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Journal articles on the topic 'Filtered vacuum arc deposition'

Author: Grafiati

Published: 28 May 2022

Last updated: 30 July 2025

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1

Benti, Hailu Gemechu, Abraham Debebe Woldeyohannes, and Belete Sirahbizu Yigezu. "Improving the Efficiency of Cutting Tools through Application of Filtered Cathodic Vacuum Arc Deposition Coating Techniques: A Review." Advances in Materials Science and Engineering 2022 (May 28, 2022): 1–17. http://dx.doi.org/10.1155/2022/1450805.

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The challenge of enhancing cutting tool life has been dealt with by many research studies. However, this challenge seems endless with growing technological advancement which brings about incremental improvement in tool life. The objective of this review paper is focused at assessing filtered cathodic vacuum arc deposition techniques applied on cutting tools and their effect on tool efficiency. The paper particularly picks filtered cathodic vacuum arc deposition (FCVAD) among other well-identified methods of coating like the Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). F

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2

TAKIKAWA, Hirofumi, and Takahiro BANDO. "Vacuum Arc Deposition: Steered and Filtered Methods." Journal of The Surface Finishing Society of Japan 75, no. 7 (2024): 310–13. https://doi.org/10.4139/sfj.75.310.

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3

Boxman, R. L., V. Zhitomirsky, B. Alterkop, et al. "Recent progress in filtered vacuum arc deposition." Surface and Coatings Technology 86-87 (December 1996): 243–53. http://dx.doi.org/10.1016/s0257-8972(96)03023-x.

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4

Верещака, Алексей, and Aleksey Vereshchaka. "Development process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD)." Bulletin of Bryansk state technical university 2014, no. 3 (2014): 10–13. http://dx.doi.org/10.12737/23189.

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Developed a process of assisted filtered cathodic-vacuum-arc deposition (AFCVAD). We used a special emitter (implantor) to generate Cr, Mo ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. A phenomenological (physical) model of assisted filtered cathodic-vacuum-arc deposition (AFCVAD), allows to predict the properties of the coatings formed on the basis of binary compounds as a function of the relationship Ra, characterizing parameters of ion i

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5

Maksimov, Y. V., A. S. Vereschaka, A. A. Vereschaka, et al. "Development and research of multilayer composite coatings with nano-dispersed structure which are deposited on cutting tools using assistance cathode-vacuum-arc processes." Izvestiya MGTU MAMI 7, no. 1-2 (2013): 73–82. http://dx.doi.org/10.17816/2074-0530-68031.

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The authors considered the problem of synthesis of multilayer coatings with nano-dispersed structure using the process of assistance filtered cathode-vacuum-arc deposition. The effect of high-energy assisting ions, generated by a special device (implanter), which the ВИТ-3 vacuum-arc setting was equipped with, is analyzed in the paper. The mechanisms of modifying the properties of the deposited coatings and cutting properties of carbide inserts with coatings obtained in assisting cathode-vacuum-arc deposition with filtration of ion-vapor flow are analyzed as well.

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6

Boxman, R. L., S. Goldsmith, A. Ben-Shalom, et al. "Filtered vacuum arc deposition of semiconductor thin films." IEEE Transactions on Plasma Science 23, no. 6 (1995): 939–44. http://dx.doi.org/10.1109/27.476479.

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7

Chen, Y. M., H. Q. Zhang, Z. W. Li, W. Cao, B. Liao, and X. Zhang. "Deposition of ZrNxOyfilms by filtered cathodic vacuum arc." Surface Engineering 29, no. 8 (2013): 567–71. http://dx.doi.org/10.1179/1743294413y.0000000163.

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8

Vereschaka, Alexey A., Anatoly S. Vereschaka, Andre DL Batako, Boris J. Mokritskii, Anatoliy Y. Aksenenko, and Nikolay N. Sitnikov. "Improvement of structure and quality of nanoscale multilayered composite coatings, deposited by filtered cathodic vacuum arc deposition method." Nanomaterials and Nanotechnology 7 (January 17, 2016): 184798041668080. http://dx.doi.org/10.1177/1847980416680805.

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This article studies the specific features of cathode vacuum arc deposition of coatings used in the production of cutting tools. The detailed analysis of the major drawbacks of arc-Physical Vapour Deposition (PVD) methods has contributed to the development of the processes of filtered cathodic vacuum arc deposition to form nanoscale multilayered composite coatings of increased efficiency. This is achieved through the formation of nanostructure, increase in strength of adhesion of coating to substrate up to 20%, and reduction of such dangerous coating surface defects as macro- and microdroplets

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9

Stepanov, Igor, Alexander Ryabchikov, and Denis Sivin. "Very Broad Metal Ion Beam Source for Ion Implantation and Coating Deposition Technologies." Advanced Materials Research 880 (January 2014): 288–91. http://dx.doi.org/10.4028/www.scientific.net/amr.880.288.

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The paper describes high broad metal ion source based on dc macroparticle filtered vacuum arc plasma generation with the dc ion-beam extraction. The possibility of formation of pseudo ribbon beam of metal ions with the parameters: ion beam length 0.6 m, ion current up to 0.2 A, accelerating voltage 40 kV, and ion energy up to 160 kV has been demonstrated. The pseudo ribbon ion beam is formed from dc driven vacuum arc plasma. The results of investigation of the vacuum arc evaporator ion-emission properties are presented. The influence of magnetic field strength near the cathode surface on the a

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10

Brzezinka, Tomasz L., Jeff Rao, Jose M. Paiva, et al. "Facilitating TiB2 for Filtered Vacuum Cathodic Arc Evaporation." Coatings 10, no. 3 (2020): 244. http://dx.doi.org/10.3390/coatings10030244.

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TiB2 is well established as a superhard coating with a high melting point and a low coefficient of friction. The brittle nature of borides means they cannot be utilised with arc evaporation, which is commonly used for the synthesis of hard coatings as it provides a high deposition rate, fully ionised plasma and good adhesion. In this work, TiB2 conical cathodes with non-standard sintering additives (carbon and TiSi2) were produced, and the properties of the base material, such as grain structure, hardness, electrical resistivity and composition, were compared to those of monolithic TiB2. The d

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11

Mo, Ji Liang, Min Hao Zhu, J. An, H. Sun, Yong Xiang Leng, and Nan Huang. "Deposition of CrN Coatings by Filtered Cathodic Vacuum Arc." Key Engineering Materials 373-374 (March 2008): 130–33. http://dx.doi.org/10.4028/www.scientific.net/kem.373-374.130.

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CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc technique (FCVA). The effect of different deposition parameters: nitrogen partial pressure, substrate-bias voltage and preheating of the substrate, on the structural and mechanical properties of the coating was investigated. X-ray diffraction analysis was used to determine the structure and composition of the coatings. The tribological behaviour and wear properties of the coatings against Si3N4 ball at different normal loads were studied under reciprocating sliding condition. The results showed that a sm

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12

Lau, S. P., Y. H. Cheng, J. R. Shi, P. Cao, B. K. Tay, and X. Shi. "Filtered cathodic vacuum arc deposition of thin film copper." Thin Solid Films 398-399 (November 2001): 539–43. http://dx.doi.org/10.1016/s0040-6090(01)01315-3.

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13

Chen, J. S., S. P. Lau, Y. B. Zhang, Z. Sun, B. K. Tay, and C. Q. Sun. "Deposition of permalloy films by filtered cathodic vacuum arc." Thin Solid Films 443, no. 1-2 (2003): 115–19. http://dx.doi.org/10.1016/s0040-6090(03)01031-9.

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14

Shi, J. R., S. P. Lau, Z. Sun, X. Shi, B. K. Tay, and H. S. Tan. "Filtered cathodic vacuum arc deposition of copper thin film." Electronics Letters 36, no. 14 (2000): 1205. http://dx.doi.org/10.1049/el:20000861.

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15

Kaplan, L., V. N. Zhitomirsky, S. Goldsmith, R. L. Boxman, and I. Rusman. "Arc behaviour during filtered vacuum arc deposition of Sn-O thin films." Surface and Coatings Technology 76-77 (November 1995): 181–89. http://dx.doi.org/10.1016/0257-8972(95)02592-8.

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16

Martin, P. "Review of the filtered vacuum arc process and materials deposition." Thin Solid Films 394, no. 1-2 (2001): 1–14. http://dx.doi.org/10.1016/s0040-6090(01)01169-5.

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17

Zhang, Xu, Xiangying Wu, Zhongzhen Yi, Tonghe Zhang, and Huixing Zhang. "The TiN/AlN multilayers deposited by filtered vacuum arc deposition." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 206 (May 2003): 382–85. http://dx.doi.org/10.1016/s0168-583x(03)00767-5.

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18

Zhitomirsky, V. N., L. Kaplan, R. L. Boxman, and S. Goldsmith. "Ion current distribution in a filtered vacuum arc deposition system." Surface and Coatings Technology 76-77 (November 1995): 190–96. http://dx.doi.org/10.1016/0257-8972(95)02593-6.

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19

Bilek, M. M. M., and W. I. Milne. "Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon." Thin Solid Films 290-291 (December 1996): 299–304. http://dx.doi.org/10.1016/s0040-6090(96)09180-8.

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20

Ben-Shalom, A., L. Kaplan, R. L. Boxman, S. Goldsmith, and M. Nathan. "SnO2 transparent conductor films produced by filtered vacuum arc deposition." Thin Solid Films 236, no. 1-2 (1993): 20–26. http://dx.doi.org/10.1016/0040-6090(93)90635-3.

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21

Shashurin, A., I. I. Beilis, Y. Sivan, S. Goldsmith, and R. L. Boxman. "Copper film deposition rates by a hot refractory anode vacuum arc and magnetically filtered vacuum arc." Surface and Coatings Technology 201, no. 7 (2006): 4145–51. http://dx.doi.org/10.1016/j.surfcoat.2006.08.022.

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22

Bi, W. Y., L. H. Li, H. T. Liu, and G. Zhao. "The effect of biased plates on transport of vacuum arc plasma through rectangular curved magnetic filter." Modern Physics Letters B 31, no. 19-21 (2017): 1740006. http://dx.doi.org/10.1142/s0217984917400061.

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Filtered cathode vacuum arc deposition can remove the macroparticles produced from the cathode. Positively biasing the whole filter or inserting a biased plate in the filter can increase the plasma transport efficiency. We developed a curved magnetic filter with rectangular cross-section to improve the coating efficiency. In this study, the effect of biased plates at outer-wall and inner-wall on the transport efficiency of vacuum arc plasma through rectangular curved magnetic filter was investigated. A Langmuir probe system is used to measure the distribution properties of the filtered plasma

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23

Vereschaka, A. A., A. S. Vereschaka, S. N. Grigoriev, and D. V. Sladkov. "Nano-Scale Multi-Layered Coatings for Cutting Tools Generated Using Assisted Filtered Cathodic-Vacuum-Arc Deposition (AFCVAD)." Applied Mechanics and Materials 325-326 (June 2013): 1454–59. http://dx.doi.org/10.4028/www.scientific.net/amm.325-326.1454.

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The subject of this study were nano-nanoscale multilayer coatings formed using the process of filtered cathodic vacuum arc deposition in assisting high-energy ions of chromium. We used a special emitter (implantor) to generate chromium ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. It is establish the positive change of key properties of coating deposited on carbide inserts WC/CrC/Co, WC / (Co-Re), TiC/TaC/Co at assisted impact of ions Cr at

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24

Zhao, Z. W., B. K. Tay, G. Q. Yu, and S. P. Lau. "Nanocrystalline Zirconium Oxide Thin Films Prepared by Filtered Cathodic Vacuum Arc." Journal of Metastable and Nanocrystalline Materials 23 (January 2005): 63–66. http://dx.doi.org/10.4028/www.scientific.net/jmnm.23.63.

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Zirconium oxide thin films were deposited at room temperature by using off-plane filtered cathodic vacuum arc (FCVA). Deposition rate, film structure, compositional analysis and optical properties are studied as a function of working pressure. Deposition rate as high as 53 nm/min could be achieved. As increasing working pressure, the film structure changes from Zr-O solid solution, to monoclinic structure with preferred orientation and finally to randomly oriented nanocrystalline structure. The averaged crystal size increases with working pressure and is less than 15 nm. The ratio of O/Zr incr

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25

WU, X. L., X. J. LI, X. ZHANG, W. B. XUE, G. A. CHENG, and A. D. LIU. "TRIBOLOGICAL BEHAVIORS OF DUPLEX DLC/Al2O3 COATINGS FABRICATED USING MICRO-ARC OXIDATION AND FILTERED CATHODIC VACUUM ARC SYSTEM." Surface Review and Letters 14, no. 02 (2007): 193–97. http://dx.doi.org/10.1142/s0218625x07009256.

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Micro-arc oxidation technique (MAO) treatment produces a layer of alumina film on the surface of the aluminum alloy. A hard and uniform tetrahedral amorphous carbon film (diamond-like carbon, DLC) was deposited on the top of the alumina layer of the 2024 aluminum alloy by a pulsed filtered catholic vacuum arc (FCVA) deposition system with a metal vapor vacuum arc (MEVVA) source. The morphology and tribological properties of the duplex DLC/ Al 2 O 3 coating were investigated by a scanning electron microscope (SEM) and a ball-on-disk sliding tester. These results suggested that the duplex DLC/ A

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26

Zhang, Xu, Xiang Ying Wu, Hui Xing Zhang, and Tong He Zhang. "Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition." Materials Science Forum 423-425 (May 2003): 585–90. http://dx.doi.org/10.4028/www.scientific.net/msf.423-425.585.

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27

Cheng, Y. H., B. K. Tay, S. P. Lau, X. Shi, and H. C. Chua. "Deposition of (Ti, Al)N films by filtered cathodic vacuum arc." Thin Solid Films 379, no. 1-2 (2000): 76–82. http://dx.doi.org/10.1016/s0040-6090(00)01397-3.

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28

Chen, B. J., X. W. Sun, and B. K. Tay. "Fabrication of ITO thin films by filtered cathodic vacuum arc deposition." Materials Science and Engineering: B 106, no. 3 (2004): 300–304. http://dx.doi.org/10.1016/j.mseb.2003.09.046.

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29

Zhitomirsky, V. N., E. Çetinörgü, E. Adler, Yu Rosenberg, R. L. Boxman, and S. Goldsmith. "Filtered vacuum arc deposition of transparent conducting Al-doped ZnO films." Thin Solid Films 515, no. 3 (2006): 885–90. http://dx.doi.org/10.1016/j.tsf.2006.07.150.

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30

Xie, Jun, and Kyriakos Komvopoulos. "Bilayer amorphous carbon films synthesized by filtered cathodic vacuum arc deposition." Journal of Materials Research 31, no. 20 (2016): 3161–67. http://dx.doi.org/10.1557/jmr.2016.250.

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31

Şenadım Tüzemen, Ebru, Merhan Kilic, Birsen Kesik Zeyrek, et al. "Formation of carbon nanowalls by pulsed filtered cathodic vacuum arc deposition." Diamond and Related Materials 93 (March 2019): 200–207. http://dx.doi.org/10.1016/j.diamond.2019.02.007.

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32

Bendavid, A., P. J. Martin, T. J. Kinder, and E. W. Preston. "The deposition of NbN and NbC thin films by filtered vacuum cathodic arc deposition." Surface and Coatings Technology 163-164 (January 2003): 347–52. http://dx.doi.org/10.1016/s0257-8972(02)00623-0.

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33

Shi, X., B. K. Tay, and S. P. Lau. "THE DOUBLE BEND FILTERED CATHODIC ARC TECHNOLOGY AND ITS APPLICATIONS." International Journal of Modern Physics B 14, no. 02n03 (2000): 136–53. http://dx.doi.org/10.1142/s0217979200000145.

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A new Filtered Cathodic Vacuum Arc coating system with a magnetic macroparticle filter design consisting of an off-plane double-bend (OPDB) filter is described. The transport of the vacuum arc plasma through this OPDB filter is investigated using Langmuir and deposition probes. Films of amorphous hard carbon have been deposited a 90° single bend and the OPDB filter and the macroparticle contents of the films are compared. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model. The results demonstrate the OPDB filt

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34

Zhitomirsky, V. N., R. L. Boxman, and S. Goldsmith. "Unstable arc operation and cathode spot motion in a magnetically filtered vacuum‐arc deposition system." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 4 (1995): 2233–40. http://dx.doi.org/10.1116/1.579548.

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35

Witke, T., T. Schuelke, B. Schultrich, P. Siemroth та J. Vetter. "Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods". Surface and Coatings Technology 126, № 1 (2000): 81–88. http://dx.doi.org/10.1016/s0257-8972(00)00544-2.

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36

Vereschaka, Alexey Anatolevich, Boris Y. Mokritskii, Dmitriy A. Pustovalov, Anatoliy Stepanovich Vereschaka, Jury I. Bublikov, and Gaik V. Oganyan. "Improving Efficiency of End Mills by Deposition of Modifying Nano-Scale Multilayer Composite Coatings." Applied Mechanics and Materials 798 (October 2015): 351–56. http://dx.doi.org/10.4028/www.scientific.net/amm.798.351.

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The study considers the challenge of improving the efficiency of end mills made of carbides through modification of physical and mechanical properties of tools by forming nanostructured multilayer composite coatings on its working surfaces with the use of filtered cathodic vacuum-arc deposition (FCVAD). The system and structure of three-component nanostructured multilayer composite modifying coatings for deposition on the working surfaces of the end mills are developed. The study presents the results of laboratory and industrial tests of end mills with coatings designed for conditions for roug

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37

Alnassar, Mohammad Saleh N., Patrick W. Leech, Geoff K. Reeves, et al. "Graphitic Schottky Contacts to Si formed by Energetic Deposition." MRS Proceedings 1786 (2015): 51–56. http://dx.doi.org/10.1557/opl.2015.824.

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ABSTRACTCarbon films deposited by filtered cathodic vacuum arc have been used to form high quality Schottky diodes on p-Si. Energetic deposition with an applied substrate bias of -1 kV and with a substrate temperature of 100 °C has produced carbon diodes with rectification ratios of ∼ 3 × 106, saturation currents of ∼0.02 nA and ideality factors close to unity (n = 1.05). Simulations were used to estimate the effective work function and the thickness of an interfacial mixed (C/SiO2) layer from the current/voltage characteristics of the diodes.

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38

Zhang, Xu, Hui Xing Zhang, Xiang Ying Wu, and Tong He Zhang. "Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition." Materials Science Forum 475-479 (January 2005): 3623–26. http://dx.doi.org/10.4028/www.scientific.net/msf.475-479.3623.

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The tetrahedral amorphous carbon films are attracting materials because of their properties similar to diamond, such as high hardness, resistivity, optical transparency, chemical inertness and low coefficient of friction. These properties make it ideal for wear resistance application on cutting tools, automotive component, aerospace components and orthopedic prosthesis etc. In this paper the structures, mechanical properties and wear resistance of the tetrahedral amorphous carbon films deposited on silicon under lower pulse bias voltage by filtered catholic vacuum arc deposition system have be

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39

Martins, D. R., M. C. Salvadori, P. Verdonck, and I. G. Brown. "Contamination due to memory effects in filtered vacuum arc plasma deposition systems." Applied Physics Letters 81, no. 11 (2002): 1969–71. http://dx.doi.org/10.1063/1.1506019.

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40

Huang, Zhanyun, Ping Luo, Wanzong Chen, Shirong Pan, and Dihu Chen. "Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition." Vacuum 89 (March 2013): 220–24. http://dx.doi.org/10.1016/j.vacuum.2012.05.018.

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41

Yu, G. Q., B. K. Tay, S. P. Lau, K. Prasad, and J. X. Gao. "Low temperature deposition of tantalum diffusion barrier by filtered cathodic vacuum arc." Journal of Physics D: Applied Physics 36, no. 11 (2003): 1355–59. http://dx.doi.org/10.1088/0022-3727/36/11/317.

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42

Hee, Ay Ching, Huiliang Cao, Yue Zhao, Sina S. Jamali, Avi Bendavid, and Philip J. Martin. "Cytocompatible tantalum films on Ti6Al4V substrate by filtered cathodic vacuum arc deposition." Bioelectrochemistry 122 (August 2018): 32–39. http://dx.doi.org/10.1016/j.bioelechem.2018.02.006.

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43

Polo, M. C., J. L. Andújar, A. Hart, J. Robertson, and W. I. Milne. "Preparation of tetrahedral amorphous carbon films by filtered cathodic vacuum arc deposition." Diamond and Related Materials 9, no. 3-6 (2000): 663–67. http://dx.doi.org/10.1016/s0925-9635(99)00339-8.

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44

Верещака, Алексей, Aleksey Vereshchaka, Ойбек Хожаев, and Oybek Khozhaev. "Improving operational characteristics of tool from tungsten-free carbides (cermets) by nanostructured multilayer composite coatings." Bulletin of Bryansk state technical university 2014, no. 3 (2014): 20–25. http://dx.doi.org/10.12737/23193.

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This paper discusses the issues of improving the efficiency of cutting tool made of tungsten-free carbides (cermets) by using nano-dispersed multi-layered composite coatings formed by use of innovative processes of filtered cathodic vacuum arc deposition (FCVAD). Developed composi-tions of nano-structured multi-layered composite coatings contributes to significant improvement of properties of cutting tool made of cermets in cutting constructional steel and expansion of their application area for machining of heat-resistant alloys.

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45

Xu, Lan Xin, Peng Li, Jin Wang, et al. "Deposition of Diamond-Like Carbon Films on Polyoxymethylene Substrates by Magnetic Filtered Cathodic Vacuum Arc Deposition." Advanced Materials Research 47-50 (June 2008): 1415–18. http://dx.doi.org/10.4028/www.scientific.net/amr.47-50.1415.

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In order to improve the abrasion property of polyoxymethylene (POM)，diamond like carbon (DLC) film was deposited on POM substrate by the method of magnetic filtered cathodic vacuum arc deposition (MFCVAD). X-ray photoelectron spectroscopy (XPS) showed that the sp3 fraction decreased with the negative bias voltages increased. According to the result of the nano-indenter, the hardness of POM plates coated with DLC films was significantly harder than POM substrate. The results of ball-on-disc tribological testing demonstrated that the hardest DLC film had the lowest friction coefficient (0.11). T

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46

Jiang, Jie, Huayu Zhao, Xiaming Zhou, Shunyan Tao, and Chuanxian Ding. "Oxidation Resistance of Vacuum Plasma Sprayed CoNiCrAlY Coatings Modified by Filtered Cathodic Vacuum Arc Deposition Aluminizing." Journal of Thermal Spray Technology 22, no. 1 (2012): 69–74. http://dx.doi.org/10.1007/s11666-012-9866-7.

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47

Chen, J. S., S. P. Lau, G. Y. Chen, et al. "Deposition of iron containing amorphous carbon films by filtered cathodic vacuum arc technique." Diamond and Related Materials 10, no. 11 (2001): 2018–23. http://dx.doi.org/10.1016/s0925-9635(01)00474-5.

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48

Siemroth, P., and T. Schülke. "Copper metallization in microelectronics using filtered vacuum arc deposition — principles and technological development." Surface and Coatings Technology 133-134 (November 2000): 106–13. http://dx.doi.org/10.1016/s0257-8972(00)00883-5.

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49

Zhitomirsky, V. N., T. David, R. L. Boxman, et al. "Properties of SnO2 coatings fabricated on polymer substrates using filtered vacuum arc deposition." Thin Solid Films 492, no. 1-2 (2005): 187–94. http://dx.doi.org/10.1016/j.tsf.2005.06.061.

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50

Aramwit, C., S. Intarasiri, D. Bootkul, et al. "Effects of filtered cathodic vacuum arc deposition (FCVAD) conditions on photovoltaic TiO2 films." Applied Surface Science 310 (August 2014): 266–71. http://dx.doi.org/10.1016/j.apsusc.2014.01.097.

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