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Journal articles on the topic 'White Light Scanning Interferometry'

Author: Grafiati

Published: 4 June 2021

Last updated: 18 February 2022

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1

Behrends, Gert, Dirk Stöbener, and Andreas Fischer. "Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry." Sensors 21, no. 7 (2021): 2486. http://dx.doi.org/10.3390/s21072486.

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Lateral scanning white light interferometry (LSWLI) is a promising technique for high-resolution topography measurements on moving surfaces. To achieve resolutions typically associated with white light interferometry, accurate information on the lateral displacement of the measured surface is essential. Since the uncertainty requirement for a respective displacement measurement is currently not known, Monte Carlo simulations of LSWLI measurements are carried out at first to assess the impact of the displacement uncertainty on the topography measurement. The simulation shows that the uncertaint

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2

Tereschenko, Stanislav, Peter Lehmann, Lisa Zellmer, and Angelika Brueckner-Foit. "Passive vibration compensation in scanning white-light interferometry." Applied Optics 55, no. 23 (2016): 6172. http://dx.doi.org/10.1364/ao.55.006172.

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3

Kassamakov, Ivan, Kalle Hanhijärvi, Imad Abbadi, Juha Aaltonen, Hanne Ludvigsen, and Edward Hæggström. "Scanning white-light interferometry with a supercontinuum source." Optics Letters 34, no. 10 (2009): 1582. http://dx.doi.org/10.1364/ol.34.001582.

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4

Vallance, R. Ryan, Chris J. Morgan, Shelby M. Shreve, and Eric R. Marsh. "Micro-tool characterization using scanning white light interferometry." Journal of Micromechanics and Microengineering 14, no. 8 (2004): 1234–43. http://dx.doi.org/10.1088/0960-1317/14/8/017.

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5

Behrends, Gert, Dirk Stöbener, and Andreas Fischer. "Lateral scanning white-light interferometry on rotating objects." Surface Topography: Metrology and Properties 8, no. 3 (2020): 035006. http://dx.doi.org/10.1088/2051-672x/aba484.

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6

Wang, Zhen, and Yi Jiang. "Wavenumber scanning-based Fourier transform white-light interferometry." Applied Optics 51, no. 22 (2012): 5512. http://dx.doi.org/10.1364/ao.51.005512.

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7

Jiang, Yi. "Wavelength-scanning white-light interferometry with a 3×3 coupler-based interferometer." Optics Letters 33, no. 16 (2008): 1869. http://dx.doi.org/10.1364/ol.33.001869.

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8

Zhu, Linlin, Yuchu Dong, Zexiao Li, and Xiaodong Zhang. "A Novel Surface Recovery Algorithm for Dual Wavelength White LED in Vertical Scanning Interferometry (VSI)." Sensors 20, no. 18 (2020): 5225. http://dx.doi.org/10.3390/s20185225.

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The two peaks characteristic of yellow and blue light in the spectrum of dual-wavelength white light emitting diodes (LEDs) introduce distinctive features to the interference signal of white light scanning interferometry (WLSI). The distinctive features are defined as discontinuities, so that the fringe contrast function cannot be modeled as a single Gaussian function, and causes the interferogram to have uneven distribution of fringes of different orders in the scanning interferometer. This phenomenon leads to the low accuracy of the zero-order fringe position in the envelope calculation, whi

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9

Maniscalco, B., P. M. Kaminski, and J. M. Walls. "Thin film thickness measurements using Scanning White Light Interferometry." Thin Solid Films 550 (January 2014): 10–16. http://dx.doi.org/10.1016/j.tsf.2013.10.005.

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10

Dai, Rong, Tie-bang Xie, and Su-ping Chang. "A micro-displacement stage for scanning white-light interferometry." Journal of Physics: Conference Series 13 (January 1, 2005): 94–97. http://dx.doi.org/10.1088/1742-6596/13/1/022.

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11

Olszak, Artur. "Lateral scanning white-light interferometer." Applied Optics 39, no. 22 (2000): 3906. http://dx.doi.org/10.1364/ao.39.003906.

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12

Ma, S., C. Quan, R. Zhu, C. J. Tay, L. Chen, and Z. Gao. "Application of least-square estimation in white-light scanning interferometry." Optics and Lasers in Engineering 49, no. 7 (2011): 1012–18. http://dx.doi.org/10.1016/j.optlaseng.2011.01.013.

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13

Harasaki, Akiko, and James C. Wyant. "Fringe modulation skewing effect in white-light vertical scanning interferometry." Applied Optics 39, no. 13 (2000): 2101. http://dx.doi.org/10.1364/ao.39.002101.

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14

Chang, S. P., T. B. Xie, and Y. L. Sun. "Measurement of Transparent Film Using Vertical Scanning White-Light Interferometry." Journal of Physics: Conference Series 48 (October 1, 2006): 1063–67. http://dx.doi.org/10.1088/1742-6596/48/1/198.

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15

Deng, Qinyuan, Junbo Liu, Yan Tang, et al. "Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression." IEEE Photonics Technology Letters 30, no. 4 (2018): 379–82. http://dx.doi.org/10.1109/lpt.2017.2787100.

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16

Kang, Min-Gu, Sang-Yoon Lee, and Seong-Woo Kim. "Self-Compensation of PZT Errors in White Light Scanning Interferometry." Journal of the Optical Society of Korea 3, no. 2 (1999): 35–40. http://dx.doi.org/10.3807/josk.1999.3.2.035.

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17

Deck, Leslie, and Peter de Groot. "High-speed noncontact profiler based on scanning white-light interferometry." Applied Optics 33, no. 31 (1994): 7334. http://dx.doi.org/10.1364/ao.33.007334.

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18

Fleischer, Matthias, Robert Windecker, and Hans J. Tiziani. "Theoretical limits of scanning white-light interferometry signal evaluation algorithms." Applied Optics 40, no. 17 (2001): 2815. http://dx.doi.org/10.1364/ao.40.002815.

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19

Cui, Kaihua, Qian Liu, Xiaojin Huang, Hui Zhang, and Lulu Li. "Scanning error detection and compensation algorithm for white-light interferometry." Optics and Lasers in Engineering 148 (January 2022): 106768. http://dx.doi.org/10.1016/j.optlaseng.2021.106768.

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20

Madani-Grasset, Frédéric, Nhan T. Pham, Emmanouil Glynos, and Vasileios Koutsos. "Imaging thin and ultrathin organic films by scanning white light interferometry." Materials Science and Engineering: B 152, no. 1-3 (2008): 125–31. http://dx.doi.org/10.1016/j.mseb.2008.06.004.

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21

Lehmann, Peter, Peter Kühnhold, and Weichang Xie. "Reduction of chromatic aberration influences in vertical scanning white-light interferometry." Measurement Science and Technology 25, no. 6 (2014): 065203. http://dx.doi.org/10.1088/0957-0233/25/6/065203.

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22

Jiang, Yi, and Caijie Tang. "Effect of nonlinear wavelength scanning to Fourier transform white-light interferometry." Microwave and Optical Technology Letters 51, no. 2 (2008): 426–32. http://dx.doi.org/10.1002/mop.24097.

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23

Mun, Jeong Il, Taeyong Jo, Taiwook Kim, and Heui Jae Pahk. "Residual vibration reduction of white-light scanning interferometry by input shaping." Optics Express 23, no. 1 (2015): 464. http://dx.doi.org/10.1364/oe.23.000464.

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24

Deck, L., and P. de Groot. "High-speed non-contact profiler based on scanning white light interferometry." International Journal of Machine Tools and Manufacture 35, no. 2 (1995): 147–50. http://dx.doi.org/10.1016/0890-6955(94)p2365-m.

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25

Pavliček, Pavel, and Erik Mikeska. "White-light interferometer without mechanical scanning." Optics and Lasers in Engineering 124 (January 2020): 105800. http://dx.doi.org/10.1016/j.optlaseng.2019.105800.

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26

Kim, Ki Woo, In Jung Lee, Chang Soo Kim, Don Koo Lee, and Eun Woo Park. "Micromorphology of Epicuticular Waxes and Epistomatal Chambers of Pine Species by Electron Microscopy and White Light Scanning Interferometry." Microscopy and Microanalysis 17, no. 1 (2010): 118–24. http://dx.doi.org/10.1017/s1431927610093967.

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AbstractHigh-resolution imaging and quantitative surface analysis of epicuticular waxes and epistomatal chambers of pine species were performed by field emission scanning electron microscopy and white light scanning interferometry. Both juvenile and adult needles were collected from the two-year-old seedlings of Pinus rigida and Pinus densiflora and subjected to surface observations. Epicuticular wax structures developed on the cuticle layer as well as in the epistomatal chambers and appeared to occlude the cavities in the two pine species. The stomata of P. densiflora were characterized by mo

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27

Schäfer, Robert, Henri Seppänen, Ivan Kassamakov, Edward Hæggström, and Peter Hautpmann. "Bonding quality monitoring applying statistical modeling of Scanning White Light Interferometry data." Microelectronic Engineering 84, no. 11 (2007): 2757–68. http://dx.doi.org/10.1016/j.mee.2007.06.002.

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28

Shekhawat, V. K., M. P. Laurent, C. Muehleman, and M. A. Wimmer. "Surface topography of viable articular cartilage measured with scanning white light interferometry." Osteoarthritis and Cartilage 17, no. 9 (2009): 1197–203. http://dx.doi.org/10.1016/j.joca.2009.03.013.

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29

Jo, Taeyong, Seongryong Kim, and Heuijae Pahk. "3D Measurement of TSVs Using Low Numerical Aperture White-Light Scanning Interferometry." Journal of the Optical Society of Korea 17, no. 4 (2013): 317–22. http://dx.doi.org/10.3807/josk.2013.17.4.317.

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30

Lehmann, Peter, Stanislav Tereschenko, and Weichang Xie. "Fundamental aspects of resolution and precision in vertical scanning white-light interferometry." Surface Topography: Metrology and Properties 4, no. 2 (2016): 024004. http://dx.doi.org/10.1088/2051-672x/4/2/024004.

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31

Zhou, Yunfei, Liyun Zhong, Hongzhi Cai, Jindong Tian, Dong Li, and Xiaoxu Lu. "White Light Scanning Interferometry Based on Generalized Cross-Correlation Time Delay Estimation." IEEE Photonics Journal 9, no. 5 (2017): 1–11. http://dx.doi.org/10.1109/jphot.2017.2737231.

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32

Sysoev, E. V. "White-light interferometer with partial correlogram scanning." Optoelectronics, Instrumentation and Data Processing 43, no. 1 (2007): 83–89. http://dx.doi.org/10.3103/s8756699007010128.

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33

Munteanu, Florin. "Self-calibrating lateral scanning white-light interferometer." Applied Optics 49, no. 12 (2010): 2371. http://dx.doi.org/10.1364/ao.49.002371.

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34

Jian, Li, Li Hua Lei, Dong Sheng Li, et al. "Study on Spatial Frequency Domain Algorithm and White Light Interference System Based on NMM." Applied Mechanics and Materials 738-739 (March 2015): 904–10. http://dx.doi.org/10.4028/www.scientific.net/amm.738-739.904.

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White light interference technique for topography measurement effectively avoids phase ambiguity in phase-shifting interferometry. The spatial frequency domain algorithm based on scanning white light interference technique has the advantage of insensitivity to noise and higher calculation accuracy compared with other methods. The white light interference sensor is constructed based on nano positioning and nano measuring machine (NMM), the calibrated step height standard of 100±3nm is measured. The spatial frequency domain algorithm is adopted for data processing, the repetitive test result of

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35

Dai, Rong, Tie Bang Xie, and Su Ping Chang. "A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface." Key Engineering Materials 364-366 (December 2007): 364–70. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.364.

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A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and e

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36

Schaber, Clemens F., Stanislav N. Gorb, and Friedrich G. Barth. "Force transformation in spider strain sensors: white light interferometry." Journal of The Royal Society Interface 9, no. 71 (2011): 1254–64. http://dx.doi.org/10.1098/rsif.2011.0565.

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Scanning white light interferometry and micro-force measurements were applied to analyse stimulus transformation in strain sensors in the spider exoskeleton. Two compound or ‘lyriform’ organs consisting of arrays of closely neighbouring, roughly parallel sensory slits of different lengths were examined. Forces applied to the exoskeleton entail strains in the cuticle, which compress and thereby stimulate the individual slits of the lyriform organs. (i) For the proprioreceptive lyriform organ HS-8 close to the distal joint of the tibia, the compression of the slits at the sensory threshold was a

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37

Chyun, In-Bum, and Ki-Nam Joo. "Sub-sampling Technique to Improve the Measurement Speed of White Light Scanning Interferometry." Journal of the Korean Society for Precision Engineering 31, no. 11 (2014): 999–1006. http://dx.doi.org/10.7736/kspe.2014.31.11.999.

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38

Kassamakov, Ivan Vl, Henri O. Seppänen, Markku J. Oinonen, et al. "Scanning white light interferometry in quality control of single-point tape automated bonding." Microelectronic Engineering 84, no. 1 (2007): 114–23. http://dx.doi.org/10.1016/j.mee.2006.08.013.

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39

Kim, Seung-Woo, and Gee-Hong Kim. "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry." Applied Optics 38, no. 28 (1999): 5968. http://dx.doi.org/10.1364/ao.38.005968.

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40

Ma, S., C. Quan, R. Zhu, C. J. Tay, L. Chen, and Z. Gao. "Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry." Optics Communications 284, no. 10-11 (2011): 2488–93. http://dx.doi.org/10.1016/j.optcom.2011.01.041.

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41

Nolvi, Anton, Ivan Kassamakov, and Edward Hæggström. "Subsurface metrology using scanning white light interferometry: absolute z coordinates deep inside displays." Journal of the Optical Society of America A 35, no. 1 (2017): A18. http://dx.doi.org/10.1364/josaa.35.000a18.

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42

Kao, Ching-Fen, Shih-Kuo Tsai, and Sheng-Hua Lu. "Measuring Cell Gap of Liquid Crystal Displays by Scanning White-Light Tandem Interferometry." Japanese Journal of Applied Physics 48, no. 10 (2009): 106508. http://dx.doi.org/10.1143/jjap.48.106508.

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43

Sun, Yifeng, Haobiao Yu, Jianqiu Ma, et al. "Spurious fringe processing for dielectric metasurface profile measurement using white-light scanning interferometry." Applied Optics 60, no. 2 (2020): 215. http://dx.doi.org/10.1364/ao.411723.

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44

Dong, Jing-tao, and Rong-sheng Lu. "Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry." Applied Optics 51, no. 23 (2012): 5668. http://dx.doi.org/10.1364/ao.51.005668.

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45

Kocour, Vladimir, Veronika Petranova, and Jaroslav Valach. "COMPARISON OF OPTICAL METHODS FOR CHARACTERIZATION OF GLASS MOSAIC WEATHERING." Acta Polytechnica CTU Proceedings 3 (February 11, 2016): 30–34. http://dx.doi.org/10.14311/app.2016.3.0030.

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The work presented in this paper is a part of research project supported by Ministry of Culture and devoted to conservation of precious mosaic of "Last Judgement" on St. Vitus Cathedral in Prague. The aim of the project is to enhance external protective polymeric coating on glass tesserae of mosaic and also to develop optical method for assessment of coating’s surface conditions. The paper concentrates on comparison of various methods for surface evaluation assesses their advantages and disadvantages and also discusses their suitability for long term monitoring of coating state, namely reflect

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46

Gao, F., H. Muhamedsalih, and X. Jiang. "In-Process Fast Surface Measurement Using Wavelength Scanning Interferometry." Advanced Materials Research 622-623 (December 2012): 357–60. http://dx.doi.org/10.4028/www.scientific.net/amr.622-623.357.

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A wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process. White light spectral scanning interferometry, together with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and those with large step heights. An active servo control system is used to serve as a phase compensating mechanism to eliminate the

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47

Ma Long, 马龙, 张鸿燕 Zhang Hongyan, 牛一凡 Niu Yifan, and 郭彤 Guo Tong. "Large Range Evaluation Method Based on White Light Scanning Interferometry for Aspheric Optical Elements." Laser & Optoelectronics Progress 51, no. 6 (2014): 061207. http://dx.doi.org/10.3788/lop51.061207.

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48

ZOU Wen-dong, 邹文栋, 黄长辉 HUANG Chang-hui, 郑玱 ZHENG Qiang, 徐周珏 XU Zhou-jue, and 董娜 DONG Na. "Measurement of microscopic surface topography of alloy dimple fracture by scanning white-light interferometry." Optics and Precision Engineering 19, no. 7 (2011): 1612–19. http://dx.doi.org/10.3788/ope.20111907.1612.

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49

Liao, Hsin-Hung, and Yao-Joe Yang. "A linnik scanning white-light interferometry system using a mems digital-to-analog converter." Procedia Engineering 5 (2010): 758–61. http://dx.doi.org/10.1016/j.proeng.2010.09.219.

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50

Huang, Yiliang, Jian Gao, Lanyu Zhang, Haixiang Deng, and Xin Chen. "Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement." Applied Optics 59, no. 4 (2020): 1082. http://dx.doi.org/10.1364/ao.379996.

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