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1

Fromille, Samuel S. IV. "Novel Concept for High Dielectric Constant Composite Electrolyte Dielectrics." Thesis, Monterey, California. Naval Postgraduate School, 2013. http://hdl.handle.net/10945/53408.

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Approved for public release<br>This research was part of an ongoing program studying the concept of multi-material dielectrics (MMD) with dielectric constants much higher than homogenous materials. MMD described in this study have dielectric constants six orders of magnitude greater than the best single materials. This is achieved by mixing conductive particles with an insulating surface layer into a composite matrix phase composed of high surface area ceramic powder and aqueous electrolyte. Specifically examined in this study was micron-scale nickel powder treated in hydrogen peroxide (H2O2)
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Eusner, Thor. "Determining the Preston constants of low-dielectric-constant polymers." Thesis, Massachusetts Institute of Technology, 2006. http://hdl.handle.net/1721.1/36308.

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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.<br>Includes bibliographical references (leaf 30).<br>An important step in the manufacture of integrated circuits (ICs) is the Chemical Mechanical Polishing (CMP) process. In order to effectively use CMP, the removal rates of the materials used in ICs must be known. The removal rate of a given material by CMP can be determined once its Preston constant is known. The objectives of this work were to develop a method to determine the Preston constants and to measure the Preston constants of four low-dielec
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3

Long, Ernest Edward. "Electrochemistry in low dielectric constant media." Thesis, University of Liverpool, 1992. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.316974.

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4

Cho, Taiheui. "Anisotropy of low dielectric constant materials and reliability of Cu/low-k interconnects /." Digital version accessible at:, 2000. http://wwwlib.umi.com/cr/utexas/main.

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5

BERNAL, JOSÉ IGNACIO MARULANDA. "MICROWAVE DEVICES USING HIGH DIELECTRIC CONSTANT FILMS." PONTIFÍCIA UNIVERSIDADE CATÓLICA DO RIO DE JANEIRO, 2010. http://www.maxwell.vrac.puc-rio.br/Busca_etds.php?strSecao=resultado&nrSeq=17115@1.

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COORDENAÇÃO DE APERFEIÇOAMENTO DO PESSOAL DE ENSINO SUPERIOR<br>A crescente demanda por dispositivos portáveis de tamanho e peso cada vez mais reduzidos vem estimulando a busca por materiais de alta constante dielétrica e baixas perdas na faixa de freqüência de microondas capazes de permitir a integração e miniaturização de circuitos. No presente trabalho foi realizado um estudo teórico e experimental sobre a utilização de filmes de alta constante dielétrica na fabricação de dispositivos passivos de microondas de tamanhos reduzidos. Foi feita uma análise no domínio da freqüência sobre a influê
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6

Braganza, Clinton Ignatuis. "High Dielectric Constant Materials Containing Liquid Crystals." Kent State University / OhioLINK, 2009. http://rave.ohiolink.edu/etdc/view?acc_num=kent1248065159.

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7

Mercer, Sean R. "Online microwave measurement of complex dielectric constant." Doctoral thesis, University of Cape Town, 1990. http://hdl.handle.net/11427/8342.

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Includes bibliographical references.<br>This dissertation examines the problem of on-line measurement of complex dielectric constant for the purpose of dielectric discrimination or product evaluation using microwave techniques. Various methods of signal/sample interaction were studied and consideration was given to the problem of sorting irregularly shaped discrete samples. The use of microwave transmission and reflection measurements was evaluated. The signal reflection methods were deemed to be best suited to applications with constant geometry feed presentation ( ie. a continuous, homogeneo
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8

Cabral, Flávio Pandur Albuquerque. "Medidas das constantes dielétricas e deslocamento elétrico em dielétricos: desenvolvimento da técnica e metodologia." Universidade de São Paulo, 1998. http://www.teses.usp.br/teses/disponiveis/76/76132/tde-08042014-151001/.

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Desenvolveu-se um sistema para medir a constante dielétrica complexa de amostras dielétricas, de construção simples, versátil e de baixo custo. A medida é feita aplicando-se uma tensão senoidal e fazendo-se a aquisição do sinal aplicado e do sinal da resposta elétrica (carga elétrica). Emprega-se uma placa A/D para a aquisição de dados com taxa de amostragem de 100 Ksamples/seg e através da transformada de Fourier discreta destes sinais determina-se a impedância complexa da amostra, a partir da qual calcula-se a constante dielétrica complexa. A placa utilizada e o circuito de medida da carga e
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9

Dhanapala, Hembathanthirige Yasas. "Dielectric Constant Measurements Using Atomic Force Microscopy System." Wright State University / OhioLINK, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=wright1347907325.

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10

Tanner, Carey Marie. "Engineering high dielectric constant materials on silicon carbide." Diss., Restricted to subscribing institutions, 2007. http://proquest.umi.com/pqdweb?did=1459913391&sid=1&Fmt=2&clientId=1564&RQT=309&VName=PQD.

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11

Shan, Xiaobing Cheng Zhongyang. "High dielectric constant 0-3 ceramic-polymer composites." Auburn, Ala, 2009. http://hdl.handle.net/10415/1820.

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12

Wang, Henry F. S. (Henry Fu-Sen). "Dielectric Relaxation of Aqueous Solutions at Microwave Frequencies for 335 GHz. Using a Loaded Microwave Cavity Operating in the TM010 Mode." Thesis, University of North Texas, 1994. https://digital.library.unt.edu/ark:/67531/metadc279039/.

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The frequency dependence and temperature dependence of the complex dielectric constant of water is of great interest. The temperature dependence of the physical properties of water given in the literature, specific heat, thermal conductivity, electric conductivity, pH, etc. are compared to the a. c. (microwave) and d. c. conductivity of water with a variety of concentration of different substances such as HC1, NaCl, HaS04, etc. When each of these properties is plotted versus inverse absolute temperature, it can be seen that each sample shows "transition temperatures". In this work, Slater's pe
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Sun, Minwei. "Applying zeolites as low dielectric constant (low-k) materials." Diss., UC access only, 2009. http://proquest.umi.com/pqdweb?index=14&did=1907180231&SrchMode=1&sid=4&Fmt=2&VInst=PROD&VType=PQD&RQT=309&VName=PQD&TS=1270059102&clientId=48051.

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14

Lu, Jiongxin. "High dielectric constant polymer nanocomposites for embedded capacitor applications." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/26666.

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Thesis (Ph.D)--Materials Science and Engineering, Georgia Institute of Technology, 2009.<br>Committee Chair: Wong, C. P.; Committee Member: Jacob, Karl; Committee Member: Liu, M. L.; Committee Member: Tannenbaum, Rina; Committee Member: Wang, Z. L.. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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15

Liu, Jiangping. "Prediction of Fluid Dielectric Constants." BYU ScholarsArchive, 2011. https://scholarsarchive.byu.edu/etd/2787.

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The dielectric constant or relative static permittivity of a material represents the capacitance of the material relative to a vacuum and is important in many industrial applications. Nevertheless, accurate experimental values are often unavailable and current prediction methods lack accuracy and are often unreliable. A new QSPR (quantitative structure-property relation) correlation of dielectric constant for pure organic chemicals is developed and tested. The average absolute percent error is expected to be less than 3% when applied to hydrocarbons and non-polar compounds and less than 18% wh
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16

Sun, Yang. "Dielectric Properties of CaCu3Ti4O12 and Its Related Materials." University of Akron / OhioLINK, 2006. http://rave.ohiolink.edu/etdc/view?acc_num=akron1153884252.

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17

Chan, Christina Ye. "Waves, scale, sand, and water : dielectric constant of unconsolidated sediments." Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1999. http://www.collectionscanada.ca/obj/s4/f2/dsk1/tape8/PQDD_0015/NQ46327.pdf.

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18

Blanco, Agnes M. Padovani. "Low dielectric constant porous spin-on glass for microelectronic applications." Diss., Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/11840.

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19

Butterworth, Sean. "Shape and chemical anisotropic particles in low dielectric constant media." Thesis, University of Manchester, 2013. https://www.research.manchester.ac.uk/portal/en/theses/shape-and-chemical-anisotropic-particles-in-low-dielectric-constant-media(d8ace7a1-8993-4a6b-a50d-2a2ea71c10f8).html.

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Electrophoretic displays (EDPs) are an attractive low power technology for small to large area displays. Such display technology has seen a surge of research interest with the launch of successful e-readers in the market place, owing to their lower power consumption and paper-like quality. This work aims to look at the influence of shape on the electrophoretic mobility of particles for such devices. Crosslinked poly(methyl methacrylate) (PMMA) precursor particles with a narrow size distribution were produced by non aqueous dispersion polymerisation utilising a pump-feed method. To produce shap
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20

Gramse, Georg. "Studying Electrostatic Polarization Forces at the Nanoscale. Dielectric constant of supported biomembranes measured in air and liquid environment." Doctoral thesis, Universitat de Barcelona, 2012. http://hdl.handle.net/10803/83359.

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The objective of my thesis was to develop novel techniques and methods to probe the dielectric properties of biomembranes in air and their natural environment - liquid solution. The dielectric constant ε(r) of biomembranes is a parameter especially important in cell electrophysiology as it ultimately determines the ion membrane permeability, the membrane potential formation or the action potential propagation velocity, among others. However, no technique is able to provide this quantity with the required nanoscale spatial resolution and in electrolyte solution. AFM is an extremely versatile
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21

Ziemath, Ervino Carlos. "Medidas dielétricas em cristal de KCN a ultrabaixas freqüências." Universidade de São Paulo, 1985. http://www.teses.usp.br/teses/disponiveis/54/54132/tde-11092007-102959/.

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Realizamos medidas dielétricas a baixas freqüências (10-2-40Hz) em cristais de KCN empregando uma ponte de ultra-baixas freqüências, bem como a altas freqüências (50-104 Hz) empregando uma ponte de capacitância comercial (General Radio). As curvas de perda dielétrica mostraram um bom ajuste entre altas e baixas freqüências. Obtivemos picos de perda dielétrica num intervalo de cinco décadas e entre 53 e 78K. Os picos destas curvas foram ajustados segundo uma equação de Arrhenius, e obtivemos uma energia de ativação de 0,148 eV e um tempo de relaxação característico de 6,53 x 10-15s para os dipo
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22

Rao, Yang. "High dielectric constant materials development and electrical simulation of embedded capacitors." Diss., Georgia Institute of Technology, 2001. http://hdl.handle.net/1853/20014.

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23

Simkovic, Viktor. "Novel Low Dielectric Constant Thin Film Materials by Chemical Vapor Deposition." Thesis, Virginia Tech, 1999. http://hdl.handle.net/10919/35627.

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A modified CVD reactor was designed with a deposition chamber capable of accomodating 8" wafers, with the capacity to remotely pyrolyze two different precursors. The design was based on a previous working reactor, with the most notable improvements being a showerhead design for more even delivery of gaseous precursor and a separate heating control of the substrate holder and deposition chamber walls. The performance of the reactor was analyzed by testing the pressure gradients within and the thickness uniformity of films deposited on 8" wafers. The reactor exhibited a linear pressure gradie
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Song, Yi. "AC conductivity and dielectric constant of systems near the percolation threshold /." The Ohio State University, 1986. http://rave.ohiolink.edu/etdc/view?acc_num=osu148726754698361.

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25

Gillespie, David. "Electrokinetic and electrostatic properties of highly charged colloids in low-dielectric media." Thesis, University of Bristol, 2016. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.690761.

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Marques, Duarte da Paz Ana Marta. "Water content measurement in woody biomass : using dielectric constant at radio frequencies." Licentiate thesis, Mälardalen University, School of Sustainable Development of Society and Technology, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:mdh:diva-963.

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<p>The will for replacement of fossil fuels increased the use of woody biomass as fuel in heating and power plants. An important parameter for the use woody biomass as fuel is the water content of biomass as it influences the heating value and thereby the combustion control and pricing. Currently, water content is determined using the gravimetric method by drying samples  in an oven. This method is neither fast nor representative, as the water content can vary largely in different parts of the container which raised the need to develop sensors that are able to measure water content of biomass
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Troutman, Tia Shawana. "Development of low viscosity, high dielectric constant polymers for integral passive applications." Thesis, Georgia Institute of Technology, 1999. http://hdl.handle.net/1853/8683.

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Agraharam, Sairam. "Plasma assisted deposition of low dielectric constant fluorocarbon materials for microelectronic applications." Diss., Georgia Institute of Technology, 2000. http://hdl.handle.net/1853/11896.

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Chen, Che-yu, and 陳哲宇. "Glasses with high dielectric constant." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/6fd2nq.

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碩士<br>大同大學<br>材料工程學系(所)<br>102<br>Recently, niobium glasses receive much attention. Compared to other glass systems, niobium glasses have the advantages of high dielectric constant. However, the color of niobium glasses limits its application on optical components. The glass system SrO-BaO-Nb2O5-SiO2 has been investigated in this thesis. The expectation be understood that adding Sb2O5, P2O5, BaF2 ,KF and change ratio of Sr/Ba regarding to each property of this glass system. Hope to achieve the purpose of making niobium glass achromatic as far as maintaining a high dielectric constant in the pr
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Lai, Bo-Shen, and 賴柏伸. "Dielectric loss estimation from dielectric constant usingKramers-kronig relation." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/t75457.

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碩士<br>國立臺灣大學<br>電信工程學研究所<br>106<br>In this thesis, a method which can estimate dissipation factor (Df) from dielectric constant (Dk) is proposed. By using measured dielectric constant, the imaginary part of permittivity can be obtained through Kramers-Kronig relation. Also, the error generated by lacking data at high frequencies in truncated Kramers-Kronig relation would be revised and discussed in detail. Furthermore, four methods, including transmission coefficient extraction of both strip line (SL) and substrate integrated waveguide (SIW) from through, reflection and line (TRL) method , mic
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李勃學. "Effect of Extreme Ultra-Violet Radiation on High Dielectric Constant Dielectrics." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/85995804593938080878.

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碩士<br>國立交通大學<br>電子研究所<br>98<br>In this thesis, EUV radiation damage on high dielectric constant (high-k) dielectric with metal gate is evaluated. TiN is selected as the metal gate electrode. Five kinds of high-k dielectric are evaluated. They are SiO2, , MOCVD Al2O3, HfAlO, HfSiO and ALD Al2O3. Simple metal-oxide-Si (MOS) capacitor structure was fabricated. We also use SiO2 and Al2O3 as gate dielectrics fabricate Metal-Oxide-Silicon-Field-Effect-Transistor (MOSFET) in order to demonstrate EUV effect on MOSFET. Before and after EUV irradiation, the C-V curves of these five dielectrics have sign
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Wei, Hsuan-Yi, and 魏易玄. "Investigation of Low-Dielectric constant Hydrogen Silsesqnioxane as Intermetal Dielectric." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/58764277136681114396.

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碩士<br>國立中山大學<br>物理學系研究所<br>90<br>Abstract As ULSI circuits are scaled down to deep submicron regime, interconnect delay becomes increasingly dominant over intrinsic gate delay. To reduce the RC delay time, many low dielectric constant materials have been developed. One of the most promising low-k materials is siloxane-based hydrogen silsesquioxane (HSQ) having the general formula (HSiO3/2)2n, n=2, 3, etc. available as Flowable Oxide (FOx). But low mechanical strength is the problem of HSQ. In order to modify the material composition and mechanical intensity of HSQ, a novel siloxane-based inorg
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Vedula, Ramakrishna. "Low dielectric constant materials and processes for interlayer dielectric applications." 2006. https://scholarworks.umass.edu/dissertations/AAI3206194.

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At 0.18 microns and below minimum device dimensions in Ultra Large Scale Integrated Circuits, signal net parasitic delay amounts to 80% of the overall path delay. This leads to serious problems relating to signal timing, crosstalk, noise and power consumption. Although Copper is being used as an alternative to Aluminum interconnects to reduce the resistive component of the RC delays, finding a suitable material to replace Silicon Dioxide (SiO2) as the interlayer dielectric poses serious challenges. Most of the inorganic candidates are variants of SiO2, while the most prominent among polymeric
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Chung-Yi, Lin, and 林宗毅. "Study of the High Dielectric Constant Epoxy." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/04575206753118176023.

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碩士<br>國立交通大學<br>應用化學系<br>89<br>The study focused on the dielectric properties of epoxy resin. The NO2 group shows significant effect on increasing the dielectric constant of the system, and the C≡N group also has similar effect for the polarity of these functional groups. The photoresistor method is used to measure the degradation of the system. The yellowing of the system is caused by the high test temperature or the exposure under the UV light. The study also reports the effect of different curing agent, molecular weight and quantity of PEG modifier on the dielectric properties. T
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Alberto, Marco António Curado. "High dielectric constant oxides for CMOS technology." Master's thesis, 2017. http://hdl.handle.net/10316/82960.

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Dissertação de Mestrado Integrado em Engenharia Física apresentada à Faculdade de Ciências e Tecnologia<br>Hidrogénio em óxidos de terras raras paramagnéticas (óxido de neodímio) foi investigado através de medidas de espectroscopia de muão positivo obtidas nas instalações da ISIS obtidas com o detector EMU (Laboratório Rutherford Appleton , Reino Unido). Muonio, é como um pesudo-isótopo leve do hidrogénio, usado para imitar a configuração electrónica do hidrogénio. Foram identificados duas configurações do muonio: uma configuração de estado dador no local de ligação com o oxigénio e um estado
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Chuang, Yueh-Cheng, and 莊岳鎮. "Characterization of Low Dielectric Constant Spin-On Polymers for Interlayer Dielectric Applications." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/09543450452235962948.

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碩士<br>國立交通大學<br>電子研究所<br>84<br>For deep submicron CMOS technology the speed of the devices is limited more by interconnect delay and less by intrinsic gate delay. Change in the dielectric materials to reduced capacitance is probably one of the bestapproach to interconnection delay, also to power disspation and crosstalk. this thesis presents the film characteristics, thermal stability, leakage current and stress variations of three type of low-k SOG. Experimental results are compared wit
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Tu, Hsien Ming, and 杜賢明. "Study of Advanced Low Dielectric Constant Materials for ULSI Intermetal Dielectric Applications." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/50335301534663409081.

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碩士<br>國立交通大學<br>電子工程系<br>87<br>For ULSI circuits when feature size is scaled into the deep submicron region, The speed of the devices will be significantly limited by the interconnect delay. Low dielectric constant (K) materials will play a major role, with copper as the interconnect material, in offering to minimize the interconnect RC delay. A variety of inorganic or organic polymers, xerogel are being considered for low k applications. This thesis will describe two new siloxanes and porous xerogel with ultra-low dielectric constant for low k applications. We will explore thermal stability,
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Zhang, Sheng 1986. "Interdigitated capacitor sensor for complex dielectric constant sensing." Thesis, 2010. http://hdl.handle.net/2152/ETD-UT-2010-05-1142.

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The objective of this thesis is to develop a complex dielectric properties sensor using interdigitated capacitor (IDC) structure. IDCs are easy to fabricate and because of its planar structure, it can be easily integrated with other sensing components and signal processing electronics. The design, fabrication, modeling, and testing of IDC sensors are presented in this thesis. Design parameters and their influence on sensor's output signals are discussed. Previous IDC models are reviewed and the limitations are studied. A new equivalent circuit model based on the fringing electric field distrib
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Chen, Jun-Ming, and 陳俊銘. "Process Study of Porous Low Dielectric Constant Materials." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/36452082380840136700.

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碩士<br>樹德科技大學<br>電腦與通訊研究所<br>93<br>As feature sizes of devices are continuously scaled down and shrink into deep submicron regime, the rapid increase in resistance-capacitance (RC) time delay is becoming one of the major bottlenecks for deep submicron devices. Much attention has been paid to the use of porous low dielectric constant materials, instead of conventional SiO2, to reduce interconnect capacitance and address the RC delay problem. This paper discussed the plasma etching process, photoresist removal process, cupper diffusion and mechanical strength improvement of mesoporous silica. In
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Tang, Chien-Fu, and 唐健夫. "Study on Siloxane Based Low dielectric Constant Materials." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/25981374709808651073.

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碩士<br>國立交通大學<br>電子工程系<br>89<br>As IC technology moves into the deep submicron regime, it is required to decrease the metal pitch and to increase the number of metal layers for interconnect to accommodate the increased packing density and functional complexity. This makes propagation delay in interconnects becomes an appreciable fraction of the total time delay. Use of the spin on glass (SOG) low dielectric constant material (low-k) as the intermetal dielectric (IMD) results in low inter-line capacitance, high speed, low power dissipation, and low cross-talk noise. An organic SOG, Hybird-Organi
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Lin, Zen-Kuan, and 林仁寬. "X-ray Exposure on Low Dielectric Constant Materials." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/77642812227254364342.

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碩士<br>國立中山大學<br>物理學系研究所<br>89<br>Abstract As integrated circuit dimensions continue to shrink, interconnect RC delay becomes an increasingly serious problem. Fabrication of interconnect structures using new materials of low resistivity and low permittivity to replace the traditional Al and SiO2 interconnect technology is in high demand. Specially, copper and low dielectric constant (low-k) polymers show great promise. Among various low-k materials, spin-on glass (SOG) materials have been widely used as an interlayer dielectric in multilevel interconnections because they are applied easily
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戴裕國. "Measurement of dielectric constant at microwave frequency range." Thesis, 1991. http://ndltd.ncl.edu.tw/handle/65848869527363926245.

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Chen, Shiu-Sheng, and 陳旭昇. "Percolative BaTiO3/Ni Composites with Improved Dielectric Constant." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/55535939463043312883.

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碩士<br>國立臺灣大學<br>材料科學與工程學研究所<br>96<br>Abstract The properties of ceramic-metal composites exhibit significant change in the neighborhood of percolation threshold, for examples: the dielectric constant increases rapidly and the resistance decreases abruptly. In the present study, two specimen series, BaTiO3/Ni(NO3)2 and BaTiO3/Ni systems are prepared by sintering in N2. The BaTiO3/Ni composites are obtained. The effect of Ni content on the microstructure and the dielectric properties of Ni-doped BaTiO3 are investigated. The experimental results show that the microstructure of BaTiO3 spe
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Chen, Wen-Jen, and 陳玟任. "Study on Porous Ultra Low Dielectric Constant Material." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/42776881244685936298.

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碩士<br>國立雲林科技大學<br>電子與資訊工程研究所碩士班<br>90<br>For deep submicron generation, performance of devices is dominated by propagation delay between metal interconnection. In order to improve this issue , in this thesis, a porous material with ultra low dielectric constant is used to reduced capacitance between metal interconnection to decreasing of RC time delay to enhance the performance of device. In this study, a porous ultra low dielectric constant material- porous HOSP is a spin on glass material. This study is focus on intrinsic characteristics 、thermal stability 、damage after various kinds of plas
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Chen, Shiu-Sheng. "Percolative BaTiO3/Ni Composites with Improved Dielectric Constant." 2008. http://www.cetd.com.tw/ec/thesisdetail.aspx?etdun=U0001-1706200813502100.

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46

Lai, Gung Shen, and 賴冠生. "Extraction of the High Frequency Effective Dielectric Constant." Thesis, 1997. http://ndltd.ncl.edu.tw/handle/12970037146413472940.

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Chen, Tsung-Wen, and 陳琮汶. "Characterization of spin-on Hydrogen Silsesquioxane (HSQ) for Low dielectric constant Intermetal Dielectric Applications." Thesis, 1997. http://ndltd.ncl.edu.tw/handle/41418237018331621276.

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碩士<br>國立交通大學<br>電子工程學系<br>85<br>As the CMOS geometry shrinks to 0.35um and beyond, low dielectric constant properties become increasingly important in the selection of intermetal dielectric oxide. In this thesis, we introduce a low-k SOG material that is Hydrogen Silsesquioxane (HSQ) -based flowable oxide (FOx) and study its characteristics when used for low-k IMD applications. In the present study, film shrinkage has been reported. The FOx film thickness shrinkage
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48

Wang, Yong-Lin, and 王詠麟. "Microwave Measurements of Dielectric Properties for High Dielectric Constant Ceramic Materials by Mixture Equations." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/59y4j8.

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碩士<br>國立虎尾科技大學<br>光電與材料科技研究所<br>98<br>This article reports on a study of the dielectric constants of ceramic dispersions in the polyethylene matrix at microwave frequency. The experimental dielectric constants of ceramic dispersions in the polyethylene matrix at microwave frequency are compared to those obtained by using different mixing laws. Ceramic powders are mixed in a certain proportion of matrix powder. Three high dielectric constant ceramic powders of TiO2, CaTiO3 and SrTiO3 with the dielectric constants of 100,170 and 300, respectively, are studied. The matrix material is the PE powd
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Zhang, Sheng active 2013. "Passive inductively coupled wireless sensor for dielectric constant sensing." 2013. http://hdl.handle.net/2152/21728.

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In order to address the challenges of capacitive sensing in harsh environment, self resonant passive wireless sensors are studied. The capacitive sensing elements based on interdigitated capacitor (IDC) sensor are used. A semi-empirical model providing accurate capacitance calculation for IDCs over a wide range of dimensions and dielectric constants is developed. An equivalent circuit model based on electric field distribution is proposed, leading to a closed form approximation for IDC capacitance calculation. The conductivity of the material under test is also considered and a model is propos
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Tu, Yi-Chuan, and 凃ㄧ權. "Integration of Copper and Porous Low Dielectric Constant Materials." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/99868972638712822673.

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碩士<br>國立交通大學<br>機械工程系<br>90<br>As the devices become smaller and dimensions decline to sub-micron scale, the performance of integrated circuits will be significantly limited by the interconnect RC time delay. To alleviate these impacts, copper and low dielectric constant materials are used to replace aluminum and silicon oxide as the conduction and dielectric layers in metallization system. Since copper diffuses fast in silicon substrate, a diffusion barrier with good thermal stability, contact resistance, and low resistivity is needed in Cu/Si contact system. Reactively sputtered T
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