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Journal articles on the topic 'Ultrathin oxides'

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1

Bec, Romulad B., Andrzej Jakubowsk, Lidia Łukasiak, and Michał Korwin-Pawłowski. "Challenges in ultrathin oxide layers formation." Journal of Telecommunications and Information Technology, no. 1 (March 30, 2001): 27–34. http://dx.doi.org/10.26636/jtit.2001.1.46.

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In near future silicon technology cannot do without ultrathin oxides, as it becomes clear from the Roadmap 2000. Formation, however, of such layers creates a lot of technical and technological problems. The aim of this paper is to present the technological methods that potentially can be used for formation of ultrathin oxide layers for next generations ICs. The methods are brie y described and their pros and cons are discussed.
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2

Taylor, Seth T., John Mardinly, and Michael A. O'Keefe. "HRTEM Image Simulations for the Study of Ultrathin Gate Oxides." Microscopy and Microanalysis 8, no. 5 (2002): 412–21. http://dx.doi.org/10.1017/s1431927602020123.

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We have performed high resolution transmission electron microscope (HRTEM) image simulations to qualitatively assess the visibility of various structural defects in ultrathin gate oxides of MOSFET devices, and to quantitatively examine the accuracy of HRTEM in performing gate oxide metrology. Structural models contained crystalline defects embedded in an amorphous 16-Å-thick gate oxide. Simulated images were calculated for structures viewed in cross section. Defect visibility was assessed as a function of specimen thickness and defect morphology, composition, size, and orientation. Defect morp
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3

Zhu, Jianhui, Jian Jiang, Wei Ai, et al. "Encapsulation of nanoscale metal oxides into an ultra-thin Ni matrix for superior Li-ion batteries: a versatile strategy." Nanoscale 6, no. 21 (2014): 12990–3000. http://dx.doi.org/10.1039/c4nr03661a.

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A versatile strategy of encapsulating nanoscale metal oxides into ultrathin Ni “armors” is proposed for superior anodes of LIBs. The hybrids of metal oxide@Ni show drastic improvements in the capacity retention, long-term cyclic stability and rate performance.
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4

Huang, Feng, W. J. Liu, J. F. Sullivan, J. A. Barnard, and M. L. Weaver. "Room-temperature oxidation of ultrathin TiB2 films." Journal of Materials Research 17, no. 4 (2002): 805–13. http://dx.doi.org/10.1557/jmr.2002.0118.

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Titanium diboride has been claimed as a very promising candidate material for protective applications in the magnetic recording. Its oxidation resistance at room temperature is a critical criterion in assessing this application potential. In this paper, the oxidation characteristics of ultrathin TiB2 thin films, such as overcoat erosion and oxide thickness, are investigated via a combination of x-ray reflectivity, x-ray photoelectron spectroscopy (XPS), and atomic force microscopy. It was found that a <2-h exposure to air at room temperature led to the formation of approximately 15-Å-thick,
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5

Morgen, P., A. Bahari, U. Robenhagen, et al. "Roads to ultrathin silicon oxides." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23, no. 1 (2005): 201–7. http://dx.doi.org/10.1116/1.1842113.

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6

Wang, Kai, Bolong Huang, Weiyu Zhang, et al. "Ultrathin RuRh@(RuRh)O2 core@shell nanosheets as stable oxygen evolution electrocatalysts." Journal of Materials Chemistry A 8, no. 31 (2020): 15746–51. http://dx.doi.org/10.1039/d0ta03213a.

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We report a novel architecture of ultrathin RuRh@(RuRh)O<sub>2</sub> core/shell nanosheets with a core of ultrathin metallic RuRh nanosheets and a shell of (RuRh)O<sub>2</sub> oxides as a superb electrocatalyst toward the oxgen evolution reaction (OER), better than most of the state-of-the-art Ru-based or Ir-based electrocatalysts. Moreover, the RuRh@(RuRh)O<sub>2</sub> core/shell nanosheets exhibit good durability because the (RuRh)O<sub>2</sub> oxide shell protects the normally labile RuRh NS core against dissolution during the OER process.
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7

Lobinsky, A. A., and V. I. Popkov. "Ultrathin 2D nanosheets of transition metal (hydro)oxides as prospective materials for energy storage devices: A short review." Electrochemical Materials and Technologies 1, no. 1 (2022): 20221008. http://dx.doi.org/10.15826/elmattech.2022.1.008.

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The ultrathin two-dimensional (2D) transition metal oxides and hydroxides (TMO and TMH) nanosheets are attractive for creating high-performance energy storage devices due to a set of unique physical and chemical properties. Flat 2D structure of such materials provides a sufficient number of active adsorption centers, and the ultra-small thickness, on the order of several nanometers, provides fast charge transfer, which significantly improves electronic conductivity. This brief review summarizes recent progress in the synthesis of materials based on ultrathin 2D nanosheets for energy storage ap
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8

Rotondaro, A. L. Pacheco, R. T. Laaksonen, and S. P. Singh. "Impact of the Nitrogen Concentration of Sub-1.3 nm Gate Oxides on 65 nm Technology Transistor Parameters." Journal of Integrated Circuits and Systems 2, no. 2 (2007): 63–66. http://dx.doi.org/10.29292/jics.v2i2.265.

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The nitrogen concentration of ultrathin gate oxides (sub-1.3 nm) was varied in a wide range (from 13 % to 23 %). The threshold voltage and the channel carrier mobility of advanced 65 nm technology CMOSFET transistors fabricated with these oxides were analyzed. It was observed that increasing the nitrogen concentration in the gate oxide results in a negative shift of the threshold voltage for both NMOS and PMOS devices and a degradation of the hole mobility. It was also observed that pchannel transistors are more sensitive to the nitrogen concentration of the gate oxide than n-channel transisto
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9

Ting, D. Z. Y. "Tunneling characteristics of nonuniform ultrathin oxides." Applied Physics Letters 73, no. 19 (1998): 2769–71. http://dx.doi.org/10.1063/1.122585.

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10

Ting, D. Z. Y., Erik S. Daniel, and T. C. Mcgill. "Interface Roughness Effects in Ultra-Thin Tunneling Oxides." VLSI Design 8, no. 1-4 (1998): 47–51. http://dx.doi.org/10.1155/1998/23567.

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Advanced MOSFET for ULSI and novel silicon-based devices require the use of ultrathin tunneling oxides where non-uniformity is often present. We report on our theoretical study of how tunneling properties of ultra-thin oxides are affected by roughness at the silicon/oxide interface. The effect of rough interfacial topography is accounted for by using the Planar Supercell Stack Method (PSSM) which can accurately and efficiently compute scattering properties of 3D supercell structures. Our results indicate that while interface roughness effects can be substantial in the direct tunneling regime,
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11

Chari, K. S., and S. Kar. "Interface Characteristics of Metal‐Oxide‐Semiconductor Capacitors with Ultrathin Oxides." Journal of The Electrochemical Society 138, no. 7 (1991): 2046–49. http://dx.doi.org/10.1149/1.2085921.

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12

Choi, B. D., and D. K. Schroder. "Degradation of ultrathin oxides by iron contamination." Applied Physics Letters 79, no. 16 (2001): 2645–47. http://dx.doi.org/10.1063/1.1410363.

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13

Donggun Park and Chenming Hu. "Plasma charging damage on ultrathin gate oxides." IEEE Electron Device Letters 19, no. 1 (1998): 1–3. http://dx.doi.org/10.1109/55.650333.

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14

Wen, H. J., and R. Ludeke. "Localized degradation studies of ultrathin gate oxides." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16, no. 3 (1998): 1735–40. http://dx.doi.org/10.1116/1.581293.

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15

Hamed, Mai Hussein, David N. Mueller та Martina Müller. "Thermal phase design of ultrathin magnetic iron oxide films: from Fe3O4 to γ-Fe2O3 and FeO". Journal of Materials Chemistry C 8, № 4 (2020): 1335–43. http://dx.doi.org/10.1039/c9tc05921k.

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Thermodynamically “active” oxide interfaces alter the standard iron oxide phase diagram of complex heterostructures. By controlling the effective oxygen pressure, selected iron oxides phases can be designed through a thermal phase design.
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16

Eng, J., R. L. Opila, J. M. Rosamilia, et al. "The Evolution of Chemical Oxides Into Ultrathin Oxides: A Spectroscopic Characterization." Solid State Phenomena 76-77 (January 2001): 145–48. http://dx.doi.org/10.4028/www.scientific.net/ssp.76-77.145.

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17

Takeda, Mikako, Takeshi Ohwaki, Hideo Fujii, et al. "Influence of Native Oxides on the Reliability of Ultrathin Gate Oxide." Japanese Journal of Applied Physics 37, Part 1, No. 2 (1998): 397–401. http://dx.doi.org/10.1143/jjap.37.397.

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18

Chen, Zongkun, Minghua Huang, and Helmut Cölfen. "Synthesis of ultrathin metal oxide and hydroxide nanosheets using formamide in water at room temperature." CrystEngComm 23, no. 21 (2021): 3794–801. http://dx.doi.org/10.1039/d1ce00277e.

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19

Liao, Zhaoliang, and Jiandi Zhang. "Metal-to-Insulator Transition in Ultrathin Manganite Heterostructures." Applied Sciences 9, no. 1 (2019): 144. http://dx.doi.org/10.3390/app9010144.

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Thickness-driven phase transitions have been widely observed in many correlated transition metal oxides materials. One of the important topics is the thickness-driven metal to insulator transition in half-metal La2/3Sr1/3MnO3 (LSMO) thin films, which has attracted great attention in the past few decades. In this article, we review research on the nature of the metal-to-insulator (MIT) transition in LSMO ultrathin films. We discuss in detail the proposed mechanisms, the progress made up to date, and the key issues existing in understanding the related MIT. We also discuss MIT in other correlate
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20

Hardy, An, Sven Van Elshocht, Jan D’Haen, et al. "Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films." Journal of Materials Research 22, no. 12 (2007): 3484–93. http://dx.doi.org/10.1557/jmr.2007.0433.

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Ultrathin lanthanide (Nd, Pr, Eu, Sm) oxide films with functional dielectric properties down to 3.3 nm thickness were deposited by aqueous chemical solution deposition (CSD) onto hydrophilic SiO2/Si substrates. Precursor solutions were prepared from the oxides via an intermediate, solid Ln(III)citrate. A film heat treatment scheme was derived from thermogravimetric analysis of the precursor gels, showing complete decomposition by 600 °C. Crystalline phase formation in the films depended on the lanthanide, annealing temperature, and citric acid content in the precursor. Through variation of the
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21

Fukuda, Masatoshi, Wataru Mizubayashi, Atsushi Kohno, Seiichi Miyazaki, and Masataka Hirose. "Analysis of Tunnel Current through Ultrathin Gate Oxides." Japanese Journal of Applied Physics 37, Part 2, No. 12B (1998): L1534—L1536. http://dx.doi.org/10.1143/jjap.37.l1534.

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22

Chen, C. C., C. Y. Chang, C. H. Chien, T. Y. Huang, H. C. Lin, and M. S. Liang. "Temperature-accelerated dielectric breakdown in ultrathin gate oxides." Applied Physics Letters 74, no. 24 (1999): 3708–10. http://dx.doi.org/10.1063/1.123228.

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23

Hori, Takashi, Hiroshi Iwasaki, Takuichi Ohmura, Atsuko Samizo, Minoru Sato, and Yoshiaki Yoshioka. "Compositional study of ultrathin rapidly reoxidized nitrided oxides." Journal of Applied Physics 65, no. 2 (1989): 629–35. http://dx.doi.org/10.1063/1.343095.

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24

Hattori, Takeo, Hiroshi Nohira, and Kensuke Takahashi. "The initial growth steps of ultrathin gate oxides." Microelectronic Engineering 48, no. 1-4 (1999): 17–24. http://dx.doi.org/10.1016/s0167-9317(99)00329-9.

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25

Contaret, T., G. Ghibaudo, A. Ferron, and F. Bœuf. "Excess drain noise simulation in ultrathin oxides MOSFETs." Journal of Computational Electronics 5, no. 2-3 (2006): 187–92. http://dx.doi.org/10.1007/s10825-006-8842-1.

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26

Zander, D., F. Saigne, C. Petit, and A. Meinertzhagen. "Electrical stress effects on ultrathin (2.3 nm) oxides." Journal of Non-Crystalline Solids 280, no. 1-3 (2001): 86–91. http://dx.doi.org/10.1016/s0022-3093(00)00393-8.

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27

Chang, Chun-Yen, Chi-Chun Chen, Horng-Chih Lin, Mong-Song Liang, Chao-Hsin Chien, and Tiao-Yuan Huang. "Reliability of ultrathin gate oxides for ULSI devices." Microelectronics Reliability 39, no. 5 (1999): 553–66. http://dx.doi.org/10.1016/s0026-2714(99)00037-2.

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28

Giustino, Feliciano, and Alfredo Pasquarello. "Infrared properties of ultrathin oxides on Si(100)." Microelectronic Engineering 80 (June 2005): 420–23. http://dx.doi.org/10.1016/j.mee.2005.04.025.

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29

Zhang, Xinyu, Yongwei Wang, Fenghua Cheng, Zhiping Zheng, and Yaping Du. "Ultrathin lanthanide oxides nanomaterials: synthesis, properties and applications." Science Bulletin 61, no. 18 (2016): 1422–34. http://dx.doi.org/10.1007/s11434-016-1155-2.

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30

Vereecke, G., E. Röhr, R. J. Carter, T. Conard, H. De Witte, and M. M. Heyns. "Investigation of fluorine in dry ultrathin silicon oxides." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 19, no. 6 (2001): 2108. http://dx.doi.org/10.1116/1.1414050.

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31

Cellere, G., L. Larcher, M. G. Valentini, and A. Paccagnella. "Micro breakdown in small-area ultrathin gate oxides." IEEE Transactions on Electron Devices 49, no. 8 (2002): 1367–74. http://dx.doi.org/10.1109/ted.2002.801443.

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32

Lundgren, P., M. O. Andersson, K. R. Farmer, and O. Engström. "Electrical instability of ultrathin thermal oxides on silicon." Microelectronic Engineering 28, no. 1-4 (1995): 67–70. http://dx.doi.org/10.1016/0167-9317(95)00017-3.

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33

Wu, E. Y., D. L. Harmon, and Liang-Kai Han. "Interrelationship of voltage and temperature dependence of oxide breakdown for ultrathin oxides." IEEE Electron Device Letters 21, no. 7 (2000): 362–64. http://dx.doi.org/10.1109/55.847381.

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34

Chen, Ming-Jer, Ting-Kuo Kang, Chuan-Hsi Liu, Yih J. Chang, and Kuan-Yu Fu. "Oxide thinning percolation statistical model for soft breakdown in ultrathin gate oxides." Applied Physics Letters 77, no. 4 (2000): 555–57. http://dx.doi.org/10.1063/1.127042.

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35

Bruyère, S., F. Guyader, W. De Coster, et al. "Wet or dry ultrathin oxides: impact on gate oxide and device reliability." Microelectronics Reliability 40, no. 4-5 (2000): 691–95. http://dx.doi.org/10.1016/s0026-2714(99)00273-5.

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36

Lin, M.-T., R. J. Jaccodine, and T. J. Delph. "Planar oxidation of strained silicon substrates." Journal of Materials Research 16, no. 3 (2001): 728–33. http://dx.doi.org/10.1557/jmr.2001.0112.

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We report here on a series of experiments in which relatively low levels of in-plane bending strain were applied to oxidizing silicon substrates. These were found to result in significant decreases in oxide thickness in the ultrathin oxide regime. Both tensile and compressive bending resulted in roughly the same degree of thickness retardation, although compressive bending typically led to somewhat thinner oxides than did tensile bending. An examination of the experimental data indicate that the principal effect seems to occur in the very early stages of oxidation, with only minor effects on s
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37

von Bardeleben, Hans Jürgen, J. L. Cantin, I. Vickridge, et al. "Modification of the Oxide/Semiconductor Interface by High Temperature NO Treatments: A Combined EPR, NRA and XPS Study on Oxidized Porous and Bulk n-Type 4H-SiC." Materials Science Forum 483-485 (May 2005): 277–80. http://dx.doi.org/10.4028/www.scientific.net/msf.483-485.277.

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The effect of thermal treatments in nitric oxide (NO) on the paramagnetic defects at the 4H-SiC/SiO2 interface are analyzed by EPR in oxidized porous samples. The results on ultrathin thermal oxides show that the NO treatment at 1000°C is insufficient for an efficient reduction of the two dominant paramagnetic interface defects: PbC centers and carbon clusters. From the NRA and XPS analysis of bulk samples treated under the same conditions we attribute the weak effect to the low nitrogen concentration of only 1% at the interface.
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38

Gao, Xinlong, Wenhui Shi, Pengchao Ruan, et al. "Ultrathin carbon boosted sodium storage performance in aqueous electrolyte." Functional Materials Letters 13, no. 05 (2020): 2030002. http://dx.doi.org/10.1142/s1793604720300029.

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The sodium-based aqueous energy storage devices possess the advantages of low cost, high safety and wide application. However, the low energy density of traditional carbon-based sodium storage materials limits their large-scale application. Besides, other sodium storage materials, such as transition metal oxides, polyanionic compounds and Prussian blue analogues (PBAs), cannot achieve high capacity and stable energy storage performance due to their poor conductivity and instability. Ultrathin carbon with unique characteristics, such as high electrical conductivity, excellent chemical stability
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39

Omar, Halo D. "Upright Pyramid Surface Textures for Light Trapping and MoOx Layer in Ultrathin Crystalline Silicon Solar Cells." ARO-THE SCIENTIFIC JOURNAL OF KOYA UNIVERSITY 12, no. 1 (2024): 203–6. http://dx.doi.org/10.14500/aro.11586.

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In this work, ray tracing is used to investigate the optical characteristics of various surface structures in ultrathin crystalline silicon (c-Si) for solar cells. Ultrathin c-Si with a thickness of 20 μm is used as the substrate. The light trapping includes front upright pyramids with a molybdenum oxides (MoOx) anti-reflection (AR) layer. Planar ultrathin c-Si (without a MoOx AR layer and upright pyramids) is used as a reference. The wafer ray tracer was developed by a photovoltaic (PV) lighthouse to model the MoOx AR layer to reduce the front surface reflectance and impacts of the AR layer o
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40

SUÑE, JORDI, DAVID JIMENEZ, and ENRIQUE MIRANDA. "BREAKDOWN MODES AND BREAKDOWN STATISTICS OF ULTRATHIN SiO2 GATE OXIDES." International Journal of High Speed Electronics and Systems 11, no. 03 (2001): 789–848. http://dx.doi.org/10.1142/s0129156401001003.

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The dielectric breakdown of ultra-thin silicon dioxide films used as gate insulator in MOSFETs is one of the most important reliability issues in CMOS technology. In this paper, two main aspects of oxide breakdown are considered: the modeling of the breakdown statistics and the properties of the two main breakdown modes, namely Soft Breakdown and Hard Breakdown. The most invoked models for the breakdown statistics that relate defect generation and breakdown are reviewed. Particular attention is paid to the percolation models and to a recent cell-based analytic picture. The scaling of the break
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41

Macco, Bart. "(Invited) Atomic Layer Deposition of (Semi)Conductive Oxides for Photovoltaics and Mo(o)Re." ECS Meeting Abstracts MA2024-02, no. 30 (2024): 2218. https://doi.org/10.1149/ma2024-02302218mtgabs.

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(Semi)conductive oxides are a peculiar class of materials that combine optical transparency and (tunable) electrical conductivity, and are typically composed of combinations of In, Zn, Sn or Ga. These materials play a profound role in solar cells, but are also more and mo(o)re considered in memory, logic, photonics and sensing. When they are highly (degenerately) doped, these materials can act as transparent conductive window layers (e.g. in solar cells), and are often referred to as Transparent Conductive Oxides (TCOs). Conversely, for lowly-doped (non-degenerate) semiconductive oxides, the F
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42

Istomin, A. V., and S. G. Kolyshev. "ELECTROSTATIC METHOD OF FORMING ULTRATHIN FIBERS OF REFRACTORY OXIDES." «Aviation Materials and Technologies», no. 2 (2019): 40–46. http://dx.doi.org/10.18577/2071-9140-2019-0-2-40-46.

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43

Vereecke, Guy, Erika Röhr, R. J. Carter, Thierry Conard, H. De Witte, and Marc M. Heyns. "The Origins of Fluorine in Dry Ultrathin Silicon Oxides." Solid State Phenomena 76-77 (January 2001): 153–56. http://dx.doi.org/10.4028/www.scientific.net/ssp.76-77.153.

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44

Arienzo, Maurizio, Leonello Dori, and Thomas N. Szabo. "Effect of post‐oxidation anneal on ultrathin SiO2gate oxides." Applied Physics Letters 49, no. 16 (1986): 1040–42. http://dx.doi.org/10.1063/1.97465.

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45

Oellig, Eva M., E. G. Michel, M. C. Asensio, and R. Miranda. "Ultrathin gate oxides formed by catalytic oxidation of silicon." Applied Physics Letters 50, no. 23 (1987): 1660–62. http://dx.doi.org/10.1063/1.97760.

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46

Liao, Wei-Jian, Yi-Lin Yang, Shun-Cheng Chuang, and Jenn-Gwo Hwu. "Growth-Then-Anodization Technique for Reliable Ultrathin Gate Oxides." Journal of The Electrochemical Society 151, no. 9 (2004): G549. http://dx.doi.org/10.1149/1.1783907.

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47

Fair, Richard B. "Physical Models of Boron Diffusion in Ultrathin Gate Oxides." Journal of The Electrochemical Society 144, no. 2 (1997): 708–17. http://dx.doi.org/10.1149/1.1837473.

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48

Thompson, W. Howard, Zain Yamani, Laila AbuHassan, Osman Gurdal, and Munir Nayfeh. "The effect of ultrathin oxides on luminescent silicon nanocrystallites." Applied Physics Letters 73, no. 6 (1998): 841–43. http://dx.doi.org/10.1063/1.122019.

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49

Madsen, Jon M., Zhenjiang Cui, and Christos G. Takoudis. "Low temperature oxidation of SiGe in ozone: Ultrathin oxides." Journal of Applied Physics 87, no. 4 (2000): 2046–51. http://dx.doi.org/10.1063/1.372134.

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50

Mukhopadhyay, M., S. K. Ray, D. K. Nayak, and C. K. Maiti. "Ultrathin oxides using N2O on strained Si1−xGex layers." Applied Physics Letters 68, no. 9 (1996): 1262–64. http://dx.doi.org/10.1063/1.115946.

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