Relevant bibliographies by topics / Photomath

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Photomath'

Author: Grafiati
Published: 2 June 2025
Last updated: 31 July 2025

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Journal articles on the topic "Photomath"

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Nur Aisyah and Yahfizham Yahfizham. "Studi Literatur: Analisis Kemampuan Berfikir Komputasi Menggunakan Software Matematika Photomath Tingkat SMA." Jurnal Arjuna : Publikasi Ilmu Pendidikan, Bahasa dan Matematika 2, no. 3 (2024): 147–55. http://dx.doi.org/10.61132/arjuna.v2i3.829.

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Developing computational thinking skills in the modern era of mathematics education is becoming increasingly important. Mathematical software such as Photomath offers exciting potential in supporting the development of these capabilities. This article presents an in-depth analysis of the role of Photomath in developing students' computational thinking skills through a literature review study. By identifying and evaluating relevant literature, this article explains Photomath's contribution to the understanding of mathematical concepts and problem-solving processes. The results of the analysis p
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Hulagpos, Daniel Russ, Mycel Gabertan, Heroshe April Rojas, John Rey Damasco, Randja Rana Meliston, and Kim Querido Sipin. "Enhancing Independent Learning and Academic Performance in Algebra Through Photomath Application." International Journal of Studies in Education and Science 6, no. 2 (2025): 149–63. https://doi.org/10.46328/ijses.138.

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This study investigates the effectiveness of incorporating Photomath, a mobile application, in enhancing independent learning and academic performance of Grade 7 students in Algebra. The research aims to explore the potential of Photomath in improving students' understanding and retention of algebraic concepts and their ability to solve problems independently. A mixed-methods approach was employed, involving a quasi-experimental design and survey questionnaires. The results show that students who used Photomath significantly improved their academic performance and demonstrated increased confid
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Daguinotan, Jocel Heart N., Jhasmin Joy M. Gamba, Maxine Shania S. Gonzales, and Hazel Angela M. Dajao. "Utilization of Photomath Among Grade 7 Junior High School Students." Journal of Learning and Educational Policy, no. 42 (March 29, 2024): 31–39. http://dx.doi.org/10.55529/jlep.42.31.39.

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This study investigates the efficacy of introducing the Photomath mobile app into the mathematics curriculum for Grade 7 students. The study takes a mixed-methods approach, combining quantitative analysis and qualitative observations to assess Photomath's impact on students' learning results. The study intends to offer light on how Photomath affects students' mathematical knowledge, problem-solving abilities, and overall academic achievement via the lens of educational technology. The quantitative component entails examining pre- and post-intervention assessment scores and comparing the perfor
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Oktaviani, Rima Dwi, Tsamrotul Ilmiah, Nadirotus Sholihah, Rozita Apriliyani, and Imron Fauzi. "Pemanfaatan Aplikasi Photomath Sebagai Media Pemecahan Masalah Matematis." RANGE: Jurnal Pendidikan Matematika 4, no. 1 (2022): 40–54. http://dx.doi.org/10.32938/jpm.v4i1.2539.

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Tujuan dari penelitian ini adalah untuk mendeskripsikan pemanfaatan aplikasi photomath sebagai media pemecahan masalah matematis. Metode penelitian yang digunakan adalah metode penelitian kualitatif dengan pendekatan deskriptif. Teknik pengumpulan data yang digunakan adalah penggunaan angket (kuesioner) berupa google form yang terdiri dari soal-soal matematika yang harus diselesaikan dengan menggunakan aplikasi photomath dan beberapa pertanyaan dengan lima pilihan jawaban serta jawaban bebas berupa pendapat dan saran yang diberikan oleh subjek penelitian terkait aplikasi photomath. Sumber data
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Rotinsulu, Disyan Zerahya, and Tanti Listiani. "Peran Guru dalam Meminimalisir Penggunaan Aplikasi Instan PhotoMath di Kelas Matematika." EDUKATIF : JURNAL ILMU PENDIDIKAN 5, no. 5 (2023): 1864–76. http://dx.doi.org/10.31004/edukatif.v5i5.4864.

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Siswa yang tidak bertanggung jawab dalam menggunaan PhotoMath akan cenderung menggunakan aplikasi ini untuk menyelesaikan soal matematika secara instan. Siswa yang terbiasa menggunakan PhotoMath, ciri-cirinya malas belajar, tidak hafal rumus, daya intelektual rendah, tidak dapat mengerjakan latihan soal dan senang copy-paste. Penggunaan model pembelajaran inkuiri dapat menjadi solusi untuk mengurangi ketergantungan siswa akan penggunaan PhotoMath. Guru akan membantu siswa memperoleh pengetahuan dengan berproses (tidak instan) menggunakan cara questioning. Artikel ini bertujuan untuk mengkaji a
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Sri Damayani and Yahfizham Yahfizham. "Systematic Literature Review: Pemanfaatan Aplikasi Photomath Sebagai Media Belajar Matematika." Bilangan : Jurnal Ilmiah Matematika, Kebumian dan Angkasa 2, no. 3 (2024): 46–52. http://dx.doi.org/10.62383/bilangan.v2i3.50.

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This research aims to identify the use of the photomath application as a mathematics learning medium. This research method uses the SLR (Systematic Literature Review) method. This systematic review identified 6 articles through the Google Scholar database published in 2019-2024. Data collection used the PRISMA procedure. The results of this research show that the photomath application is very helpful in learning activities, especially in mathematics lessons. The photomath application apart from making it easier for students in the learning process, the photomath application also helps teachers
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Siahaan, Meiva Marthaulina Lestari, Cecilia Novianti Salsinha, Lailin Hijriani, Selestina Nahak, and Farida Daniel. "Photomath application for learning algebra: Preliminary study on a school in border area." Indonesian Journal of Science and Mathematics Education 8, no. 1 (2025): 199. https://doi.org/10.24042/ijsme.v8i1.24297.

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This research was motivated by the shift in the educational paradigm toward technology-integrated learning and addresses the disparity in facilities between urban and border area schools. It aimed to determine the effect of Photomath on students' cognitive abilities and to assess their attitudes, motivation, belief, and readiness towards its use in a border area school. The instruments employed were pretest, posttest, and questionnaire. This research serves as an initial study on the use of technology in schools located in border areas. A mixed-method approach was employed, combining qualitati
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Hotimah, Husnul, and Pratiwi Dwi Warih S. "EFEKTIVITAS PENGGUNAAN APLIKASI PHOTOMATH UNTUK MENINGKATKAN PEMAHAMAN SISWA KELAS VIII PADA MATERI SPLDV DI SMPN 3 SUMBERASIH SATU ATAP." Jurnal Karya Pendidikan Matematika 12, no. 1 (2025): 29. https://doi.org/10.26714/jkpm.12.1.2025.29-40.

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Penelitian ini memiliki tujuan untuk menilai efektivitas penggunaan aplikasi Photomath untuk meningkatkan pemahaman siswa kelas VIII terhadap materi Sistem Persamaan Linear Dua Variabel (SPLDV) di SMP Negeri 3 Sumberasih Satu Atap. Metode yang diterapkan adalah pre-eksperimen dengan pendekatan kuantitatif, melibatkan 50 siswa berperan sebagai objek dalam studi ini. Informasi diperoleh melalui pretest dan posttest untuk mengevaluasi pemahaman siswa sebelum dan setelah penggunaan aplikasi Photomath dalam pembelajaran. Temuan penelitian mengindikasikan adanya peningkatan yang signifikan dalam pem
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Pikri, Aulia Zakial, Putri Yulia, and Rahmi Putri. "Photomath Applications for Learning Mathematics Analysis." Mathline : Jurnal Matematika dan Pendidikan Matematika 8, no. 2 (2023): 295–312. http://dx.doi.org/10.31943/mathline.v8i2.322.

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During the Covid-19 pandemic, the implementation of learning in schools underwent a change from face-to-face learning in class to online learning. One form of online defense that is carried out at SMPN 3 Sungaipuh is learning mathematics using the Photomath application. The purpose of this study was to determine the planning, implementation, evaluation and constraints encountered in learning Mathematics using the photomath application. This type of research use a descriptive qualitative analysis approach. Data collection techniques are observation, interviews, and documentation. The results of
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Fatmah, Gatia Lubna Siti, Novi Andri Nurcahyono, and Ana Setiana. "Pengaruh PhotoMath Terhadap Kemampuan Berpikir Kritis Siswa SMP Negeri 3 Sukabumi." Indiktika : Jurnal Inovasi Pendidikan Matematika 7, no. 2 (2025): 477–88. https://doi.org/10.31851/indiktika.v7i2.16423.

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Media pembelajaran PhotoMath adalah media pembelajaran berbasis alat elektronik yang dapat digunakan di smarthphone untuk membantu siswa dalam memecahkan masalah matematika. Saat ini, pembelajaran online yang tidak terikat tempat dan waktu yang didukung oleh kegiatan interaktif sangatlah penting. Penelitian ini bertujuan untuk melihat bagaimana PhotoMath mempengaruhi kemampuan berpikir kritis siswa di SMP Negeri 3 Sukabumi dengan menggunakan model Discovery Learning yang didukung PhotoMath. Dengan menggunakan pendekatan kuantitatif dan metode quasi eksperimental, penelitian ini melibatkan 112
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Dissertations / Theses on the topic "Photomath"

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McCallum, Martin. "Advanced photomask characterisation for microlithography." Thesis, University of Edinburgh, 2006. http://hdl.handle.net/1842/15319.

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This thesis addresses the characterisation of these advanced photomasks. There are many techniques published that produce advanced masks, but this work deals with two of the primary ones, advanced binary masks and alternating phase shift masks (altPSM). The work covered studies the methods of extracting the three dimensional structure of these masks and uses simulation to show what effect this has upon the waves propagating through them. The thesis deals with the way in which mask inspection systems image masks and the differences inherent between the way they observe defects and the way that
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Zanelli, Claudio, Dushyanth Giridhar, Manish Keswani, Nagaya Okada, Jyhwei Hsu, and Petrie Yam. "Acoustic characterization of two megasonic devices for photomask cleaning." SPIE-INT SOC OPTICAL ENGINEERING, 2016. http://hdl.handle.net/10150/622537.

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Wet photomask cleaning relies on megasonic agitation to enhance the process, but there are many challenges to reliably maximize particle removal efficiency (PRE) and minimize damage. With the shift to pellicle-free EUV masks, photomask processes are more vulnerable to contamination, increasing the urgency to improve the cleaning process. This difficulty is largely due to the unavailability of appropriate measurement of the acoustic field. Typically all that is known about the acoustic output is the driving frequency and the electric power delivered to a transducer, both global parameters that
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Kelley, Maureen. "Route Descriptions Using Maps, Photomaps, and Imagery: An Experimental Analysis." Thesis, University of Oregon, 2013. http://hdl.handle.net/1794/12999.

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Previous route description experiments conducted by psychologists show there are differences between males and females in the use of landmarks when describing routes. Previous research has shown that females used landmarks and egocentric forms of turn descriptors more often than males for route descriptions. This method is known as route knowledge in the spatial knowledge literature. Males, conversely, were seen to use fewer landmarks and more cardinal direction descriptions and standard distances when describing routes. Spatial knowledge literature terms this method survey knowledge. The
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Khoperia, T. N., and T. I. Zedginidze. "Competitive Nanotechnologies for Fabrication of Thin Films and Powderlike Nanomaterials." Thesis, Sumy State University, 2012. http://essuir.sumdu.edu.ua/handle/123456789/34812.

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The present paper contains new data on the nanotechnologies for fabrication of fine-grained powderlike particles, films, bulk materials, nanocomposites, nanochips and devices for microelectronics, nanoelectronics, photonics and photocatalysis. The technology providing the replacement of precious metals by nonprecious ones and the exclusion of the use of toxic substances is presented. The developed methods of metallization of various materials have been widely used at the enterprises of the NIS for production of quartz resonators and filters, monolithic piezoquartz filters, photomasks, pie
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Pieuchard, Marion. "La photographie et l'automatisme : histoire d'une utopie du Photomaton au procédé Polaroïd." Thesis, Paris 1, 2013. http://www.theses.fr/2013PA010746.

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La présence de productions photographiques issues d'appareils et de dispositifs populaires dans le domaine culturel, artistique et patrimonial se mesure aujourd'hui aux succès d'édition et d'exposition consacrées au photomaton, à la photographie trouvée et plus généralement aux amateurs, où l'on rencontre nombre de "Polaroïds" ou de "Photomatons". Il existe un goût pour ce "vintage" vernaculaire, en raison de la disparition ou bien de la profonde modification qui touche ces dispositifs avec le fameux passage au numérique. En se retournant sur l'histoire de ces machines, c'est bon seulement leu
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Palmer, Carl M. "A calibration study of a still video system and photomatic color separation program /." Online version of thesis, 1989. http://hdl.handle.net/1850/11538.

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Ribeiro, Cíntia França. "Crime de mão própria: o rastro autobiográfico em Photomaton & vox, de Herberto Helder." Universidade Federal de Minas Gerais, 2013. http://hdl.handle.net/1843/ECAP-94LKUH.

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The image of autobiographical crime in Photomaton & vox, by Portuguese poet Herberto Helder, calls for an approach involving a range of discourses, from literary theory to philosophy, including history and law. Through such an approach, this study aims to describe how it is that, within Helders work, an extremely singular poetic voice emerges, playing with features of the autobiographical genre. However, as deviating from the main theoretical frameworks traditionally concerning autobiography, the investigation pursues the connection between Giorgio Agambens philosophy and Helders literature, f
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Tsiamis, Andreas. "Electrical test structures and measurement techniques for the characterisation of advanced photomasks." Thesis, University of Edinburgh, 2010. http://hdl.handle.net/1842/4296.

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Existing photomask metrology is struggling to keep pace with the rapid reduction of IC dimensions as traditional measurement techniques are being stretched to their limits. This thesis examines the use of on-mask probable electrical test structures and measurement techniques to meet this challenge and to accurately characterise the imaging capabilities of advanced binary and phase-shifting chrome-on-quartz photomasks. On-mask, electrical and optical linewidth measurement techniques have highlighted that the use of more than one measurement method, complementing each other, can prove valuable w
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Sung, Jin Won. "A NEW HYBRID DIFFRACTIVE PHOTO-MASK TECHNOLOGY." Doctoral diss., University of Central Florida, 2005. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/2391.

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In the field of photolithography for micro-chip manufacturing, the photo-mask is used to print desired patterns on a proper photo-resist on wafer. The most common type of photo-mask is binary amplitude mask made an opaque layer of chrome. The principle and potential application of hybrid photo-mask with diffractive phase element and binary amplitude is presented in this dissertation paper from both numerical modeling and experimental research. The first important application is the characterization of aberration in the stepper system using hybrid diffractive photo-mask. By utilizing multiple d
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Patterson, Patrick Branch. "Creation of a Mechanical Gradient Peg-Collagen Scaffold by Photomasking Techniques." University of Akron / OhioLINK, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=akron1384720879.

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Books on the topic "Photomath"

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Michel, Rouleau, ed. Photomaton: Roman. Éditions P. Tisseyre, 2007.

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1976-, Taschereau Marie-Stéfanie, ed. Collection Photomaton: Série Flash. Flic flac, 2011.

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Musée de l'Elysée (Lausanne, Switzerland), Centre culturel de la communauté française Wallonie-Bruxelles-Le Botanique. Musée, and Kunst Haus Wien, eds. Derrière le rideau: L'esthétique photomaton. Musée de l'Élysée, 2012.

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1819-1889, Disdéri André-Adolphe-Eugène, Frizot Michel, and Centre national de la photographie (France), eds. Identités: De Disdéri au photomaton. Centre national de la photographie, 1985.

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Muzzarelli, Federica. Formato tessera: Storia, arte e idee in photomatic. B. Mondadori, 2003.

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Helder, Herberto. Photomaton & vox ; Flash ; El cap entre les mans. Gregal Llibres, 1988.

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Poland) Miesiąc Fotografii w Krakowie (Exhibition) (12th 2014 Kraków. Miesiąc Fotografii w Krakowie 2014: Krakow Photomonth Festival 2014. Fundacja Sztuk Wizualnych, 2014.

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Yōichi, Takehana, and Hōga Morihisa, eds. Fotomasuku: Denshi buhin seizō no kikan gijutsu = Photomask technology. Tōkyō Denki Daigaku Shuppankyoku, 2011.

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Poland) Miesiąc Fotografii w Krakowie (Exhibition) (2013 Kraków. Miesiąc Fotografii w Krakowie 2013: Krakow Photomonth Festival 2013. Fundacja Sztuk Wizualnych, 2013.

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Naber, Robert J., and Hiroichi Kawahira. Photomask technology 2007: 18-21 September, 2007, Monterey, California, USA. SPIE, 2007.

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Book chapters on the topic "Photomath"

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Resnick, D. J. "Photomask Etching." In Handbook of Advanced Plasma Processing Techniques. Springer Berlin Heidelberg, 2000. http://dx.doi.org/10.1007/978-3-642-56989-0_9.

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Yang, Deren, Ying Shi, and Xuegong Yu. "Photomask and Photoresist." In Handbook of Integrated Circuit Industry. Springer Nature Singapore, 2023. http://dx.doi.org/10.1007/978-981-99-2836-1_78.

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Fitzgerald, Alissa M., Carolyn D. White, and Charles C. Chung. "Design for Manufacturing: Process Integration and Photomask Layout." In Microsystems and Nanosystems. Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-61709-7_11.

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Hirleman, E. D., D. J. Holve, and E. A. Hovenac. "Calibration of Single Particle Sizing Velocimeters Using Photomask Reticles." In Applications of Laser Anemometry to Fluid Mechanics. Springer Berlin Heidelberg, 1989. http://dx.doi.org/10.1007/978-3-642-83844-6_10.

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Dhaulakhandi, A. B., Shyamali Thakur, and S. K. Koul. "CD Sensitivity to Process Parameters in Photomask Fabrication Using a LASER Pattern Generator." In Springer Proceedings in Physics. Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-319-97604-4_106.

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Moeinzadeh, Seyedsina, and Esmaiel Jabbari. "3D Cell Culture in Micropatterned Hydrogels Prepared by Photomask, Microneedle, or Soft Lithography Techniques." In Methods in Molecular Biology. Springer New York, 2017. http://dx.doi.org/10.1007/978-1-4939-7021-6_18.

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Póvoa Pontes Coelho, Marina. "Capítulo 2: O Uso de Tecnologias Digitais no Ensino da Matemática." In Matemática Aplicada e Inovação no Ensino: Teoria, Prática e Desafios Contemporâneos. Agnaldo Braga Lima, 2024. http://dx.doi.org/10.70576/rdc.978-65-984615-2-2-c2.

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Outro aspecto importante é o uso de aplicativos móveis que tornam o aprendizado acessível em qualquer lugar. Aplicativos como Photomath permitem que os estudantes resolvam problemas matemáticos simplesmente fotografando-os com seus dispositivos móveis. Isso não só estimula a prática autônoma como também promove um aprendizado mais ativo e investigativo. Softwares educativos: Como o GeoGebra e Desmos ajudam na visualização de conceitos matemáticos. Plataformas online: Exemplos como Khan Academy oferecem aulas interativas e exercícios práticos. Aplicativos móveis: Ferramentas como Photomath ince
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Cardoso, Meiri das Graças, Valdeci da Silva Araújo, Grasielly dos Santos de Souza, Juliana Fernandes Lança, and Luciana Maria da Silva Costa. "O USO DO APLICATIVO PHOTOMATH POTENCIALIZANDO O ENSINO DE EXPRESSÕES NUMÉRICAS." In Educação Matemática em Pesquisa: Perspectivas e Tendências - Volume 2. Editora Científica Digital, 2021. http://dx.doi.org/10.37885/201202511.

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S. Hegadi, Dr Pampapati. "AI APPLICATIONS FOR PROGRESSIVE TEACHERS." In Futuristic Trends in Artificial Intelligence Volume 3 Book 1. Selfypage Developers Private Limited, 2024. http://dx.doi.org/10.58532/v3bfai1p1ch1.

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Progressive-Teachers are the pre-service trainee-teachers in the training institutions wherein they would accumulate the knowledge, and develop the skills and strategies to teach the school children in their career. Currently, the trainee-teachers are following the ICT curriculum without any underpinning the applications of Artificial Intelligence (AI). Alan Turing’s statement about AI, “Artificial Intelligence is a field, which combines robust datasets, to enable problem-solving. It encompasses sub-fields of machine learning and deep learning, which are frequently mentioned in conjunction wit
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Silva, Marcos Adriano Marques, Silvana M. A. V. Santos, Alberto da Silva Franqueira, et al. "O USO DAS NOVAS TECNOLOGIAS NO ENSINO DE MATEMÁTICA: UTILIZAÇÃO DO SOFTWARE PHOTOMATH NO ENSINO DE PROBLEMAS." In Inclusão Integral Transformando a Educação com Tecnologia, Gestão Eficiente e Abordagens Multidisciplinares. EBPCA - Editora Brasileira de Publicação Científica Aluz, 2024. http://dx.doi.org/10.51473/ed.al.iit10.

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Conference papers on the topic "Photomath"

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Hirata, Tirza Cosmos dos Santos, Valdeci da Silva Araújo, and Eliza Adriana Sheuer Nantes. "UM ESTUDO SOBRE O APLICATIVO PHOTOMATH NO ENSINO DE MATEMÁTICA." In I Congresso Internacional Schoenstatt de Educação: Abordagens e Inovações Educacionais. Helio Hiroshi Suguimoto, 2016. http://dx.doi.org/10.17921/2525-5320.2016.272-273.

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Da Conceição, Daiane Leal, and Maristani Polidori Zamperetti. "Tecnologias Digitais no Ensino da Matemática: Avaliações Docentes do Aplicativo Photomath." In Congresso sobre Tecnologias na Educação. Sociedade Brasileira de Computação - SBC, 2020. http://dx.doi.org/10.5753/ctrle.2020.11434.

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O presente trabalho é um recorte da pesquisa de Dissertação de Mestrado concluída, a qual teve como objetivo investigar as concepções dos docentes frente ao uso de Aplicativos Educacionais no ensino da Matemática. Com uma abordagem qualitativa a investigação foi desenvolvida durante a realização do minicurso pelo projeto de extensão Rede Colabora (UFPEL), que utiliza o Moodle para promover cursos de formação continuada de professores. Os sujeitos dessa etapa foram 248 professores de Matemática em atuação na educação básica. A partir de uma prática de ensino desenvolvida com o Aplicativo Photom
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Vintere, Anna, Elena Safiulina, and Olga Panova. "AI-based mathematics learning platforms in undergraduate engineering studies: analyses of user experiences." In 23rd International Scientific Conference Engineering for Rural Development. Latvia University of Life Sciences and Technologies, Faculty of Engineering and Information Technologies, 2024. http://dx.doi.org/10.22616/erdev.2024.23.tf216.

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Artificial intelligence is becoming more popular between students in higher education helping students in finding answers faster and easier and augment the educational process. Although the educators usually consider artificial intelligence as a threat to educational processes, however artificial intelligence is a leap across creative and innovative thinking in various fields, including mathematics education. Several studies have shown that artificial intelligence allows students to develop and improve more mathematical skills and cognitive skills in learning. It can help students explore more
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Nurhayati, Rofiroh, and Desi Riski. "An Analysis Conceptual Understanding and Student’s Learning Self-Reliance in the New Normal Era Assisted by Photomath on SLETV Material." In 1st International Conference on Mathematics and Mathematics Education (ICMMEd 2020). Atlantis Press, 2021. http://dx.doi.org/10.2991/assehr.k.210508.058.

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Schöning, Johannes, Antonio Krüger, Keith Cheverst, Michael Rohs, Markus Löchtefeld, and Faisal Taher. "PhotoMap." In the 11th International Conference. ACM Press, 2009. http://dx.doi.org/10.1145/1613858.1613876.

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Wang, Zhikun, Kuan Lu, and ChaBum Lee. "A Fringe Pattern Analysis Technique for Photomask Line-Edge-Roughness Characterization." In ASME 2023 18th International Manufacturing Science and Engineering Conference. American Society of Mechanical Engineers, 2023. http://dx.doi.org/10.1115/msec2023-103862.

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Abstract Line-edge roughness (LER) characterization is vital in modern semiconductor industry. An EKEI (enhanced knife edge interferometry)-based method for photomask LER characterization, being capable of a 0.01μm LER measurement accuracy, was proposed in this paper. The changes in fringe pattern caused by edge roughness were derived and analyzed through cross-correlation index. A negative relationship between the cross-correlation and the LER value was observed. The results are validated by both simulation and experiment, indicating that the proposed method can detect both roughness changes
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7

Wang, Zhikun, and ChaBum Lee. "Review of KEI Method-Based Dimensional Measurement, Positioning Control and Part Inspection." In ASME 2022 17th International Manufacturing Science and Engineering Conference. American Society of Mechanical Engineers, 2022. http://dx.doi.org/10.1115/msec2022-85660.

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Abstract We have developed knife-edge interferometry (KEI) for various engineering applications, including displacement measuring sensors for dynamic system controls and edge quality of the parts, such as cutting tools, corrosive blades, and photomask patterns. This paper reviewed the modeling, design, and data analysis of KEI. With the expanding market of manufacturing industries, edge topography and instrumentation technology become more and more vital to industrial manufacturing-related applications such as cutting tool wear inspection, photomask edge roughness determination, and edge corro
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Marmillion, Pat, Walt Trybula, and Brian J. Grenon. "Advanced photomask cleaning." In Photomask Technology, edited by Wolfgang Staud and J. Tracy Weed. SPIE, 2004. http://dx.doi.org/10.1117/12.570013.

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Balan, Nikita, Vladimir Ivanov, Alexander Pankratov, and Ekaterina Kharchenko. "METHOD FOR CALCULATION OF MASK SPECIFICATION CONTRIBUTION TO LITHOGRAPHIC BUDGETS." In International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis. LLC MAKS Press, 2020. http://dx.doi.org/10.29003/m1653.silicon-2020/372-374.

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In this work we consider the contribution of tolerances on the mask pattern quality to the error budgets of lithographic operations. A method for developing a photomask specification based on the lithography modeling is proposed.
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Medvedev, Konstantin, Alexandr Pankratov, and Vladimir Ivanov. "CONCEPT OF A WORKFLOW MANAGEMENT SYSTEM APPLICATION FOR PHOTOMASK DESIGN." In International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis. LLC MAKS Press, 2020. http://dx.doi.org/10.29003/m1660.silicon-2020/391-394.

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The paper discusses the possibility of using a workflow management system (WFMS) for photomask design. A model for describing business logic has been proposed, and its effectiveness has been analyzed by modeling topology verification flow.
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Reports on the topic "Photomath"

1

Evans, C. J., A. D. Davies, R. E. Parks, and L.-Z. Shao. Interferometric metrology of photomask blanks:. National Institute of Standards and Technology, 2000. http://dx.doi.org/10.6028/nist.ir.6701.

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