Journal articles: 'Ultra-precision machines'

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Wan, Shao Song, Jian Cao, and Cong Yan. "Interpolation Algorithm Application to New Ultra-Precision Polishing Instrument." Applied Mechanics and Materials 602-605 (August 2014): 3400–3403. http://dx.doi.org/10.4028/www.scientific.net/amm.602-605.3400.

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This paper presented the key techniques development of motor/generator (M/G) for the FES system in recent years, and summarized the latest developments of three machines such as: induction machine (IM), reluctance machine (RM) and permanent magnet machine (PMM) including traditional structure PMM and Halbach structure PMM, which now widely used in the FES system. Ultra smooth surface polishing techniques are the important part in the ultra precision machining system. The new ultra-precision polishing instrument which fit for the precision polishing in the elbow’s internal surface has been researched in this paper. The polishing instrument is a sphere which performs rotating-jet polishing and flexibly dragged by the string. The simulation result has proved that the polishing instrument can polish the internal surface of the elbow and achieve the purpose of the improving roughness of the internal surface.

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Zhan, Lan, Fei Hu Zhang, Chen Hui An, and Zhi Peng Li. "Influencing Factors of Surface Generation in Ultra-Precision Fly Cutting." Advanced Materials Research 1136 (January 2016): 221–26. http://dx.doi.org/10.4028/www.scientific.net/amr.1136.221.

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Ultra-precision fly cutting machines have long been the hardest one to compliant and induce great focus of researchers. In this paper, a surface topography model is proposed to predict the surface generation in an ultra-precision fly cutting machine. The building of surface topography model is based on the trace of the tool tip. With the 3D surface profile simulations of workpieces, several influencing factors of surface topography, especially the factors related to micro waviness error, are studied.

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Gao, Bin, Jing Hua Zhu, and Wen Chang Lang. "Structural Analysis for an Ultra-Precision Machine Slide by FEM Based on Applied Mechanics." Advanced Materials Research 496 (March 2012): 321–24. http://dx.doi.org/10.4028/www.scientific.net/amr.496.321.

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Micro/nano machining becomes more and more important and popular. Ultra-precision machines are the fundamentals. Aiming at design and developing an ultra-precision machine tool for micro/nano machining, the slide, one of the most important part of the machine has been analyzed by FEM. The software Abaqus has been used for the analysis. Based on the full load created by the coils and permanent magnet of the linear motors, the kinetics characteristics have been analyzed. According to the analytical results, the slide structure has been optimized to fulfill the requirements of the developed micro/nano machine tool.

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Vahdati, Mehrdad, and Ali Shokuhfar. "Design of Moving Components of an Ultra Precision Machine Tool for Nanometric Machining." Materials Science Forum 553 (August 2007): 232–38. http://dx.doi.org/10.4028/www.scientific.net/msf.553.232.

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Ultra precision machines are used for very precise machining as well as small parts. Due to their application, the accuracy of products has been upgraded in recent years. Thus, dimensional accuracies could be compared with surface texture dimensions like roughness and etc. In order to attain dimensions with surface texture accuracy, usually micro/nano meter, it is necessary to adopt ordinary machining technologies with micro/nano techniques. This measuring by adoption leads to nano-machining. Nano-machining researches deal with all three basic components of, machine tools, work piece, and cutting tool, which have fundamental importance for development of this technique. Despite of wide range of possible researches, only part of design points of ultra precision machines have been considered in this report. Air operated systems, like air slide table, and air spindle are examples of ultra precision machine tool components. These two components have been analyzed for some of their characteristics. Experiments have been planed to extract the relationship between stiffness, employing some of the effective parameters such as air pressure and air gap. The results describe the performance condition of air table and air spindle under different loadings.

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Vahdati, Mehrdad, and Seyed Alireza Rasouli. "Vibration Simulation of Air Slide Table in Ultra Precision Machines." Applied Mechanics and Materials 66-68 (July 2011): 2158–63. http://dx.doi.org/10.4028/www.scientific.net/amm.66-68.2158.

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The compressed air vibration in air slide table of ultra precision machines is an obstacle for gaining Nano-metric level of accuracies in the products created by these machines. In this article, the vibration behavior of air slide table due to compressed air layer is analyzed. The air slide table fluid and dynamic analytical model has been derived. In order to have air exit velocity from clearance gap, the finite element software FLUENT was applied. Finally, in order to calculate the displacements of table due to vibration and drawing its curves via time at the presence of varieties of air pressure, the second order differential equation was solved by MATLAB. In solving differential equation the Rang-Kutta method was used.

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Vahdati, Mehrdad, E. Azimi, and Ali Shokuhfar. "Air Characteristics in Air Turbine Spindle of Ultra Precision Machines." Defect and Diffusion Forum 297-301 (April 2010): 396–401. http://dx.doi.org/10.4028/www.scientific.net/ddf.297-301.396.

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Air Spindles have been used in ultra precision machines for several years due to their advantages such as high speed rotation, low friction, and low vibration, [1]. Air spindles are widely used in these machines for producing precise work pieces. Although, spindles function on a very complicated theoretical basis, [2, 3], their structure is very simple and consists of mainly a rotor and a stator. The rotor/stator could be made of different shapes. A cylindrical shape is the one commonly in use. The spindle designed in this work has a spherical configuration. It has been designed so that it could be moved without application of electric motor and only by a wind turbine system, [4]. The spindle studied in this research uses compressed air for rotor suspension, and has an air turbine for rotating its shaft. A thin air film acts as bearing layer between rotor and stator. In design procedure, operation parameters such as air inlet pressure for turbine, air inlet pressure for bearing, diameter of turbine nuzzles, diameter of bearing nuzzles, clearance between rotor and stator and etc. have been considered, [5]. A prototype spindle has been manufactured using design criteria. The influence of above mentioned parameters have been recognized through experiments.

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Buhmann, Marco, Erich Carelli, Christian Egger, Raoul Roth, and Thomas Liebrich. "Investigation on probe positioning errors affecting on-machine measurements on ultra-precision turning machines." Procedia CIRP 101 (2021): 242–45. http://dx.doi.org/10.1016/j.procir.2020.10.004.

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Brecher, Christian, Dominik Lindemann, and Christian Wenzel. "Influences of Closed Loop Control Componentson the Performance of Ultra-Precision Machines." Key Engineering Materials 625 (August 2014): 207–12. http://dx.doi.org/10.4028/www.scientific.net/kem.625.207.

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At Fraunhofer IPT a test bench has been setup to analyze closed loop control components and their interfaces with focus on their application in ultra-precision machining applications. This paper will present the results of the analysis of feedback and servo drive systems and will give a close inside on the influences of linear scales and analog and digital servo drives for applications in ultra-precision machining. The performed measurements include the analysis of the position accuracy and repeatability (step response test) as well as the determination of the dynamic frequency characteristics (stiffness / compliance) of an air bearing axis. With respect to the aforementioned measurements the tests have been performed under the variation of linear scales (vendor, pitch, signal, sampling frequency, etc.) and servo drives (vendor, switching or linear amplifiers, PWM frequency, control architecture, DC bus voltage, etc.). The paper will give a summary on the results of the analyzed topics, carefully chosen regarding their relevance to ultra-precision machining. Finally, a short outlook to future research work concerning the analysis of CNC controls will be given.

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Li, Xiao Peng, Hao Tian Yang, Ya Min Liang, Guang Hui Zhao, and Xing Ju. "Improvement Technology and Research Contents of Machining Accuracy for CNC Machine Tools." Applied Mechanics and Materials 394 (September 2013): 195–200. http://dx.doi.org/10.4028/www.scientific.net/amm.394.195.

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To bring a new technological revolution, CNC technology and machines give the birth of a new era of control and production. The rapid development of CNC has considerably advanced the precision and ultra-precision machining technology to improve a new level and great attention. From error prevention and compensation, researches of the CNC machines precision at home and abroad were introduced. Key reasons for error compensation hardly use in the domestic widely were pointed out. Finally, the necessity and main contents of error compensation technology were presented according to the actual situation of enterprises.

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Aggogeri, Francesco, Alberto Borboni, Rodolfo Faglia, Angelo Merlo, and Sara de Cristofaro. "Precision Positioning Systems: An Overview of the State of Art." Applied Mechanics and Materials 336-338 (July 2013): 1170–73. http://dx.doi.org/10.4028/www.scientific.net/amm.336-338.1170.

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In the industrial world the interest in Precision Positioning Systems is exponentially increasing in relation to the rapid growth of Ultra High Precision (UHP) machining. A greater attention is given to traditional techniques and developing of innovative solutions. This paper intends to present a review of the actual state of art in precision positioning system based on flexure hinge related to industrial machines, showing a comparison between different techniques.

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Li, Zhuo Lin, Wing Bun Lee, Benny C. F. Cheung, L. T. Ho, and Yue Gang Fu. "A Study of Computer Controlled Ultra-Precision Polishing of Silicon Carbide Reflecting Lenses for Enhancing Surface Roughness." Key Engineering Materials 625 (August 2014): 437–45. http://dx.doi.org/10.4028/www.scientific.net/kem.625.437.

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Reflecting lens is an important component of optical systems, such as high-resolution cameras, large space telescopes and meteorological satellites etc. Among the lens materials, Silicon Carbide (SiC) has attracted a lot of attention as an important optical material because of its excellent mechanical and physical properties. Apart from the form accuracy, the attainment of a consistently high optical quality in polishing SiC is still of a concern. There are advanced ultra-precision polishing machines that can correct geometrical errors and surface finish of the workpiece. These include surface roughness and waviness. However, the hardness of SiC material itself put an challenge for polishing process. In this paper, A computer controlled ultra-precision polishing (CCUP) method based on mechanical polishing is used to produce the SiC lens. Experiments are being designed on a 7-axis ultra precision polishing machine (Zeeko IRP200). As it is difficult to find out slurry which is harder than SiC so that the conventional polishing slurry is be used. It provides a nice consequence that it also efficient when the polish powder is softer than the machined materials. The tool pressure, polishing head speed and the feed rate are varied and optimized to obtain the best reflectivity of the lens being polished. A pilot experiment will be conducted for the corrective polishing for the form error of the optical surface made of SiC. The result from the study will provide an important means to optimize the process for machining SiC reflective lens using the CCUP process.

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Tang, Heng Xing, Chu Peng Zhang, and Lin Lin. "Development of an Ultra-Precision Annular Polishing Machine Tool with Full Gas Static Pressure." Key Engineering Materials 837 (April 2020): 183–90. http://dx.doi.org/10.4028/www.scientific.net/kem.837.183.

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In order to improve chemical mechanical polishing (CMP) efficiency and accuracy in the fabrication of planar optics, CMP models and machine tools have been developed. A three-dimensional contour map of the surface of the polishing plate was established by measuring the runout error of several circles on the polishing plate. Based on the Preston equation and the three-dimensional contour map, a CMP model that simulates material removal at any point on the work piece is proposed. This model shows that higher motion accuracy can improve efficiency and accuracy. Then, based on this point of view, a new CMP machine tool was designed, and the ultra-precision gas static pressure guide rail and turntable and Siemens 840Dsl numerical control system were applied to the new CMP machine tool. In order to validate the new machine, a series of testing and processing experiments were carried out. The straightness error of the gas static pressure guide rail can be less than 1.1 μm. The axial runout error of the gas turntable can be less than ±0.4 μm. The surface profile of the experimental workpiece can be less than 0.01λ, and the processing efficiency of the new CMP machine can reach 4 times of the processing efficiency of the conventional CMP machine. In addition, the repeatability and stability of the CMP process is improved on new machines.

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Zhang, Q., and Ze Sheng Lu. "A Study on Design of Ultra-Precision Micro-Feed Stage." Key Engineering Materials 315-316 (July 2006): 131–35. http://dx.doi.org/10.4028/www.scientific.net/kem.315-316.131.

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Ultra-precision positioning technique has become one of the important parts in the development of precision machines. Flexure stage driven by piezoelectric actuator (PZT) has been used widely as micro-feed installation because they have many advantages, such as: driving directly, fine displacement resolution, no friction or spacing. This paper designed a micro-feed stage driven by PZT using clinograph mechanism, analyzed the influence of flexure hinges on the static and dynamic performance of micro-feed stage based on finite element analysis. The design procedure was presented by which we can determine the geometrical dimensions of flexure hinge easily and achieve desired performance parameters of the stage, and the effectiveness of the design method was validated by experiment.

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KOBAYASHI, Fumio, Takashi NOMURA, Kazuo YOSHIKAWA, Hatsuzo TASHIRO, Masane SUZUKI, and Masao USUKI. "A Study of Profile Measurement with Zone-Plate Interferometer on Ultra Precision Machines." Transactions of the Society of Instrument and Control Engineers 28, no. 1 (1992): 164–65. http://dx.doi.org/10.9746/sicetr1965.28.164.

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Lee, Jihyun, and Chinedum E. Okwudire. "Reduction of vibrations of passively-isolated ultra-precision manufacturing machines using mode coupling." Precision Engineering 43 (January 2016): 164–77. http://dx.doi.org/10.1016/j.precisioneng.2015.07.006.

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SHINDO, Ryota, Tadashi TOKAI, and Naoki TSUNEKAWA. "Features of Ultra-Precision Grinding Machines That Make Full Use of Structural Optimization." Journal of the Japan Society for Precision Engineering 86, no. 6 (2020): 413–17. http://dx.doi.org/10.2493/jjspe.86.413.

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Buhmann, Marco, Raoul Roth, Thomas Liebrich, Klaus Frick, Erich Carelli, and Michael Marxer. "New positioning procedure for optical probes integrated on ultra-precision diamond turning machines." CIRP Annals 69, no. 1 (2020): 473–76. http://dx.doi.org/10.1016/j.cirp.2020.04.062.

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Ling, Si Ying, Zhi Feng Lou, Qiang Liu, and Li Ding Wang. "The Periodical Translocation Gear-Grinding Technique to Improve the Indexing Accuracy of Ultra-Precision Gears." Advanced Materials Research 941-944 (June 2014): 2134–39. http://dx.doi.org/10.4028/www.scientific.net/amr.941-944.2134.

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The ultra-precision master gears have important application in calibrating high precision gear measuring instruments or coordinate measuring machines and in military industry. Firstly based error interference of the angle-transferring curve, the periodical translocation technique (PTT) of gear-grinding to improve the indexing accuracy of ultra-precision gears is proposed. The conclusions are drawn by precision experiment: (1) controlling 2/3~3/4 of total teeth participating in regrinding process can obtain the smaller total cumulative pitch deviation; (2) with increasing of the number of teeth participating in regrinding processes, the effects on single pitch deviation is more obvious. Finally, the total pitch deviation Fp of the specimen reaches to 0.79 μm (2.7′′), and the single pitch deviation fp reaches to 0.30 μm (1.0′′) by adopting PTT technique and both of them reaches to submicron level.The precision gear-grinding experiments show the efficiency and practicability of the PTT technique.

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Shen, Yuan, Xin Fang Ge, Nai Ji Fan, and Yi Ying Wang. "Micro-Vibration Control for Ultra-Precision Isolation Platform of Large Grating Ruling Engine." Advanced Materials Research 706-708 (June 2013): 1423–27. http://dx.doi.org/10.4028/www.scientific.net/amr.706-708.1423.

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Vibration is one of the key factors affecting the machining precision of ultra-precision grating-ruling machines. In this study a structural model of the ultra-precision two-stage isolation system of a large grating-ruling engine is designed according to the vibration characteristics of the grating-ruling engine, and an active vibration control system adopting the fuzzy adaptive PID controller (FAPIDC) approach combined with an air-springs system is applied to realize high performance in controlling complex micro-vibration. The stability of PID control and the flexibility and adaptability of the fuzzy logic controller (FLC) are both combined for FAPIDC, because the optimal values of PID parameters are obtained by using fuzzy sets. The simulation results confirm that the two-stage vibration control system using fuzzy adaptive PID control strategy has good isolation performance against disturbance. The control system has fast dynamic response, high stabilization precision and strong adaptive robustness.

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Corbett, J. "Smart machine tools." Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering 212, no. 3 (1998): 203–13. http://dx.doi.org/10.1243/0959651981539406.

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Improved manufacturing methods have become crucial factors in retaining global competitiveness for a wide range of products. This has led to the development of new automatic supervision techniques for use in smart machine tools. These are necessary because it is not possible to design and manufacture machine tool structures and systems with work zone areas of sufficient accuracy and repeatability to meet the improved performance requirements demanded by many modern manufacturing companies. The principal areas for automatic supervision of the machine tool are the tooling, appropriate machine elements and the overall machine system. Thermal effects have been shown to be the largest source of dimensional errors and apparent non-repeatability of machines. Therefore, for the highest precision machines on-line temperature monitoring and control is of paramount importance. This paper describes the application of automatic supervision techniques applied to the NION diamond turning and grinding machine, developed by Cranfield Precision Engineering Limited, which is the most accurate machine tool, of its size, currently available, as well as an ultra precision five-axis grinding machine, built in Japan by the Toyoda Machine Works Limited. In addition, following a project at Cranfield University, the benefits of on-line measuring techniques are discussed in obtaining new cost effective manufacturing methods for producing aero-engine turbine blades. Further examples are given, including major projects at Liverpool John Moores University and Eindhoven University of Technology, where significant improvements in accuracy capabilities were obtained for a standard cylindrical grinding machine and a five-axis vertical milling machine.

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MCKEOWN, P. A., K. CARLISLE, P. SHORE, and R. F. J. READ. "Ultra-precision, high stiffness CNC grinding machines for ductile mode grinding of brittle materials." Journal of the Japan Society for Precision Engineering 56, no. 5 (1990): 806–14. http://dx.doi.org/10.2493/jjspe.56.806.

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Bosmans, Niels, Jun Qian, and Dominiek Reynaerts. "Reproducibility of a Nanometre Accurate Moving-Scale Measurement System." Key Engineering Materials 613 (May 2014): 37–42. http://dx.doi.org/10.4028/www.scientific.net/kem.613.37.

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A dedicated experimental setup has been designed and built up for determining the reproducibility of a 1-DOF moving-scale measurement system. A 3-DOF moving-scale system would enable the measurement of the position of a workpiece table moving in three perpendicular directions with minimized Abbe-offset. This allows normal machine tools and CMMs to match or even surpass the accuracy of ultra-precision machines. An uncertainty budget indicates that the 1-DOF moving-scale system can obtain a measurement uncertainty of 18 nm. Thermal drift is the largest contribution to the measurement uncertainty and should be accurately determined.

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Schmidt, Robert-H. Munnig. "Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry." Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences 370, no. 1973 (2012): 3950–72. http://dx.doi.org/10.1098/rsta.2011.0054.

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The developments in lithographic tools for the production of an integrated circuit (IC) are ruled by ‘Moore’s Law’: the density of components on an IC doubles in about every two years . The corresponding size reduction of the smallest detail in an IC entails several technological breakthroughs. The wafer scanner, the exposure system that defines those details, is the determining factor in these developments. This review deals with those aspects of the positioning systems inside these wafer scanners that enable the extension of Moore’s Law into the future. The design of these systems is increasingly difficult because of the accuracy levels in the sub-nanometre range coupled with motion velocities of several metres per second. In addition to the use of feedback control for the reduction of errors, high-precision model-based feed-forward control is required with an almost ideally reproducible motion-system behaviour and a strict limitation of random disturbing events. The full mastering of this behaviour even includes material drift on an atomic scale and is decisive for the future success of these machines.

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Walker, David, Guo Yu Yu, Caroline Gray, et al. "Process Automation in Computer Controlled Polishing." Advanced Materials Research 1136 (January 2016): 684–89. http://dx.doi.org/10.4028/www.scientific.net/amr.1136.684.

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We report on an ambitious project in the field of automation, applied to bound and free abrasive processing of precision and ultra-precision surfaces, with potentially far-reaching consequences. This involves two main aspects:- directly processing surfaces using industrial robots, and combining robots with Zeeko CNC polishing machines to automate operations that are currently manual. These form steps towards our ultimate vision of the Integrated Manufacturing Cell for bespoke optics rather than mass-produced, and manufacture of other precision surfaces including prosthetic joint implants. Projects such as the European Extremely Large Telescope provide a relevant case study, where significant numbers of high-value bespoke optics are required.

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Brinksmeier, Ekkard, and Werner Preuss. "Micro-machining." Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences 370, no. 1973 (2012): 3973–92. http://dx.doi.org/10.1098/rsta.2011.0056.

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Manipulating bulk material at the atomic level is considered to be the domain of physics, chemistry and nanotechnology. However, precision engineering, especially micro-machining, has become a powerful tool for controlling the surface properties and sub-surface integrity of the optical, electronic and mechanical functional parts in a regime where continuum mechanics is left behind and the quantum nature of matter comes into play. The surprising subtlety of micro-machining results from the extraordinary precision of tools, machines and controls expanding into the nanometre range—a hundred times more precise than the wavelength of light. In this paper, we will outline the development of precision engineering, highlight modern achievements of ultra-precision machining and discuss the necessity of a deeper physical understanding of micro-machining.

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Okwudire, Chinedum E., and Jihyun Lee. "Minimization of the residual vibrations of ultra-precision manufacturing machines via optimal placement of vibration isolators." Precision Engineering 37, no. 2 (2013): 425–32. http://dx.doi.org/10.1016/j.precisioneng.2012.11.005.

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Vahdati, Mehrdad, Ali Shokuhfar, and Meysam Bagheri. "The Influence of External Load and Air Pressure on Air Slide Table Performance of Ultra Precision Machines in Nano Machining." Defect and Diffusion Forum 283-286 (March 2009): 177–82. http://dx.doi.org/10.4028/www.scientific.net/ddf.283-286.177.

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Ultra precision machine tools are used in nano machining technology. Two main assemblies creating rotational and linear motion, called air spindle and linear air table are used in these machines. The linear air table has been simulated experimentally like a linear air bearing. This bearing moves in the main direction, X, while it has straightness error motions in Y and Z directions. The error values vary due to different parameters. This investigation deals with the influential parameters and their proportion in the error value. As far as the two mating surfaces are separated by a thin layer of pressurized air, the air pressure, location and amount of external load, are some of the parameters which have been studied. Results show that the more air pressure, the more stability and stiffer table. There will be less error motions as well. The error amount is not the same in X and Y directions. Finally, in order to have linear stiffness, the optimum air pressure, external load, and load location have been decided.

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Bouderbala, K., and H. Nouira. "FEM and experimental investigation of the thermal drift in ultra-high precision measuring machines for dimensional metrology." Measurement 90 (August 2016): 250–64. http://dx.doi.org/10.1016/j.measurement.2016.04.064.

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Arezki, Yassir, Rong Su, Ville Heikkinen, et al. "Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level." Sensors 21, no. 4 (2021): 1103. http://dx.doi.org/10.3390/s21041103.

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The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

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Kazimierski, Zbyszko, Lech Brzeski, and Longin Horodko. "Gas Bearing of Infinite Stiffness." Journal of Tribology 114, no. 2 (1992): 270–73. http://dx.doi.org/10.1115/1.2920883.

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The experiences gathered during the theoretical and experimental investigations of the thrust and journal high stiffness bearing (H.S.B.) allowed to improvement of their characteristics. New elements of the throttling system were introduced into the journal H.S.B. to make possible this improvement. It was shown that the H.S.B. can reach infinite stiffness in a wide range of the loading forces having at the same time zero or submicronic shaft displacement. Additionally, the load-displacement characteristic of the H.S.B. may have the prescribed negative displacement to make possible the full compensation of elastic deformation of connected machine parts. The influence of journal rotation on the H.S.B. load-displacement characteristics is discussed in this paper. The H.S.B. of presented characteristics may be applied to many precise devices, e.g., to ultra-precision grinding machines.

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Cheung, ChiFai, MingJun Ren, LingBao Kong, and David Whitehouse. "Modelling and analysis of uncertainty in the form characterization of ultra-precision freeform surfaces on coordinate measuring machines." CIRP Annals 63, no. 1 (2014): 481–84. http://dx.doi.org/10.1016/j.cirp.2014.03.032.

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Hocken, Robert J., R. Fesperman, J. Overcash, O. Ozturk, and C. Stroup. "Engineering Nanotechnology: The Top Down Approach." Key Engineering Materials 381-382 (June 2008): 3–6. http://dx.doi.org/10.4028/www.scientific.net/kem.381-382.3.

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Nanotechnology can be defined as “the study, development and processing of materials, devices, and systems in which structure on a dimension of less than 100 nm is essential to obtain the required functional performance.” There are currently two very different approaches to nanotechnology, the first and more classical approach is commonly called engineering nanotechnology. This approach involves using classical deterministic mechanical and electrical engineering principles to build structures with tolerances at levels approaching a nanometer. The other approach, sometimes called molecular nanotechnology, is concerned with self-assembled machines and the like and is far more speculative. At UNC Charlotte’s Center for Precision Metrology we have been working in engineering nanotechnology for more than a decade. We started with molecular manipulation with scanning probe microscopes in the late 1980s [1] and have continued to develop new measurement systems [2], nano-machining systems [3,4], and nano-positioning devices. One of the largest challenges is precision motion control of macroscopic stages. Currently we have three stages under development or modification. The first is the Sub Atomic Measuring Machine (SAMM) [5] which is being modified to provide picometer resolution; the second is the Multi-Scale Alignment and Positioning System (MAPS) initially to be used for nanoimprinting; the third is an Ultra-Precision Vacuum Stage [6], which is the subject of another paper in this conference. This paper will discuss the first two systems.

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Feng, Kaiping, Tianchen Zhao, Binghai Lyu, and Zhaozhong Zhou. "Ultra-precision grinding of 4H-SiC wafer by PAV/PF composite sol-gel diamond wheel." Advances in Mechanical Engineering 13, no. 9 (2021): 168781402110449. http://dx.doi.org/10.1177/16878140211044929.

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To eliminate the deep scratches on the 4H-SiC wafer surface in the grinding process, a PVA/PF composite sol-gel diamond wheel was proposed. Diamond and fillers are sheared and dispersed in the polyvinyl alcohol-phenolic resin composite sol glue, repeatedly frozen at a low temperature of −20°C to gel, then 180°C sintering to obtain the diamond wheel. Study shows that the molecular chain of polyvinyl alcohol-phenolic resin is physically cross-linked to form gel under low-temperature conditions. Tested by mechanical property testing machines, microhardness tester, and SEM. The results show that micromorphology is more uniform, the strength of the sol-gel diamond wheel is higher, the hardness uniformity is better than that of the hot pressing diamond wheel. Grinding experiments of 4H-SiC wafer were carried out with the prepared sol-gel diamond wheel. The influence of grinding speed, feed rate, and grinding depth on the surface roughness was investigated. The results showed that by using the sol-gel diamond wheel, the surface quality of 4H-SiC wafer with an average surface roughness Ra 6.42 nm was obtained under grinding wheel speed 7000 r/min, grinding feed rate 6 µm/min, and grinding depth 15 µm, the surface quality was better than that of using hot pressing diamond wheel.

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Ekberg, Peter, Lars Stiblert, and Lars Mattsson. "A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines." Measurement Science and Technology 25, no. 5 (2014): 055001. http://dx.doi.org/10.1088/0957-0233/25/5/055001.

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Han, Cheng Shun, Long Jiang Zhang, and Shen Dong. "Research on Mathematical Models of New Diamond Turning for Non-Axisymmetric Aspheric Mirrors." Key Engineering Materials 364-366 (December 2007): 35–38. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.35.

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In this paper, a new generation method for diamond turning non-axisymmetry aspheric mirrors is introduced. A rotary arm that carried a diamond tool combined with fast tool servo was used to replace the straight guides employed by most diamond turning machines. The micro linear feed of the fast tool servo was real-time calculated with the use of high resolution angular feedback on the work spindle and the swing tool. Synchronized motion of the fast tool servo according to rotating angles of the workpiece and the diamond tool produced ultra-precision non-axisymmetry aspheric surfaces. The corresponding mathematical models of NC program are presented.

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Yazawa, Takanori, Yousuke Hattori, Yasuhiko Ogiya, and Tatsuhiro Kojima. "Figure Error Control for Microgrooving on Ordinary Lateral Milling Machines Using a Reference Surface to Control Cutting." International Journal of Automation Technology 3, no. 4 (2009): 428–32. http://dx.doi.org/10.20965/ijat.2009.p0428.

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This paper proposes improving microgrooving system on an ordinary lateral milling machine by using controlled cutting with reference surface (CCRS). CCRS improves ultra-precision machining accuracy through in-process measurement and control. CCRS controls relative displacement between the tool and workpiece, effectively improving table motion error accuracy. CCRS was confirmed in simulation and experiments to (1) improve accuracy if digital control sampling time is enough shorter than the error motion period and (2) worsen surface roughness because the feed rate equals cutting speed in shaping if the shorter sampling time for the error motion period cannot be used. In other words, the relationship between improvement in table error motion accuracy and desirable surface roughness is a trade-off solved by using fly cutting with CCRS.

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Vahdati, Mehrdad, and Ali Shokuhfar. "An Analytical Study on the Spherical Spindle of an Ultra Precision Machine for Use in Nano Machining Technology." Defect and Diffusion Forum 283-286 (March 2009): 171–76. http://dx.doi.org/10.4028/www.scientific.net/ddf.283-286.171.

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Air spindles in ultra precision machines produce rotational movements for the cutting tool or work piece. The common combination of a simple cylindrical rotor and stator is the design for most spindles. If the length of such a spindle is longer than usual, it will deviate from its stable situation and start vibrating during operation, especially in high rotational speeds. In order to overcome the vibration problem, one of possible solutions is the application of a spherical rotor and stator. The manufacturing and assembly limitations do not allow obeying the spherical shape exactly. Thus, the design has been committed according to a quasi-sphere. This form of the rotor will be more stable. The subsequent result of stability improvement will be less air pressure and power consumption. There are some specific characterizations of the spindle which must be calculated for the spherical case. For this purpose a computer model of the object was made. Then, the model was put under finite element study to find the best air pressure and air flow velocity condition.

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Galajda, Pavol, Alena Galajdova, Stanislav Slovak, et al. "Robot vision ultra-wideband wireless sensor in non-cooperative industrial environments." International Journal of Advanced Robotic Systems 15, no. 4 (2018): 172988141879576. http://dx.doi.org/10.1177/1729881418795767.

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In this article, the ultra-wideband technology for localization and tracking of the robot gripper (behind the obstacles) in industrial environments is presented. We explore the possibilities of ultra-wideband radar sensor network employing the centralized data fusion method that can significantly improve tracking capabilities in a complex environment. In this article, we present ultra-wideband radar sensor network hardware demonstrator that uses a new wireless ultra-wideband sensor with an embedded controller to detect and track online or off-line movement of the robot gripper. This sensor uses M-sequence ultra-wideband radars front-end and low-cost powerful processors on a system on chip with the advanced RISC machines (ARM) architecture as a main signal processing block. The ARM-based single board computer ODROID-XU4 platform used in our ultra-wideband sensor can provide processing power for the preprocessing of received raw radar signals, algorithms for detection and estimation of target’s coordinates, and finally, compression of data sent to the data fusion center. Data streams of compressed target coordinates are sent from each sensor node to the data fusion center in the central node using standard the wireless local area network (WLAN) interface that is the feature of the ODROID-XU4 platform. The article contains experimental results from measurements where sensors and antennas are located behind the wall or opaque material. Experimental testing confirmed capability of real-time performance of developed ultra-wideband radar sensor network hardware and acceptable precision of software. The introduced modular architecture of ultra-wideband radar sensor network can be used for fast development and testing of new real-time localization and tracking applications in industrial environments.

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Choi, K.-B., and J. J. Lee. "Static model for flexure-based compliant mechanism driven by piezo stacks." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 222, no. 4 (2008): 703–9. http://dx.doi.org/10.1243/09544062jmes630.

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Flexure-based compliant mechanisms have been used in ultra-precision stages, stages for nano-imprint machines, AFM scanners, and MEMS structures, etc. In this paper, a mathematical static model for flexure-based compliant mechanism driven by piezo stacks is derived. The force vector generated from piezo stacks was linearized in terms of displacement and applied voltage vectors. Then, the piezo force vector was substituted into the static model of a compliant mechanism. Finally, the force and the displacement vectors of input bodies, and the block force and the displacement vectors of output bodies were derived. The derived mathematical model was verified by FEM analyses and experiments. The derived mathematical model can well describe the static performance of a flexure-based compliant mechanism driven by piezo stacks.

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Park, Sang Bong. "An Application of Estimate Expert System Technology for Burrless Rubber Mould Manufacturing Process." Advanced Materials Research 308-310 (August 2011): 1732–39. http://dx.doi.org/10.4028/www.scientific.net/amr.308-310.1732.

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Rubber products have durable, lightweight, and shockproof properties, which allow them to be used in various industries. As demand on products with elaborate shape and parts and minimized occurrence of burrs has increased in high-precision industries, particularly in IT, BT, and NT, moulding technology becomes an essential technology to develop core objects composing frames for assembly and elementary parts that produce ultra small machines and basic components of MEMS and NEMS. Despite the technological demand, rubber-related moulding technology has not been standardized, and its total process – shaping, design, production, and test – has not been systemized, which results in low productivity in rubber products. This study is to standardize and systematize the rubber product production process by evaluating the cost estimation of moulding production process and to improve occurring problems during the process. The subject of the study was burrless rubber product moulding process.

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Song, R. J., J. L. Niu, and Dong Hai Chen. "Current Development and Countermeasure of Ultra-Precision Machine Tools." Key Engineering Materials 455 (December 2010): 632–36. http://dx.doi.org/10.4028/www.scientific.net/kem.455.632.

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Ultra-precision machine tools is an important machinery equipment to implement ultra-precision machining. Current development and the trend of the ultra-precision machine tools was analyzed. The factors influencing machining accuracy were pointed out from the viewpoint of system. Some suggestions were put forward on the domestic development and research of the ultra-precision machine tools.

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Sun, X. W., Fei Hu Zhang, Shen Dong, and L. J. Zhang. "Research on Low Speed Servo Control Technology of Ultra-Precision Machine Tool." Key Engineering Materials 339 (May 2007): 163–67. http://dx.doi.org/10.4028/www.scientific.net/kem.339.163.

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An ultra-precision machine is developed by Precision Engineering Research Institute of Harbin Institute of Technology to machine components made of KDP crystal with single point diamond fly cutting technique . A stable ultra-low speed feed of worktable is necessary in the machining process inasmuch as the KDP crystal components to be machined must be high form accuracy, low surface roughness and low surface waveness . This paper analyses the effect on speed stability and positioning accuracy under the control of semi-closed loop and full-closed loop based on the experimental data, and also present a compensating control algorithm of error disturbance feed-forward which enhances the stability of ultra-low speed motion of the semi-closed loop feed control servo system of the machine. The simulation results indicate that the values of the steadystate tracking error decreased to 1/10 after using compensating control algorithm. The P-V value of the aluminum specimen machined by the ultra-precision machine tool was 0.27 wavelengths.

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KAI, Yoshiaki, Masahiko FUKUTA, Atsushi MATSUBARA, and Daisuke KONO. "0113 Effect of support system on vibration mode of ultra-precision machine tools." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2015.8 (2015): _0113–1_—_0113–2_. http://dx.doi.org/10.1299/jsmelem.2015.8._0113-1_.

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Wu, Dong Xu, Guo Li, Bo Wang, Zheng Qiao, and Lei Lv. "Fabrication of Microstructured Surfaces by Five-Axis Ultra Precision Machine Tool." Key Engineering Materials 625 (August 2014): 187–91. http://dx.doi.org/10.4028/www.scientific.net/kem.625.187.

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In this paper, a five-axis ultra precision machine tool for fabrication of microstructured surfaces is presented. This machine consists of two rotary axes (C&B) and three linear axes (X&Y&Z). High precision aerostatic bearing and torque motor are adopted in C axis (main spindle) and B axis. X axis and Z axis use the hydrostatic guideway and are driven by linear motors. Y axis is driven by torque motor and precision ball screw. This machine is able to realize multiple processing methods, including ultra precision diamond turning, ultra precision milling, fly-cutting, fast tool servo and slow tool servo diamond turning.Furthermore, a large number of experiment researches are carried out. Some typical microstructure surfaces are manufactured, for sinusoidal grid surface, the surface roughness Ra is 11.9nm, which is machined by slow tool servo diamond turning. Micro pyramid array surface is fabricated by using fly-cutting, which performs well both in the profile accuracy and the repeatability. These experiment researches prove that this ultra precision machine is superior in accuracy and system reliability.

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Uhlmann, Eckart, Gerhard Häusler, Christian Röttinger, Evelyn Olesch, Christian Faber, and M. Kurz. "Machine Integrated Measurement of Ultra Precision Machined Specular Non-Rotational Symmetrical Surfaces." Advanced Materials Research 907 (April 2014): 277–89. http://dx.doi.org/10.4028/www.scientific.net/amr.907.277.

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In this paper, current results of a research project combining ultra precision machining and optical measurement are presented. The goal is to improve the quality of specular freeform surfaces manufactured by ultra precision slow slide servo turning by running appropriate correction cycles on the basis of machine integrated measurements. These measurements are conducted using the principle of Phase Measuring Deflectometry (PMD) in order to optically acquire full-field 3D-height data. For this purpose, a special setup the so called Mini PMD that can be operated within the limited installation space of an ultra precision machine tool has been designed and implemented. Results of machine integrated measurements of a specular non-rotational symmetrical surface are presented. Furthermore, using Mini PMD and a rotationally symmetric test surface, a complete correction cycle is demonstrated without the necessity of taking the workpiece off the machine for measurement.

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Chen, Guoda, Yazhou Sun, Chenhui An, Feihu Zhang, Zhiji Sun, and Wanqun Chen. "Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool." Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 232, no. 9 (2016): 1501–7. http://dx.doi.org/10.1177/0954405416673102.

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The ultra-precision spindle is the key component of ultra-precision machine tool, which largely influences the machining accuracy. Its frequency characteristics mainly affect the frequency domain error of the machined surface. In this article, the error measurement setup for the ultra-precision aerostatic spindle in a flycutting machine tool is established. The dynamic and multi-direction errors of the spindle are real-time measured under different rotation speeds. Then, frequency domain analysis is carried out to obtain its regularity characteristics based on the measurement result. Through the analysis, the main synchronous and asynchronous errors with relatively large amplitude of the spindle errors are found, and the amplitude change law of these main spindle errors is obtained. Besides, the cause of the main synchronous and asynchronous errors is also analyzed and indicated. This study deepens the understanding of ultra-precision spindle dynamic characteristics and plays the important role in the spindle frequency domain errors’ control, machining process planning, frequency characteristics analysis and oriented control of the machined surface errors.

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Leighton, M., T. Nicholls, M. De la Cruz, R. Rahmani, and H. Rahnejat. "Combined lubricant–surface system perspective: Multi-scale numerical–experimental investigation." Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 231, no. 7 (2016): 910–24. http://dx.doi.org/10.1177/1350650116683784.

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Frictional losses are one of the main causes of reduced energy efficiency in all machines and mechanisms. In particular, there is mounting pressure upon manufacturers of all forms of vehicle to comply with increasingly stringent legislation and directives with regard to harmful emissions. Therefore, reduction of friction has become an imperative issue. The traditional approach of dealing with surface material and lubricant formulation in isolation has been replaced by a lubricant–surface system approach. This paper presents multi-scale experimentation from nano/meso-scale lateral force microscopy of ultra-thin surface adsorbed films through to micro-scale precision sliding tribometry to investigate lubricant–surface friction optimisation within the mixed regime of lubrication, using lubricants with different organic and inorganic friction modifying species. These affect the parameters of the system, commonly used as input to models for mixed and boundary regimes of lubrication. Therefore, the precise measurement of these parameters at different physical scales is important. The study also makes use of detailed numerical predictions at micro-scale through combined solution of the average Reynolds equation as well as interaction of wetted asperities in mixed and boundary regimes of lubrication. Good agreement is found between the predictions and measurements at micro-scale tribometric interactions. Furthermore, the same trends are observed in testing across the physical scales.

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Huo, De Hong, Kai Cheng, and Hui Ding. "Design and Performance Assessment of a 5-Axis Ultra-Precision Micro-Milling Machine." Applied Mechanics and Materials 217-219 (November 2012): 1699–704. http://dx.doi.org/10.4028/www.scientific.net/amm.217-219.1699.

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This paper presents the development and performance assessment of a novel 5-axis ultra-precision micro-milling machine (UltraMill) which enables ultra-precision micromachining of high precision 3D miniature components and micro features. An integrated design approach with motion accuracy, dynamic stiffness and thermal stability prioritized has been proposed and applied to analyze and optimize key machine components and their integration. Direct drives and aerostatic bearings with the squeeze oil-film damper are employed in the micro-milling machine throughout, which offers higher motion accuracy, improved dynamics and loading capacity. Micro-milling trials were performed on OFHC copper using tungsten carbide, CVD diamond and single crystal diamond micro tools. Both micro featured profiles and micro machined surfaces were measured to validate the proposed machine specifications and performance.

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Namba, Y., H. Tsuwa, R. Wada, and N. Ikawa. "Ultra-Precision Float Polishing Machine." CIRP Annals 36, no. 1 (1987): 211–14. http://dx.doi.org/10.1016/s0007-8506(07)62588-8.

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Zhang, Chao, Fei Hu Zhang, and Qiang Zhang. "Design and Test of Piezoelectric Tool Actuator on Ultra-Precision Machine Tool for KDP Crystals." Advanced Materials Research 1027 (October 2014): 16–19. http://dx.doi.org/10.4028/www.scientific.net/amr.1027.16.

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In order to improve the positioning resolution of the tool adapter on ultra-precision machine tool for KDP crystals, this paper presents a new piezo tool actuator. First, a new flexible membrane structure is designed after considering the characteristics of the machine tool for KDP crystals. Then, its detailed structural dimension is determined by finite element method. Finally, the piezo tool actuator is machined based on designs and its performance data is obtained by experiments. Experimental results indicate that its positioning resolution is superior to 0.5μm and its stroke reaches 4.7μm, which can meet the requirements of ultra-precision machine tool for KDP crystals.

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Journal articles on the topic 'Ultra-precision machines'

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