Academic literature on the topic 'Vacuum deposition method'

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Journal articles on the topic "Vacuum deposition method"

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Rezinkin, O. L. "Synthesis of ferroceramics for electromagnetic shock waves generators by vacuum aerosol deposition method." Functional materials 23, no. 3 (2016): 484–89. http://dx.doi.org/10.15407/fm23.03.484.

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Szczepański, Tomasz, Urszula Więckiewicz, Barbara Konior, and Patryk Pucułek. "Vacuum metal deposition (VMD) – characteristics of the method." Issues of Forensic Science 308 (2020): 40–46. http://dx.doi.org/10.34836/pk.2020.308.1.

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Vacuum metal deposition was introduced in the process of visualization of latent fingermarks already in the 20th century. However, due to the requirement of using specialist equipment to ensure appropriate conditions for the development process, which would have generated significant costs, the method was not available in Poland. Technological developments, however, made it possible to create compact devices with smaller dimensions and lower parameters, which, nowadays, can be used in virtually every forensic fingerprint identification laboratory. The article describes the theoretical basis of
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SOONMIN, HO. "A review of nanostructured thin films for gas sensing and corrosion protection." Mediterranean Journal of Chemistry 7, no. 6 (2018): 433–51. http://dx.doi.org/10.13171/mjc7618111916hs.

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Thin film technology is getting huge attention across the world due to its wide applications. Deposition of thin films involves creation, transportation and condensation of target materials with thickness varying from few nanometers to several microns onto the substrate. This review will highlight thin film depositing techniques which consist of non-vacuum and vacuum based deposition method. Besides this, thin films and their applications in gas sensing and corrosion protection have also been discussed.
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Blanchet, R. C., and C. A. Santinelli. "Improved method for vacuum deposition of insulating films." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 4, no. 4 (1986): 1948–49. http://dx.doi.org/10.1116/1.573754.

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Mustata, Ion, Cristian Lungu, Ionut Jepu, and Corneliu Porosnicu. "Thermionic Vacuum Discharges for Thin Film Depositions." Coatings 13, no. 9 (2023): 1500. http://dx.doi.org/10.3390/coatings13091500.

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The thermionic vacuum discharge method is very effective in that the films obtained using this technology are characterised by a very high degree of adhesion, density and purity because the deposition technique is carried out in high, very high or, if possible, in ultra-very high vacuum conditions with no gas present. When the substrate is placed in vacuum, no heat transfer particles are present, the substrate being heated only by the ion incident on the surface. This advantage recommends the TVD method for deposits on plastics or other thermally sensitive materials. Additionally, this slow he
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INOUE, Takayoshi. "Thin Film Deposition using a Velocity-Selected Vacuum Deposition Method. Development of Velocity Selector and Its Application to Vacuum Deposition." Transactions of the Japan Society of Mechanical Engineers Series B 62, no. 599 (1996): 2711–16. http://dx.doi.org/10.1299/kikaib.62.2711.

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Wu, Hou Ya, Tie Niu Yang, and Xiao Jun Wang. "Researches of Pressure Measurement Method in Vacuum Environment." Applied Mechanics and Materials 347-350 (August 2013): 19–23. http://dx.doi.org/10.4028/www.scientific.net/amm.347-350.19.

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wafer processing is one process of the IC industry which is a booming area nowadays, the quality of the production of this course depends on the performance of the film which is formed by deposition. And one of the most important factors influencing the performance is working pressure. Variable structure chamber for flowing experiment and testing which is a multifunction testing platform with changeable structure and sufficient measurement points all-covered the chamber, a device has been designed and manufactured to measure and research vacuum flow filed. By using this equipment, the pressure
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Hinaut, Antoine, Sebastian Scherb, Sara Freund, Zhao Liu, Thilo Glatzel, and Ernst Meyer. "Influence of electrospray deposition on C60 molecular assemblies." Beilstein Journal of Nanotechnology 12 (June 15, 2021): 552–58. http://dx.doi.org/10.3762/bjnano.12.45.

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Maintaining clean conditions for samples during all steps of preparation and investigation is important for scanning probe studies at the atomic or molecular level. For large or fragile organic molecules, where sublimation cannot be used, high-vacuum electrospray deposition is a good alternative. However, because this method requires the introduction into vacuum of the molecules from solution, clean conditions are more difficult to be maintained. Additionally, because the presence of solvent on the surface cannot be fully eliminated, one has to take care of its possible influence. Here, we com
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Prikryl, Radek, Pavel Otrisal, Vladimir Obsel, Lubomír Svorc, Radovan Karkalic, and Jan Buk. "Protective Properties of a Microstructure Composed of Barrier Nanostructured Organics and SiOx Layers Deposited on a Polymer Matrix." Nanomaterials 8, no. 9 (2018): 679. http://dx.doi.org/10.3390/nano8090679.

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The SiOx barrier nanocoatings have been prepared on selected polymer matrices to increase their resistance against permeation of toxic substances. The aim has been to find out whether the method of vacuum plasma deposition of SiOx barrier nanocoatings on a polyethylene terephthalate (PET) foil used by Aluminium Company of Canada (ALCAN) company (ALCAN Packaging Kreuzlingen AG (SA/Ltd., Kreuzlingen, Switzerland) within the production of CERAMIS® packaging materials with barrier properties can also be used to increase the resistance of foils from other polymers against the permeation of organic
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Agawa, Yoshiaki, Satoshi Endo, Masamichi Matsuura, and Yoshikazu Ishii. "Behaviors of Metal Nano-Particles Prepared by Coaxial Vacuum Arc Deposition." Advanced Materials Research 123-125 (August 2010): 1067–70. http://dx.doi.org/10.4028/www.scientific.net/amr.123-125.1067.

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By the use of a coaxial pulsed vacuum arc discharge deposition method (APD), we have developed the catalyst deposition system onto support powders or sheet under vacuum. In this letter, we introduce Pt catalysis processing for fuel cell and evaluation for the electrode property.
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Dissertations / Theses on the topic "Vacuum deposition method"

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Vasyliev, V. V., A. A. Luchaninov, E. N. Reshetnyak, and V. E. Strelnitskij. "Comparative Characteristics of Stress and Structure of TiN and Ti0.5-xAl0.5YxN Coatings Prepared by Filtered Vacuum-Arc PIIID Method." Thesis, Sumy State University, 2012. http://essuir.sumdu.edu.ua/handle/123456789/34913.

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A comparative study of the structure and stress state of Ti0.5-xAl0.5YxN and TiN coatings deposited under identical conditions from the filtered vacuum-arc plasma under high voltage pulsed bias potential on the substrate was carried out. It was found that for Ti0.5Al0.5N coatings the dependence of the residual stress on the amplitude of the pulsed voltage potential is non-monotonic with a minimum when the amplitude is of 1 kV. As for TiN films, a monotonic decrease in the level of residual stresses takes place when the amplitude of the potential is increased in the range 0-2.5 kV. Non-mon
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Багдасарян, Артем Анатолійович, Артем Анатольевич Багдасарян та Artem Anatoliiovych Bahdasarian. "Структурно-фазовое состояние и физико-механические свойства нитридных покрытий на основе Ti, Hf, Zr, V и Nb". Thesis, Изд-во СумГУ, 2015. http://essuir.sumdu.edu.ua/handle/123456789/38937.

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Дисертація на здобуття наукового ступеня кандидата фізико-математичних наук за спеціальністю 01.04.07 – фізика твердого тіла. – Сумський державний університет, Суми, 2015. Дисертаційна робота присвячена дослідженню структурно-фазового стану і фізико-механічних властивостей наноструктурних покриттів (Ti-Hf-Zr-V-Nb)N, які отримані вакуумно-дуговим осадженням. Проведене комплексне дослідження впливу режимів осадження (тиск робочого газу і потенціал зсуву підкладки) на морфологію, елементний і фазовий склад та як наслідок напружено-деформований стан, термічну стійкість, механічні і трибологічні
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Shaginyan, L. R. "Temperature rise of film condensation surface as a phenomenon intrinsic to vacuum deposition methods." Thesis, Видавництво СумДУ, 2011. http://essuir.sumdu.edu.ua/handle/123456789/20646.

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By means of in situ measurement of the temperature of condensation surface by two independent methods during deposition of various materials by magnetron sputtering it was revealed that it is noticeably higher than that of the substrate and linearly increases with increasing of the deposition rate of the film. This effect is explained by the idea that intermediate liquid-like layer forms on the boundary between the vapor and solid (film) phases, that exists exceptionally during arrival of sputtered species on the condensation surface. Calculations based on the experimental results show that
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Якущенко, Іван Володимирович, Иван Владимирович Якущенко та Ivan Volodymyrovych Yakushchenko. "Структурні характеристики та фізико-механічні властивості багатокомпонентних нітридних покриттів до і після іонної імплантації". Thesis, Сумський державний університет, 2018. http://essuir.sumdu.edu.ua/handle/123456789/67473.

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Дисертаційна робота присвячена дослідженню впливу імплантації негативних іонів Au- на фазовий склад, структурно-напружений і дефектний стан, механічні й трибологічні властивості п'яти- та шести- елементних нітридних покриттів (TiZrAlYNb)Nx і (TiZrHfVNbTa)Nx і вплив на них технологічних умов осадження (тиску робочого газу, і потенціалу зсуву підкладки). Результати дослідження елементного, фазового і напружено-деформованого стану покриттів свідчать про те, що в покриттях відбувається формування двух основних кристалічних фаз – ГЦК і ОЦК в залежності від тиску робочого газу. Фазовий стан змінюєт
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Албу-Бадрi, Ахммад М. Махммуд, Ахммад М. Махммуд Албу-Бадри та Akhmmad M. Makhmmud Albu-Badri. "Физико-механические свойства и структура покрытий на основе Ti, Al, Zr, Si и N". Thesis, Изд-во СумГУ, 2013. http://essuir.sumdu.edu.ua/handle/123456789/30567.

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В дисертаційній роботі досліджено фізико-механічні та триботехнічні характеристики нанокомпозитних покриттів на основі Zr, Ti, Al, Sі та N, синтезованих вакуумно-дуговим методом із застосуванням ВЧ стимуляції. Проаналізовано вплив фізико-технологічних параметрів осадження на властивості нанокристалічних покриттів. Встановлено, що розміри кристалітів синтезованих нанокомпозитних покриттів на основі Ti-Al-N, Ti-Si-N і Ti-Zr-Si-N змінюються у діапазоні 10 – 25 нм. Виявлено кореляцію між елементним складом, мікроструктурою і механічними властивостями покриттів. Структура отриманих покриттів є визн
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Lin, Shih-Mao, and 林世茂. "Non-Sulfurized CZTS(Cu2ZnSnS4) Compound Solar Cell by Non-Vacuum Chemical Bath Stacking Deposition Method." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/80434045221822157092.

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碩士<br>國立雲林科技大學<br>電子工程系<br>103<br>In recent years, the high-efficiency Cu2ZnSnS4 (CZTS) solar cell, which was developed by IBM, Solar Frontier and TOK, have attracted great attention.The highest efficiency of the CZTS solar cell is around 12.1%. In this study, the CZTS solar cell was fabricated by Chemical Bath deposition, which is method without sulfurization treatment and non-toxic process and application on solar cell technology. This paper will take it as a target, using of chemical bath deposition(CBD) then developing no sulfurization treatment and optimized solar cells. We compare this s
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Chen, Bing-Cyun, and 陳秉群. "Development of Si Bulk Solar Cell Fabrication Method by Using Non Vacuum Film Deposition Process." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/58291273306962475865.

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碩士<br>國立臺灣科技大學<br>光電工程研究所<br>96<br>We use Sol-gel method to develop PSG solution which will be the Phosphorus diffuse source, and coat it on single crystalline silicon wafer by spin-coating method; therefore, a p-n junction is in silicon wafer by high temperature annealing. We make p-n diode on polished single crystalline silicon wafer, and the ideal factor is 1.52. Using the same method to make solarcell, though it is no anti-reflection structure and anti-reflection coating, the conversion efficiency is 9.07%.We use Sol-gel method to make TiO2 solution which will be anti-reflection coating. W
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Kheswa, Ntombizonke Yvonne. "Synthesis and characterisation of 114Cd targets." Thesis, 2011. http://hdl.handle.net/11394/3681.

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>Magister Scientiae - MSc<br>To study nuclear reactions and nuclear structures, target materials are bombarded with high-energy particles. The target material can either be in a form of a metal film or gas. A target material designed to study certain nuclear reactions or to produce nuclei to study their structure should yield as minimum as possible of competing reactions under ion bombardment. This requires a chemically and isotopically pure target material prepared as a self supporting thin film, or as alternative, prepared on a thin career foil. Additional requirement for lifetime measuremen
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Rakesh, Kumar Rajaboina. "Growth of Semiconductor and Semiconducting Oxides Nanowires by Vacuum Evaporation Methods." Thesis, 2013. http://etd.iisc.ac.in/handle/2005/3400.

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Recently, there has been a growing interest in semiconductor and semiconducting oxide nanowires for applications in electronics, energy conversion, energy storage and optoelectronic devices such as field effect transistors, solar cells, Li- ion batteries, gas sensors, light emitting diodes, field emission displays etc. Semiconductor and semiconducting oxide nanowires have been synthesized widely by different vapor transport methods. However, conditions like high growth temperature, low vacuum, carrier gases for the growth of nanowires, limit the applicability of the processes for the growth of
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Rakesh, Kumar Rajaboina. "Growth of Semiconductor and Semiconducting Oxides Nanowires by Vacuum Evaporation Methods." Thesis, 2013. http://etd.iisc.ernet.in/2005/3400.

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Recently, there has been a growing interest in semiconductor and semiconducting oxide nanowires for applications in electronics, energy conversion, energy storage and optoelectronic devices such as field effect transistors, solar cells, Li- ion batteries, gas sensors, light emitting diodes, field emission displays etc. Semiconductor and semiconducting oxide nanowires have been synthesized widely by different vapor transport methods. However, conditions like high growth temperature, low vacuum, carrier gases for the growth of nanowires, limit the applicability of the processes for the growth of
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Book chapters on the topic "Vacuum deposition method"

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Kretkowski, Maciej, Junya Katai, Hiroyuki Futamata, Wataru Inami, and Yoshimasa Kawata. "Vacuum Gripper-Based Practical Method of Gentle Deposition of Living Cells and Its Filter Substrates onto SiN Films for Electron Beam Irradiation Experiments." In Recent Advances in Technology Research and Education. Springer Nature Switzerland, 2024. http://dx.doi.org/10.1007/978-3-031-54450-7_20.

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Schultrich, Bernd. "Methods of Vacuum Arc Deposition of ta-C Films." In Tetrahedrally Bonded Amorphous Carbon Films I. Springer Berlin Heidelberg, 2018. http://dx.doi.org/10.1007/978-3-662-55927-7_10.

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Rauschenbach, Stephan, Marko Grabarics, Martina Delbianco, et al. "High-resolution Imaging of Glycans by Scanning Tunnelling Microscopy Enabled by Electrospray Ion Beam Deposition (ESIBD)." In Glycoprotein Analysis. Royal Society of Chemistry, 2024. http://dx.doi.org/10.1039/9781839166433-00329.

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Electrospray ion beam deposition (ESIBD) has recently been developed as a universal vacuum deposition method, capable of transferring fragile, non-volatile molecules to surfaces in a vacuum. This enables the chemically selective preparation of surfaces for investigation by scanning probe microscopy (SPM). This chapter introduces the methods and summarizes the recent achievements in applying high-resolution SPM imaging to glycans.
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Kolekar, Sadhu K., Rahul Ahir, Kiran Diwate, and Haribhahu Borate. "Synthesis and Characterization of CZTS Thin Films for Solar Cell Applications." In Innovations in Perovskite Solar Cell Materials and Devices - Cutting-Edge Research and Practical Applications. IntechOpen, 2025. https://doi.org/10.5772/intechopen.1008712.

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This chapter provides a comprehensive overview of various deposition techniques used for synthesizing copper zinc tin sulfide (CZTS) thin films, focusing on both vacuum and non-vacuum processes. Vacuum-based methods, known for producing high-quality films with minimal defects, are compared with non-vacuum techniques, which often introduce impurities and defects. The discussion includes techniques, such as sputtering, molecular beam epitaxy (MBE), pulsed laser deposition (PLD), electrodeposition, spray pyrolysis, the sol-gel method, and electron beam evaporation. Among these, spray pyrolysis is
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Pinchuk, Nataliia, and Oleksandr Terletskyi. "NANOSTRUCTURED COATINGS ZRN, OBTAINED BY VACUUM-ARC DEPOSITION METHOD." In Modernization of research area: national prospects and European practices. Publishing House “Baltija Publishing”, 2022. http://dx.doi.org/10.30525/978-9934-26-221-0-1.

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Nowadays increased interest is shown in ZrN coatings, which have high erosion resistance, strength in combination with a fairly high hardness. Among the various ion-plasma techniques, vacuum-arc is one of the most versa-tile processes due to the high degree of ionization of the flow of film-forming particles and good adhesion properties of coatings to the substrate. The purpose of the paper is problem of structural engineering of vacuum-arc ZrN coatings is acute in order to predictably obtain the necessary functional physical and mechanical characteristics. Methodology. The study of the struct
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Pandey, Dr Sharad. "METHOD OF PREPARATION OF AMORPHOUS COMPOSITION." In Futuristic Trends in Physical Sciences Volume 3 Book 4. Iterative International Publishers, Selfypage Developers Pvt Ltd, 2024. http://dx.doi.org/10.58532/v3bkps4p6ch1.

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Fabricating advanced and sophisticated devices needs materials which are developed by research. In developing the optical and photonic devices, for research need amorphous chalcogenide materials. In this chapter, describe the procedure for deciding the weight/mass/atomic percentage of different elements in an amorphous chalcogenide mixture and then synthesise glass. Some scholars' research has been conducted on glass, pallets, thin films etc. In present chapter describes different methods of deposition of thin film. This chapter describes in deep, the vacuum evaporation in which material eithe
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Yeskermessov, Didar, Zhanerke Toleukhanova, Zarina Aringozhina, Yerkezhan Tabiyeva, and Waqar Ahmed. "Hard and Superhard Multicomponent Nitride Coatings Deposited Using Vacuum-Arc Evaporation." In Innovations in Materials Chemistry, Physics, and Engineering Research. IGI Global, 2023. http://dx.doi.org/10.4018/978-1-6684-6830-2.ch004.

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This chapter is devoted to experimental research on the investigated of the structural-phase, morphology, elemental composition, physical-mechanical, and tribological properties (friction, wear, and adhesion) of hard and superhard micro- and nanostructured coatings of systems based on (Zr-Ti-Nb)N, (Zr-Ti-Cr-Nb)N, and (Zr-Ti-Cr-Nb-Si)N were fabricated by vacuum-arc deposition in the nitrogen atmosphere. The authors in the work used advanced proven experimental research methods (SEM-EDX, TEM-EDS, XRD, SIMS, GDMS, PIXE, XPS, AFM, hardness measurements, and adhesion testing), as well as theoretica
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Heydari Gharahcheshmeh, Meysam. "Manufacturing of Conducting and Semiconducting Polymers by Chemical Vapor Deposition (CVD) Method." In Nanofabrication - The Art of Manipulating Matter at the Nanoscale [Working Title]. IntechOpen, 2025. https://doi.org/10.5772/intechopen.1009989.

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Chemical vapor deposition (CVD) is a versatile technique for fabricating high-quality thin films, widely used across various industries. As materials science advances, CVD continues to evolve, enabling the precise deposition of both inorganic 2D materials and high-purity polymeric thin films with excellent conformality on diverse substrates. In particular, conducting polymers have emerged as promising materials for next-generation electronic, optoelectronic, and energy storage devices, offering electrical conductivity, optical transparency, ionic transport, and mechanical flexibility. Oxidativ
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Kumar, Sumit. "A Review on the Chemical Vapor Deposition Synthesis of 2D Materials and Their Applications." In Technological Applications of Nano-Hybrid Composites. IGI Global, 2024. http://dx.doi.org/10.4018/979-8-3693-1261-2.ch010.

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This chapter explains the principle and synthesis method involved in the chemical vapor deposition (CVD) process. A smart method for making layered 2D atomic crystal nanomaterials on a compatible substrate through bottom-up approach is explored. CVD is a vacuum deposition method used to produce high-quality, high-performance solid materials. CVD is a scalable method to fabricate one layer to multi-layer thin films to bulk layer hybrid materials and their hetero-structure composites by changing the precursor compound with combination of an appropriate element having affinity toward the precurso
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Antonio Santana Andrade Junior, Marcos, Hugo Leandro Sousa dos Santos, Mileny dos Santos Araujo, Arthur Corrado Salomão, and Lucia Helena Mascaro. "Solution-Processed Chalcogenide Photovoltaic Thin Films." In Thin Films. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.94071.

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Chalcogenides-based thin film solar cells are great competitors to beat high efficiencies as silicone solar cells. The chalcogenides that have been commonly used as absorber materials are CIS, CIGS, and CZTS. They present some advantages of having a direct and tunable band gap, high absorption coefficient and respectable efficiency to cost ratio. Solution processable deposition approaches for the fabrication of solar cells attracts a great deal attention due to its lower capital cost of the manufacturing than the vacuum-based techniques. In this chapter, we detail the use of a low-cost method
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Conference papers on the topic "Vacuum deposition method"

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Veselá, Petra, Martina Hlubučková, Vít Kanclíř, Jan Václavík, and Karel Žídek. "Aging changes in dynamics of ps sonar experiment in thin optical films: possible sources and consequences." In Optical Interference Coatings. Optica Publishing Group, 2025. https://doi.org/10.1364/oic.2025.the.3.

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We used the experimental pump&amp;probe method of picosecond acoustics to show that the signal is prone to sample aging, partially reversible in vacuum. The aging can be eliminated by deposition of an Si3N4 passivation layer.
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Mehta, Narinder K., Vinod S. Agarwala, Airan Perez, and K. S. Rajan. "Fluorinated Schiff Base Compound as Corrosion Inhibitor for Steel." In CORROSION 1995. NACE International, 1995. https://doi.org/10.5006/c1995-95491.

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A study to evaluate wear and corrosion inhibition, and the mode of molecular bonding of a fluorinated schiff base compound (imine compounds), a condensation reaction product of 4-fluorobenzaldehyde and 4,4'-benzidine, onto AISI 1010 steel surface was undertaken to develop a new lubricant additive for greases. Physical vapor adsorption and chemisorption techniques were used for the deposition of schiff base on the metal surface. The schiff base was found to adhere best with the physical adsorption technique. It involved heating of freshly cleaned specimens suspended over schiff base in an all-g
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Advincula, Rigoberto C. "Graphene Based Nanomaterials for Biomedical Coatings." In CORROSION 2017. NACE International, 2017. https://doi.org/10.5006/c2017-09584.

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Abstract Nanotechnology involves scale, function, and composition that enable macroscopic properties with improved performance and high-value adding for any industry including the biomedical industry. The use of graphene-based nanomaterials is of high interest for electronic applications and the solid-state display industry. However, it is not as well known in the biomedical and bio-implant field. The graphene and the oxidized graphene oxide GO nanomaterials can be prepared by plasma, vacuum deposition, solid state catalytic methods, and also by solution exfoliation methods. This paper highlig
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Pan Wang, Hongbin Zhuo, Yue Wang, and Xun Cai. "A parallel current deposition method for PIC simulation on GPU." In 2015 IEEE International Vacuum Electronics Conference (IVEC). IEEE, 2015. http://dx.doi.org/10.1109/ivec.2015.7224036.

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Ning Zhao, Jing Chen, Zhiwei Zhao, Wei Lei, and Xiaobing Zhang. "Field emission from polypyrrole-graphene composites synthesized by electrochemical deposition method." In 2015 28th International Vacuum Nanoelectronics Conference (IVNC). IEEE, 2015. http://dx.doi.org/10.1109/ivnc.2015.7225600.

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Gryaznov, A. O., E. V. Lee, A. V. Ishchenko, et al. "Automated installation for organic coatings deposition by vacuum thermal evaporation method." In 3RD ELECTRONIC AND GREEN MATERIALS INTERNATIONAL CONFERENCE 2017 (EGM 2017). Author(s), 2017. http://dx.doi.org/10.1063/1.5002986.

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Osada, H., M. Akai, Y. Yachi, T. Yoshida, S. Chiba, and K. Seki. "Preparation of metal oxide magnetic thin film by vacuum deposition method." In IEEE International Magnetics Conference. IEEE, 1999. http://dx.doi.org/10.1109/intmag.1999.837780.

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Wang, Chao, Xiaobao Geng, and Haixia Zhang. "Fabrication of SiC MEMS Pressure Sensor Based on Novel Vacuum-Sealed Method." In 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems. ASMEDC, 2008. http://dx.doi.org/10.1115/micronano2008-70136.

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Fabrication of SiC MEMS pressure sensor based on novel vacuum-sealed method is presented in this paper. The sensor was fabricated using surface micromachining. Due to its excellent mechanical properties and high chemical resistance, PECVD (Plasma Enhanced Chemical Vapor Deposition) SiC was chosen as structural material. Polyimide acts as sacrificial layer which solve stiction problem in process. STS PECVD system is utilized to realize releasing, deposition and vacuum sealing consecutively in the process chamber, by this method wafer cleaning step was avoided before releasing the sacrificial la
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Lyngnes, O., K. Kraus, A. Ode, and T. Erguder. "Method for Designing Coating Thickness Uniformity Shadow Masks for Deposition Systems with a Planetary Fixture." In Society of Vacuum Coaters Annual Technical Conference. Society of Vacuum Coaters, 2014. http://dx.doi.org/10.14332/svc14.proc.1817.

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Almandoz, Rebecca, Robert W. Fletcher, and Joseph Ziegelbauer. "An Innovative and Novel Aluminum Metal Microsphere Production and Deposition Method Using a Pulsed DC Cold Plasma Process." In ASME 2023 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2023. http://dx.doi.org/10.1115/imece2023-113020.

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Abstract Metal microspheres have numerous applications including sintering, heat transfer fluids, electromagnetic fluids, catalysis and electrical components. We have now successfully produced aluminum metal microspheres using a novel method by means of a pulsed DC cold plasma process. There are two types of plasmas: hot plasma, 10,000–100,000 K, and cold plasmas with temperatures slightly above ambient room temperature. Cold plasma temperature is as high as hot plasmas, but the temperature of the neutral species is approximately ambient temperature. Cold plasma can operate in a vacuum, partia
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