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Dissertations / Theses on the topic 'MEMS piezoresistive pressure sensor'

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Published: 3 June 2025

Last updated: 31 July 2025

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1

Olszacki, Michal. "Modelling and optimization of piezoresistive pressure sensors." Toulouse, INSA, 2009. http://eprint.insa-toulouse.fr/archive/00000297/.

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Depuis 1954, où l’effet piézorésistif a été découvert dans Silicium, la démarche pour mesurer la pression a changé et de nouveaux dispositifs avec des performances remarquables sont apparus sur le marché. Grâce au développement des microtechnologies, une nouvelle famille de capteurs de pression piézorésistifs miniatures s’est ainsi progressivement imposée pour de nombreuses applications. Même si le principe de fonctionnement des capteurs de pression piézorésistif en silicium reste le même depuis de nombreuses années, l’optimisation des capteurs pour une application donnée reste toujours une ét

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2

Aiyar, Avishek R. "Microfabrication of a MEMS piezoresistive flow sensor - materials and processes." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/24696.

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3

Ibrahim, Amr. "Remotely interrogated MEMS pressure sensor." Thesis, University of Glasgow, 2012. http://theses.gla.ac.uk/4149/.

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This thesis considers the design and implementation of passive wireless microwave readable pressure sensors on a single chip. Two novel-all passive devices are considered for wireless pressure operation. The first device consists of a tuned circuit operating at 10 GHz fabricated on SiO2 membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that a passive resonant circuit detunes. The circuit is remotely interrogated to read off the sensor data. The chip area is 20 mm2 and the membrane area is 2mm2 with thickness of 4 µm. Two on chip passive r

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4

Waterfall, Tyler Lane. "Design of Piezoresistive MEMS Force and Displacement Sensors." Diss., CLICK HERE for online access, 2006. http://contentdm.lib.byu.edu/ETD/image/etd1549.pdf.

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5

Tan, T. H. "Silicon piezoresistors for MEMS pressure sensor applications." Thesis, Queen's University Belfast, 2014. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.677842.

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Silicon based micromachining technology enables the realization of high performance micro electromechanical systems (MEMS) including a range of physical and environmental sensors. Pressure sensors are used for a wide range of monitoring and control applications, e.g. environmental, industrial, aircraft, automotive. Monitoring of vehicle tyre pressures offers benefits such as improved safety, fuel economy, and tyre life. Micromachined pressure sensors are used at present, but require further research to improve their performance in terms of size, power consumption and manufacturing cost. This t

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6

Chen, Xiaopei. "Fiber Optic Pressure Sensor Fabrication Using MEMS Technology." Thesis, Virginia Tech, 2003. http://hdl.handle.net/10919/32744.

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A technology for fabricating fiber optic pressure sensors is described. This technology is based on intermediate-layer bonding of a fused silica ferrule to a patterned, micro-machined fused silica diaphragm, providing low temperature fabrication of optical pressure sensor heads that can operate at high temperature. Fused silica ferrules and fused silica diaphragms are chosen to reduce the temperature dependence. The fused silica diaphragms have been micro-machined using wet chemical etching in order to form extrinsic Fabry-Perot (FP) interferometric cavities. Sol-gel is used as an inter

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7

Rathore, Pradeep Kumar. "Cmos compatible mems structures for pressure sensing applications." Thesis, IIT Delhi, 2015. http://localhost:8080/iit/handle/2074/6894.

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8

Abeysinghe, Don Chandana. "Novel MEMS Pressure and Temperature Sensors Fabricated on Optical Fibers." University of Cincinnati / OhioLINK, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin997987327.

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9

Tosolini, Giordano. "Force sensors based on piezoresistive and MOSFET cantilevers for biomolecular sensing." Doctoral thesis, Universitat Autònoma de Barcelona, 2013. http://hdl.handle.net/10803/131408.

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Los procesos de reconocimiento biomolecular entre receptores y ligandos son muy importantes en biología. Estas biomoléculas pueden desarrollar complejos muy específicos y tener una variedad de funciones como replicación y transcripción genómica, actividad enzimática, respuesta inmune, señalamiento celular, etc. La complementariedad inequívoca mostrada por estos componentes biológicos es ampliamente utilizada para desarrollar biosensores. Dependiendo de la naturaleza de las señales que se convierten, los biosensores pueden ser clasificados en ópticos, eléctricos o mecánicos. Entre los sensores

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10

Li, Gang. "Piezoresistive pressure sensor with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon /." View abstract or full-text, 2004. http://library.ust.hk/cgi/db/thesis.pl?ELEC%202004%20LIG.

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11

Anderås, Emil. "Advanced MEMS Pressure Sensors Operating in Fluids." Doctoral thesis, Uppsala universitet, Fasta tillståndets elektronik, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-173182.

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Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors. In this thesis two different pressure sensor techniques are studied. The first concerns ways to improve the sensitivity in the most commonly occurring pressure sensor, namely such based on the piezoresistive technique. Since the giant piezoresistive effect was observed in silicon nanowires, it was assumed that a similar effect could be expected in nano-thin silicon films. However,

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12

Law, Jesse Townsend. "Application of the van der Pauw structure as a piezoresistive pressure sensor a numerical study /." Thesis, Montana State University, 2007. http://etd.lib.montana.edu/etd/2007/law/LawJ0807.pdf.

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13

Ozgeneci, Ercin Mehmet. "Mems Sensor Based Underwater Ahrs(attitude And Heading Reference System) Aided By Compass And Pressure Sensor." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614619/index.pdf.

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Attitude and Heading angles are crucial parameters for navigation. Conventional navigation methods mostly uses IMU and GPS devices to calculate these angles. MEMS technology offers small sized, low cost IMU sensors with moderate performance. However, GPS cannot be used in underwater. Therefore, different aiding sensors are used in underwater vehicles in order to increase the accuracy. As the accuracy of devices increases, the cost of these devices also increases. In this thesis, rather than using GPS and high quality IMU sensors, low cost MEMS IMU sensor is used together with a magnetometer an

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14

Johari, Houri. "Development of MEMS Sensors for Measurements of Pressure, Relative Humidity, and Temperature." Digital WPI, 2003. https://digitalcommons.wpi.edu/etd-theses/815.

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Continued demands for better control of the operating conditions of structures and processes have led to the need for better means of measuring temperature (T), pressure (P), and relative humidity (RH). One way to satisfy this need is to use MEMS technology to develop a sensor that will contain, in a single package, capabilities to simultaneously measure T, P, and RH of its environment. Because of the advantages of MEMS technology, which include small size, low power, very high precision, and low cost, it was selected for use in this thesis. Although MEMS sensors that individually measure T

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15

LI, CHUNYAN. "POLYMER FLIP-CHIP BONDING OF PRESSURE SENSORS ON FLEXIBLE KAPATON FILM FOR NEONATAL CATHETERS." University of Cincinnati / OhioLINK, 2004. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1085764407.

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16

Bertolini, Mayara Cristina. "Flexible and 3D printable conductive composites for pressure sensor applications." Doctoral thesis, Università degli studi di Trento, 2022. https://hdl.handle.net/11572/360281.

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O objetivo deste estudo foi o desenvolvimento de compósitos poliméricos flexíveis e altamente condutores elétricos preparados por moldagem por compressão e por fabricação de filamentos fundidos (FFF) para possíveis aplicações como materiais piezoresistivos ou piezoelétricos para sensores de compressão. Compósitos baseados em misturas de poli(fluoreto de vinilideno)/poliuretano termoplástico (PVDF/TPU) como matriz e contendo várias frações de negro de fumo-polipirrol (CB-PPy) como aditivo condutor foram preparados. Diversas técnicas de caracterização foram realizadas para avaliar as propriedade

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17

Kinnell, Peter Ken. "The development of selective strain coupling structures for a novel MEMS resonant pressure sensor." Thesis, University of Birmingham, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.422766.

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This thesis proposes a novel form of MEMS (micro electro mechanical system) resonant pressure sensor. The sensor incorporates a MEMS silicon resonator that is coupled to a macro scale metallic diaphragm. The combination of a large metallic diaphragm with a micro engineered MEMS resonator required an innovative selective strain coupling structure to be designed. Without the proposed coupling structure, unwanted packaging or thermally induced strain would severely degrade sensor performance, resulting in resonator misalignment, or unwanted strain loading. The feasibility of the proposed device i

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18

De, Clerck Albrey Paul. "Modeling the Thermal Performance of an Intelligent MEMS Pressure Sensor with Self-Calibration Capabilities." Thesis, Virginia Tech, 2020. http://hdl.handle.net/10919/100688.

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Recent industry trends toward more complex and interconnected systems have increased the demand for more reliable pressure sensors. One of the best methods to ensure reliability is by regularly calibrating the sensor, checking its functionality and accuracy. By integrating a micro-actuator with a pressure sensor, the sensor can self-calibrate, eliminating the complexities and costs associated with traditional sensor calibration methods. The present work is focused on furthering understanding and improving the thermal performance of a thermopneumatic actuated self-calibrating pressure sensor.

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19

Black, Richard Allyn. "A flush mounted microelectromechanical system (MEMS) pressure and flow sensor based air data system /." Thesis, Connect to this title online; UW restricted, 1999. http://hdl.handle.net/1773/10012.

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20

Song, Chao. "Micromachined flow sensors for velocity and pressure measurement." Diss., Georgia Institute of Technology, 2014. http://hdl.handle.net/1853/52304.

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This research focuses on developing sensors for properties of aerodynamic interest (i.e., flow and pressure) based on low-cost polymeric materials and simple fabrication processes. Such sensors can be fabricated in large arrays, covering the surface of airfoils typically used in unmanned vehicles, allowing for the detection of flow separation. This in turn potentially enables, through the use of closed-loop control, an expansion of the flight envelope of these vehicles. A key advance is compensation for the typically inferior performance of these low cost materials through both careful design

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21

Naeli, Kianoush. "Optimization of piezoresistive cantilevers for static and dynamic sensing applications." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2009. http://hdl.handle.net/1853/28247.

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Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009.<br>Committee Chair: Brand, Oliver; Committee Member: Adibi, Ali; Committee Member: Allen, Mark G.; Committee Member: Bottomley, Lawrence A.; Committee Member: Degertekin, F. Levent.

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22

Larsen, Gerrit T. "Piezoresistive Models for Polysilicon with Bending or Torsional Loads." Diss., CLICK HERE for online access, 2009. http://contentdm.lib.byu.edu/ETD/image/etd3165.pdf.

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23

SARAN, ANISH. "MEMS BASED FABRY PEROT PRESSURE SENSOR AND NON-ADHESIVE INTEGRATION ON OPTICAL FIBER BY ANODIC BONDING." University of Cincinnati / OhioLINK, 2004. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1084719088.

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24

Goericke, Fabian Thomas. "Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/24624.

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25

Savaris, Weslin Keven. "Caracterização do compósito piezoresistivo Cu-PDMS para uso como sensor de pressão /." Ilha Solteira, 2020. http://hdl.handle.net/11449/192135.

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Orientador: Marcelo Augusto Assunção Sanches<br>Resumo: Recentes estudos têm abordado o aprimoramento de sensores de pressão com a finalidade de reproduzir a sensibilidade da pele humana para ser utilizada em robôs. Dentre diversos materiais disponíveis na literatura, destaca-se o material piezoresistivo à base do elastômero Polidimetilsiloxano e Cobre Dendritico (Cu-PDMS), devido à tecnologia empregada na produção destes sensores. Este trabalho trata a síntese e a caracterizações de compósitos piezoresistivo Cu-PDMS para confecção de sensores de pressão, na forma matricial, para aplicações bi

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26

Lohrer, John. "Smart Prosthetic for Lower Limb Amputees Utilizing a Novel Shear and Normal Force Sensor." University of Cincinnati / OhioLINK, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1504803734497035.

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27

Li, Weizhuo. "Wavelength Multiplexing of MEMS Pressure and Temperature Sensors Using Fiber Bragg Gratings and Arrayed Waveguide Gratings." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1123972586.

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28

Aravamudhan, Shyam. "Development of micro/nanosensor elements and packaging techniques for oceanography." [Tampa, Fla.] : University of South Florida, 2007. http://purl.fcla.edu/usf/dc/et/SFE0002219.

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29

Garcia, Vitor. "Sensor de pressão microeletronico baseado no efeito piezoMOS." [s.n.], 2006. http://repositorio.unicamp.br/jspui/handle/REPOSIP/261754.

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Orientador: Fabiano Fruett<br>Dissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Eletrica e de Computação<br>Made available in DSpace on 2018-08-06T06:47:54Z (GMT). No. of bitstreams: 1 Garcia_Vitor_M.pdf: 2431852 bytes, checksum: 99df32075176f9b0322278b0ce286ba5 (MD5) Previous issue date: 2006<br>Resumo: Apresentamos neste trabalho um sensor de pressão de baixo consumo de potência. totalmente compatível com o processo de fabricação CMOS. constituído por um amplificador operacional sensível ao estresse mecânico fabricado sobre uma membrana. O desenho do layou

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30

Hou, Stephen Ming-Chang 1981. "Design and fabrication of a MEMS-array pressure sensor system for passive underwater navigation inspired by the lateral line." Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/75454.

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Thesis (Elec. E.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.<br>This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.<br>Cataloged from student-submitted PDF version of thesis.<br>Includes bibliographical references (p. 233-241).<br>An object within a fluid flow generates local pressure variations that are unique and characteristic to the object's shape and size. For example, a three-dimensional object or a wall-like obstacle obstructs flow and c

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31

Wu, Zhizhen. "Flexible Microsensors based on polysilicon thin film for Monitoring Traumatic Brain Injury (TBI)." University of Cincinnati / OhioLINK, 2017. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1512045589967871.

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32

Samoei, Victor K. "Fabrication and Characterization of Thin film Pressure Sensors using Novel Materials." University of Toledo / OhioLINK, 2020. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1596762165322848.

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33

Pekárek, Jan. "Výzkum a vývoj moderních emisních senzorů typu MEMS." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-233623.

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The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material

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34

Pekárek, Jan. "Katodové nanostruktury v MEMS aplikacích." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-217244.

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The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage.

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35

Khaji, Zahra. "Extending Microsystems to Very High Temperatures and Chemically Harsh Environments." Doctoral thesis, Uppsala universitet, Mikrosystemteknik, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-302658.

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Aiming at applications in space exploration as well as for monitoring natural hazards, this thesis focuses on understanding and overcoming the challenges of extending the applicability of microsystems to temperatures above 600°C as well as chemically harsh environments. Alumina and zirconia high-temperature co-fired ceramics (HTCC) with platinum as the conductor material, have in this thesis, been used to manufacture a wide range of high-temperature tolerant miniaturized sensors and actuators, including pressure and flow sensors, valves, a combustor, and liquid monopropellant microthrusters. I

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36

Jeedigunta, Sathyaharish. "Growth and characterization of nanocrystalline diamond films for microelectronics and microelectromechanical systems." [Tampa, Fla] : University of South Florida, 2008. http://purl.fcla.edu/usf/dc/et/SFE0002532.

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37

Ibarra, Alejandro Rafael Garcia. "Desenvolvimento de transmissores de pressão diferencial baseados em sensores piezoresistivos e saída analógica de 4-20 mA." Universidade de São Paulo, 2014. http://www.teses.usp.br/teses/disponiveis/3/3140/tde-19032015-163304/.

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Este projeto de pesquisa apresenta o desenvolvimento de protótipos de transmissores industriais de pressão do tipo diferencial piezoresistivo com saída analógica a dois fios 4-20 mA. Os dispositivos usam um DSSP (processador digital de sinal do sensor) para realizar compensação térmica nas temperaturas de 0°C até 80°C e a calibração de pressão diferencial na faixa de 0-25 bard e de pressão de linha de 0-7 barg. Os transmissores permitem a leitura de diversas variáveis industriais: pressão diferencial, pressão relativa e pressão absoluta em fluidos. Os transmissores têm um TEB (total error band

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38

Billot, Margot. "Etude et développement d'un capteur de microforce pour la caractérisation de la nanofriction multi-aspérités en micromanipulation dextre." Thesis, Besançon, 2016. http://www.theses.fr/2016BESA2005/document.

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L’objectif de cette thèse est le développement d’un nouveau capteur de forcemulti-axes destiné à mesurer les composantes de friction impliquées dans lecontact doigt/objet lors la micromanipulation dextre. Des études théoriques etdes simulations par éléments finis ont conduit à la conception de ce capteurMEMS piézorésistif composé d’une plate-forme centrale munie d’une microbille,entourée d’une table compliante. D’après les résultats de simulations, ce capteur estcapable de mesurer indépendamment les forces normales et de frottement (couplageréciproque inférieure à 1%) avec une bonne sensibilit

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Singh, Jaspreet. "Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement." Thesis, 2014. http://etd.iisc.ac.in/handle/2005/3132.

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Now-a-days sensors are not limited only to industry or research laboratories but have come to common man’s usage. From kids toys to house hold equipment like washing machine, microwave oven as well as in automobiles, a wide variety of sensors and actuators can be easily seen. The aim of the present thesis work is to discuss the design, development, fabrication and testing of miniaturized piezoresistive, absolute type, low pressure sensor and flow sensor. Detailed performance study of these sensors in different ambient conditions (including harsh environment such as radiation, temperature etc.

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Singh, Jaspreet. "Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement." Thesis, 2014. http://hdl.handle.net/2005/3132.

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Now-a-days sensors are not limited only to industry or research laboratories but have come to common man’s usage. From kids toys to house hold equipment like washing machine, microwave oven as well as in automobiles, a wide variety of sensors and actuators can be easily seen. The aim of the present thesis work is to discuss the design, development, fabrication and testing of miniaturized piezoresistive, absolute type, low pressure sensor and flow sensor. Detailed performance study of these sensors in different ambient conditions (including harsh environment such as radiation, temperature etc.

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41

Chung-Hsien, Yang, and 楊忠憲. "The Study and Fabrication of Advanced Piezoresistive Pressure and Shear-Stress Sensors by Micro-Electro-Mechanical System(MEMS) Technologies." Thesis, 2000. http://ndltd.ncl.edu.tw/handle/51715769660576297106.

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碩士<br>國立成功大學<br>電機工程學系<br>88<br>Based on computer finite element analysis ANSYS5.3 and micro-electro-mechanical system(MEMS) technologies, monolithic silicon micro pressure and shear-stress sensors have been designed and fabricated. The sensors employ one or two four-terminal shear-stress sensitive piezoresistive transverse voltage strain gauge in place of the conventional Wheatstone bridge construction. In the developed pressure sensor, a square diaphragm with 3000X3000X100 um3 is formed by bulk micromachining of an n-type <100> monolithic silicon in KOH solution. The gauge, which

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42

Chu, Huey-Chi, and 朱惠祺. "Surface micromachined piezoresistive pressure sensor." Thesis, 1996. http://ndltd.ncl.edu.tw/handle/58138727480873005145.

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碩士<br>國立臺灣大學<br>應用力學研究所<br>84<br>Surface micromachined piezoresistive pressure sensor has been designed, modeled, and fabricated. The optimal position, orientation, and length of effective resistors on circular and square plate have been found. The sensitivity of 0.15 mV/V/psi could be achieved by the optimization design. The linearity error of pressure sensor is dominated by the large deflection of plates. The strain under large deflection of circular and square plates could be solved by t

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43

Lin, Shi-Zheng, and 林世政. "Characteristics Testing on a Underwater Piezoresistive MEMS sensor and its application." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/25610964460467950649.

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碩士<br>國立成功大學<br>系統及船舶機電工程學系碩博士班<br>94<br>This study focus on establishing the standard characteristics testing on MEMS sensor. Also the application and promotion for underwater acoustic MEMS sensor are our goal. These testing sensors are piezoresistive sensors which fabricated by MEMS process. Comparing with the commercial hydrophone B&K 8104, MEMS sensors have better sensitivity. 　We build an auto sweep frequency program for users. To set the initial frequency, interval frequency and end frequency coefficients, the program can automatically generate the user-defined swept frequencies. By cha

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Cheng, Wei-Ren, and 鄭惟仁. "Design and Fabrication on the Piezoresistive Low Pressure Sensor." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/76821998187861427274.

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碩士<br>國立清華大學<br>動力機械工程學系<br>98<br>This study develops a piezoresistive low pressure sensor which sensing range is defined below to 1psi. The sensing range of this target is in the range of human breath. Thus, the application lies in the medical instrument and monitoring systems. The low pressure sensor can detect the amplitude and frequency of the breath to monitor and record the breathing conditions of patients or elders for analyzing or emergency requests. In order to find out the significant structure factors for device performance and fabrication yield, this study builds complete platform

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45

Pinela, Nuno Miguel Gonçalves. "Piezoresistive Pressure Sensor for application in e-skin devices." Master's thesis, 2017. http://hdl.handle.net/10362/26672.

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(ENG) In recent years, the advancement of science and technology tends to evolve towards the exploitation of electronic skin (e-skin) and functional prosthetic devices, enabling innovating applications in various fields such as biomedical systems, sports health-monitoring and healthcare. Owing to their significant role in health monitoring, pressure sensors come as essential components in the development of artificial systems that can mimic the impressive human skin. The development of such sensors comprises the search for flexible and stretchable materials suitable for implementation in

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46

Chen, Wei-Jie, and 陳瑋杰. "Development of a piezoresistive real-time blood pressure sensor." Thesis, 2016. http://ndltd.ncl.edu.tw/handle/61120546990567638564.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>104<br>The objective of this thesis is to develop a blood-pressure measuring method for providing a real-time monitoring and early warning of cardiovascular diseases. The major disadvantages of the commonly-used sphygmomanometers found on the market are bulky and heavy for outdoor applications. In this thesis, we develop a wearable, blood-pressure measuring device with a light weight and small volume. In this thesis, the proposed noninvasive measuring technique is based on detecting surface deformations of human skins and then calculating the blood pressures. With t

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Hsieh, Po-Tsung, and 謝伯宗. "Double bridge temperature compensation technique for piezoresistive pressure sensor." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/20651345611612742400.

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碩士<br>義守大學<br>電子工程學系<br>90<br>A main problem associated with piezoresistive pressure sensors is the cross sensitivity sensed among different temperature. The influence of temperature is manifested as a change in the span and offset of the sensor output. The output voltage and zero offset voltage of traditional piezoresistive pressure sensor under temperature variation have a large drift. The output result is also influenced. In this thesis, a new temperature compensation technique for a silicon pressure sensor is presented. We combine two sensors, the piezoresistive bridge and the compensation

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Lin, Yu-Ren, and 林昱任. "Design and Fabrication of Bulk Micromachined Piezoresistive Pressure Sensor." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/269ze9.

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碩士<br>國立中山大學<br>電機工程學系研究所<br>97<br>Utilizing the bulk and surface micromachining technologies, this thesis designed and fabricated a piezoresistive pressure microsensor for developing an in-vivo and real-time biomedical detection microsystem to monitor the uric pressure in patients’ bladder. In this study, the main processing steps include the implantation of a moderate boron ion concentration into the N-epitaxial silicon layer to form the piezoresistors, anisotropic etching the backside silicon substrate to create a cavity by 30% KOH solution in 80°C temperature, and anodic bonding of the sil

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Chang, Lung-Hsien, and 張龍現. "Fabrication and Characterization of Implantable Piezoresistive Micro Blood Pressure Sensor." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/50118855043625289923.

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碩士<br>國立雲林科技大學<br>機械工程系<br>102<br>This study is mainly to fabricate and characterize the implantable MEMS (micro-electro-mechanical systems) based piezoresistive micro blood pressure sensor (MBPS) for heart blood pressure monitoring. In this study, the MBPS chip has a dimension size of 700 μm by 700 μm and a thickness of 200 μm is fabricated successfully by using the standard ICs and MEMS processes. A 2 μm thick PECVD silicon dioxide thin film is used as the pressure sensing diaphragm which has a square size of 400 μm in length and the patterned poly-silicon (poly-Si) thin film material with a

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鄭宇舜. "The study and fabrication of piezoresistive pressure sensor by NEMS." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/39267801462822669424.

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碩士<br>南台科技大學<br>機械工程系<br>92<br>This work focuses on the processes of fabrication and simulation for a made by the bulk-machining technologies. By intensive cross checks among MEMS-related application software and one Finite Element Analysis software, improvements can be made both in shortening the process of building model of the micro pressure sensor and in speeding up its design verification. The optimization for the pressure sensor structure is also investigated. Regarding the analysis, the membranes 200*200μm and 400*400μm are chosen to study their changes of the resistances a

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