Academic literature on the topic 'Yttrium oxide based coating'

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Journal articles on the topic "Yttrium oxide based coating"

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Park, Seung Hyun, Kyung Eon Kim, and Sang Jeen Hong. "Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma." Coatings 11, no. 1 (2021): 105. http://dx.doi.org/10.3390/coatings11010105.

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Coating the inner surfaces of high-powered plasma processing equipment has become crucial for reducing maintenance costs, process drift, and contaminants. The conventionally preferred alumina (Al2O3) coating has been replaced with yttria (Y2O3) due to the long-standing endurance achieved by fluorine-based etching; however, the continuous increase in radio frequency (RF) power necessitates the use of alternative coating materials to reduce process shift in a series of high-powered semiconductor manufacturing environments. In this study, we investigated the fluorine-based etching resistance of a
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Grigoriev, Sergey, Alexey Vereschaka, Filipp Milovich, et al. "Investigation of the Properties of Multilayer Nanostructured Coating Based on the (Ti,Y,Al)N System with High Content of Yttrium." Coatings 13, no. 2 (2023): 335. http://dx.doi.org/10.3390/coatings13020335.

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The studies are focused on the properties of the multilayer composite coating based on the (Ti,Y,Al)N system with high content of yttrium (about 40 at.%) of yttrium (Y). The hardness and elastic modulus were defined, and the resistance to fracture was studied during the scratch testing. Two cubic solid solutions (fcc phases), including c-(Ti,Y,Al)N and c-(Y,Ti,Al)N, are formed in the coating. The investigation of the wear resistance of the (Ti,Y,Al)N-coated tools during the turning of steel in comparison with the wear resistance of the tools with the based on the (Ti,Cr,Al)N system coating and
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Tang, Zaifeng, Yuwei Wang, Kaiqu Ang, et al. "The Etching Behaviour and Fluorine-Based-Plasma Resistance of YOF Coatings Deposited by Atmospheric Plasma Spraying." Coatings 14, no. 9 (2024): 1091. http://dx.doi.org/10.3390/coatings14091091.

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There is a high demand for plasma-resistant coatings that prevent the corrosion of the internal ceramic components of plasma etching equipment, thereby reducing particle contamination and process drift. Yttrium oxyfluoride (YOF) coatings were prepared using atmospheric plasma spraying (APS) with commercially available YOF/YF3 powder mixtures; namely YOF 3%, YOF 6%, and YOF 9%. The etching behaviour of YOF and yttrium oxide (Y2O3) coatings was investigated using an inductively coupled plasma consisting of NF3/He. X-ray photoelectron spectroscopy (XPS) showed that the YOF 6% coating had the thic
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VALLEJO, N. DIAZ, O. SANCHEZ, J. C. CAICEDO, W. APERADOR, and G. ZAMBRANO. "HOT CORROSION OF YTTRIUM STABILIZED ZIRCONIA COATINGS DEPOSITED BY AIR PLASMA SPRAY ON A NICKEL-BASED SUPERALLOY." Surface Review and Letters 24, no. 06 (2016): 1750084. http://dx.doi.org/10.1142/s0218625x17500846.

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In this research, the electrochemical impedance spectroscopy (EIS) and Tafel analysis were utilized to study the hot corrosion performance at 700[Formula: see text]C of air plasma-sprayed (APS) yttria-stabilized zirconia (YSZ) coatings with a NiCrAlY bond coat grown by high velocity oxygen fuel spraying (HVOF), deposited on an INCONEL 625 substrate, in contact with corrosive solids salts as vanadium pentoxide V2O5 and sodium sulfate Na2SO4. The EIS data were interpreted based on proposed equivalent electrical circuits using a suitable fitting procedure performed with Echem AnalystTM Software.
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Vilar, Rui, and Edson Costa Santos. "Structure of NiCrAlY Coatings Deposited on Oriented Single Crystal Superalloy Substrates by Laser Cladding." Advanced Materials Research 278 (July 2011): 503–8. http://dx.doi.org/10.4028/www.scientific.net/amr.278.503.

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In the present work single and multiple layer NiCrAlY coatings were produced by laser cladding on (100) single-crystalline substrates of SRR99 Ni-based superalloy. Detailed structural characterisation and texture analysis by optical microscopy, scanning electron microscopy, X-ray diffraction and Rutherford backscattering showed that the NiCrAlY coatings consisted essentially of gamma phase with yttrium oxide (Y2O3) and a small proportion of yttrium–aluminium garnet (Al5Y3O12) precipitated in the interdendritic regions. The coatings presented a columnar dendritic structure grown by epitaxial so
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ОЛЕКСАНДРЕНКО, ВІКТОР, ВЛАДИСЛАВ СВІДЕРСЬКИЙ, ЛЮДМИЛА КИРИЧЕНКО, ІГОР ДАНІЛЕНКО, ВАЛЕРІЙ ЄФІМЕНКО та ЮРІЙ НЕЛЮБІН. "ДОСЛІДЖЕННЯ ВЛАСТИВОСТЕЙ НАНОМОДИФІКОВАНИХ ПОКРИТТІВ НА ОСНОВІ ФТОРПОЛІМЕРУ Ф-30П". Herald of Khmelnytskyi National University. Technical sciences 329, № 6 (2023): 125–34. https://doi.org/10.31891/2307-5732-2023-329-6-125-134.

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Ways to enhance the physical and mechanical properties and wear resistance of fluoroplastic coatings on metal surfaces were analyzed. The influence of composition and temperature-time conditions of forming multilayer fluoroplastic coatings on their abrasion resistance, microhardness, and corrosion resistance were studied. Technological operation modes were described, and the properties of developed coatings based on fluoropolymer F-30P were presented. The research on the wear resistance of developed fluoroplastic coatings has shown that the addition of 17 wt.% graphite С-1 and 1 wt.% aminoorga
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Tang, Zaifeng, Yukun Lv, Kaiqu Ang, et al. "Investigation of the Etching Resistance of Yttrium Oxyfluoride Coating Deposited via Atmospheric Plasma Spraying Against Cl2/O2 Plasma." Materials 18, no. 9 (2025): 1903. https://doi.org/10.3390/ma18091903.

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Chlorine-based plasma is widely used in key etching applications. However, while etching the wafer materials, chlorine plasma can cause damage to the internal components of the etching chamber, which adversely affects the equipment’s lifespan. As a result, selecting appropriate coating materials for the chamber’s internal components is essential for mitigating corrosion. The etch resistance of these coatings directly impacts not only the quality of wafer production but also the operational safety and maintenance cycle of the etching equipment. In this study, three yttrium oxyfluoride coatings
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Li, Pei Huan, Yong Zhang, and Xuan Hui Qu. "Effect of Y2O3 Coating on the Interface and Mechanical Properties of SiC Fiber Reinforced GH4738 Composites." Materials Science Forum 898 (June 2017): 604–8. http://dx.doi.org/10.4028/www.scientific.net/msf.898.604.

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To prevent the strong interfacial reactions in SiC fiber reinforced nickel-based superalloys matrix composites, yttrium oxide (Y2O3) was used as the barrier coating by reaction magnetron sputtering method. Compared with the composites without coating, after the high temperature hot isostatic pressing (HIP), Y2O3 coating effectively protected the SiC fibers from the interfacial reactions, and no element diffusion can be observed between the fibers and the matrix. The elevated temperature tensile tests were performed on both SiC/GH4738 and SiC/Y2O3/GH4738 composite. The results indicated that th
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Kachalin, G. V., K. S. Medvedev, A. F. Mednikov, et al. "On the formation of thermal barrier coatings by magnetron sputtering." Frontier materials & technologies, no. 4 (2024): 51–61. https://doi.org/10.18323/2782-4039-2024-4-70-5.

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The use of magnetron sputtering systems with extended uncooled targets will allow developing industrial import-substituting technologies for the formation of thermal barrier coatings, based on zirconium oxide doped with rare earth metal oxides to solve urgent problems of gas turbine construction. This paper presents the results of comparing the technology for producing thermal barrier coatings by magnetron sputtering, with two types of extended targets made of Zr–8%Y alloy – a widely used cooled target and an uncooled extended target, of a magnetron sputtering system developed by the authors.
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Cheng, Taotao, Yuelu Dong, Liang Ma, et al. "Experiment and Numerical Simulation on Thermal Cycling Performance of YSZ-Based Sealing Coatings with “Brick-Mud” Layered Structure." Coatings 14, no. 3 (2024): 351. http://dx.doi.org/10.3390/coatings14030351.

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The failure of premature thermal cycling spalling off is the bottleneck problem currently faced by yttrium oxide partially stabilized zirconia (YSZ) ceramic-based sealing coatings. Studies on the thermal cycling performance of coatings with “brick-mud” structures were carried out by experimental and simulation methods in this paper. The results showed that, as the thickness of “mud” layer increased, the bonding strength of the “brick-mud” structure coatings gradually decreased. When the thickness of the “mud” layer was about 3 μm and 10 μm, the thermal cycling lives of the T1 and T2 coatings w
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Dissertations / Theses on the topic "Yttrium oxide based coating"

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Tirala, David. "Testování a hodnocení vlastností keramických jader pro technologii vytavitelného modelu." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2021. http://www.nusl.cz/ntk/nusl-445169.

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Production of top quality castings for applications in energy, aerospace and medical industries by the addition of ceramic cores to investment casting presents many metallurgical and technological problems. Ceramic cores applied in investment casting are subjects to many requirements in terms of their inertness to the casted alloy and at the same time to their final removal from the casting cavity in such a way that does not damage the casting. Both of these assumptions can be achieved by applying a thin layer of inert oxide ceramic coating to the surface of a ceramic core, made out of a chemi
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Lin, Xin. "Yttrium disilicate as environmental barrier coating for silicon nitride-based glow plug." University of British Columbia, 2017. http://hdl.handle.net/2429/64165.

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Silicon-based ceramics undergo severe degradation at temperatures above ~1000 ℃ in the presence of water vapor, which is inevitable in combustion environments. Therefore, Environmental Barrier Coatings (EBCs) are necessary for the protection of Si₃N₄-based ceramic components in the harsh combustion environments. Rare earth silicates, which have relatively low thermal expansion coefficients, good chemical stability at high temperatures and low recession rates in the presence of water vapor, are promising candidate materials for such EBC application. This study was related to the application of
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DE, MIRANDA AURISTELA CARLA. "Design, production and characterization of glass-ceramic based sealants for solid oxide fuel cells applications." Doctoral thesis, Politecnico di Torino, 2015. http://hdl.handle.net/11583/2591557.

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Planar solid oxide fuel cells (SOFCs) are capable of achieving higher power density than tubular SOFC, but hermetic seals are required to prevent mixing of the fuel and oxidant, It is still a challenge to develop sealing materials that retain desirable physical properties, are chemically compatible with other fuel cell components at high temperature (e.g. 800 °C) in a wide range of oxygen partial pressure, and remain operational over thousands of hours. In most planar SOFCs stacks designs, the interconnect is sealed to the cell components. The seal between the metal interconnect and the cerami
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Dostál, Vladimír. "Využití oxidu yttria pro vytváření antireflexních vrstev solárních článků." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2010. http://www.nusl.cz/ntk/nusl-218813.

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This work deals with deposition of yttrium oxide layers on silicon substrate (P – type) by using magnetron and reactive magnetron sputtering. Experiments which were made are further described. After that, work is focused on evaluation of deposited layers by using FTIR measurement technique and spectrophotometry. At the end of the work results of experiments are discussed also with the future progress.
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JAVED, HASSAN. "Design, synthesis and characterization of glass-ceramic and ceramic based materials for solid oxide electrolysis cell (SOEC) applications." Doctoral thesis, Politecnico di Torino, 2019. http://hdl.handle.net/11583/2743336.

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Mao, Fang. "Synthesis, Characterization, and Evaluation of Ag-based Electrical Contact Materials." Doctoral thesis, Uppsala universitet, Oorganisk kemi, 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-320235.

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Ag is a widely used electrical contact material due to its excellent electrical properties. The problems with Ag are that it is soft and has poor tribological properties (high friction and wear in Ag/Ag sliding contacts). For smart grid applications, friction and wear became increasingly important issues to be improved, due to much higher sliding frequency in the harsh operation environment. The aim of this thesis is to explore several different concepts to improve the properties of Ag electrical contacts for smart grid applications. Bulk Ag-X (X=Al, Sn In) alloys were synthesized by melting o
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Blandenet, Olivier. "Elaboration de revetements, dont WC-Co, par canon à détonation." Grenoble INPG, 1997. http://www.theses.fr/1997INPG0124.

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Lors de cette etude, nous avons mis au point et optimise les conditions d'elaboration de revetements ceramique oxyde et cermet a l'aide d'un procede de projection par canon a detonation : le korund. Les mesures experimentales de pression et de celerite de l'onde de detonation nous permettent de conclure a la validite de la representation de la detonation se propageant a l'interieur du fut du korund et de l'ecoulement des produits de detonation en aval de cette onde, respectivement a l'aide des modeles chapman-jouguet (c. J. ) et taylor zeldovich (t. Z. ). L'optimisation de la composition, de l
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Fang, Lei. "Exploring spin in novel materials and systems." The Ohio State University, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=osu1299611695.

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Pousaneh, Elaheh. "Synthesis and Characterization of Metal Complexes for Thin Film Formation via Spin-Coating or Chemical Vapor Deposition." 2019. https://monarch.qucosa.de/id/qucosa%3A72463.

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The present thesis describes the synthesis and characterization of magnesium, copper, and iron complexes and their application in the MOCVD (Metal-Organic Chemical Vapor Deposition) process, as well as the synthesis and characterization of yttrium and gadolinium complexes and their use as spin-coating precursors for metal oxide thin layer formation. The objective of this scientific work is the development of the family of bis(β-ketoiminato) magnesium(II) complexes and a series of heteroleptic β-ketoiminato copper(II) precursors for the formation of magnesium oxide and copper/copper oxide layer
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Salehizadeh, Seyed Ali. "Encapsulation of iron oxide-based nanoparticles in silica for biomedical applications." Doctoral thesis, 2019. http://hdl.handle.net/10773/27748.

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Over last decades, a great attention has been devoted to iron oxide-based nanoparticles coated by dielectric organic or inorganic materials for the potential contributions in biomedical applications and microwave absorbers industry. The present Ph.D. study focuses on the fabrication of iron-based oxide nanoparticles and coating the particles within the silica matrix in the form of a core-shell structure exhibiting interesting magnetic and electrical properties for application in the biomedical and microwave technology areas. The combined study of electrical and magnetic properties of the sili
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Books on the topic "Yttrium oxide based coating"

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Kinnunen, Petri. Electrochemical characterisation and modelling of passive films on Ni- and Fe-based alloys. Technical Research Centre of Finland, 2002.

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Center, Lewis Research, ed. The evaluation of a modified chrome oxide based high temperature solid lubricant - coating for foil gas bearing. National Aeronautics and Space Administration, Lewis Research Center, 1998.

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DellaCorte, Christopher. The evaluation of a modified chrome oxide based high temperature solid lubricant - coating for foil gas bearing. National Aeronautics and Space Administration, Lewis Research Center, 1998.

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Moi, Yeoh Lee. Phase formation and superconductivity in copper oxide based YBCO and RU-1212 and RU-1222 systems prepared by sol-gel and coprecipitation techniques. Nova Science Publishers, 2011.

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A, Laskowski J., and United States. National Aeronautics and Space Administration., eds. Tribological evaluation of PS300: A new chrome oxide based solid lubricant coating sliding against A1₂0₃ from 25 to 650⁰C. National Aeronautics and Space Administration, 1996.

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Kapustin, Vladimir, and Illarion Li. Theory, electronic structure and physical chemistry of materials cathodes for microwave devices. INFRA-M Academic Publishing LLC., 2020. http://dx.doi.org/10.12737/1041298.

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In the monograph the kinetic theory of cathode materials based on metal and oxide phases, analytical methods of research of the cathodes, methods of study of their emission properties. Details the authors discuss the theory and physico-chemistry of oxide-Nickel, metalloplastic, and metal alloyed oxide-yttrium cathodes, including a cathode for magnetrons with cold start.
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Tribological evaluation of PS300: A new chrome oxide based solid lubricant coating sliding against A1₂0₃ from 25 to 650⁰C. National Aeronautics and Space Administration, 1996.

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Tribological evaluation of PS300: A new chrome oxide based solid lubricant coating sliding against A1₂0₃ from 25 to 650⁰C. National Aeronautics and Space Administration, 1996.

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Book chapters on the topic "Yttrium oxide based coating"

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Ata, Fatma Kubra, Seda Yalçınkaya, and Serap Yalcin. "The Design, Synthesis, Characterization of Iron Oxide-Based Coating-Based Nanoproducts." In Handbook of Consumer Nanoproducts. Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-15-6453-6_56-1.

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Ata, Fatma Kubra, Seda Yalçınkaya, and Serap Yalcin. "The Design, Synthesis, and Characterization of Iron Oxide-Based Coating-Based Nanoproducts." In Handbook of Consumer Nanoproducts. Springer Nature Singapore, 2022. http://dx.doi.org/10.1007/978-981-16-8698-6_56.

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Vitoria, Ignacio, Dayron Armas, Carlos Coronel, et al. "Micro Sized Interdigital Capacitor for Gases Detection Based on Graphene Oxide Coating." In Sensing Technology. Springer Nature Switzerland, 2023. http://dx.doi.org/10.1007/978-3-031-29871-4_4.

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Lee, Kee Sung, Tae Ho Shin, Shi Woo Lee, Sang Kuk Woo, Jae Kyo Yang, and Yong Ho Choa. "Surface Coating of Reactive Layer with Inner Nano-Pores on Lantanium Gallium Based Oxide." In Materials Science Forum. Trans Tech Publications Ltd., 2005. http://dx.doi.org/10.4028/0-87849-966-0.161.

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Fu, Yi, Xin Hua Ji, and Yu Wen Qin. "Experimental Study of Micro Displacement Field of Microstate of Crack Tips of Ceramics Plasticized with Zirconia and Stabilized by Yttrium Oxide – Application of Digital Image Correlation Method Based on Analysis by Scanning Electron Microscope." In Key Engineering Materials. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-410-3.2436.

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Piticescu, Radu-Robert, Cristina Florentina Ciobota, Mihail Botan, and Alexandru Gyorgy Okos. "Synthesis of Ultra-High Temperature Pyrochlore Ceramics for Extreme Conditions." In Advanced Ceramics Materials - Emerging Technologies [Working Title]. IntechOpen, 2024. https://doi.org/10.5772/intechopen.1007904.

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Thermal protection systems (TPS) for aerospace industry require the use of coatings made from ultra-high temperature ceramics (UHTCs), a class of materials based on oxides, nitrides, carbides and borides of transitional metals. Yttria-doped zirconia is the actual “gold standard” for aerospace coatings but the high temperature phase transitions limit its use in developing a new generation of TPS. Rare earth zirconia pyrochlores Ln2Zr2O7 (Ln = La, Nd, Sm, Gd, Yb) emerged as future candidates for high temperature coatings due to their high thermal stability on a large temperature range. Here, we
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Jucha, Sebastian Oliwer, and Grzegorz Jan Moskal. "Thermal Barrier Coatings on the Base of Samarium Zirconates." In Production, Properties, and Applications of High Temperature Coatings. IGI Global, 2018. http://dx.doi.org/10.4018/978-1-5225-4194-3.ch004.

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The zirconates of rare earth elements, such as Sm2Zr2O7, can be an alternative material for zirconia modified by yttria (8YSZ) usually used as an insulation layer in thermal barrier coatings (TBC) systems. This chapter describes the morphology of feedstock zirconate powder, internal morphology and selected properties of different samarium zirconate TBC systems. These included: composite TBC coatings of Sm2Zr2O7 + 8YSZ type with different ratio of both used to coatings deposition powders (25/75, 50/50 and 75/25) as well as the TBC of double ceramic layer (DCL) type with an 8YSZ internal layer a
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Mishra, Trilochan, Manmatha Mahato, and Shashi Kant Tiwari. "Oxide-based self-cleaning and corrosion protective coatings." In Handbook of Modern Coating Technologies. Elsevier, 2021. http://dx.doi.org/10.1016/b978-0-444-63237-1.00005-x.

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Pathak, Trilok K., R. E. Kroon, L. P. Purohit, and Hendrik C. Swart. "Highly luminescent ZnO based upconversion thin films grown by sol-gel spin coating." In Spectroscopy of Lanthanide Doped Oxide Materials. Elsevier, 2020. http://dx.doi.org/10.1016/b978-0-08-102935-0.00009-5.

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Batra, Yogita, Puspender Singh Beniwal, and Anju Dagar. "Graphene–Metal Oxide-based Poly(Vinylidene Fluoride) Composites for Dielectric Applications." In Graphene–Metal Oxide Composites. Royal Society of Chemistry, 2025. https://doi.org/10.1039/9781837673391-00256.

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Graphene-based nanocomposites have gained a lot of attention among researchers due to their versatile applications in devices that need excellent dielectric characteristics. Graphene and its derivatives in composite form represent attractive prospects for usage in the electronic industry, sensors, and energy storage and conversion devices, due to their favorable mechanical, electrical, optical, and dielectric properties. Graphene metal oxide (GMO) nanoparticles (NPs) are used as fillers with poly(vinylidene fluoride) (PVDF) polymer to create GMO/PVDF composites. Various synthesis techniques li
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Conference papers on the topic "Yttrium oxide based coating"

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Buchheit, R. G. "Alkaline Oxide Conversion Coatings for Aluminum Alloys." In CORROSION 1996. NACE International, 1996. https://doi.org/10.5006/c1996-96625.

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Abstract Three related conversion coating methods are described that are based on film formation which occurs when aluminum alloys are exposed to alkaline Li salt solutions. Representative examples of the processing methods, resulting coating structure, composition and morphology are presented. The corrosion resistance of these coatings to aerated 0.5 M NaCl solution has been evaluated as a function of total processing time using electrochemical impedance spectroscopy (EIS). This evaluation shows that excellent corrosion resistance can be uniformly achieved using no more than 20 minutes of pro
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Fuerbeth, Wolfram. "Nanoparticle/Nanofibre-based Coatings for Corrosion/Oxidation Protection." In CORROSION 2017. NACE International, 2017. https://doi.org/10.5006/c2017-09071.

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Abstract In recent years the use of nanotechnological methods for all types of coatings has become increasingly important. Nanoparticles from sol-gel systems or from commercial dispersions as well as different types of nanocapsules or nanotubes may nowadays be used in order to develop novel coating systems or to improve the protective ability of conventional coating systems. The corrosion research group at the DECHEMA Research Institute has been engaged in this field for several years. Therefore this paper aims to give an exemplified overview on the different ways of using nanoparticles in pro
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V, Jagadeesan, Charles Babu J, Umamaheswari, and Aravind K C. "Fabrication Process of an Embedded System Based Spin Coating Machine and the Growth of Magnesium Doped Zinc Oxide Thin Films." In 2024 First International Conference on Innovations in Communications, Electrical and Computer Engineering (ICICEC). IEEE, 2024. https://doi.org/10.1109/icicec62498.2024.10808236.

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Singh, Virendra, Manuel Marya, Alireza Zolfaghari, and Vipul Shinde. "Tribological and Anti-scale Performance of Graphene Reinforced Polymer Coating." In CONFERENCE 2025. AMPP, 2025. https://doi.org/10.5006/c2025-00564.

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Abstract Several coatings have been applied to oilfield equipment to extend their lifespan by protecting against wear and corrosion. These coatings enhance surface hardness and improve frictional and corrosion characteristics. Additionally, some of these coatings help ensure flow by minimizing downhole scale buildup on completion tools during operation. In this respect, polymer-based low-friction coatings are preferred. However, their low hardness and wear resistance affect their full-life functionality against scale minimization. This paper investigates the enhancement of the tribological and
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Kitamura, J., H. Mizuno, K. Sato, Z. Tang, and A. Burgess. "Crystal and Micro Structures of Plasma Sprayed Yttrium Oxide Coatings by Axial Injection of Fine Powder Slurries." In ITSC2010, edited by B. R. Marple, A. Agarwal, M. M. Hyland, et al. DVS Media GmbH, 2010. http://dx.doi.org/10.31399/asm.cp.itsc2010p0207.

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Abstract Yttrium oxide (Y2O3) coatings have been prepared with high power axial injection plasma spraying using fine powder slurries. It is clarified that the coatings have high hardness, low porosity and high erosion resistance against CF4 contained plasma in the previous study. This suggests that the plasma spraying of Y2O3 with slurry injection techniques is applicable to fabricating equipments for semiconductor devices, such as dry etching. Surface morphologies of the slurry coatings with splats are almost similar to conventional plasma-sprayed Y2O3 coatings, identified from microstructura
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Shahien, M., M. Yamada, and M. Fukumoto. "Reactive Plasma Sprayed Nitride Coatings with Improved Conductivity." In ITSC2017, edited by A. Agarwal, G. Bolelli, A. Concustell, et al. DVS Media GmbH, 2017. http://dx.doi.org/10.31399/asm.cp.itsc2017p0934.

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Abstract Decomposition of the nitride ceramic particles like aluminium nitride (AlN) during conventional thermal spray process prevents their deposition on the substrate. Reactive plasma spraying (RPS) is a promising solution to fabricate AlN coatings. It is based on reaction and deposition of molten particles in active nitrogen ambient to form the AlN phase. Several thick AlN based coatings were fabricate successfully by reactive plasma spraying of aluminium and/or alumina particles. This study shows our recent achievements of fabrication of AlN coatings with improved conductivity. It was pos
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Ravi, B. G., S. Sampath, R. Gambino, P. S. Devi, and J. B. Parise. "Plasma Spray Synthesis from Precursors: Progress, Issues and Considerations." In ITSC2006, edited by B. R. Marple, M. M. Hyland, Y. C. Lau, R. S. Lima, and J. Voyer. ASM International, 2006. http://dx.doi.org/10.31399/asm.cp.itsc2006p0871.

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Abstract Precursor plasma spray synthesis is an innovative and rapid method to make functional oxide ceramic coatings by starting from solution precursors and directly producing inorganic films. This emerging method, utilizes molecularly mixed precursor liquids, which essentially avoids the handling and selection of powders, opening up new avenues for developing compositionally complex functional oxide coatings. Precursor plasma spray also offers excellent opportunities in exploring the non-equilibrium phase evolution during plasma spraying of multi-component oxides from inorganic precursors.
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Yoshida, Mitsuru, Yutaka Tateishi, Tadashi Osako, Motoyuki Kondo, and Yasushi Nomura. "Development of Plasma Spray Gun for Inner Diameter Suspension and Fabrication of Thermal Spray Coating." In ITSC2019, edited by F. Azarmi, K. Balani, H. Koivuluoto, et al. ASM International, 2019. http://dx.doi.org/10.31399/asm.cp.itsc2019p0241.

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Abstract This study compares the performance of an ordinary plasma spray gun with that of recently developed gun designed for spraying feedstock suspensions on inner diameter surfaces. To evaluate the guns, yttrium oxide was deposited on 304 stainless steel while varying supply pressure, spraying distance, and gun traverse speed. Different methods of delivering suspension spray material to the gun were also investigated. Although Y2O3 inner-diameter coatings were successfully formed, hardness and cross-sectional porosity need improvement. Based on the findings, it may be necessary to increase
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Zhou, Z., L. Wang, D. He, F. Wang, and Y. Liu. "Microstructure and Electrochemical Behavior of Fe-Based Amorphous Metallic Coatings Fabricated by Atmospheric Plasma Spraying." In ITSC2010, edited by B. R. Marple, A. Agarwal, M. M. Hyland, et al. DVS Media GmbH, 2010. http://dx.doi.org/10.31399/asm.cp.itsc2010p0745.

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Abstract A Fe48Cr15Mo14C15B6Y2 alloy with high glass forming ability (GFA) was selected to prepare amorphous metallic coatings by atmospheric plasma spraying (APS) process. The as-deposited coatings present a dense layered structure and low porosity. Microstructural studies show that some nanocrystals and a fraction of yttrium oxides formed during spraying process, which induced the amorphous fraction of the coatings decreasing to 69% compared with fully amorphous alloy ribbons of the same component. High thermal stability employs the amorphous coatings to work below 910K temperature without c
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Podob, Mark. "Chemical Vapor Deposition (CVD) Coatings for Protection of Jet Engine Components." In ASME 1993 International Gas Turbine and Aeroengine Congress and Exposition. American Society of Mechanical Engineers, 1993. http://dx.doi.org/10.1115/93-gt-375.

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CVD coatings are thin films resulting from the chemical reaction between a gaseous phase and the heated surface of a substrate. Among the industries using CVD coating technology are electronics, tooling, fuel cogeneration, and aerospace. The electronics industry uses CVD to deposit semiconductor materials onto different substrates. For the tooling industry, titanium nitride (TiN), titanium carbide (TiC), or aluminum oxide (Al2O3) is deposited onto cutting or metal forming tools. These hardcoatings act as chemical and thermal barriers between the tool and workpiece. In the aerospace industry, C
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