision machine tool. The OMM system is tested in terms of accuracy and repeatability. In comparison to the results of the shaper cutting of an oxygen-free copper (OFC) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness.