Relevant bibliographies by topics / Arc-PVD coatings

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'Arc-PVD coatings'

Author: Grafiati
Published: 28 May 2022
Last updated: 31 July 2025

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Journal articles on the topic "Arc-PVD coatings"

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BLISS, SHARDONNAY, and BRYONY JAMES. "INFLUENCE OF COMMERCIAL PVD DEPOSITION PARAMETERS WHEN PRODUCING TIN COATINGS." International Journal of Modern Physics B 20, no. 25n27 (2006): 4267–72. http://dx.doi.org/10.1142/s0217979206041203.

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Physical Vapor Deposition (PVD) is a coating technique that relies on the creation of a vapor phase, under vacuum conditions, that condenses on a substrate to form a coating. PVD coatings of titanium nitride are commonly used in functional applications to promote faster cutting speeds and to prolong tool life, leading to operational cost savings and improved productivity. Some of the limitations of a PVD coating for functional applications are based on the coating thickness, where a lower coating thickness reduces the wear volume available on a contacting surface. Also of issue is the presence
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Muhammed, Musa, Mousa Javidani, Tahere Ebrahimi Sadrabadi, Majid Heidari, Tom Levasseur, and Mohammad Jahazi. "A Comprehensive Review of Cathodic Arc Evaporation Physical Vapour Deposition (CAE-PVD) Coatings for Enhanced Tribological Performance." Coatings 14, no. 3 (2024): 246. http://dx.doi.org/10.3390/coatings14030246.

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In the realm of industries focused on tribology, such as the machining industry, among others, the primary objective has been tribological performance enhancement, given its substantial impact on production cost. Amid the variety of tribological enhancement techniques, cathodic arc evaporation physical vapour deposition (CAE-PVD) coatings have emerged as a promising solution offering both tribological performance enhancement and cost-effectiveness. This review article aims to systematically present the subject of CAE-PVD coatings in light of the tribological performance enhancement. It commenc
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Mendala, Boguslaw. "Structure of Al-AlN Composite Coatings Obtained by Arc-PVD Method." Key Engineering Materials 465 (January 2011): 263–66. http://dx.doi.org/10.4028/www.scientific.net/kem.465.263.

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In this paper the investigations concerning deposition of aluminium and aluminium nitride coatings by Arc-PVD method were presented. The tests were done on samples made of martensitic stainless steel EI962 (11H11N2W2MF) type. The aluminium base coatings are corrosion resistant in many environments and are anodic in comparison with most of steel. For this reason those coatings are expected to form a replacement for cadmium galvanic coatings. The main parameters of aluminium base coatings deposition by Arc-PVD processes were presented. Influence of Arc-PVD parameters on Al-AlN composite coatings
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Vereschaka, Alexey A., Anatoly S. Vereschaka, Andre DL Batako, Boris J. Mokritskii, Anatoliy Y. Aksenenko, and Nikolay N. Sitnikov. "Improvement of structure and quality of nanoscale multilayered composite coatings, deposited by filtered cathodic vacuum arc deposition method." Nanomaterials and Nanotechnology 7 (January 17, 2016): 184798041668080. http://dx.doi.org/10.1177/1847980416680805.

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This article studies the specific features of cathode vacuum arc deposition of coatings used in the production of cutting tools. The detailed analysis of the major drawbacks of arc-Physical Vapour Deposition (PVD) methods has contributed to the development of the processes of filtered cathodic vacuum arc deposition to form nanoscale multilayered composite coatings of increased efficiency. This is achieved through the formation of nanostructure, increase in strength of adhesion of coating to substrate up to 20%, and reduction of such dangerous coating surface defects as macro- and microdroplets
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Fuentes, G. G., M. J. Díaz de Cerio, J. A. García, et al. "Gradient CrCN cathodic arc PVD coatings." Thin Solid Films 517, no. 20 (2009): 5894–99. http://dx.doi.org/10.1016/j.tsf.2008.08.005.

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Fuentes, G. G., M. J. Díaz de Cerio, J. A. García, et al. "Gradient CrCN cathodic arc PVD coatings." Surface and Coatings Technology 203, no. 5-7 (2008): 670–74. http://dx.doi.org/10.1016/j.surfcoat.2008.08.079.

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Wu, Liying, Lianchang Qiu, Yong Du, et al. "Structure and Mechanical Properties of PVD and CVD TiAlSiN Coatings Deposited on Cemented Carbide." Crystals 11, no. 6 (2021): 598. http://dx.doi.org/10.3390/cryst11060598.

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This work reports the results of our investigation of the structure and mechanical properties of physical vapor deposition (PVD) and chemical vapor deposition (CVD) TiAlSiN coatings deposited on cemented carbide substrates. For the first time, a novel nanocomposite of Ti0.13Al0.85Si0.02N coating deposited from TiCl4-AlCl3-SiCl4-NH3-H2 gas precursors was prepared by low pressure chemical vapor deposition (LPCVD) at 780 °C and a pressure of 60 mbar, while PVD Ti0.31Al0.60Si0.09N coating was prepared using the arc ion plating method. The investigation results including morphology, microstructure,
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Wang, Shaoqing, Wei Ji, Yaru Wang, et al. "Comparative Study of Corrosion Behavior of LPCVD-Ti0.17Al0.83N and PVD-Ti1−xAlxN Coatings." Coatings 12, no. 6 (2022): 835. http://dx.doi.org/10.3390/coatings12060835.

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In the present work, a low-pressure chemical vapor deposition (LPCVD) Ti0.17Al0.83N and state-of-the-art arc ion plating PVD-Ti1−xAlxN (x = 0.25, 0.55, 0.60, 0.67) coatings were deposited on cemented carbide substrate. The morphological, structural, and electrochemical properties of LPCVD-Ti0.17Al0.83N and PVD-Ti1−xAlxN coatings were compared. The X-ray diffraction (XRD) results and scanning electron microscopy (SEM) images revealed that the LPCVD-Ti0.17Al0.83N coating had a face-centered cubic (fcc) structure, while presenting a crack-free surface morphology and a compressive residual stress
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Polityko, K. N., I. V. Kolesnikov, and D. S. Manturov. "Analysis of Technologies for Applying High-Entropy Coatings by Physical Deposition Method." Advanced Engineering Research (Rostov-on-Don) 24, no. 4 (2024): 369–91. https://doi.org/10.23947/2687-1653-2024-24-4-369-391.

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Introduction. Modern tribology solves the problems of increasing the reliability of friction units through applying vacuum wear-resistant coatings by the physical vapor deposition (PVD) method. More than five thousand scientific papers are devoted to high-entropy alloys (HEA). However, an urgent question about the possibility of obtaining wear-resistant and antifriction high-entropy coatings (HEC) using the PVD method remains unsolved. Its solution opens up the possibility of using HEC in mechanical engineering. The presented article is intended to fill this gap. Research objectives are as fol
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Chayeuski, Vadzim, Valery Zhylinski, Victor Kazachenko, Aleksandr Tarasevich, and Abdelhafed Taleb. "Structural and Mechanical Properties of DLC/TiN Coatings on Carbide for Wood-Cutting Applications." Coatings 13, no. 7 (2023): 1192. http://dx.doi.org/10.3390/coatings13071192.

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In this work, the diamond-like carbon and titanium nitride (DLC/TiN) multilayer coatings were prepared on a cemented tungsten carbide substrate (WC—3 wt.% Co) using the cathodic vacuum arc physical vapor deposition (Arc-PVD) method and pulsed Arc-PVD method with a graphite cathode for the deposition of TiN and carbon layers, respectively. The structural and mechanical properties of the prepared coatings were studied, and different techniques, such as scanning electron microscope (SEM), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), Raman spectroscopy, and microindentation
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Dissertations / Theses on the topic "Arc-PVD coatings"

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Belov, D. S., A. O. Volkhonsky, Blinkov I. V, E. A. Skryleva, and J. Michalski. "Multilayer Nanostructured Wear-Resistant Coatings with Increased Thermal Stability, Adapted to Varying Friction Conditions." Thesis, Sumy State University, 2013. http://essuir.sumdu.edu.ua/handle/123456789/35318.

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The work covers studying of influence of indexes of an ion-plasma vacuum-arc deposition method to the structure, composition and properties of Ti-Al-N/Zr-Nb-N/Cr-N multilayer nanostructured coatings (MNC). The average crystallites size within the layers is about 5-10 nm. Received coatings are featured by absence of any change in the composition and properties after heating up to 1000 ºС, the coatings hardness is up to 36,6GPa, Young's modulus of elasticity is up to 580 GPa, plastic work of deformation is up to 64 %, adhesive strength is about 100 N and coefficient of friction is 0,45. Whe
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Schmitt, Thomas. "Mécanismes de dégradation de revêtements base CrN élaborés par arc-PVD : Intérêt d'une nano-architecture." Phd thesis, Ecole Centrale de Lyon, 2010. http://tel.archives-ouvertes.fr/tel-00633784.

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Les enjeux environnementaux liés à l'utilisation des fluides de coupe lors des étapes d'usinage, nécessitent le développementde nouveaux matériaux résistant à une utilisation en lubrification réduite, voire à sec. Le domaine des revêtements en couchesminces et plus particulièrement des dépôts physiques en phase vapeur (PVD) permet de synthétiser des surfaces adaptées à cetype d'utilisation sévère. Le nitrure de titane (TiN), largement utilisé dans l'industrie, montre toute l'efficacité de cesrevêtements. Ses performances sont cependant limitées à des températures modérées. Au contraire, le car
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Soranansri, Panuwat. "Tribological behavior in hot forming of aluminum alloy : tribological performance of commercial PVD coatings and mechanisms of aluminum transfer." Electronic Thesis or Diss., Valenciennes, Université Polytechnique Hauts-de-France, 2025. https://ged.uphf.fr/nuxeo/site/esupversions/59dae705-f61e-4502-b722-6abf28311853.

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Les objectifs de cette thèse de doctorat étaient de caractériser l’efficacité des revêtements de surface développé pour lutter contre les problèmes de transfert de matière rencontrés lors de la mise en forme de l’aluminium à chaud, et d'étudier ces mécanismes de transfert. Le matériau utilisé était un alliage d'aluminium AA 6082-T6, largement employé dans la fabrication de composants automobiles.Le test de Compression-Translation à chaud (WHUST) a été retenu comme tribomètre principal pour cette étude. Afin de contrôler précisément les températures des essais, un dispositif miniaturisé du WHUS
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Dietzel, Yvette. "Beschichtung von textilen Flächen mit den PVD-Technologien reaktives Vakuumbogen-Verdampfen und reaktives Magnetron-Sputtern : PVD-Beschichtung von textilen Flächen." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2004. http://nbn-resolving.de/urn:nbn:de:swb:14-1103790814484-00373.

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Gegenstand der wissenschaftlichen Arbeit ist der technologische Nachweis für die Erzeugbarkeit haftfester metallischer und keramischer Schichten auf textilen Flächengebilden mit den PVD-Technologien reaktives Magnetron-Sputtern und reaktives Vakuumbogen-Verdampfen. Basis für die Realisierung der experimentellen Untersuchungen sind sowohl vorhandene industrielle PVD-Beschichtungsanlagen, die im Batchbetrieb arbeiten, als auch Rollcoater als Bindeglied zwischen einer Labor- und einer Industrieanlage. Kern des Vorhabens sind umfangreiche Batchbeschichtungen auf Basis einer breit angelegten Experi
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Öqvist, Per-Olof. "Multivariate Data Analysis on (Ti,Al)N Arc-PVD coating process : MVDA of the growth parameters thickness, stress,composition, and cutting performance." Thesis, Uppsala universitet, Oorganisk kemi, 2021. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-448547.

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This diploma work was done at Seco Tools AB (SECO) in Fagersta and aimed to evaluate the possibility to model the relationship between deposition data, deposition properties and, cutting performance of a (Ti,Al)N coating on cutting inserts by applying the Multivariate Data Analysis (MVDA) modeling technique Partial Least Squares Projection to Latent Structures Modeling (PLS). Cathodic Arc Deposition (Arc-PVD) was the PVD technique focused on this study. The deposition technique that was focused on in this study was Cathodic Arc Deposition (Arc-PVD). For this purpose, two series of Arc-PVD coat
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Júnior, Adonias Ribeiro Franco. "Obtenção de revestimentos dúplex por nitretação a plasma e PVD-TiN em aços ferramenta AISI D2 e AISI H13." Universidade de São Paulo, 2003. http://www.teses.usp.br/teses/disponiveis/3/3133/tde-02102003-114623/.

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No presente trabalho foi avaliado o efeito da microestrutura e da capacidade de suportar carregamento de camadas nitretadas produzidas em aços ferramenta AISI H13 e AISI D2 sobre a aderência e a resistência ao desgaste microabrasivo de revestimentos de TiN-PVD. Em cada um desses aços, foram produzidas camadas nitretadas de diferentes estruturas e espessuras, e foram determinadas experimentalmente as curvas potencial início de formação de camada branca, para a nitretação a 520oC. Para o aço ferramenta AISI H13, o emprego de tempos de pré-tratamento de nitretação mais prolongados ( aproximadamen
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Chen, Yi-fong, and 陳逸峰. "Study on Surface Characteristics of DC53 Steel Treated by Nitriding and Arc-PVD Coating." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/z264w4.

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碩士<br>大同大學<br>材料工程學系(所)<br>95<br>The work investigated to improve the surface treatment by Cathodic Arc Deposition (CAD) system with fill. Because the TiN、TiAlN and TiCN coatings are popularly investigated before. Thereby, in this case, use TiAlSi target and Cr target moreover N2 gas was through into with the process parameters to deposited AlTiSiN and AlTiCrN/CrN two mixed films, and then study the structure of the coatings by XRD, the morphology by SEM, on the characteristics, we measure the adhesions, the hardness, and the corrosion behaviors. They expect to obtain excellent properties besi
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Kaulfuß, Frank. "Erweiterung der Grenzen der Hartstoffbeschichtung durch Nanostrukturierung." 2018. https://tud.qucosa.de/id/qucosa%3A32522.

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Hartstoffschichten ermöglichen die Verbesserung bewährter und die Entwicklung neuartiger Produkte. Bei geringstem Materialaufwand lassen sich mit solchen Schichten Wirkungen erzielen, die auf eine andere Weise nicht erreichbar wären. Dünne Hartstoffschichten bis 10 µm werden seit Jahrzehnten zum Verschleißschutz von Werkzeugen und Bauteilen eingesetzt. Der zu den PVD-Verfahren zählende Vakuumbogenprozess (Arc-PVD) wird in der Industrie in großem Umfang zur Abscheidung nitridischer Hartstoffschichten eingesetzt. Als besonders vorteilhaft sind dabei die hohe Ionenenergie im fast vollständig ioni
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Book chapters on the topic "Arc-PVD coatings"

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Franchi, D., F. Rabezzana, H. Curtins, and R. Menegon. "New Generation Arc Cathodic PVD Coatings “Platit” for Cutting Tools, Punchs and Dies." In Advanced Manufacturing Systems and Technology. Springer Vienna, 1996. http://dx.doi.org/10.1007/978-3-7091-2678-3_91.

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Lee, Jung Min, Dae Cheol Ko, and Byung Min Kim. "Evaluation of Adhesive Properties of Arc PVD Coatings on Non-Nitrided and Nitrided Various Substrates." In Engineering Plasticity and Its Applications. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-433-2.77.

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Paritong, H., C. Schoenjahn, L. A. Donohue, and W. D. Münz. "PVD Interface Design of Niobium Coatings on Steel Substrates by Cathodic Arc Generated High Energy Ion Bombardment." In Interface Controlled Materials. Wiley-VCH Verlag GmbH & Co. KGaA, 2005. http://dx.doi.org/10.1002/352760622x.ch41.

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Dinu, Mihaela, Iulian Pana, Anca C. Parau, and Alina Vladescu. "Tribological Performance of Coatings Obtained by PVD Techniques." In Handbook of Research on Tribology in Coatings and Surface Treatment. IGI Global, 2022. http://dx.doi.org/10.4018/978-1-7998-9683-8.ch009.

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The chapter presented a short review related to the factors that dictate the wear and friction behavior of various coatings obtained by PVD techniques used for various applications. An important parameter with high impact on the final properties of the coatings prepared by cathodic arc evaporation is the reactive atmosphere. The friction and wear performance of the carbide coatings were strongly dependent on the carbon content which can be controlled by varying the C2H2 mass flow rate and the arc current on the cathode. Regarding the carbonitrides coatings, the ratio of C/N plays an important
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"Thin Film Deposition Techniques—An Overview." In Introduction to Thin Film Deposition Techniques: Key Topics in Materials Science and Engineering. ASM International, 2023. http://dx.doi.org/10.31399/asm.tb.itfdtktmse.t56060001.

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Abstract This chapter presents the theory and practice associated with the application of thin films. The first half of the chapter describes physical deposition processes in which functional coatings are deposited on component surfaces using mechanical, electromechanical, or thermodynamic techniques. Physical vapor deposition (PVD) techniques include sputtering, e-beam evaporation, arc-PVD, and ion plating and are best suited for elements and compounds with moderate melting points or when a high-purity film is required. The remainder of the chapter covers chemical vapor deposition (CVD) proce
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Jewsbury, P., P. Lambrineas, and K. Jackson. "A Study of Coatings Produced by Sharc PVD Arc Source." In Surface Engineering. Routledge, 2018. http://dx.doi.org/10.1201/9780203737798-8.

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Thanigaivelan R., Saravanan K. G., and Makesh M. "Surface Modification Techniques for Improving the Material Performance." In Advanced Manufacturing Techniques for Engineering and Engineered Materials. IGI Global, 2022. http://dx.doi.org/10.4018/978-1-7998-9574-9.ch001.

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Surface modification techniques are mainly considered to change the surface of the material based on the application. The surface modified materials possess excellent mechanical, tribological, and biological characteristics. In this chapter, the principle of various surface modification techniques including their outcomes, advantages, and limitations are reviewed. Among the various surface coating techniques, the most frequent techniques such as chemical vapor deposition (CVD), physical vapor deposition (PVD), micro-arc oxidation (MAO) coating, and electro-deposition coating were discussed in
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Menshakov, Andrey, Yuliya Bruhanova, and Polina Skorynina. "Investigation of a New Hybrid PVD+PECVD Method for Obtaining Promising Polymer Derived Ceramic SiAlCN Coatings." In Advances in Transdisciplinary Engineering. IOS Press, 2024. http://dx.doi.org/10.3233/atde240629.

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The vacuum-plasma method based on the thermal evaporation of aluminum and activation of a silicon-containing organic precursor in a low-pressure arc discharge using a self-heating hollow cathode (SHHC) was used for synthesis of ceramic SiAlCN coatings. The spectrum of plasma containing Al vapors and decomposition products of hexamethyldisilazane (HMDS) in an Ar+N2 medium was analyzed by optical emission spectroscopy, which showed the effective activation of different components of the vapor-gas mixture and the presence of all necessary elements for the formation of SiAlCN coatings. The SEM ana
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Pinchuk, Nataliia. "COMPARATIVE ANALYSIS OF STRUCTURE FORMATION AND PROPERTIES OF PVD COATINGS TIN, TI/TIN AND TIN-MON." In The scientific paradigm in the context of technological development and social change. Publishing House “Baltija Publishing”, 2023. http://dx.doi.org/10.30525/978-9934-26-297-5-19.

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Nanocomposite coatings represent a new generation of mate-rials and they consist of at least two phases with a nanocrystalline and/or amorphous structure. They have a lot of unique properties, the appear-ance of which is associated with a high volume fraction of phase boundar-ies, with the strength of these boundaries, with the absence of dislocations inside crystals. The purpose of the paper analysis of the reasons for the observed changes, based on the mechanism of formation of surface lay-ers of vacuum-arc coatings under the condition of implantation processes stimulated by applying a negat
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Conference papers on the topic "Arc-PVD coatings"

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Miyasaka, Akihiro, Yoshimi Yamaguchi, Tsugio Miyagawa, and Arata Nakamura. "Selection of Metallic and Non-Metallic Materials Suitable for I.D. Surface Coating of Production Tubings for Sour Service." In CORROSION 1994. NACE International, 1994. https://doi.org/10.5006/c1994-94083.

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Abstract A research project was conducted by a joint research group for developing highly corrosion-resistant tubulars with thin protective layers on I.D. surface of high-strength low-alloy steel tubings. As a first step of the project, extensive experiments were performed to screen the proper coating materials and coating processes that give sufficient resistance to production environments and thus protect tubing from corrosion and cracking. The surface coatings were prepared on steel coupons and pipes by various processes such as PVD, CVD, plasma spraying, plasma transferred arc. The tested
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Masamura, Katsumi, Yuko Takeuchi, Katsuomi Tamaki, Tsuguo Miyagawa, and Arata Nakamura. "Corrosion Resistance of Newly Developed inside Coated Materials in Sour Environments." In CORROSION 1994. NACE International, 1994. https://doi.org/10.5006/c1994-94084.

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Abstract A research program was conducted by a joint research group. New coating technologies were applied to oil country tubular goods to improve their corrosion resistance. Six types of coating facilities for 0.5 m long pipes were constructed as candidate process. Chemical vapor deposition (CVD), physical vapor deposition (PVD), plasma transferred arc hard facing (PTH), polymer coating, low pressure plasma spraying (LPPS) and laser remelting of LPPS were selected. By CVD and PVD process, TiN was mainly coated. High Ni alloy was coated by LPPS and PTH process. Tetrafluoroethylene - perfluoroa
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Kravchenko, Ya, V. Borysiuk, A. Pogrebnjak, M. Kylyshkanov, I. Iatsunskyi, and K. Smyrnova. "Characteristics of Arc-PVD TiAlSiY and (TiAlSiY)N coatings." In 2017 IEEE 7th International Conference "Nanomaterials: Application & Properties" (NAP). IEEE, 2017. http://dx.doi.org/10.1109/nap.2017.8190195.

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Swadzba, L., A. Maciejny, and B. Mendala. "Overaluminising of NiCoCrAlY Coatings by Arc PVD on Ni-Base Superalloys." In Superalloys. TMS, 2000. http://dx.doi.org/10.7449/2000/superalloys_2000_693_701.

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Muslimin, Ahmad Novi, Eni Sugiarti, Zaqi Asshidiqi, Yudha Budiman, Setiadi, and Bagus Wicaksono. "Structural and mechanical properties of Cr-Si-O and Ti-O thin coatings deposited by Arc-PVD coating." In 5TH INTERNATIONAL SEMINAR ON METALLURGY AND MATERIALS (ISMM2022): Strengthening research and innovation in metallurgy and materials for sustainable economic development. AIP Publishing, 2024. http://dx.doi.org/10.1063/5.0187054.

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Atar, Erdem, Hu¨seyin Cimenoglu, and E. Sabri Kayali. "An Investigation of Fretting Wear Behaviour of a Ternary (Zr,Hf)N Coating." In World Tribology Congress III. ASMEDC, 2005. http://dx.doi.org/10.1115/wtc2005-63637.

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In this study, the wear behaviors of ZrN and (Zr, 21wt.% Hf)N coatings, deposited on hardened AISI D2 cold work tool steel by a arc-physical vapor deposition (PVD) technique were examined by a fretting wear tester. Wear tests were conducted by rubbing Al2O3 and steel balls on the surfaces of the coatings under dry sliding condition. Characterization tests showed that, the hardness and the surface roughness of the examined coatings were almost the same. However, addition of 21wt.% Hf to ZrN improved the adhesion between the coating and the substrate. Fretting wear tests conducted by rubbing bot
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U¨rgen, Mustafa, K. Kazmanli, V. Ezirmik, et al. "Comparative Tribological Behavior of TiN-, CrN-, ZrN-, and MoN -Cu Based Nanocomposite Coatings." In World Tribology Congress III. ASMEDC, 2005. http://dx.doi.org/10.1115/wtc2005-64056.

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Nanocomposite structures composed of hard and soft phases are very promising candidates for tribological applications involving both dry and lubricated sliding. This study aims to compare the wear behavior of copper doped hard nanocomposite nitride coatings under dry and lubricated sliding conditions. These nanocomposite coatings are produced in a cathodic arc-based hybrid PVD coating system and their mechanical and structural properties are fully characterized using electron microscopy and other relevant techniques. Tribological tests were performed in pin on disc and reciprocating wear test
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Scheffel, Bert, Christoph Metzner, and Thomas Modes. "Spotless arc activated high-rate deposition using novel dual crucible technology for titanium dioxide coatings." In 13th International Conference on Plasma Surface Engineering September 10 - 14, 2012, in Garmisch-Partenkirchen, Germany. Linköping University Electronic Press, 2013. http://dx.doi.org/10.3384/wcc2.14-17.

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For deposition of thin oxide coatings there are a lot of qualified PVD processes today. If high productivity or large-area coating is necessary for economic reasons processes with high deposition rate are reasonable. Using electron beam (EB) evaporation all inorganic materials can be evaporated with high rates. Microstructure of coatings deposited by EB-evaporation depends on substrate temperature during layer growth and melting temperature of coating material. Particularly in case of high melting materials columnar and porous microstructure is obtained. For large area coating several plasma s
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Postolnyi, B. O., and J. P. Araujo. "Structural analysis of Arc-PVD multilayer metal nitride coatings CrN/MoN using electron backscatter diffraction (EBSD)." In 2016 International Conference on Nanomaterials: Application & Properties (NAP). IEEE, 2016. http://dx.doi.org/10.1109/nap.2016.7757249.

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S. Belov, Dmitry. "Structure and phase formation of ion-plasma vacuum-arc Zr-B-Si-C-Ti-(N) coatings during deposition." In SurfCoat Korea and Graphene Korea 2021 International Joint Virtual Conferences. Setcor Conferences and Events, 2021. http://dx.doi.org/10.26799/cp-surfcoat-graphene-korea-2021/3.

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Abstract:
Zr-B-Si-C-Ti-N and Zr-B-Si-C-Ti coating systems were produced by arc-PVD technique. For their deposition, a combined titanium cathode with a ZrB2-SiC insert was used. Deposition was carried out in a residual atmosphere of N2 and Ar. Coatings structure and composition were investigated. The Zr-B-Si-C-Ti coating is characterized by an amorphous-nanocrystalline structure. In this case, nanocrystallites were formed from complex (Zr, Ti) C, and the amorphous structure fraction is formed mainly by phases based on zirconium and silicon. The second system, deposited in a nitrogen residual atmosphere,
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