Relevant bibliographies by topics / Micro-electromechanical systems (MEMS)

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Micro-electromechanical systems (MEMS)'

Author: Grafiati
Published: 4 June 2021
Last updated: 26 July 2025

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Journal articles on the topic "Micro-electromechanical systems (MEMS)"

1

Kartunov, Stefan. "Micro-Electromechanical Systems In The Ecology." Environment. Technology. Resources. Proceedings of the International Scientific and Practical Conference 2 (August 5, 2015): 163. http://dx.doi.org/10.17770/etr2011vol2.981.

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In the present paper a definition, a model for building of MEMS (micro-electromechanical systems), types, their advantages and disadvantages have been given. The elements and the components, from which they are built, the development and the prediction of market about them have been considered as well more important firms, that manufacture them. A classification of MEMS is made on the basis of their designation and the region, where they operate. A special place is separated on the application of MEMS in the ecology as well as concrete examples are indicated – developments of firms and own one
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Jiang, Zhuangde. "Special issue: Micro-electromechanical systems (MEMS)." Frontiers of Mechanical Engineering 12, no. 4 (2017): 457–58. http://dx.doi.org/10.1007/s11465-017-0492-4.

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Polla, D. L., and L. F. Francis. "Ferroelectric Thin Films in Micro-electromechanical Systems Applications." MRS Bulletin 21, no. 7 (1996): 59–65. http://dx.doi.org/10.1557/s0883769400035934.

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Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devi
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Cao, Huiliang. "Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices." Micromachines 14, no. 12 (2023): 2134. http://dx.doi.org/10.3390/mi14122134.

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Shen, Yutong. "Current Status and Application of Micro-electromechanical Systems (MEMS)." Highlights in Science, Engineering and Technology 46 (April 25, 2023): 97–105. http://dx.doi.org/10.54097/hset.v46i.7685.

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MEMS (Micro-electromechanical systems), a technology that produces devices with tiny size and various abilities, has shown its great potential in many areas, but there are still many parts that wait to be improved. This paper would give a brief introduction of the technology with its features, superiorities and drawbacks. Based on these characteristics, several applications of the technology would be introduced with some specific examples. In this paper, current status with the advantages and disadvantages of MEMS would be discussed, and some improvements would be mentioned related to the prob
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Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.
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Abdelrassoul, Roshdy A. "MEMS and NEMS - micro (and nano) electromechanical systems." Advances in Computing and Engineering 2, no. 1 (2022): 58. http://dx.doi.org/10.21622/480.

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Abdelrassoul, Roshdy A. "MEMS and NEMS - micro (and nano) electromechanical systems." Advances in Computing and Engineering 2, no. 1 (2022): 60. http://dx.doi.org/10.21622/ace.2022.02.1.058.

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Altintas, Zeynep. "Editorial for the Special Issue on Biosensors and MEMS-Based Diagnostic Applications." Micromachines 12, no. 3 (2021): 229. http://dx.doi.org/10.3390/mi12030229.

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Feng, Xian Zhang, Liang Ji Chen, and Jun Wei Cheng. "Application and Prospects of Packaging Technology of MEMS." Key Engineering Materials 460-461 (January 2011): 274–79. http://dx.doi.org/10.4028/www.scientific.net/kem.460-461.274.

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Micro-electromechanical systems is called MEMS for short, it is the product of mutual integration for the micro-electronics and micro-mechanics, which covers mechanical, electrical, physical, biological and other modern technology. MEMS packaging is a key technology that has been developed based on electronic package technology. In order to strengthen the development of packaging process of MEMS, in particular, which are low cost, materials and packaging technology and has an ideal effect. The characteristics of MEMS packaging technology based on MEMS technologies are introduced, and the futur
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Dissertations / Theses on the topic "Micro-electromechanical systems (MEMS)"

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Wong, Christine Y. 1975. "Strategic outsourcing of micro-electromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/43726.

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Thesis (M.B.A.)--Massachusetts Institute of Technology, Sloan School of Management; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering; in conjunction with the Leaders for Manufacturing Program at MIT, 2002.<br>"June 2002."<br>Includes bibliographical references (leaves 60-61).<br>ABB Automation is starting to experiment with Micro-electrical Mechanical Systems (MEMS) as an enabling technology for their products. If ABB's implementation of MEMS is found successful, it will be able to create breakthrough products and services that will revolutionize
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Seth, Danny 1978. "A remotely automated microscope for characterizing micro electromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/86762.

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Jafaridinani, Kian. "Parameter estimation methods based on binary observations - Application to Micro-Electromechanical Systems (MEMS)." Phd thesis, Supélec, 2012. http://tel.archives-ouvertes.fr/tel-00756675.

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While the characteristic dimensions of electronic systems scale down to micro- or nano-world, their performance is greatly influenced. Micro-fabrication process or variations of the operating situation such as temperature, humidity or pressure are usual cause of dispersion. Therefore, it seems essential to co-integrate self-testing or self-adjustment routines for these microdevices. For this feature, most existing system parameter estimation methods are based on the implementation of high-resolution digital measurements of the system's output. Thus, long design time and large silicon areas are
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Spinello, Davide. "Instabilities in Multiphysics Problems: Micro- and Nano-electromechanical Systems, and Heat-Conducting Thermoelastoviscoplastic Solids." Diss., Virginia Tech, 2006. http://hdl.handle.net/10919/28829.

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We investigate (i) pull-in instabilities in a microelectromechanical (MEM) beam due to the Coulomb force and in MEM membranes due to the Coulomb and the Casimir forces, and (ii) thermomechanical instability in a heat-conducting thermoelastoviscoplastic solid due to thermal softening overcoming hardening caused by strain- and strain-rate effects. Each of these nonlinear multiphysics problems is analyzed by the meshless local Petrov-Galerkin (MLPG) method. The moving least squares (MLS) approximation is used to generate basis functions for the trial solution, and the basis for test functions is
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Khosrowabadi, Allen, Richard Gurr, and Amy Fleishans. "SUBMINIATURE GPS INERTIAL TIME SPACE POSITION INFORMATION." International Foundation for Telemetering, 2000. http://hdl.handle.net/10150/608299.

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International Telemetering Conference Proceedings / October 23-26, 2000 / Town & Country Hotel and Conference Center, San Diego, California<br>In the past few years, GPS has proven itself as an effective source of time space position information (TSPI) data for air vehicles. Currently, GPS truth systems are used to track aircraft ranging from low dynamic vehicles to high dynamic fighters. However, low-cost GPS TSPI instrumentation is not currently available for stores and weapons delivered by air vehicles. To date, data is collected by tracking dropped items using radar or optical means. This
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Maiorca, Felice. "Innovative Electromechanical Transduction Mechanisms for Piezoelectric Energy harvesting from Vibration: Toward Micro and Nano Electro-Mechanical Systems." Doctoral thesis, Università di Catania, 2015. http://hdl.handle.net/10761/3949.

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Vibration energy harvesting is one the hottest topics addressed by a big part of the scientific community. A lot of transduction mechanisms have been investigated and designed, based mechanical systems and transduction principles in order to recover energy coming from environmental vibrations. In this work, innovative transduction mechanisms will be described, suitable to harvesting energy from weak random vibrations, to rectifying and multiplying voltages avoiding the use of classic solutions based on diodes. Innovative devices will be introduced, based on nonlinear mechanical systems and pie
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Voyantzis, Mitchell D. "CloudMEMS Platform for Design and Simulation of MEMS: Physics Modules & End-to-End Testing." University of Toledo / OhioLINK, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=toledo1533226484963866.

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ISLAM, MOHAMMAD SAIFUL. "Reconfigurable RF and Wireless Architectures Using Ultra-Stable Micro- and Nano-Electromechanical Oscillators: Emerging Devices, Circuits, and Systems." Case Western Reserve University School of Graduate Studies / OhioLINK, 2020. http://rave.ohiolink.edu/etdc/view?acc_num=case1582167898995604.

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Perry, Richard. "Towards environmentally friendly electrodeposition : using citrate based electrolytes to deposit nickel and nickel-iron." Thesis, University of Edinburgh, 2016. http://hdl.handle.net/1842/16184.

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The production of magnetic materials is of great interest for use in the micro-fabrication industry. In particular, Permalloy (Ni80Fe20) is used in the production of micro-electromechanical systems (MEMS) due to its favourable magnetic properties (high relative permeability, low coercivity and high magnetic saturation). This leads to applications in devices such as inductors, transformers and micro-actuators. The electrodeposition of NiFe is also of fundamental electrochemical interest, as there is anomalous thermodynamic behaviour, with the less noble (iron) metal depositing preferentially to
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Thuau, Damien. "Fabrication and characterisation of carbon-based devices." Thesis, University of Edinburgh, 2012. http://hdl.handle.net/1842/5879.

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Thin film material properties and measurement characterisation techniques are crucial for the development of micro-electromechanical systems (MEMS) devices. Furthermore, as the technology scales down from microtechnology towards nanotechnology, nanoscale materials such as carbon nanotubes (CNTs) are required in electronic devices to overcome the limitations encountered by conventional materials at the nanoscale. The integration of CNTs into micro-electronics and material applications is expected to provide a wide range of new applications. The work presented in this thesis has contributed to t
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Books on the topic "Micro-electromechanical systems (MEMS)"

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Thomas, George, Cheng Z. -Y, and Society of Photo-optical Instrumentation Engineers., eds. Micro (MEMS) and nanotechnologies for space applications: 19-20 April, 2006, Kissimmee, Florida, USA. SPIE, 2006.

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P, Lee Abraham, American Society of Mechanical Engineers. MEMS Subdivision., and International Mechanical Engineering Congress and Exposition (2001 : New York, N.Y.), eds. Micro-electro-mechanical systems (MEMS)--2001: Presented at the 2001 ASME International Mechanical Engineering Congress and Exposition : November 11-16, 2001, New York, New York. American Society of Mechanical Engineers, 2001.

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ASME International Mechanical Engineering Congress and Exposition (2001 New York, N.Y.). Micro-electro-mechanical systems: MEMS -- 2001 : presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York. American Society of Mechanical Engineers, 2001.

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Boundary Layer Control Using Micro-Electromechanical systems (MEMS). Storming Media, 2002.

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Dechev, Nikolai. Microassembly of 3D microstructures and micro-electromechanical systems (MEMS). 2004.

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(Editor), Osamu Tabata, Toshiyuki Tsuchiya (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), and Jan G. Korvink (Series Editor), eds. Reliability of MEMS (Advanced Micro and Nanosystems). Wiley-VCH, 2008.

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Brand, Oliver, Jan G. Korvink, Henry Baltes, Gary K. Fedder, and Christofer Hierold. Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley & Sons, Limited, John, 2008.

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Korvink, J. G., Oliver Brand, Henry Baltes, Gary K. Fedder, and C. Hierold. Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley-VCH Verlag GmbH, 2013.

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Brand, Oliver, Jan G. Korvink, Henry Baltes, Gary K. Fedder, and Christofer Hierold. Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems. Wiley & Sons, Incorporated, John, 2013.

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George, Thomas. Micro (Mems) And Nanotechnologies for Space Applications. Society of Photo Optical, 2006.

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Book chapters on the topic "Micro-electromechanical systems (MEMS)"

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Colinge, Cynthia A. "Wafer Bonding for Micro-ElectroMechanical Systems (MEMS)." In Perspectives, Science and Technologies for Novel Silicon on Insulator Devices. Springer Netherlands, 2000. http://dx.doi.org/10.1007/978-94-011-4261-8_26.

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Naghib, Seyed Morteza, and Yasaman Rezaeian. "Microfluidic Micropumps: Advancing Biomedical Applications with Micro Electromechanical-Based Systems (MEMS)." In Series in BioEngineering. Springer Nature Switzerland, 2025. https://doi.org/10.1007/978-3-031-88419-1_4.

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Kurina, G. A., J. M. Balthazar, and A. M. Tusset. "Using Different Approximations of Averaging Method in Theory of Micro Electromechanical Systems (MEMS)." In Mechanisms and Machine Science. Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-60694-7_21.

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Lenk, Claudia, Kalpan Ved, Steve Durstewitz, Tzvetan Ivanov, Martin Ziegler, and Philipp Hövel. "Bio-inspired, Neuromorphic Acoustic Sensing." In Springer Series on Bio- and Neurosystems. Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-36705-2_12.

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AbstractWe present an overview of recent developments in the area of acoustic sensing that is inspired by biology and realized by micro-electromechanical systems (MEMS). To support understanding, an overview of the principles of human hearing is presented first. After the review of bio-inspired sensing systems, we continue with an outline of an adaptable acoustic MEMS-based sensor that offers adaptable sensing properties due to a simple, real-time feedback. The transducer itself is based on an active cantilever, which offers the advantage of an integrated deflection sensing based on piezoresis
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Lyshevski, Sergey Edward. "Control of MEMS and NEMS." In Nano- and Micro-Electromechanical Systems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315219288-9.

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Lyshevski, Sergey Edward. "Fundamentals of Microfabrication and MEMS Fabrication Technologies." In Nano- and Micro-Electromechanical Systems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315219288-4.

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Lyshevski, Sergey Edward. "Devising and Synthesis of NEMS and MEMS." In Nano- and Micro-Electromechanical Systems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315219288-5.

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Lyshevski, Sergey Edward. "Examples in Synthesis, Analysis, Design, and Fabrication of MEMS." In Nano- and Micro-Electromechanical Systems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315219288-10.

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Lyshevski, Sergey Edward. "Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures." In Mems and Nems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315220246-5.

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Tuna, Gurkan, and Vehbi Cagri Gungor. "Micro-Electromechanical Systems for Underwater Environments." In Handbook of Research on Recent Developments in Intelligent Communication Application. IGI Global, 2017. http://dx.doi.org/10.4018/978-1-5225-1785-6.ch020.

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Underwater networking technologies have brought us unforeseen ways to explore the unexplored aquatic environment and this way provided us with a large number of different kinds of applications for environmental, scientific, commercial, and military purposes. Although precise and continuous aquatic environment monitoring capability is highly important for various underwater applications, due to the unique characteristics of underwater networks such as low communication bandwidth, high error rate, node mobility, large propagation delay, and harsh underwater environmental conditions, existing sol
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Conference papers on the topic "Micro-electromechanical systems (MEMS)"

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Alvarez Castaño, Maria Isabel, Ye Pu, Felix Wechsler, Jorge Madrid-Wolff, and Christophe Moser. "Implementation of a micro electromechanical system (MEMS) phase-only light modulator (PLM) for holographic volumetric additive manufacturing." In Emerging Digital Micromirror Device Based Systems and Applications XVII, edited by Benjamin L. Lee and Alex Lyubarsky. SPIE, 2025. https://doi.org/10.1117/12.3043069.

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Cheung, Catherine, Jobin Puthuparampil, Julio Valdés, and Shashank Pant. "Manoeuvre Recognition Using A Low-Cost Standalone MEMS-IMU System." In Vertical Flight Society 72nd Annual Forum & Technology Display. The Vertical Flight Society, 2016. http://dx.doi.org/10.4050/f-0072-2016-11469.

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This paper describes the use of a low-cost standalone MEMS-IMU (micro-electromechanical system - inertial measurement unit) sensor system developed by the National Research Council Canada (NRC) for manoeuvre recognition in helicopters. The system records accelerations, angular rotation rates, magnetic flux, altitude, location and velocity through its IMU and GPS. The MEMS-IMU system was flown on the Bell 206 helicopter operated by the NRC Flight Research Laboratory in two unscripted flight tests. Comparison of the system's measurements with those of the helicopter's inertial navigation system
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Farrar, D. "Controlling Micro ElectroMechanical Systems (MEMS) in Space." In SPACE TECHNOLOGY AND APPLICATIONS INT.FORUM-STAIF 2003: Conf.on Thermophysics in Microgravity; Commercial/Civil Next Generation Space Transportation; Human Space Exploration; Symps.on Space Nuclear Power and Propulsion (20th); Space Colonization (1st). AIP, 2003. http://dx.doi.org/10.1063/1.1541293.

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Zunino III, James L., and Donald Skelton. "Department of Defense need for a micro-electromechanical systems (MEMS) reliability assessment program." In MOEMS-MEMS Micro & Nanofabrication, edited by Danelle M. Tanner and Rajeshuni Ramesham. SPIE, 2005. http://dx.doi.org/10.1117/12.602257.

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Schoen, F., M. Nawaz, T. Bever, et al. "Temperature Compensation in Silicon-Based Micro-Electromechanical Resonators." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805525.

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Bertke, Maik, Svenja Schudak, and Roman Ostholt. "Glass as A Functional Material for Micro Electromechanical Systems." In 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2024. http://dx.doi.org/10.1109/mems58180.2024.10439553.

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Zou, Xuecui, Sally Ahmed, and Hossein Fariborzi. "Design and Demonstration of Micro-Electromechanical Resonator-Based Multipliers." In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2021. http://dx.doi.org/10.1109/mems51782.2021.9375351.

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Molinero, David, and Shawn J. Cunningham. "Integrated electro-optical wafer level dynamic characterization of micro-electromechanical systems." In 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP). IEEE, 2019. http://dx.doi.org/10.1109/dtip.2019.8752628.

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Reissman, Timothy, Ephrahim Garcia, Nicolae Lobontiu, and Yoonsu Nam. "Transfer function characterization of thermally-actuated displacement-amplified micro-electromechanical systems (MEMS)." In Smart Structures and Materials, edited by Vijay K. Varadan. SPIE, 2006. http://dx.doi.org/10.1117/12.658590.

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Rochus, Ve´ronique, Jean-Claude Golinval, and Christophe Geuzaine. "Dual Approach for Electromechanical Coupling in MEMS." In ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2009. http://dx.doi.org/10.1115/detc2009-87791.

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In this paper we present an approach for the computation of coupled electromechanical problems in micro-electromechanical systems based on a vector potential formulation of the electrostatic problem. This formulation is the dual of the scalar potential approach commonly used in the literature. We present an analytic derivation of the force computed using this dual method based on the virtual work principle, and compare the primal and dual approaches on the finite element solution of simple two-dimensional test-cases.
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Reports on the topic "Micro-electromechanical systems (MEMS)"

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Feddema, J. T., R. Simon, M. Polosky, and T. Christenson. Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components. Office of Scientific and Technical Information (OSTI), 1999. http://dx.doi.org/10.2172/5833.

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Giedd, Ryan, Matt Curry, Paul Durham, and Norm Dobson. Biosensors Made From Carbon and Polymer Composite Micro-Electromechanical Systems (MEMS). Defense Technical Information Center, 2004. http://dx.doi.org/10.21236/ada426181.

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Giedd, Ryan, Matt Curry, Paul Durham, and Norm Dobson. Biosensors Made from Carbon and Polymer Composite Micro-Electromechanical Systems (MEMS). Defense Technical Information Center, 2003. http://dx.doi.org/10.21236/ada419760.

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Hudson, Tracy D., and Michael S. Kranz. Operation of Silicon-on-Insulator (SOI) Micro-ElectroMechanical Systems (MEMS) Gyroscopic Sensor as a Two-Axis Accelerometer. Defense Technical Information Center, 2012. http://dx.doi.org/10.21236/ada559286.

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Murphy, Brianna, and Roger Kaul. High-impedance Buffer Amplifier For Micro-electromechanical System (MEMS) Resonator Measurements. Defense Technical Information Center, 2010. http://dx.doi.org/10.21236/ada531283.

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